• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.246-246
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• 1999

TFT-LCD 제조공정의 발전에 따라, 박막층(a-Si, SiNx, gate 전극, ITO 등)에 대한 습식공정을 대치하는 건식식각이 선호되고 있다. scan signal의 전파지연시간을 단축시키는 장점을 갖는 Al gate 전극의 건식식각의 경우, 높은 식각속도와 slope angle의 조절, 그리고 식각균일도가 요구된다. 이러한 Al gate 전극물질로는 Al에 Ti이나 Nd와 같은 금속을 첨가하여 post annealing 동안에 발생하는 hillock을 방지하고 더불어 낮은 resistivity(<10$\mu$$\Omega$cm)와 열과 부식에 대한 높은 저항성을 얻을 수 있다. 그러나 Al-Nd alloy 박막은 식각속도와 photoresist에 대한 식각선택도가 낮아 문제로 지적되고 있다. 본 실험에서는 고밀도 플라즈마원의 일종인 자화된 고밀도 유도결합형 플라즈마를 이용하여 식각가스 조합, inductive power, bias voltage 그리고 공정압력 등의 다양한 공정변수에 따른 Al-Nd film의 기본적인 식각특성 변화를 관찰하였다. 식각시 chloring gas를 주요 식각가스로 사용하고 BCl, HBr 등을 10mTorr의 일정한 압력을 유지하는 조건하에서 첨가하였으며 inductive power는 5100W~800W, bias voltage는 -50V~-200V까지 변화를 주었다. 식각공정의 전후를 통하여 Al-Nd 박막표면의 조성변화를 관찰하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하였으며 공정변수에 따른 식각후 profile 관찰은 scanning electron microscopy(SEM)을 통하여 관찰하였다. Al-Nd 식각속도는 100% Cl2 플라즈마에 비해 BCl3의 양이 증가할수록 증가하였으며 75%의 BCl3 gas를 첨가하였을 때 가장 높은 식각속도를 얻을 수 있었다. 또한 SEM을 이용한 표면분석으로 roughness가 감소된 공정조건을 찾을 수 있었다.

• Korean Journal of Materials Research
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• v.9 no.3
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• pp.315-321
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• 1999

Metal matrix composites have been extensively studied because of their excellent characteristics for structural application. $Al_2O_3$ and SiC have been used as a common reinforcement owing to their good mechanical properties. However the manufacturing cost of these ceramic reinforcement is expensive, so the use of the composites has been restricted to special purposes. In this study, we tested the application possibility as a reinforcement of $Al_2O_3$-TiC powder synthesized by SHS(Self-propagating High-temperature Synthesis) process to Al alloy matrix composite. Also, $Al_2O_3$ short fibers were added with the synthesized powders in order to apply to the Al matrix hybrid composites. Squeeze infiltration casting process was used to make the composite with 25vol% of reinforcement. Microstructure and crystal structure were examined by SEM, OM and XRD, also the mechanical properties were studied by the compressive test and wear test.

• 대한치주과학회:학술대회논문집
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• 2007.11a
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• pp.124-125
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• 2007

• Proceedings of the Korean Nuclear Society Conference
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• 2001.10a
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• pp.213.2-213
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• 2001

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2006.10a
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• pp.85-85
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• 2006

• Journal of Korea Foundry Society
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• v.35 no.6
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• pp.147-154
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• 2015

The effects of Sc and Sr elements on the modification of the eutectic $Mg_2Si$ phase and the castability were investigated in the Al-4wt%Mg-0.9wt%Si-0.3wt%Mn-0.15wt%Fe alloy. Measurements of the cooling curve and microstructure observations were performed to analyze the additional effects of Sc and Sr minor elements during the solidification process. A prominent effect found on the modification of the eutectic $Mg_2Si$ phase with additions of the Sr and Sc elements. Here, a fine eutectic $Mg_2Si$ phase and a decrease in the growth temperature of the eutectic $Mg_2Si$ phase were evident with an addition of Sc element up to 0.2 wt%. The growth temperature of the eutectic $Mg_2Si$ phase decreased and the effect on the modification of the eutectic $Mg_2Si$ phase increased with the addition of Sr element up to 0.02 wt%. The addition of 0.02wt%Sr had the strongest effect on the modification of the eutectic $Mg_2Si$ phase, and the resulting microstructure of the eutectic $Mg_2Si$ phase was found to have a fibrous morphology with a decreased aspect ratio and an increased modification ratio. Fluidity and shrinkage tests were conducted to evaluate the castability of the alloy. The addition of 0.02wt%Sr effectively increased the fluidity of the alloy, while an addition of Sc did not show any effect compared to when nothing was added. The maximum filling length was recorded for 0.01wt%TiB-0.02wt%Sr owing to the effect of the fine ${\alpha}$-Al grains. The macro-shrinkage ratio decreased, while the micro-shrinkage ratio increased with the addition of various eutectic modifiers. The highest ratio of micro-shrinkage was recorded for the 0.02wt%Sr condition. However, the total shrinkage ratio was nearly identical regardless of the amounts added in this study.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.22 no.5
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• pp.227-232
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• 2012

Inconel 617 and Hastelloy X are the most promising candidate materials for the heat exchanger of next generation nuclear reactor. Surface coating and its effects on high temperature properties for the Inconel 617 and Hastelloy X under molten FLiNaK (LiF-NaF-KF) salt environment have been investigated. For TiAlN and $Al_2O_3$ overlay coatings, the two different PVD (physical vapor deposition) methods of an arc discharge and a sputtering were applied, respectively. A study for the thermal stability of the surface modified Ni-Cr alloy substrates has been conducted. To evaluate the corrosion mechanism of Ni-Cr alloys in the molten salt, a ruptured Inconel pipe used for the molten salt transportation has been analyzed. The thermal properties of morphological and structural properties each sample were characterized before and after heat-treatment at $600^{\circ}C$ in molten FLiNaK salt. The results showed that the TiAlN and $Al_2O_3$ overlay coated specimens had the enhanced high temperature stability.

• Progress in Superconductivity
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• v.9 no.1
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• pp.85-90
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• 2007

Lanthanum aluminate($LaAlO_3$) film has been prepared on single crystal and metal substrates by dip coating method. Lanthanum acetate and aluminum were prepared via ligand exchange starting from lanthanum nitrate hexahydrate and aluminum nitrate hexahydrate in acetate glacial acetic acid solution after being refluxed. Coating solution was obtained by diluting the gel with methanol and 2-methoxyethanol to adjust the total cation concentration to 0.67 M. Precursor coated film was prepared by dip-coating with a speed of 25 mm/min on various substrates such as $LaAlO_3$ (001), MgO(001), $SrTiO_3$(001) single crystal, LMO/MgO/Ni-alloy. Thin films have been obtained by heat treating the precursor film at various temperatures from $600^{\circ}C{\sim}900^{\circ}C$ and various heating rate from $0.83^{\circ}C/min{\sim}1.25^{\circ}C/min$ under $Ar/O_2$ mixture containing 1000ppm oxygen. The films have been characterized by scanning electronic microscopy (SEM) and X-ray diffraction (XRD). XRD analysis for the prepared film showed that $LaAlO_3$ thin films with a preferred orientation of (100) plane parallel to substrate surface were obtained at $800^{\circ}C(1.11\;^{\circ}C/min)$ on LMO/MgO/Ni-alloy substrate, but the intensity decreased with the increase of heat treatment temperature.

• Journal of the Korean Ceramic Society
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• v.40 no.2
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• pp.123-127
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• 2003

The effects of process parameters on coating formation and coating properties were investigated using a fused and crushed Ti $O_2$powder by the Taguchi method and L$_{9}$(3$^4$) orthogonal array. The Taguchi analysis was conducted through the results of the coating properties affected strongly by plasma spraying parameters and Ti $O_2$powder was sprayed on Ti-6Al-4V alloy substrate. The coating properties were characterized by thickness, microhardness, porosity and surface roughness using optical microscopy, image analyzer and surface roughness tester respectively. An observed optimum condition of plasma spraying process could be found for potential use as a bioceramic coating.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.27 no.7
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• pp.1051-1057
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• 2003

This study is about controlled impurities, which make metal alloys, especially AC4CH alloy that is made by restraining 0.2％ Fe and Aluminum to make a matrix material. A metal matrix composite is produced using the squeeze casting method. The first step in the squeeze casting method is to add some organic binder including aluminum borate whisker into the matrix. After the fabrication of a metal matrix composite, each is individually appended to an inanimate binder such as SiO$_2$, Al$_2$O$_3$, and TiO$_2$. Through experiments the mechanical property changes were investigated between the metal matrix composite and AC4CH alloy. This study proves the superiority of the mechanical property of a metal matrix composites over AC4CH according to the previous tests and results that were mentioned above. One excellent property of matrix material composites is the infiltrated TiO$_2$ reinforcement. This material is a good substitute for the existing materials that are used in the development of industries today.