• 마이크로전자및패키징학회지
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• 제27권4호
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• pp.77-81
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• 2020

Resistive RAM (ReRAM)은 전이금속 산화물의 저항변화 특성을 이용하는 차세대 비휘발 메모리로 전이금속산화물 내의 산소공공의 재분포를 통한 저항변화 특성을 이용한다. 따라서 저항변화 특성을 위해 전이금속산화물 내에는 일정량 이상의 산소공공이 요구되며 이를 위해서는 박막 형성 공정에서 산화 수를 조절할 수 있는 공정이 필요하다. 본 연구에서는 직접패턴이 가능한 photochemical metal organic deposition (PMOD) 공정을 사용하여 UV 노출에 의해 photochemical metal organic precursor의 ligand가 분해되는 과정에서 전기장을 인가하여 박막내의 산화 수를 조절하는 실험을 진행하였다. Electric field assisted PMOD (EFAPMOD) 법을 이용하여 FeOx 박막의 산화 수 조절이 가능함을 x-ray photoelectron spectroscopy (XPS) 분석과 I-V 측정을 통하여 확인하였으며, EFAPMOD 공정 중 인가하는 전압의 크기를 조절하여 박막의 산화 수를 조절할 수 있음을 확인하였다. 따라서 EFAPMOD 공정 중 인가전압의 크기를 이용하여 저항변화 특성에 적합한 적정한 산화수를 가지는 금속산화물 박막을 얻고 그 저항변화 특성을 조정할 수 있음을 확인하였다.

• 한국전기전자재료학회논문지
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• 제15권6호
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• pp.518-523
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• 2002

The influences of ion beam energy and reactive oxygen partial pressure on the physical and crystallographic characteristics of transition metal oxide compound(CrOx) film were studied in this paper. Chromium oxide films were deposited onto a cover-glass using ion Beam Sputter Deposition(IBSD) technique according to the various processing parameters. Crystallinity and grain size of as-deposited films were analyzed using XRD analysis. Thickness and Resistivity of the films were measured by $\alpha$-step and 4-point probe measurement. According to the XRD, XPS and resistivity results, the deposited films were the cermet type films which had crystal structure including amorphous oxide(a-oxide) phase and metal Cr phase simultaneously. The increment of the ion beam energy during the deposition process led to decreasing of metal Cr grain size and the rapid change of resistivity above the critical $O_2$ partial pressure.

• 공업화학
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• 제26권2호
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• pp.128-131
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• 2015

친환경적 조건에서의 니트릴의 수화 반응은 아미드를 생산하기 위한 가장 경제적이고 매력적인 방법이다. 고체 금속 산화물과 지지체를 이용한 전이 금속 촉매 시스템은 이러한 니트릴 수화 반응을 보다 향상시키기 위한 의미 있는 연구로써 수행되어져 왔다. 이들 촉매들의 중요한 특징은 방향족, 지방족, 이종 원자형, 지방족 고리형 등의 니트릴들을 포함하는 넓은 범위의 다양한 기질들에 적용된다는 것이다. 또한 이들은 높은 촉매적 활성을 유지하면서 여러 번의 재사용성이 가능하고 반응 후 그 혼합물로부터 분리가 용이하다는 장점들을 갖는다. 이 리뷰를 통하여 니트릴 수화반응을 통한 아미드 합성에 적용되는 금속 산화물과 지지체를 가진 금속 촉매들에 대해 알아본다.

• 전기전자학회논문지
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• 제23권4호
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• pp.1128-1133
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• 2019

이 논문에서는 전이 금속 산화물(TMO)층으로 구성된 다층 박막을 사용하는 BIPV(Building Integrated Photovoltaic) 시스템용 전면 컬러 유리를 제안하였다. 몰리브덴 산화물(MoO₃) 및 텅스텐 산화물(WO₃)은 굴절률 차이가 큰 계면을 형성하여 적절한 간섭효과를 얻을 수 있다. 단일 Thermal Evaporator 증착 방법을 통해 다층 박막을 제작함으로써 간단하고 빠르며 저렴한 제조 방법을 제안하였다. MoO₃(60nm)/WO₃(100nm) 다층 박막으로 90% 이상의 광 투과율을 갖는 자홍색 유리를 시연하였으며, 이 기술은 상용화된 BIPV 시스템에 유용할 것으로 기대된다.

• 한국진공학회지
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• 제12권S1호
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• pp.100-103
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• 2003

The magnetoresistance (MR) of $La_{1-\chi}S_{\chi}CoO_{3-\delta}$ films prepared by pulsed-laser deposition were investigated in order to clarify the magnetotransport properties around the metal-insulator transition. For the films in the metallic state ($\chi$ > 0.25), the MR(T) manifests a small peak at the Curie temperature due to the spin-disorder scattering. The transition of the film into the insulating state ($\chi\;\leq$ 0.25) is accompanied by an essential growth of the MR and results in a significant increase in the MR(T) with decreasing temperature, due to a phase separation into the ferromagnetic-metal clusters and the insulating matrix.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.424.1-424.1
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• 2014

Vanadium dioxide (VO2) is a strongly correlated oxide exhibiting a first-order metal-insulator transition (MIT) that is accompanied by a structural phase transition from a low temperature monoclinic phase to a high-temperature rutile phase. VO2 has attracted significant attention because of a variety of possible applications based on its ultrafast MIT. Interestingly, the transition nature of VO2 is significantly affected by stress due to doping and/or interaction with a substrate and/or surface tension as well as defects. Accordingly, there have been considerable efforts to understand the influences of such factors on the phase transition and the fundamental mechanisms behind the MIT behavior. Here, we present the influences of oxygen deficiency, hydrogen doping, and substrate-induced stress on MIT phenomena in single-crystalline VO2 nanobeams. Specifically, the work function and the electrical resistance of the VO2 nanobeams change with the compositional variation due to the oxygen-deficiency-related defects. In addition, the VO2 nanobeams during exposure to hydrogen gas exhibit the reduction of transition temperature and the complex phase inhomogenieties arising from both substrate-induced stress and the formation of the hydrogen doping-induced metallic rutile phase.

• Transactions on Electrical and Electronic Materials
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• 제11권1호
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• pp.1-10
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• 2010

This is an overview paper reporting our most recent work on processing and microstructure of nano-structured oxides and their photoluminescence and photo-catalysis properties. Zinc oxide and related transition metal oxides such as vanadium pentoxide and titanium dioxide were produced by a combination of magnetron sputtering, hydrothermal growth and atmosphere controlled heat treatment. Special morphology and microstructure were created including nanorods arrays, core-brushes, nano-lollipops and multilayers with very large surface area. These structures showed special properties such as much enhanced photoluminescence and chemical reactivity. The photo-catalytic properties have also been promoted significantly. It is believed that two factors contributed to the high reactivity: the large surface area and the interaction between different oxides. The transition metal oxides with different band gaps have much enhanced photoluminescence under laser stimulation. Use of these complex oxide structures as electrodes can also improve the energy conversion efficiency of solar cells. The mixed oxide complex may provide a promising way to high-efficiency photo emitting materials and photo-catalysts.

• 한국분말재료학회지
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• 제8권3호
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• pp.186-191
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• 2001

Several fabrication processes, corresponding nanostructural features and multifunctionality as well has been investigated for oxide ceramic based nanocomposites with metal nanodispersion (i.e., ceramic/metal nanocomposites). Transition metal (Ni, Co, etc) dispersed alumina and zirconia based nanocomposites have been synthesized by reducing and hot-press sintering of ceramic and metal oxide mixtures prepared by several method. Improved fracture strength (1.1 and 1.9 GPa for $Al_2O_3/Ni$ and $ZrO_2/Ni$ nanocomposites, respectively) of these composites have been achieved according to their nanostructures. In addition, ferromagnetic characteristic has been kept. The variation of magnetization with an applied stress has found to be more sensitive as smaller as the magnetic metal dispersion is. This result thus suggests the possibility of fracture and/or stress sensing of the composites by simple magnetic measurement.

• 한국자기학회지
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• 제21권1호
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• pp.1-4
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• 2011

정육면체 전이금속 산화물 FeO, MnO의 자기적 상호작용을 제1원리의 범밀도함수법을 이용하여 계산하였다. 그 결과, 모두 초교환작용으로 인해 반강자성적 상호작용이 가장 낮은 에너지를 가지고 있었다. 자기이방성은 반강자성 스핀 배열의 FeO 클러스터에서만 발견되었다. 그 원인은 <111> 방향으로 각운동량을 가지는 3d down-spin 전자의 스핀-궤도 결합에 기인하였다.

• 전기화학회지
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• 제12권1호
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• pp.1-10
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• 2009

This article reviewed transport behaviours of electroactive species in ionic compounds, focusing on chemical diffusion of Li through the transition metal oxide in a current flowing condition. For this purpose, a distinction has been first briefly made between migration and diffusion with respect to current, driving force and charge of electroactive species considered. Then, the equations for chemical diffusion are derived theoretically in open-circuit and current flowing conditions. Finally, the experimental methods such as ac impedance spectroscopy and current (potential) transient techniques are described in details for characterising chemical diffusion. In addition, the role of the thermodynamic enhancement factor in chemical diffusion is discussed.