• Title/Summary/Keyword: TiN Layer

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Piezoelectric Properties of $Pb(Ni_{1/3}Nb_{2/3})O_{3}-PbZrO_{3}-PbTiO_{3}$ Ceramics doped with$Y_{2}O_{3}$ and Their Application to Multilayer Piezoelectric Actuators ($Y_{2}O_{3}$가 첨가된 $Pb(Ni_{1/3}Nb_{2/3})O_{3}-PbZrO_{3}-PbTiO_{3}$ 세라믹의 압전특성 및 적층형 압전 Actuator에 관한 연구)

  • Choi, Hae-Yun;Kwon, Jeong-Ho;Lee, Dae-Su;Kim, Il-Won;Song, Jae-Sung;Jeong, Soon-Jong;Lee, Jae-Shin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.11a
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    • pp.317-321
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    • 2002
  • Piezoelectric properties of $(Pb_{1-x}Y_x)[(Ni_{1/3}Nb_{2/3})_{0.15}(Zr_{1/2}Ti_{1/2)})_{0.85}]O_{3}$ (x=0~0.05) ceramics were investigated, The stoichiometric PNN-PZT ceramics required the sintering temperature above $1100^{\circ}C$, but the addition of $Y_{2}O_{3}$ in the PNN-PZT ceramic lowered the sintering temperature down to $1000^{\circ}C$. In case of x=0.005, the electro-mechanical coupling $factor(K_p)$, the piezoelectric $constant(d_{33})$, and the maximum strain ratio of PNN-PZT ceramics sintered at $1000^{\circ}C$ were 53.1%, 395pC/N, and $2200{\times}10^{-6}$ respectively, A 30-layer piezoelectric actuator$(10{\times}10{\times}1.7mm)$ fabricated with the above material showed the maximum strain of $2.09{\mu}m$ under 100V DC bias.

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Study on the Dielectric Properties of $(Sr_{1-x}{\cdot}Ca_x)_mTiO_3$ Grain Boundary Layer Ceramics) ($(Sr_{1-x}{\cdot}Ca_x)_mTiO_3$ 입계층 세라믹의 유전특성에 관한 연구)

  • Kim, Jin-Sa;Choi, Woon-Shik;Shin, Chul-Gi;Kim, Sung-Yeol;Lee, Joon-Ung
    • Proceedings of the KIEE Conference
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    • 1994.11a
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    • pp.215-218
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    • 1994
  • Dielectric properties of $(Sr_{l-x}{\cdot}Ca_x)_mTiO_3+0.006Nb_2O_5$($0.05{\leq}x{\leq}0.2$, 0.996$N_2$) were painted on the surface with CuO paste, and then annealed at $1100^{\circ}C$ for 2hr. Grain size increased with increasing substitutional contents of Ca up to 15[mol%], but decreased with further substitution. In the specimens with $10{\sim}15[mol%]$ of Ca and m=1, excellent dielectric properties were obtained as follows; dielectric constant <25000, dielectric loss($tan{\delta}[%]$) <0.3[%] and capacitance change rate with temperature <${\pm}10[%]$, respectively. All the specimens in this study exhibited dielectric relaxation with frequency as a function of the temperature. The dispersive frequency was over $10^6[Hz]$.

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Stability Enhancement of Super-RENS Readout Signal

  • Kim, Joo-Ho;Lee, Yong-Woon;Hwang, Wook-Yeon;Shima, Takayuki;Chung, Chong-Sam
    • Transactions of the Society of Information Storage Systems
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    • v.3 no.3
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    • pp.123-125
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    • 2007
  • We report the readout stability improvement results of super-resolution near field structure (Super-RENS) writeonce read-many (WORM) disk at a blue laser optical system. (Laser wavelength 405nm, numerical aperture 0.85) By using diffusion barrier structure (GeSbTe sandwiched by GeN) and high transition temperature recording material ($BaTiO_3$), material diffusion of phase change layer and recording mark degradation were greatly improved during high power (Pr=2.0mW) readout process up to $1{\times}10^5$ times.

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Quantitative Analysis of Wear Debris for Surface Modification Layer by Ferrography (Ferrography에 의한 표면개질층의 마모분 정량분석)

  • 오성모;이봉구
    • Tribology and Lubricants
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    • v.15 no.3
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    • pp.265-271
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    • 1999
  • Wherever there are rotating equipment and contact between surface, there is wear and the generation of wear particles. The particles contained in the lubricating oil carry detailed and important information about the condition monitoring of the machine. This information may be deduced from particle shape, composition, size distribution, and concentration. Therefore, This paper was undertaken to Ferrography system of wear debris generated from lubricated moving machine surface. The lubricating wear test was performed under different experimental conditions using the Falex wear test of Pin and V-Block type by Ti(C, N) coated. It was shown from the test results that wear particle concentration (WPC) and wear severity Index( $I_{S}$), size distribution in normal and abnormal wear have come out all the higher value by increases sliding friction time. Wear shape is observed on the Ferrogram it was discovered a thin leaf wear debris as well as ball and plate type wear particles. This kind of large wear shape have an important effect not only metals damage, but also seizure phenomenon.

Fabrication & Properties of Field Emitter Arrays using the Mold Method for FED Application (Mold 법에 의해 제작된 FED용 전계에미터어레이의 특성 분석)

  • ;;;;K. Oura
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.347-350
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    • 2001
  • A typical Mold method is to form a gate electrode, a gate oxide, and emitter tip after fabrication of mold shape using wet-etching of Si substrate. In this study, however, new Mold method using a side wall space structure is used in order to make sharper emitter tip with a gate electrode. Using LPCVD(low pressure chemical vapor deposition), a gate oxide and electrode layer are formed on a Si substrate, and then BPSG(Boro phospher silicate glass) thin film is deposited. After, the BPSG thin film is flowed into a mold as high temperature in order to form a sharp mold structure. Next TiN thin film is deposited as a emitter tip substance. The unfinished device with a glass substrate is bonded by anodic bonding techniques to transfer the emitters to a glass substrate, and Si substrate is etched using KOH-deionized water solution. Finally, we made sharp field emitter array with gate electrode on the glass substrate.

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Nanostructured Photoelectrode Materials for Improving Light-Harvesting Properties in DSSCs

  • Jeong, Hyeon-Seok
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.7.2-7.2
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    • 2011
  • Photoelectrochemical solar cells such as dye-sensitized cells (DSSCs), which exhibit high performance and are cost-effective, provide an alternative to conventional p-n junction photovoltaic devices. However, the efficiency of such cells plateaus at 11~12%, in contrast to their theoretical value of 33%. The majority of research has focused on improving energy conversion efficiency of DSSC by controlling nanostructure and exploiting new materials in photoelectrode consisting of semiconducting oxide nanoparticles and a transparent conducting oxide electrode (TCO). In this presentation, we introduce monodisperesed TiO2 nanoparticles prepared by forced hydrolysis method and their superiority as photoelectrode materials was characterized with aids of optical and electrochemical analysis. Inverse opal-based scattering layers containing highly crystalline anatase nanoparticles are also introduced and their feasibility for use as bi-functional light scattering layer is discussed in terms of optical reflectance and charge generation properties as a function of optical wavelength.

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PECVD에 의한 TiN 코팅의 마모특성 연구

  • Song, Geon;Ahn, Hyo-Seok
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 1990.06a
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    • pp.53-57
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    • 1990
  • 항공기 및 자동차를 위시한 기계공업 전반의 급속한 발달과 더불어 각종 기계들이 전문, 특수화됨에 따라 이들의 작업조건 역시 고속, 고하중화 되어가며 모든 기계요소의 접촉조건을 이겨낼 수 있는 해졀책이 요구되고 있는 실정이다. 이러한 문제점을 해결하기 위한 방안으로 현재 선진공업국에서는 재래식 금속재료의 표면에 목적하는 효과를 발휘할 수 있는 물질을 코팅(coating)하여 그 표면의 특성을 향상시키기 위해 노력하고 있다. 일반 기계요소에서 발생되는 파괴는 원천적으로 접촉표면 및 부표면(subsurface)에서 시작되며 이는 표면층(surface layer)이 마모, 부식, 피로 등의 표면 관련 제 현상에 대한 대응능력이 결핍되거나 부족하게 되는 곳과 관련지울수 있다. 일반 금속재료로써는 표면층을 최적의 Tribology 적 성질 (내마모성, 내부식성, 고강도 등)을 갖도록 하기에는 미흡하다. 이러한 문제점을 해결하기 위한 수단으로 bulk material에 그것이 가지지 못하는 Tribology 적으로 우수한 성질을 그 표면층에 부여하는 기술로써 여러가지 방법이 개발되어 왔으나 그중 대표적인 것이 바로 표면 코팅기술이다.

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Fabrication and Characterization of GaAs/AlGaAs HEMT Device (GaAs/AlGaAs HEMT소자의 제작 및 특성)

  • 이진희;윤형섭;강석봉;오응기;이해권;이재진;최상수;박철순;박형무
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.9
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    • pp.114-120
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    • 1994
  • We have been successfully fabricated the low nois HEMT device with AlGaAs and GaAs structure. The epitazial layer with n-type AlgaAs and undoped GaAs was grown by molecular beam epitaxy(MBE) system. Ohmic resistivity of the ource and drain contact is below 5${\times}10^{6}{\Omega}{\cdot}cm^{2}$ by the rapid thermal annealing (RTA) process. The ideality factor of the Schottky gate is below 1.6 and the gate material was Ti/Pt/Au. The HEMTs with 0.25$\mu$m-long and 200$\mu$m-wide gates have exhibited a noise figure of 0.65dB with associated gain of 9dB at 12GHz, and a transconductance of 208mS/mm.

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The Effect of Pretreatment for Cemented Carbide Substrate Using Wet Blasting

  • Hong, Sung-Pill;Kim, Soo-Hyun;Kang, Jae-Hoon;Yoon, Yeo-Kyun;Kim, Hak-Kyu
    • Proceedings of the Korean Powder Metallurgy Institute Conference
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    • 2006.09b
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    • pp.1102-1103
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    • 2006
  • The pretreatment for substrate was carried out in change of gun pressure of $0.5\sim3.5$ bar using wet blasting. The size of $Al_2O_3$ powder was about $50{\sim}150{\mu}m$. As the results, the surface roughness of cemented carbide substrate was improved with increment of gun pressure of wet blasting. A new surface layer was formed and Co particles were uniformly distributed over the entire surface after pretreatment. The adhesion of the pretreated substrate in same PVD-TiAlN film was improved and in approximately $Ra=90\sim120\;nm$ shown the best adhesion value.

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Phase Identification of Nano-Phase Materials using Convergent Beam Electron Diffraction (CBED) Technique

  • Kim, Gyeung-Ho;Ahn, Jae-Pyoung
    • Applied Microscopy
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    • v.36 no.spc1
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    • pp.47-56
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    • 2006
  • Improvements are made to existing primitive cell volume measurement method to provide a real-time analysis capability for the phase analysis of nanocrystalline materials. Simplification is introduced in the primitive cell volume calculation leading to fast and reliable method for nano-phase identification and is applied to the phase analysis of Mo-Si-N nanocoating layer. In addition, comparison is made between real-time and film measurements for their accuracy of calculated primitive cell volume values and factors governing the accuracy of the method are determined. About 5% accuracy in primitive cell determination is obtained from camera length calibration and this technique is used to investigate the cell volume variation in WC-TiC core-shell microstructure. In addition to chemical compositional variation in core-shell type structure, primitive cell volume variation reveals additional information on lattice coherency strain across the interface.