• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2009.06a
• /
• pp.260-260
• /
• 2009

초박형 절연막은 현재 다양한 전자소자의 제작과 향상을 위하여 활용되고 있으며, 일반적인 화학 기상 증착 방법으로는 균일도를 확보하기 어려운 문제점을 가지고 있다. 본 논문에서는 디스플레이의 구동소자로 활용되는 박막 트랜지스터의 특성 향상과 비휘발성 메모리 소자의 터널링 박막에 응용하기 위하여 초박형 실리콘 옥시나이트라이드 박막의 증착과 이의 특성을 분석하였다. 실리콘 옥시나이트라이드 박막은 실리콘 산화막에 질소가 주입되어 있는 형태로 실리콘 산화막과 실리콘 계면상에 존재하는 질소는 터널링 전류와 결함 형성을 감소시키며, bulk 내에 존재하는 질소는 단일 실리콘 산화막에 비해 더 두꺼운 박막을 커패시턴스의 감소없이 이용할 수 있는 장점이 있다. 플라즈마 처리 기법을 이용하였을 경우에는 초박형의 균일한 박막을 얻을 수 있으며, 본 연구에서는 이산화질소 플라즈마를 이용하여 활성화된 질소 및 산소 라디칼들이 실리콘 계면을 개질하여 초박형 실리콘 옥시나이트라이드 박막을 형성활 수 있다. 플라즈마 처리 시간과 RF power의 변화에 따라 형성된 실리콘 옥시나이트라이드 박막의 두께 및 광학적 특성은 엘립소미터를 통하여 분석하였으며, 전기적인 특성은 금속-절연막-실리콘의 MIS 구조를 형성하여 커패시턴스-전압 곡선과 전류-전압 곡선을 사용하여 평가하였다. 이산화질소 플라즈마 처리 방법을 사용한 실리콘 옥시나이트라이드 박막을 log-log 스케일로 시간과 박막 두께의 함수로 전환해보면 선형적인 증가를 나타내며, 이는 초기적으로 증착률이 높고 시간이 지남에 따라 두께 증가가 포화상태에 도달함을 확인할 수 있다. 실리콘 옥시나이트라이드 박막은 초기적으로 산소의 함유량이 많은 형태의 박막으로 구성되며, 시간의 증가에 따라서 질소의 함유량이 증가하여 굴절률이 높고 더욱 치밀한 형태의 박막이 형성되었으며, 이는 시간의 증가에 따라 플라즈마 챔버 내에 존재하는 활성종들은 실리콘 박막의 개질을 통한 실리콘 옥시나이트라이드 박막의 두께 증가에 기여하기 보다는 형성된 박막의 내부적인 성분 변화에 기여하게 된다. 이산화질소 플라즈마 처리 시간의 변화에 따라 형성된 박막의 정기적인 특성의 경우, 2.3 nm 이상의 실리콘 옥시나이트라이드 박막을 가진 MIS 구조에서 accumulation과 inversion의 특성이 명확하게 나타남을 확인할 수 있다. 아산화질소 플라즈마 처리 시간이 짧은 실리콘 옥시나이트라이드 박막의 경우 전압의 변화에 따라 공핍영역에서의 기울기가 현저히 감소하며 이는 플라즈마에 의한 계면 손상으로 계면결합 전하량이 증가에 기인한 것으로 판단된다. 또한, 전류-전압 곡선을 활용하여 측정한 터널링 메카니즘은 2.3 nm 이하의 두께를 가진 실리콘 옥시나이트라이드 박막은 직접 터널링이 주도하며, 2.7 nm 이상의 두께를 가진 실리콘 옥시나이트라이드 박막은 F-N 터널링이 주도하고 있음을 확인할 수 있다. 즉, 2.5 nm 두께를 경계로 하여 실리콘 옥시나이트라이드 박막의 터널링 메카니즘이 변화함을 확인할 수 있다. 결론적으로 2.3 nm 이상의 두께를 가진 실리콘 옥시나이트라이드 박막에서 전기적인 안정성을 확보할수 있어 박막트랜지스터의 절연막으로 활용이 가능하며 2.5 nm 두께를 경계로 터널링 메커니즘이 변화하는 특성을 이용하여 비휘발성 메모리 소자 제작시 전하 주입 및 기억 유지 특성을 확보를 위한 실리콘 옥시나이트라이드 터널링 박막을 효과적으로 선택하여 활용할 수 있다.

• Journal of the Korean Vacuum Society
• /
• v.15 no.2
• /
• pp.152-161
• /
• 2006

In order to test the capacity of Si(5 5 12) as a potential template for nanowire fabrication, Bi/Si(5 5 12) system has been studied by STM. With Bi deposition, Si(5 5 12) has been transformed to Si(3 3 7) terrace. Initially Bi atoms selectively replace Si-dimers and Si-adatoms with Bi-dimers and Bi-adatoms, respectively. With extended Bi adsorption, Bi-dimers adsorb on the pre-adsorbed Bi-dimers and Bi-atoms. These dimers in the second layer form Bi-dimer pairs having relatively stable $p^3$ bonding, Finally, the Bi-dimer adsorbs on the Bi-dimers in the second layer and saturates. It can be deduced that both surface transformation to (3 3 7) and site-selective Bi adsorption are possible due to substrate-strain relaxation through inserting Bi atoms into subsurface of Si substrate.

• Journal of the Korean Geotechnical Society
• /
• v.21 no.3
• /
• pp.19-25
• /
• 2005

A tunnel that uses the RMR method or the Q-system is called a 'modem tunnel' because the New Austrian Tunneling Method (NATM) is not employed, even though shotcrete and rock bolts are used as support. It is known that the modem tunnel, which is supported by shotcrete, is basically different from the conventional tunnel, which is supported by steel ribs. In order to preserve the load-carrying capacity of the rock mass, loosening and excessive rock deformations must be minimized. Although it is known that this can be achieved by applying shotcrete in the case of the modem tunnel, this has not been clearly demonstrated. In order to inspect the distinctions between the conventional tunnel and the modern tunnel, their support characteristics and the rock loads of the rock mass classifications are compared. Terzaghi's rock load classification was used as the conventional tunnel's representative rock mass classification. The RMR method and the Q-system were adopted as the modem tunnel's representative rock mass classification. The study's results show that the load-carrying capacity of shotcrete, when used as the main support in the modern tunnel, is greater than the load-capacity of the steel ribs used in the conventional tunnel. Because it has been verified that the rock loads of their rock mass classifications are not different, then, according to the rock mass classifications, the load-carrying capacity of the rock mass of the modern tunnel, which uses shotcrete, is not greater than that of the conventional tunnel.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.37 no.2
• /
• pp.485-495
• /
• 2017

A development of underground space is very useful solution to slove problem occurred from ground surface enlargement in urban areas due to the growth of population, tunnelling is the most popular way and widely used. Researches regarding tunneling-induced pile-soil interactive behaviour have been conducted by many researchers. A study on pile axial force distribution due to tunnelling through laboratory model test, however, is being rarely carried out. In this study, therefore, authors investigate ground behaviour due to tunnelling below grouped pile subjected vertical load as well as pile axial force distribution. A concept of volume loss is used to express tunnel excavation, which is normally applied to 1~2% for tunnelling in soft ground. In this study, however, 10% of that applied to investigate failure mechanism. As a result of laboratory model test, a decrease of pile axial force occurs at 1.5% of volume loss, settlement of grouped pile is 1.2~4.7 times greater than the adjacent ground surface one. Ground deformations at 1.5% of volume loss are measured using Close Range Photogrammetry and compared with results from numerical analysis.

• The Journal of Engineering Geology
• /
• v.26 no.1
• /
• pp.63-70
• /
• 2016

The aim of this study is the safety and an accident prevention in limestone terrain by the underground tunneling. The geology of the study area consists of a Paleozoic sedimentary sequence dominated by limestone, sandstone, shale, and carbonaceous shale. The sequence gently dips to the northeast but the joint contains steep with variable trend. A significant fracture zone is developed in the limestone and shale beds, sub-parallel to bedding, and follows in part the limestone-sandstone contact. Monitoring of groundwater levels in the area shows marked fluctuations in the water table, which repeatedly rose to a level of -4 m before sinking to -15 m. These cycles occurred in mid-May, 2007 and in early and middle June. The data indicate that these fluctuations were unrelated to rainfall that occurred during the study period. We infer that the fluctuations were associated with the development of underground karstic networks along the deep fracture zone, and overlying ground subsidence is likely related to the rapid sinking of groundwater and the associated strong downward suction force.

• The Journal of Engineering Geology
• /
• v.28 no.1
• /
• pp.81-99
• /
• 2018

Excessive groundwater discharge by tunneling and tunnel operation can lead to groundwater exhaustion and ground subsidence. Therefore, it is very important to evaluate environmental impact and to establish mitigation measures of the impact related to tunnel excavation based on hydrogeological and modeling approaches. This study examined the depletion of surface reservoirs and valley water due to tunnel excavation through field survey, water quality analysis, tracer test, and groundwater modeling. As a result of field water quality test, the concentration of chemical constituents in groundwater discharge into the tunnel is slightly higher than that of valley water. By the result of laboratory water analysis, both valley water and the groundwater belong to $Ca^{2+}+HCO_3{^-}$ type. Tracer test that was conducted between the valley at the injection point and the tunnel, indicates valley water infiltration into the ground and flowing out to the tunnel, with maximum electrical conductance changes of $70{\mu}S/cm$ in the first test and of $40{\mu}S/cm$ in the second test. By groundwater modeling, the groundwater discharge rate into the tunnel during tunnel construction is estimated as $4,942m^3/day$ and groundwater level recovers in 3 years from the tunnel completion. As a result of particle tracking modeling, the nearest particle reaches the tunnel after 6 hours and the farthest particle reaches the tunnel after 9 hours, similarly to the case of the field trace test.

• Tunnel and Underground Space
• /
• v.16 no.1 s.60
• /
• pp.73-84
• /
• 2006

Effects of railway tunnel excavation on water level at a national groundwater monitoring station in Mokpo were evaluated by field investigation and numerical groundwater modeling. The water level at the station has experienced a decline of about 5 m within 1 year since July 2002. From the field investigation, it was concluded that decrease of precipitation oo increase of grundwater use was not reason for the decline. The Mokpo tunnel of new Honam railway, 70 m apart from the national station, appeared most plausible cause and a period of the tunnel excavation generally well matches up that of the drawdown. To quantify the effects of the tunneling on the water level, a groundwater flow modeling was performed. Especially, a most probable conceptual model was optimized through multiple preliminary simulations of various scenarios because there were few hydrogeological data available for the study area. The optimized model was finally used for the quantification. Based on the field investigation and the numerical simulations, it was concluded that the tunnel excavation was one of the most probable reasons for the substantial water level decline but further hydrogeologic investigation and continuous monitoring are essentially required for the surrounding area.

• Journal of the Korean Vacuum Society
• /
• v.15 no.1
• /
• pp.50-56
• /
• 2006

We investigated the adsorption of benzene and pyridine on $Si(5\;5\;12)-2\times1$ at 80 K by using variable-low temperature scanning tunneling microscopy (STM) and density functional theory (DFT) calculations. The benzene molecule most strongly binds to two adatoms on the D3 and D2 units in a tilted butterfly configuration, which consists of $di-\sigma$ bonds between C atoms and Si adatoms and two C=C double bonds in the benzene molecule Pyridine molecules interact with adatom(s) on the D2 and D3 units through both Si-N dative bonding and $di-\sigma$ bonds. The dative bonding through the lone pair electrons of N atom produces a vertical configuration (pyridine-like), which is more stable than $di-\sigma$ bonds $Di-\sigma$ bonds can be formed either through Si-N1 and Si-C4 or Si-C2 and Si-C5.

• Tunnel and Underground Space
• /
• v.15 no.4 s.57
• /
• pp.275-287
• /
• 2005

At the planning and design stages of a development of underground space or tunneling project, the information regarding ground conditions is very important to enhance economical efficiency and overall safety In general, the information can be expressed using RMR or Q-system and with the geophysical exploration image. RMR or Q-system can provide direct information of rock mass in a local scale for the design scheme. Oppositely, the image of geophysical exploration can provide an exthaustive but indirect information. These two types of the information have inherent uncertainties from various sources and are given in different scales and with their own physical meanings. Recently, RMR has been estimated in unsampled areas based on given data using geostatistical methods like Kriging and conditional simulation. In this study, simulated annealing(SA) is applied to overcome the shortcomings of Kriging methods or conditional simulations just using a primary variable. Using this technique, RMR and the image of geophysical exploration can be integrated to construct the spatial distribution of RM and to evaluate its uncertainty. The SA method was applied to solve an optimization problem with constraints. We have suggested the practical procedure of the SA technique for the uncertainty evaluation of RMR and also demonstrated this technique through an application, where it was used to identify the spatial distribution of RMR and quantify the uncertainty. For a geotechnical application, the objective functions of SA are defined using statistical models of RMR and the correlations between RMR and the reference image. The applicability and validity of this application are examined and then the result of uncertainty evaluation can be used to optimize the tunnel layout.

• Tunnel and Underground Space
• /
• v.13 no.4
• /
• pp.279-286
• /
• 2003

Many trials to set up the correlation between the rock mass classification and the earth resistivity have been carried out to design tunnel support type based on the interpreted electrical resistivity acquired by surface electrical survey. But it is hard to find reports on the comparison of the real rock support type determined during the excavation with the electrical resistivity by the inversion of the survey data acquired before the tunneling. In this study, the rock mass classification based on the face mapping data and the resistivity inversion data are investigated to see if it is possible to design reliably the rock support type based on the surface electrical survey. To get the quantitative correlation, rock engineering indices such as RCR(rock condition rating), N(Rock mass number), Q-system and RMR(rock mass rating) are calculated. Since resistivity data has low resolution, Kriging method as a post processing technique which minimizes the estimated variance is used to improve resolution. The result of correlation analysis shows that the 2D electrical resistivity survey is appropriate to see the general trend of the geology in the sense of rock type, though there might be some local area where these two factors do not coincide. But the correlation between the result of 3D survey and the rock mass classification turns out to be very high, and then 3D electrical resistivity survey can make it possible to set up more reliable rock support type.