• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
• /
• pp.168-168
• /
• 2008

Dimension of a transistor has rapidly shrunk to increase the speed of device and to reduce the power consumption. However, it is accompanied with several problems like direct tunneling through the gate dioxide layer and low conductivity characteristic of poly-Si gate in nano-region. To cover these faults, study of new materials is urgently needed. Recently, high dielectric materials like $Al_2O_3$, $ZrO_2$, and $HfO_2$ are being studied for equivalent oxide thickness (EOT). However, poly-Si gate is not compatible with high-k materials for gate-insulator. Poly Si gate with high-k material has some problems such as gate depletion and dopant penetration problems. Therefore, new gate structure or materials that are compatible with high-k materials are also needed. TiN for metal/high-k gate stack is conductive enough to allow a good electrical connection and compatible with high-k materials. According to this trend, the study on dry etching of TiN for metal/high-k gate stack is needed. In this study, the investigations of the TiN etching characteristics were carried out using the inductively coupled $BCl_3$-based plasma system and adding $Cl_2$ gas. Dry etching of the TiN was studied by varying the etching parameters including $BCl_3$/Ar gas mixing ratio, RF power, DC-bias voltage to substrate, and $Cl_2$ gas addition. The plasmas were characterized by optical emission spectroscopy analysis. Scanning electron microscopy was used to investigate the etching profile.

• 한국반도체및디스플레이장비학회:학술대회논문집
• /
• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
• /
• pp.120-122
• /
• 2002

• 한국표면공학회:학술대회논문집
• /
• 한국표면공학회 2006년도 추계학술발표회 초록집
• /
• pp.65-65
• /
• 2006

• 한국자동차공학회논문집
• /
• 제2권2호
• /
• pp.95-102
• /
• 1994

Aluminum sheet application to automobile body panels has now become an important objective to meet the requirements of automobile weight reduction. As the Mg content in Al-Mg based alloys increased up to 7.19%, the strength and elongation increased. For instance. Al-7.19Mg alloy had a high strength of 305MPa and a high elongation of 35%. A study was also made to investigate the interrelation between grain size and tensile properties with varying the contents of Mg, Ti and Zr elements and annealing conditions. The yield stress decreased as the grain size increased, which increased the uniform elongation. The strain hardening exponents n increased as the Mg content increased, which depended on the increasing difficulties of the cross slip of dislocation.

• 한국전기전자재료학회논문지
• /
• 제16권9호
• /
• pp.795-800
• /
• 2003

The dielectric and piezoelectric properties of the xPb(A $l_{0.5}$N $b_{0.5}$) $O_3$-(1-x)Pb(Z $r_{0.52}$ $Ti_{0.48}$) $O_3$ [xPAN-(1-x)PZT] thin films by pulsed laser deposition (PLD) were investigated as a function of PAN contents. The effect of texture on dielectric and piezoelectric properties of the 0.05PAN-0.95PZT thin films having the highest piezoelectric constant( $d_{33}$) was studied more precisely. For 0$\leq$x$\leq$0.15 compositions in xPAN-(1-x)PZT thin films, the well-developed perovskite phase with (111) preferred orientation was obtained at the deposition temperature of 50$0^{\circ}C$. With increasing PAN content, remanent polarization and coercive field decreased. The dielectric constant increased with an increase of PAN content until it reached 1450 at $\chi$= 0.05, and then decreased for higher PAN content. The maximum points of dielectric constant coincides with the maximum points of the piezoelectric constant $d_{33}$.33/.33/././.

• 한국전기전자재료학회:학술대회논문집
• /
• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
• /
• pp.138-141
• /
• 2004

[ $MnO_2$ ]가 첨가된 $0.9Pb(Zr_{0.5}Ti_{0.5})O_3-0.2Pb[(Zn_{0.8}Ni_{0.2})_{1/3}Nb_{2/3}]O_3$(0.8PZT-0.2PZNN) 세라믹스는 그 압전특성과 유전특성이 뛰어나지만 $1000^{\circ}C$ 이하의 낮은 소결 온도에서는 소결되지 않는다. $1000^{\circ}C$이하의 낮은 소결온도에서 소결하기 위해 CuO를 첨가한 결과, 소결온도 $920^{\circ}C$에서 소결성은 우수하였으나 그 압전 특성의 저하가 두드러졌다. 이는 XRD에서 확인한 결과에 따르면 CuO의 첨가가 우수한 MPB 조성으로 판명된 $MnO_2$ 가 첨가된 0.8PZT-0.2PZNN 세라믹스의 결정구조를 Rhombohedral 구조로 바꾸기 때문인 것으로 보였으며 이러한 문제는 PZNN의 비율을 조절하여 0.875PZT-0.125PZNN 세라믹스를 선택함으로 인해 해결할 수 있었다. 그러나 여전히 낮은 $Q_m$값을 높이기 위해서 $Al_2O_3$를 첨가하였고 그 결과 시편의 tetragonality 감소와 $Q_m$값의 증가를 확인할 수 있었으나 그 첨가량이 0.2wt% 이상일 경우에는 밀도의 감소로 인한 압전특성의 저하가 나타났다. 밀도의 향상을 위해 Zn and Ni excess 조성을 선택하였고 그 결과 0.5wt% $MnO_2$와 0.2wt% CuO 그리고 0.3wt% $Al_2O_3$를 첨가한 0.875PZT-0.125PZNN 세라믹스(Zn and Ni excess 조성)를 $920^{\circ}C$에서 소결한 경우 $k_p=0.581,\;Q_m=809,\;d_{33}=345\;pC/N\;and\;{\varepsilon}_{33}/{\varepsilon}_0=1345$의 빼어난 압전 및 유전특성과 $330^{\circ}C$의 높은 $T_c$를 보였고 그 조성의 vibration velocity는 약4.5 m/s로 나타났다.

• 환경위생공학
• /
• 제9권2호
• /
• pp.8-23
• /
• 1994

During the period from Mar., 1991 to Feb., 1992 66 tSP samples were collected by Hi volume air sampler at 1 sampling site in Seoul and the amount of concentration of 21 components(SO$_{4}$$^{2-}$, NO$_{3}$$^{-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Al, Ba, Ca, Cd, Cr, Cu, Fe, It Mg, Mn, Na, Ni, Pt Si, Ti, Zn, Zr ) were measured. And monthly and seasonal variation were surveyed and the principal component analysis( PCA ) were carried out with respect to these amount of pollutants, minimum of visibility and radiation on a horizontal surface. The total amount of soluble ion in water was high in order o(SO$_{4}$$^{2-}$> NO$_{3}$$^{-}$> N%'>Cl$^{-}$ and metal ion was high in order of Na> Ca>Si> Fe> Al> K> Mg> Zn> Pb> Cu>Ti> Mn > Ba> Cr> Zr> Ni> Cd. There was Seasonal variation in concentration for SO$_{4}$$^{2-}$, NH$_{4}$$^{+}$, Cl$^{-}$, Na, Al, Ca, Bt Mg, Fe and Si. It was assumed that the components of the highest concentration on April were depend on yellow sand and the frequency of wind velocity and direction. As the results of PCA, the amount of pollution components was able to characterized with two principal components(Z$_{1}$, Z$_{2}$ ). The first principal components Z$_{1}$ was considered to be a factor indicating the pollutants originated from natural generation and The second principal components Z$_{2}$ was considered to be a factor indicating the pollutants originated from human work. The monthly concentration of pollutants in ISP, minimum of visibility and radiation on a horizontal surface was possible to evaluate by the use of these two principal components Z$_{1}$ and Z$_{2}$ .

• Bulletin of the Korean Chemical Society
• /
• 제19권11호
• /
• pp.1161-1164
• /
• 1998

The catalytic transformation of sterically bulky tertiary stannane n-Bu3SnH by the Cp2MCl2/Red-Al (M=Ti, Zr, Hf) and M(CO)6 (M=Cr, Mo, W) catalysts yielded two kinds of catenated products: one is a cross-linked polystannane as minor product, and the other is hexabutyldistannane (n-Bu3Sn)2 as major product. The distannane was produced by simple dehydrocoupling of n-Bu3SnH, whereas the cross-linked polystannane could be obtained via redistribution/dehydrocoupling combination process of n-Bu3SnH. The redistribution/dehydrocoupling combination process may initially produce a low-molecular-weight oligostannane with partial backbone Sn-H bonds which could then undergo an extensive cross-linking reaction of backbone Sn-H bonds, resulting in the formation of an insoluble polystannane.

• 암석학회지
• /
• 제12권3호
• /
• pp.119-134
• /
• 2003

육십령 복운모화강암은 광물학$.$지화학적으로 과알루미나 성질을 특징적으로 나타낸다. 육십령 화강암체는 1.15∼l.20 범위의 높은 알루미나 포화 지수와 2.20∼2.98wt% 범위의 높은 CIPW norm 강옥 함량을 나타낸다. 색지수는 <16%이고, FeO$^{T}$ +MgO+TiO$_2$,는 평균 1.9 wt%로서 우백질화강암에 해당한다. 육십령 복운모 우백질화강암은 SiO$_2$성분이 증가함에 따라, TiO$_2$, $Al_2$O$_3$, FeO, Fe$_2$O$_3$, MgO, CaO, $K_2$O, P$_2$O$_{5}$ , Rb, Ba, Sr 은 감소하는 경향을 나타내는 반면, Zr과 Th는 증가하는 경향을 나타내는데, 이는 장석, 흑운모, 인회석 저어콘의 분별경정작용에 기인한 것으로 해석된다. 거정질 암맥에는 SiO$_2$and P$_2$O$_{5}$ 는 높게, 그 외의 주원소는 결핍되어 나타난다. Manaslu, Hercynian 복운모 우백질화강암, Lachlan습곡대의 S-형 화강암과 비교해 보면, 육십령 복운모 우백질화강암은 낮은 Rb, 높은 Ba, Sr을 나타낸다. 거정질 암맥의 지화학적 특징은 육십령 복운모화강암을 형성했던 멜트로부터 일부 원소들의 제거 혹은 유동성에 의해 높은 Rb, Nb와, 낮은 Ba, Sr, Zr, Th, Pb 함유를 나타낸다. 육십령 복운모 우백질화강암은 총 휘토류 함량이 95.7∼123.3ppm 범위를 나타내며, 운석에 대해 표준해보면, 저 내지 중정도의 Eu 이상(Eu/Eu＊= 0.7∼0.9)을 가지면서 경희토류원소가 풍부하고 중희토류원소가 결핍된 매우 경사가 져 있는((La/Yb)$_{N}$ = 6.9∼24.8) 변화를 보여준다. 반면에 페그마틱 암맥은 총 휘토류원소의 함량이 7.0ppm으로 운석에 대해 표준화하면, 강한 부의 Eu 이상(Eu/Eu＊= 0.2)을 가진 편평한 양상을 나타낸다. 복운모 우백질화강암을 형성했던 멜트의 성분은 기원암 뿐만 아니라 기원암이 녹은 후의 잔류물질의 양에도 의존한다. 특히 CaO/$Na_2$O의 비와 Rb/Sr-Rb/Ba의 비들은 강한 과알루미나질 화강암에서는 기원암의 성분에, 즉, 기원암의 사장석과 점토 함량 비에 주로 의존한다. 육십령 복운모 우백질화강암은 사장석 성분보다 점토 성분이 풍부한 암석에서 기원한 Manaslu와 Hercynian 복운모 우백질화강암들(예를 들면 Millevaches와 Gueret)보다는 더 높은 CaO/$Na_2$O의 비와 더 낮은 Rb/Sr-Rb/Ba 비를 나타내고 있는데, 이러한 지화학적 특징은 점토 성분보다는 사장석이 풍부한 석영장석질 암석으로부터 기원했던 것으로 사료된다.

• 대한전기학회논문지
• /
• 제41권5호
• /
• pp.508-516
• /
• 1992

In this study, dielectric and piezoelectric properties of 0.05Pb(AlS12/3TWS11/3T)OS13T-0.95Pb(ZrS10.52TTiS10.48T)OS13T system ceramics were investigated with respect to the variations of MnOS12T and FeS12TOS13T additions amounts. The results obtained in this study are summarized as follows: 1. As the amounts of MnOS12T and FeS12TOS13T are increased, tetragonality(c/a) and apparent density were decreased but grain size was increased, also the limits of solubility were revealed because pores were formed at the amounts of 0.3wt% MnOS12T and 0.5wt% FeS12TOS13T. 2. AS the increasing of amounts of MnOS12T and FeS12TOS13T, the temperature of phase transition(TS1cT) was decreased, and pemeability had maximum value at the amount of 0.3wt% MnOS12T but were sharply decreasd for the increasing FeS12TOS13T amounts. 3. As the amounts of MnOS12T and FeS12TOS13T are increased, the electro-mechanical coupling factor(kS1pT) was decreased from 60% to 41%, 19% respectively, but mechanical quality factor(QS1mT) had maximum values 720 for amount of 0.3wt% MnOS12T and 320 the amount of 0.5wt% FeS12TOS13T.