Study on the Measurement of TMP Pumping Speed |
Kang, S.B.
(Vacuum center, Korea Research Institute of Standards and Science)
Shin, J.H. (Vacuum center, Korea Research Institute of Standards and Science) Cha, D.J. (Department of Physics, Kunsan National University) Koh, D.Y. (Energy Systems Research Center, Korea Institute of Machinery & Materials) Cheung, W.S. (Acoustics & Vibration group, Korea Research Institute of Standards and Science) Lim, J.Y. (Vacuum center, Korea Research Institute of Standards and Science) |
1 | 배석희 외 4인, 진공공학, (한국경제신문, 서울, 2000). |
2 | PNEUROP 5608: Vacuum pumps - acceptance specifications - Turbomolecular pumps - Part III, 1989. |
3 | ISO 5302: Vacuum technology - Turbomolecular pumps - Measurement of performance characteristics, 2003. |
4 | 신진현, 고문규, 정완섭, 윤주영, 임종연, 강상우, 한국진공학회지 18, 411 (2009). 과학기술학회마을 |
5 | AVS 4.2: Procedure for Measuring Throughput of High-Vacuum Pumps, 1987. |
6 | 안종찬, 김선곤, 이래덕, 엄천일, 우진춘, 이용봉, 서정준, 박종선, "측정불확도 및 BMC 표현지침 개발", 한국표준과학연구원 KRISS/IR--2001-099, 2002. |
7 | ISO 21360: Vacuum technology - Standard methods for measuring vacuum - pump performance - General description, 2007. |
8 | ISO/NP 21360-2: Vacuum technology - Standard methods for measuring vacuum - pump performance - Part 2: Positive displacement vacuum pumps, 2007. |
9 | ISO/CD 27892: Vacuum technology - Turbomolecular pumps - Measurement of rapid shutdown troque, 2007. |
10 | AVS 4.1: Procedure for Measuring Speed of High- Vacuum Pumps, 1987. |
11 | J. Y. Lim, W. S. Cheung, Y. M. Choi, D. J. Seong, Y. H. Shin, and K. H. Chung, Engineering Materials 277-279, 1000, (2005). |