• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2006.05a
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• pp.308-313
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• 2006

The effect of coating time on surface properties of the TiN-coated high speed steel(SKH51) by arc ion plating is and presented in this paper. Surface roughness, micro-hardness, coated thickness, atomic distribution of TiN and adhesion strength are measured for various coating times. It has been shown that the coating time has a deep influence more than 60 minites on the micro-hardness, coated thickness, atomic distribution of Ti and adhesion strength of the SKH51 steels, but that the coating time has little influence on the surface roughness.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2015.11a
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• pp.255-255
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• 2015

나노압침방법을 적용하여 arc ion plating을 통해 제조된 TiAlSiN 코팅층의 질소 함량에 따른 나노 기계적 특성을 평가하였다. 코팅층의 질소 함량은 28~30 [at.%] 이었다. 코팅층에는 AlN, TiSi, $Al_5Ti_3$, $Ti_3AlN$, $Al_5Ti_2$ 상이 형성되었다. 질소 함량이 더 작은 코팅층의 나노경도, 마찰계수, 피로한계의 값이 높아짐을 알 수 있었다.

• Bulletin of the Korean Chemical Society
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• v.33 no.2
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• pp.469-472
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• 2012

Intensity modulated photocurrent spectroscopy and intensity modulated photovoltage spectroscopy were investigated to measure the dynamic response of charge transfer and recombination in the standard, $TiCl_4$-treated and the combined scattering layer electrode dye-sensitized solar cells (DSSCs). IMPS and IMVS provided transit time ($\tau_n$), lifetime ($\tau_r$), diffusion coefficient ($D_n$) and effective diffusion length ($L_n$). These expressions are derived that generation, collection, and recombination of electrons in a thin layer nanocrystalline DSSC under conditions of steady illumination and with a superimposed small amplitude modulation. In this experimental, IMPS/IMVS showed that the main effect of $TiCl_4$ treatment is to suppress the recombination of photogenerated electrons, thereby extending their lifetime. And the Diffusion coefficient of combined scattering layer electrode is $6.10{\times}10^{-6}$ higher than that of the others, resulting in longer diffusion length.

• Journal of the Korean Society for Heat Treatment
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• v.4 no.4
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• pp.1-14
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• 1991

In PECVD(Plasma-Enhanced Chemical Vapor Deposition) process, titanium nitride is thin and its adhesion is poor for the protective coatings. Therefore it has been studied that intermediate layer forms between substrate and TiN thin film. Using R.F. plasma nitriding, nitride layer was first formed, then TiN thin film coated by PECVD. The chemical composition of the coatings has been characterized using AES, EDS and their crystallographic structure by means of XRD. Mechanical properties such as microhardness and film adhesion have also been determined by vickers hardness test, scratch test and indentation test. As a result, there was no difference in chemical composition and structure between the TiN deposition only and the composite of TiN deposition on nitrided steel. It was found that nitrided substrate increased the hardness of TiN coatings and was beneficial in preventing the plastic deformation in the substrate. Therefore the effective load bearing capacity of the TiN coatings on nitrided steel was increased and their adhesion was improved as well. According to the results of this study, the processes that lead to the formation of composite layers characterized by good working properties, i.e., high microhardness, adhesion and resistance to deformation.

• Tribology and Lubricants
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• v.20 no.5
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• pp.272-277
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• 2004

This study deals with the friction and wear characteristics of C-N coated spur gear. The PSII apparatus was built and a SCM415 test piece and test gear with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD coated TiN layer. It was found that both of friction coefficient of C-N coating and TiN coating decreased with increasing load, however, C-N coating showed relatively lower friction coefficient than that of TiN coating. We was investigated the effect of C-N coating on hardness, friction and wear. The TiN coated gear showed a more serious friction phenomena than that of C-N coated gear. It was considered that coating of TiN, which was conducted at a vacuum chamber at about 500$^{\circ}C$, results in a tempering of base material that causes microstructural change, which in turn resulted in decreasing of hardness. The C-N coated gear and pinion had higher wear resistance that of TiN coated gear and pinion. C-N coating significantly improved the friction and wear resistance of the gear.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.41-46
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• 2004

This study deals with the friction and wear characteristics of C-N coated spur gear. The PSII apparatus was built and a SCM415 test piece and test gear with steel substrate was treated with carbon nitrogen by this apparatus. The composition and structure of the surface layer were analyzed and compared with that of PVD coated TiN layer. It was found that both of friction coefficients of C-N coating and TiN coaling decreased with increasing load, however, C-N coating showed relatively lower friction coefficient than that of TiN coating. We was investigated the effect of C-N coating on hardness, friction and wear. The TiN coated gear showed more serious friction phenomena than that of C-N coated gear. It was considered that coating of TiN, which was conducted at a vacuum chamber at about $500^{\circ}C$ results in a tempering of base material that causes microstructure change, which in turn resulted in decreasing of hardness. The C-N coated gear and pinion had higher wear resistance that of TiN coated gear and pinion. C-N coating significantly improved the friction and wear resistance of the gear.

• Journal of the Korean Vacuum Society
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• v.9 no.4
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• pp.335-340
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• 2000

We investigated the role of the capping layers in the formation of the cobalt silicide in Co/Si systems with TiN and Ti capping layers and without capping layers. The Co/Si interfacial reactions and the phase transformations by the rapid thermal annealing (RTA) processes were observed by sheet resistance measurements, XRD, SIMS and TEM analyses for the clean silicon substrate as well as for the chemically oxidized silicon substrate by $H_2SO_4$. We observed the retardation of the cobalt disilicide formation in the Co/Si system with Ti capping layers. In the case of Co/$SiO_2$/Si system, cobalt silicide was formed by the Co/Si reaction due to with the dissociation of the oxide layer by the Ti capping layers.

• Journal of Ocean Engineering and Technology
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• v.11 no.3
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• pp.56-68
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• 1997

This work was intended to study the effect of a partial pressure ratio and a total pressure of reactive gases on the properties of TiC$_{x}$N$_{1-x}$ . coated layer. In this regard, various TiC$_{x}$N$_{1-x}$ coatings were synthesized with C2112 and N2 Mixture gas of different compositions by Arc Ion Plating process which has been highlighted for an industrial purpose. It was revealed from colors and X-ray diffraction patterns that the concentration of carbon of a TiC$_{x}$N$_{1-x}$ coating increases with a partial pressure ratio (PC$_{2}$H$_{2}$/PN$_{2}$) as well as a total pressure Of $C_{2}$H$_{2}$ and N$_{2}$ mixture gas. Accordingly, the hardness of TiC$_{x}$N$_{1-x}$ coated layer increased but the adhesion to the substrate of SKH 51 was degraded. On the other hand, the deposition rate was independent of a partial pressure ratio and a total pressure of mixture gas. It was found that a uniform gas distribution is critical for an industrial application since the composition of a coating depends strongly on the location of a substrate inside of the furnace. As a result of milling tests with different TiC$_{x}$N$_{1-x}$ coated end mills, the one which has a low carbon concentration was better than others studied in this work.d in this work.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2000.04a
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• pp.164-169
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• 2000

The remote measurement system(RMS) as a new experimental method is limited in its application to crack measurements at elevated temperatures because of the oxide layer on the specimen surface. Since TiAlN and Cr coating layers have a high resistance to oxidation and wear, this paper proposed a TiAlN and Cr coating technique for specimens to facilitate the measurement of crack growth behavior using RMS. To investigate the effects of the coating layer, tension and fatigue tests were carried out at room temperature and at 538$^{\circ}C$, using specimens of 1Cr-1Mo-0.25V steel. From the experimental results, it was found that the mechanical properties of the TiAlN and Cr coated specimens were similar to those of the substrate. Accordingly, the TiAlN and Cr coated layer had hardly any influence on the fatigue crack propagation.

• Proceedings of the IEEK Conference
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• 2003.07b
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• pp.671-674
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• 2003

본 논문에서는 Cobalt interlayer 와 Titanium Nitride(TiN) capping layer를 Ni SALICIDE의 단점인 열 안정성과 sheet resistance 와 series 저항을 감소시키는데 적용하여 0.lum 급 CMOS 소자의 특성을 연구하였다. 첫째로, Ni/Si 의 interface 에 Co interlayer 를 증착하여 Nickel Silicide의 단점인 열 안정성 평가인 700℃, 30min의 furnace annealing 후에 낮은 sheet resistance와 누설전류를 줄일 수 있었다. 두번째로, TiN caping layer를 적용하여 실리사이드 형성시 산소와의 반응을 막아 실리사이드의 표면특성을 향상시켜 누설전류의 특성을 개선하였다. 결과적으로 소자의 구동전류 향상, 누설전류 저하, 낮은 면저항으로 소자의 특성을 개선하였다.