• Journal of Photoscience
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• v.12 no.1
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• pp.17-23
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• 2005

Application of a new photocatalyst has been attempted to improve the efficiency and rates of photocatalytic degradation of azo dyes by using a model dye such as Methyl Orange. As a new photocatalyst, $TiO_2$ encapsulated EFAL-removed zeolite Y ($TiO_2$ /EFAL-removed zeolite Y) has been synthesized by ion-exchange in the mixture of EFAL-removed zeolite Y with 0.05 M aqueous [$(NH_4)_2 TiO(C_2O_4)_2.H_2O$] [$TiO(C_2O_4)_2.H_2O$]. This new photocatalyst has been characterized by measuring XRD, IR and reflectance absorption spectra as well as ICP analysis, and it was found that the framework structure of $TiO_2$ /EFAL-removed zeolite Y is not changed by removing the extra-framework aluminum (EFAL) from the normal zeolite Y and the $TiO_2$ inside the photocatalyst exists in the form of $(TiO^{2+})_n$ nanoclusters. Based on the ICP analysis, the Si/Al ratio of the $TiO_2$ /EFAL-removed zeolite Y and the weight of $TiO_2$ were determined to be 23 and 0.061g in 1.0g photocatalyst, respectively. It was also found that adsorption of the azo dye in the $TiO_2$ /EFAL-removed zeolite is very effective (about 80 % of the substrate used). This efficient adsorption contributes to the synergistic photocatalytic activities of the $TiO_2$ /EFAL-removed zeolite by minimizing the required flux diffusion of the substrate. Thus, the photocatalytic reduction of methyl orange (MO) was found to be 8 times more effective in the presence of $TiO_2$ /EFAL-removed zeolite Y than in the presence of $TiO_2$ /normal zeolite Y. Furthermore, the photocatalytic reduction of MO by using 1.0 g of the $TiO_2$ /EFAL-removed zeolite Y containing 0.061g of $TiO_2$ is much faster than that carried out by using 1.0 g of Degussa P-25.

• Korean Journal of Materials Research
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• v.10 no.2
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• pp.124-127
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• 2000

A new triode type Ti-silicided Si FEA(field emitter array) was realized by Ti-silicidation of Ti coated Si FEA and its field emission properties were investigated. In the fabricated device, the field emission properties through the unit pixel with $200{\mu\textrm{m}}{\times}200{$\mu\textrm{m}}$ tip array in the area of $1000{\mu\textrm{m}}{\times}1000{$\mu\textrm{m}}$ were as follows : the turn-on voltage was about 70V under high vacuum condition of $10^8Torr$, and the field emission current and steady state current degradation were about 2nA/tip and 0.3%/min under the bias of $V_A=500V\;and\;V_G=150V$. The low turn-on voltage and the high current stability during long term operation of the Ti silicided Si FEA were due to the thermal and chemical stability and the low work function of silicide layer formed at the surface of Si tip.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.101-102
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• 2006

금속을 도핑 함으로써 전기전도도가 향상될 것으로 생각되는 산화바나듐 나노선에 대하여 열처리 전후의 전기적 특성을 비교하였다. sol-gel 방법으로 만들어진 산화바나듐 xerogel($V_{1.66}Mo_{0.33}O_5{\cdot}nH_2O$)을 $Si_3N_4$ 절연막이 성장된 Si기판위에 분산시키고 Ti/Au으로 전극을 증착한 후 열처리 한 것과 하지 않은 두 시료의 전류-전압특성을 비교 분석하였다.

• Restorative Dentistry and Endodontics
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• v.30 no.3
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• pp.184-192
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• 2005

Intracanal separation of the rotary files is a serious concern in modern endodontic practice. The objective of this study was to compare the life span and fracture patterns of three NiTi rotary files in molar teeth Mesiobuccal roots of upper molar (n = 150) and mesial roots of lower molar (n = 150) were divided into three groups and each group was prepared with Profile, ProTaper, and K3 respectively. Every file was used until separation and/or deterioration of the cutting blade was happened, and then the number of canals to separation and/or unwinding were recorded. Radiographs and Scanning electon microscope (SEM) photographs were taken to evaluate the patterns of separation. The results were as follows: 1. There were no significant differences in numbers of canals to separation and/or unwinding among the groups. 2. Comparing between flaring files, K3 showed significant lower numbers of canals to separation and/or unwinding (p < 0.05), and there was no significant difference between shaping files 3. Separations of instruments were occurred at the midpoint of curvatures within the canals 4. In SEM observations, ductile fractures were seen in most of cases, characterized by shallow dimples. Additional researches is needed to provide a new guideline that informs the appropriate number of times to use NiTi files.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.438-439
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• 2013

Microelectronic devices의 접촉저항의 향상을 위해 Metal silicides의 형성 mechanism과 전기적 특성에 대한 연구가 많이 이루어지고 있다. 지난 수십년에 걸쳐, Ti silicide, Co silicide, Ni silicide 등에 대한 개발이 이루어져 왔으나, 계속적인 저저항 접촉 소재에 대한 요구에 의해 최근에는 Rare earth silicide에 관한 연구가 시작되고 있다. Rare-earth silicide는 저온에서 silicides를 형성하고, n-type Si과 낮은 schottky barrier contact (~0.3 eV)를 이룬다. 또한, 비교적 낮은 resistivity와 hexagonal AlB2 crystal structure에 의해 Si과 좋은 lattice match를 가져 Si wafer에서 high quality silicide thin film을 성장시킬 수 있다. Rare earth silicides 중에서 ytterbium silicide는 가장 낮은 electric work function을 갖고 있어 낮은 schottky barrier 응용에서 쓰이고 있다. 이로 인해, n-channel schottky barrier MOSFETs의 source/drain으로써 주목받고 있다. 특히 ytterbium과 molybdenum co-deposition을 하여 증착할 경우 thin film 형성에 있어 안정적인 morphology를 나타낸다. 또한, ytterbium silicide와 마찬가지로 낮은 면저항과 electric work function을 갖는다. 그러나 ytterbium silicide에 molybdenum을 화합물로써 높은 농도로 포함할 경우 높은 schottky barrier를 형성하고 epitaxial growth를 방해하여 silicide film의 quality 저하를 야기할 수 있다. 본 연구에서는 ytterbium과 molybdenum의 co-deposition에 따른 silicide 형성과 전기적 특성 변화에 대한 자세한 분석을 TEM, 4-probe point 등의 다양한 분석 도구를 이용하여 진행하였다. Ytterbium과 molybdenum을 co-deposition하기 위하여 기판으로 $1{\sim}0{\Omega}{\cdot}cm$의 비저항을 갖는 low doped n-type Si (100) bulk wafer를 사용하였다. Native oxide layer를 제거하기 위해 1%의 hydrofluoric (HF) acid solution에 wafer를 세정하였다. 그리고 고진공에서 RF sputtering 법을 이용하여 Ytterbium과 molybdenum을 동시에 증착하였다. RE metal의 경우 oxygen과 높은 반응성을 가지므로 oxidation을 막기 위해 그 위에 capping layer로 100 nm 두께의 TiN을 증착하였다. 증착 후, 진공 분위기에서 rapid thermal anneal(RTA)을 이용하여 $300{\sim}700^{\circ}C$에서 각각 1분간 열처리하여 ytterbium silicides를 형성하였다. 전기적 특성 평가를 위한 sheet resistance 측정은 4-point probe를 사용하였고, Mo doped ytterbium silicide와 Si interface의 atomic scale의 미세 구조를 통한 Mo doped ytterbium silicide의 형성 mechanism 분석을 위하여 trasmission electron microscopy (JEM-2100F)를 이용하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.349-349
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• 2011

인공관절은 노인성 질환이나 자가 면역질환, 신체적인 외상 등으로 인하여 발생하는 관절의 손상 부위를 대체하기 위해 고안된 관절의 인공 대용물이다. 인공 관절 중 인공 고관절의 경우 관절 운동을 하는 라이너(Liner)와 헤드(Head) 부분이 인공관절의 수명을 결정하게 되는데, 헤드 부분에 메탈소재와 라이너 부분에 고분자 소재를 사용하는 MOP(metal on polymer) 구조의 인공관절은 충격흡수의 장점이 있는 반면 wear debris에 의한 골용해로 인하여 관절이 느슨해지는 문제점이 발생하여 재 시술의 주요 원인이 되고 있다. 현재 인공관절의 수명을 늘리기 위해 DLC, ZrO, TiN 등의 높은 경도 값을 갖는 박막을 금속헤드 위에 증착하여 상대재인 인공관절용 고분자 소재의 마모량을 줄이고자 하는 연구가 활발하게 진행되고 있다. 따라서 본 연구에서는 PIII&D(Plasma Immersion Ion Implantation & Deposition)공정을 이용하여 Co-Cr-Mo 합금 소재에 질소 이온을 주입 한 후 NbN 박막을 증착하여 상대재인 초고분자량 폴리에틸렌(UHMWPE)의 마모량을 줄이고자 하였다. NbN 박막의 특성을 평가하기 위해 XRD, XPS, AFM 등의 분석을 수행하였으며, 상대재인 초고분자량 폴리에틸렌의 마모량을 측정하기 위해 Pin-on-disk tribometer를 이용하여 마모 실험을 진행하였다. 마모 실험 결과, NbN 박막을 단순 증착한 경우, 현재 인공관절용 헤드(Head) 소재로 가장 널리 사용되고 있는 Co-Cr-Mo 합금에 비하여, 상대재인 초고분자량 폴리에틸렌의 마모량을 약 20% 감소시키는 것을 알 수 있었다. 또한, Co-Cr-Mo 합금 소재에 질소 이온주입을 하여 표면을 개질한 후, NbN 박막을 증착한 경우, 마모량이 최대 50%까지 감소하는 것을 확인할 수 있었다.

• Journal of Biomedical Engineering Research
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• v.25 no.2
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• pp.157-163
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• 2004

Nitrogen ion implantation and ion plating techniques were applied for improvement of the wear resistance of metallic implant materials. In this work, the wear dissolution behaviour of a nitrogen ion implanted super stainless steel (S.S.S, 22Cr-20Ni-6Mo-0.25N) was compared with those of S.S.S, 316L SS and TiN coated 316L SS. The amounts of Cr and Ni ions worn-out from the specimens were Investigated using an electrothermal atomic absorption spectrometry. Furthermore, the Ti(Grade 2) disks were coated with TiN, ZrN and TiCN by use of low temperature arc vapor deposition and the wear resistance of the coating layers was compared with that of titanium. The chemical compositions of the nitrogen ion implanted and nitride coated layers were examined with a scanting auger electron spectroscopy. It wat observed that the metal ions released from the nitrogen ion implanted S.S.S surface were significantly reduced. From the results obtained, it was shown that the nitrogen ion implanted zone obtained with 100 KeV ion energy was easily removed within 200,000 revolutions from a wear dissolution testing under a similar load condition when applied to artificial hip joint. The remarkable improvement in wear resistance weir confirmed by the nitrides coated Ti materials and the wear properties differ greatly according to the chemical composition of the coating layers. for specimens with the same coating thickness of about 3$\mu\textrm{m}$, TiCN coated Ti showed the highest wear resistance. However, after removing the coating layers, the wear rates of all nitrides coated Ti reverted to their normal rates of below 10,000 revolutions from Ti-disk-on-disk wear testing under the same load condition. From the results obtained, it is suggested that the insufficient depth of the 100 Kel N$\^$＋/ ion implanted zone and of the nitrides coated layers of 3$\mu\textrm{m}$ are subject to restriction when used as frictional parts of load bearing implants.

• Journal of the Korean institute of surface engineering
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• v.28 no.6
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• pp.368-375
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• 1995

Thermal CVD method is in general used for the fabrication of TiC/$Al_2O_3$-coated carbide tools. The growth of TiC layer and the coating morphology depended on the chemical composition of the hard metal substrate on which the tool properties were strongly influenced. TiC-coated layer was grown by the diffusion of carbon from the substrate, whereas the growth of $Al_2O_3$ layer was unrelated to the composition of substrate. In the nitride hard coatings of Zr, Nb and Mo metals deposited on high speed steel substrate by magnetron sputtering, the reactivity of the metal elements was decreased with increasing group number in one period of the periodic system. The hard material films exhibited the highest adhesion with the chemical composition of stoichiometry or substoichiometry. The critical load as a measure of adhesion was evaluated using scratch tester. The CVD tools indicated the values of 80 and 40N in the coated layers with proper bonding to the substrate and with $\eta$ phase of 1$\mu\textrm{m}$ in the interface respectively, but the nitride films prepared by sputtering of PVD showed only the values between 10 and 20N.

• Journal of the Korean Society for Heat Treatment
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• v.34 no.1
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• pp.17-24
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• 2021

In this study, Ti-X (X=Mn, Fe, Mo) powder alloys were designed and manufactured by both powder metallurgy (PM) and metal powder injection molding (MIM) process to improve strength and formability compared to CP-Ti powder materials. It was found that the lamellar microstructure consisted of α and β phases was formed in PM-processed alloys. However, MIM-processed alloys showed not the lamellar microstucture but the equiaxed α + β microstructure. It was also revealed that the contents of X component and feedstock were not affected to microstructure evolution. The reason why different microstructure was appeared between PM-processed and MIM-processed alloys is not clear yet, but supposed to be the effect of intersticial elements such as C, H and N derived from feedstock during debinding process of MIM.

• Journal of IKEEE
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• v.20 no.2
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• pp.177-180
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• 2016

The effect of varying thickness of Ag/Ti metal bilayer and annealing time have investigated for controlling self-organized nanoparticles (NPs) on 4H-SiC substrate. In addition, Glass and Si substrate which have different surface energy from SiC were fabricated for analyzing interaction of agglomeration. The results of FE-SEM indicated the different formation behaviors of NPs in various ranges of fabrication condition. The surface energy was measured by using a Contact Angle Analyzer. The formation of network-like NPs was observed on Glass and 4H-SiC, respectively, whereas it was not the case on Si substrates. It has been found that the size of NPs increases with decreasing surface energy, due to particle size-dependent hydrophilic properties of substrates. The different formation behavior was explained by using Young's equation for the contact angles between the metal and different substrates.