• 제목/요약/키워드: Ti-diffusion

검색결과 502건 처리시간 0.03초

Off-Axis RF Magnetron Sputtering 방법에 의한 $Ba_{0.5}Sr_{0.5}TiO_3$ 박막의 제조 (Preparation of $Ba_{0.5}Sr_{0.5}TiO_3$ Thin Films by Off-Axis RF Magnetron Sputtering)

  • 신진;한택상;김영환;이재준;박순자;오명환;최상삼
    • 한국세라믹학회지
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    • 제31권12호
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    • pp.1429-1436
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    • 1994
  • We have prepared Ba0.5Sr0.5TiO3 thin films on Si substrate without buffer layer. Deposition was carried out by off-axis rf magnetron sputtering method using Ba0.5Sr0.5TiO3 stoichiometric target. The substrate temperature was changed from 40$0^{\circ}C$ to $700^{\circ}C$ during deposition. As the substrate temperature increased, relative intensity of (110) peak increased up to $600^{\circ}C$, however preferred orientation changed from (110) to (h00) beyond $650^{\circ}C$ of substrate temperature. Deposited films showed microstructures with fine grains whose diameters are less than 100 nm, and columnar structure was observed in the cross-sectional SEM micrograph. AES depth profile showed no significant diffusion at the interfacial reaction area. The effective dielectric constant of films showed maximum value at $600^{\circ}C$, and the leakage current increased with increasing substrate temperature, which may be ascribed to the crystallization of amorphous phases at grain boundary.

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High-Temperature Oxidation of Ti Containing Stainless Steel in O2-N2 Atmosphere

  • Onishi, Hidenori;Saeki, Isao;Furuichi, Ryusaburo;Okayama, Toru;Hanamatsu, Kenko;Shibayama, Tamaki;Takahashi, Heishichiro;Kikkawa, Shinichi
    • Corrosion Science and Technology
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    • 제3권4호
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    • pp.140-147
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    • 2004
  • High temperature oxidation of Fe-19Cr and Fe-19Cr-0.2Ti alloys is studied at 1173-1373 K in 16.5 kPa $O_2$ - balances $N_2$ atmosphere aimed at clarifying the effect of titanium addition. Oxidation rate of Fe-19Cr alloy was accelerated with titanium. For both alloys chromium rich $(Fe,\;Cr)_2O_3$ was formed as a major oxidation product. On Fe-19Cr-0.2Ti alloy, a thin layer composed of spinel type oxide and titanium oxide was also formed and an internal oxidation of titanium was observed. Titanium was concentrated at the oxide surface and internal oxidation zone but a small amount of titanium was also found in the intermediate corundum type $(Fe,\;Cr)_2O_3$ layer. Crystals of corundum type $(Fe,\;Cr)_2O_3$ formed on Fe-19Cr alloy are coarse but that formed on Fe-19Cr -0.2Ti alloys were fine and columnar. Reason for the difference in oxidation kinetics and crystal structure will be discussed relating to the distribution of aliovalent titanium in corundum type $(Fe,\;Cr)_2O_3$ oxide layer.

펄스레이저 증착법으로 제작된(Pb0.72,La0.28)Ti0.93O3박막의 수소후열처리에 관한 전기적 특성 연구 (Hydrogen Post-annealing Effect of (Pb0.72,La0.28)Ti0.93O3 Films Fabricated by Pulsed Laser Deposition)

  • 한경보;전창훈;전희석;이상렬
    • 한국전기전자재료학회논문지
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    • 제16권3호
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    • pp.190-194
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    • 2003
  • Dielectric thin films of (P $b_{0.72}$,L $a_{0.28}$) $Ti_{0.93}$ $O_3$ (PLT(28)) have been deposited on Pt(111)/Ti/ $SiO_2$/Si(100) substrates in-situ by pulsed laser deposition using different annealing and deposition Processes. We have investigated the effect of hydrogen annealing on the ferroelectric properties of PLT thin films and found that the annealing process causes the diffusion of hydrogen into the ferroelectric film resulting in the destruction of polarization. We have tried to form the film by a two-step deposition process In order to improve electrical property. Two-step process to grow PLT films was adopted and verified to be useful to enlarge the grain size of the film and to reduce the leakage current characteristics. Structural properties and electrical properties including dielectric constant, ferroelectric characteristics, and leakage current of PLT thin films were shown to be strongly influenced by grain size. The film deposited by using two-step Process including pre-annealing treatment has a strongly(111) orientation. However, the films deposited by using single -step process with hydrogen annealing process show the smallest grain size. The film deposited by using two-step process including pre-annealing treatment shows the leakage current density of below 10$^{-7}$ A/c $m^2$ for the field of smaller than 100 kV/cm. However, the films deposited by using single-step process with hydrogen annealing process and pre-annealing process show worse leakage current density than the film deposited by using two-step process including pre-annealing treatment.tment.

액상 TCE 제거반응을 위한 $CoO_x/TiO_2$ 촉매 (Heterogeneous Oxidation of Liquid-phase TCE over $CoO_x/TiO_2$ Catalysts)

  • 김문현;추광호
    • 대한환경공학회지
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    • 제27권3호
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    • pp.253-261
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    • 2005
  • 불균일 $CoO_x/TiO_2$ 촉매가 충진된 연속 흐름식 고정층 반응기 내에서 ppm 수준으로 수중에 존재하는 trichloroethylene (TCE) 제거반응을 수행하였으며, 가장 우수한 반응활성을 갖는 촉매의 결정구조와 표면화학적 특성을 분석함으로써 반응시간에 따라 분해활성이 전이영역을 보이는 원인을 규명하고자 하였다. $36^{\circ}C$의 반응온도에서 모델반응의 내부확산저항은 없었으며, $TiO_2$ 표면에 흡착에 의한 액상 TCE 제거정도는 무시할 수 있었다. 5% $CoO_x/TiO_2$ 촉매는 본 대상반응에 대하여 가장 우수한 활성을 갖는 것으로 나타났으며, 반응시간의 경과정도에 따라 TCE 분해효율이 점진적으로 증가하여 안정화되는 전이영역의 존재를 확인할 수 있었다. 반응 전 5% $CoO_x$ 촉매에 대한 XRD 패턴에서 담지체로 사용된 $TiO_2$에 의한 피크들 외에 새로운 피크가 관찰되었고, 5시간 이상 동안 반응한 후에 건조된 촉매의 경우에도 반응 전 촉매의 XRD 피크와 매우 유사하였다. $Co_3O_4$의 XRD 패턴들과 대조한 결과, 5% $CoO_x$ 촉매상에서 Co 화합물에 의해 야기되는 XRD 피크들은 $Co_3O_4$에 의한 것임을 알 수 있었다. 반응물에 노출되지 않은 5% $CoO_x/TiO_2$ 촉매에 대한 XPS 측정은 797.1 eV에서 Co $2p_{1/2}$에 대한 주피크와 함께 781.3 eV에서 Co $2p_{3/2}$에 대한 주피크가 관찰되어졌다. 반응 후 촉매의 경우에는 Co $2p_{3/2}$ 및 Co $2p_{1/2}$의 binding energy들은 각각 780.3과 795.8 eV에서 나타났다. 반응 전 후 촉매상에서 Co $2p_{3/2}$의 binding energy 차이는 1.0 eV이고, Co $2p_{1/2}$의 binding energy 차이는 1.3 eV이다. 표준 $Co_3O_4$에 대한 XPS 측정결과, 반응 후 촉매상에 존재하는 $CoO_x$$Co_3O_4$로 존재하고, 반응 전의 경우에는 이와는 다른 chemical state를 보여주었다. XRD 및 XPS 결과를 바탕으로, 촉매표면에 존재하는 $Co_3O_4$의 외부표면이 $Co_2TiO_4$$CoTiO_3$ 같은 $CoTiO_x$로 encapsulation되어 있는 모델구조를 제안할 수 있고, 이는 반응시간의 함수로 나타나는 촉매활성에 있어서 전이영역의 존재를 잘 설명할 수 있을 뿐만 아니라, XRD와 XPS에서 얻어진 촉매의 물리화학적인 특성을 잘 반영할 수 있다.

Anti-Oral Microbial Activity and Anti-Inflammatory Effects of Rosmarinic Acid in Lipopolysaccharide-Stimulated MC3T3-E1 Osteoblastic Cells on a Titanium Surface

  • Jeong, Moon-Jin;Lim, Do-Seon;Heo, Kyungwon;Jeong, Soon-Jeong
    • 치위생과학회지
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    • 제20권4호
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    • pp.221-229
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    • 2020
  • Background: The purpose of this study was to investigate the anti-oral microbial activity and anti-inflammatory effects of rosmarinic acid (RA) in lipopolysaccharide (LPS)-stimulated MC3T3-E1 osteoblastic cells on a titanium (Ti) surface during osseointegration, and to confirm the possibility of using RA as a safe natural substance for the control of peri-implantitis (PI) in Ti-based dental implants. Methods: A disk diffusion test was conducted to confirm the antimicrobial activity of RA against oral microorganisms. In order to confirm the anti-inflammatory effects of RA, inflammatory conditions were induced with 100 ng/ml of LPS in MC3T3-E1 osteoblastic cells on the Ti surface treated with or without 14 ㎍/ml of RA. The production of nitric oxide (NO) and prostaglandin E2 (PGE2) in LPS-stimulated MC3T3-E1 osteoblastic cells on the Ti surface was confirmed using an NO assay kit and PGE2 enzyme-linked immunosorbent assay kit. Reverse transcription polymerase chain reaction and western blot analysis were performed to confirm the expression of interleukin (IL)-1β and tumor necrosis factor (TNF)-α in total RNA and protein. Results: RA showed weak antimicrobial effects against Streptococcus mutans and Escherichia coli, but no antimicrobial activity against the bacteria Aggregatibacter actinomycetemcomitans and the fungus Candida albicans. RA reduced the production of pro-inflammatory mediators, NO and PGE2, and proinflammatory cytokines, TNF-α and IL-1β, in LPS-stimulated MC3T3-E1 osteoblastic cells on the Ti surface at the protein and mRNA levels. Conclusion: RA not only has anti-oral microbial activity, but also anti-inflammatory effects in LPS-stimulated MC3T3-E1 osteoblasts on the Ti surface, therefore, it can be used as a safe functional substance derived from plants for the prevention and control of PI for successful Ti-based implants.

FOWLP Cu 재배선 적용을 위한 절연층 경화 온도 및 고온/고습 처리가 Ti/PBO 계면접착에너지에 미치는 영향 (Effects of Dielectric Curing Temperature and T/H Treatment on the Interfacial Adhesion Energies of Ti/PBO for Cu RDL Applications of FOWLP)

  • 손기락;김가희;박영배
    • 마이크로전자및패키징학회지
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    • 제30권2호
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    • pp.52-59
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    • 2023
  • 팬 아웃 웨이퍼 레벨 패키지의 Cu 재배선층 적용을 위해 Ti 확산방지층과 폴리벤즈옥사졸(polybenzoxazole, PBO) 절연층 사이의 계면 신뢰성을 평가하였다. PBO 경화 온도 및 고온/고습 시간에 따라 4점 굽힘 시험으로 정량적인 계면접착에너지를 평가하였고, 박리계면을 분석하였다. 175, 200, 및 225℃의 세 가지 PBO 경화 온도에 따른 계면접착에너지는 각각 16.63, 25.95, 16.58 J/m2 로 200℃의 경화 온도에서 가장 높은 값을 보였다. 박리표면에 대한 X-선 광전자 분광분석 결과, 200℃에서 PBO 표면의 C-O 결합의 분율이 가장 높으므로, M-O-C 결합이 Ti/PBO 계면접착 기구와 연관성이 높은 것으로 판단된다. 200℃에서 경화된 시편을 85℃/85% 상대 습도에서 500시간 동안 고온/고습 처리 하는 동안 계면접착에너지는 3 .99 J/m2까지 크게 감소하였다. 이는 고온/고습 처리동안 Ti/PBO 계면으로의 지속적인 수분 침투로 인해 계면 근처 PBO의 화학결합이 약해져서 weak boundary layer를 형성하기 때문으로 판단된다.

고온 수증기 환경에서 Ni기 초합금의 산화특성 (Oxidation Behaviors of Nickel-Base Superalloys in High Temperature Steam Environments)

  • 김동훈;구자현;김대종;유영성;장창희
    • 한국압력기기공학회 논문집
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    • 제7권2호
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    • pp.26-33
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    • 2011
  • To evaluate steam oxidation behaviours of Alloy 617 and Haynes 230, oxidation test were performed at $900^{\circ}C$ in steam and $steam+20\;vol.-%\;H_2$ environments. Oxidation rate in steam condition was similar to that in air for Alloy 617, while it was slightly lower for Haynes 230. When hydrogen was added to steam, oxidation rate was enhanced. Isolated $MnTiO_3$ particle were formed on $Cr_2O_3$ oxide layer and sub layer $Cr_2O_3$ were formed in steam and $steam+20\;vol.-%\;H_2$ for Alloy 617. On the other hands, $MnCr_2O_3$ layer were formed on top of $Cr_2O_3$ oxide layer for Haynes 230. The extensive sub layer $Cr_2O_3$ formation was resulted from the oxygen inward diffusion in such environments. When hydrogen was added, the oxide morphology was changed from polygonal to platelet because of the accelerated diffusion of cations under the oxide layer. In addition, decarburized zone was extended as hydrogen participated into the reactions causing carbide dissolution.

일방향응고 Ni기초내열합금 GTD-111의 천이액상확산접합(I) (Transient Liquid Phase Bonding of Directionally Solidified Ni Base Superalloy, GTD-111(I) - Bonding Phenomena and Mechanism -)

  • 강정윤;권민석;김인배;김대업;우인수
    • Journal of Welding and Joining
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    • 제21권2호
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    • pp.82-88
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    • 2003
  • The bonding phenomenon and mechanism in the transient liquid phase bonding(TLP Bonding) of directionally solidified Ni base superalloy, GTD-111 was investigated. At the bonding temperature of 1403K, liquid insert metal was eliminated by isothermal solidification which was controlled by the diffusion of B and Si into the base metal and solids in the bonded interlayer grew epitaxially from mating base metal inward the insert metal. The number of grain boundaries formed at the bonded interlayer was corresponded with those of base metal. The liquation of grain boundary and dendrite boundary occurred at 1433K. At the bonding temperature of 1453K which is higher than liquation temperature of grain boundary, liquids of the Insert metal were connected with liquated grain boundaries and compositions in each region mixed mutually. In Joints held for various time at 1453t phases formed at liquated grain boundary far from the interface were similar to those of bonded interlayer. With prolonged holding time, liquid phases decreased gradually and liquids of continuous band shape divided many island shape. But liquid phases did not disappeared after holding for 7.2ks at 1453k. Isothermal solidification process at the bonding temperature which is higher than the liquation temperature of the grain boundary was controlled by diffusion of Ti to be result in liquation than B or Si. in insert metal. (Received January 15, 2003)

원형분류확산화염에서의 음파가진에 의한 혼합효과 (Mixing Effect by Tone-Excitation In Round Jet Diffusion Flame)

  • 김태권;박정;신현동
    • 대한기계학회논문집B
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    • 제23권6호
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    • pp.795-801
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    • 1999
  • An experimental investigation has been conducted with the objective of studying the mixing mechanism near the nozzle exit in a tone-excited jet diffusion flame. The fuel jet was pulsed by means of a loudspeaker-driven cavity. The excitation frequencies were chosen for the two cases of the non-resonant and resonant frequency identified as a fuel tube resonance due to acoustic excitation. The effect of tone-excitations on mixing pattern near the nozzle exit and flame was visualized using various techniques, including schlieren photograph and laser light scattering photograph from $TiO_2$ seed particles. In order to clarify the details of the flame feature observed by visualization methods, hotwire measurements have been made. Excitation at the resonant frequency makes strong mixing near the nozzle. In this case, the fuel jet flow in the vicinity of nozzle exit breaks up into disturbed fuel parcels. This phenomena affects greatly the combustion characteristics of the tone excited jet and presumably occurs by flow separation from the wall inside the fuel nozzle. As a result, in the resonant frequency the flame length reduces greatly.

Screen Printing법을 이용한 PMN-PZT 후막의 제조 및 특성 연구 (Fabrication and Characterization of PMN-PZT Thick Films Prepared by Screen Printing Method)

  • 김상종;최형욱;백동수;최지원;김태송;윤석진;김현재
    • 한국전기전자재료학회논문지
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    • 제13권11호
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    • pp.921-925
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    • 2000
  • Characteristics of Pb(Mg, Nb)O$_3$-Pb(Zr, Ti)O$_3$system thick films fabricated by a screen printing method were investigated. The buffer layer were coated with various thickness of Ag-Pd by screen printing to investigate the effect as a diffusion barrier and deposited Pt as a electrode by sputtering on Ag-Pb layer. The printed thick films were burned out at 650$\^{C}$ and sintered at 950$\^{C}$ in O$_2$condition for each 20, 60min after printing with 350mesh screen. The thickness of piezoelectric thick film was 15∼20㎛ and Ag-Pb layer acted as a diffusion barrier above 3㎛ thickness. The PMN-PZT thick films were screen printed on Pt/Ag-Pb(6m) and sintered by 2nd step (650$\^{C}$/20min and 950$\^{C}$/1h) using paste mixed PMN-PZT and binder in the ratio of 70:30, and the remnant polarization of thick film was 9.1$\mu$C/㎠ in this conditions.

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