• 반도체디스플레이기술학회지
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• 제21권3호
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• pp.57-62
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• 2022

The plasma resistance of multi-component glasses containing La, Gd, Ti, Zn, Y, Zr, Nb, and Ta was analyzed in this study. The plasma etching was performed via inductively coupled plasma-reactive ion etching (ICP-RIE) using CF₄/O₂/Ar mixed gas. After the reaction, the glass with a low fluoride sublimation temperature and high content of P, Si, and Ti elements showed a high etching rate. On the other hand, the glass containing a high fluoride sublimation temperature component such as Ca, La, Gd, Y, and Zr exhibited high plasma resistance because the etch rate was lower than that of sapphire. Glass with low plasma resistance increased surface roughness after etching or nanoholes were formed on the surface, but glass with high plasma resistance showed little change in surface microstructure. Thus, the results of this study demonstrate the potential for the development of plasma-resistant glasses (PRGs) with other compositions besides alumino-silicate glasses, which are conventionally referred to as plasma-resistant glasses.

• 한국표면공학회지
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• 제30권4호
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• pp.262-271
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• 1997

Nickel-matal hydride(Ni-MH) batteries are receiving attention as non-pollunting. high performance rehargeable energy stoage system. The performance of Ni-Mh is significantly influenced by the hydrogen storage alloy materiels used as an anode material. Recently, having discharge capacities higher than the $AB_5$-type hydrogen storage alloys, the Zr-based $AB_2$-Type hydrogen storage alloys has remaining problems regarding cycle life and self-dischareg. These problems need to be solved by improvements in the alloy design and/or surface treatment. This work investiggates the effects the effects of surface property by fluorination on $Zr_{0.7}Ti_{0.3}V_{0.4}Mn_{0.4}Ni{1.2}$ composittion $AB_2$-Type hydrogen storage alloys. EPMA, SEM and AES techniques were used for surface analysis, and the crystal structure was characterized by constant current cycling test and potential sweep methods. Fluorination was found to be effective when La-was incorporated into the alloy, and has unique morphology, higher reactivity, and at the same time formed a protective film. Through, fluorination, the cycle life of an electrode was found to increase significantly, charge/discharge characteristics of the electrode the potential difference between the charge/discharge plateau, i.e polarization(overpotential)were improved.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2018년도 춘계학술대회 논문집
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• pp.68-68
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• 2018

Nanoporous or nanotubular metal oxide can be fabricated by anodization of metal substrate in fluoride contained electrolytes. The approach allows various transition metals such as Zr, Hf, Nb, Ta to form highly ordered oxide nanostructures. These oxide nanostructures have various advantages such as high surface area, fast electron transport rate and slow recombination in semiconductive materials. Recently, vanadium oxide nanostructures have been drawn attentions due to their superior electronic, catalytic and ion insertion properties. However, anodization of vanadium metal to form oxide layers is relatively difficult due to ease formation of highly soluble complex in water contained electrolyte during anodization. Yang et al. reported $[TiF_6]^{2-}$ or $[BF_4]^-$ in electrolyte helps to formation of stable oxide layer [1, 2]. However, the reported approaches are very sensitive in other parameters. In this presentation, we deal with the other important key parameters to form ordered anodic vanadium oxide such as pH, temperatures and applied potential.

• 한국원자력학회:학술대회논문집
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• 한국원자력학회 2005년도 춘계학술발표회
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• pp.309-310
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• 2005

Some minor elements(Al, B, Ba, Ca, Cd, Co, Cr, Cu, Gd, Mg, Mn, Mo, Nd, Ni, P, Pb, Si, Sn, Sr, Ti, V, Yb, Zn and Zr) in iron compounds such as the S/G sludge of a power plant were separated from iron by anionic and cationic exchange methods. If a ICP-AES or AAS determination follows this method, minor elements of more than 2 or 20 ppm of Fe can be determined with an error less than 20% except Sn and Mo. Alkaline elements were excluded from this study since they can be easily recovered from an anionic exchange. Application to real sludge samples is ongoing.

• 한국세라믹학회지
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• 제23권4호
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• pp.62-68
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• 1986

$(Pb_{1-x} La_x)(Zr_{0.65} Ti_{0.35})_{1-x/4}O_3$ (PLZT X/65/35) powders were prepared by molten salt synthesis using NaCl-K Cl and conventional calcining of oxides. The effects of molten salt on formation and charactrization of PLZT powder and on dielectric piezolectric and optical properties of PLZT ceramics were studied, The completed PLZT powder formation in the presence of fused salt was attained at 50-10$0^{\circ}C$ lower temperature than that in solid state reaction and the particle size of the powder made by molten salt synthesis was markedly increased with increasing calcining temperature. The substitution of Na and/or K ions in NaCl-KCl for Pb ion in process of molten salt synthesis was increased with increasing La concentration Z. These substituted Na and/or K ions were identified as the origins of decreasing coupl-ing factor and optical transmittance of PLZT ceramics.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• 열처리공학회지
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• 제35권2호
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• pp.82-87
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• 2022

The PZT piezoelectric ceramic on the copper alloy plate shows a extraordinary pattern resulted from the electromagnetic and thermal radiation induced by copper coil. The Eddy current or magnetic field by the polarization of PZT grains contained Pb, Zr, Ti with oxide is performed to show the change of array pattern at piezoelectric grains, especially wave-shaped or wrinkled configuration along with lines of electromagnetic field are becoming larger than before while applying the coil induction.

• 대한금속재료학회지
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• 제48권12호
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• pp.1047-1055
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• 2010

The objective of this study is to investigate the ballistic properties of Zr-based amorphous alloy surface composites fabricated by high-energy electron-beam irradiation. The mixture of Zr-based amorphous powders and $LiF+MgF_2$ flux powders was deposited on a pure Ti substrate, and then an electron beam irradiated this powder mixture to fabricate a one-layer surface composite. A four-layer surface composite, in which the composite layer thickness was larger than 3 mm, was also fabricated by irradiating the deposited powder mixture by an electron beam three times on the one-layer surface composite. The microstructural analysis results indicated that a small amount of fine crystalline particles were homogeneously distributed in the amorphous matrix of the surface composite layer. According to the ballistic impact test results, the surface composite layers effectively blocked a fast traveling projectile, while many cracks were formed at the composite layers, and thus the surface composite plates were not perforated. The surface composite layer containing ductile ${\beta}$ dendritic phases showed a better ballistic performance than the one without dendrites because dendritic phases hindered the propagation of shear bands or cracks.

• 암석학회지
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• 제12권3호
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• pp.119-134
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• 2003

육십령 복운모화강암은 광물학$.$지화학적으로 과알루미나 성질을 특징적으로 나타낸다. 육십령 화강암체는 1.15∼l.20 범위의 높은 알루미나 포화 지수와 2.20∼2.98wt% 범위의 높은 CIPW norm 강옥 함량을 나타낸다. 색지수는 <16%이고, FeO$^{T}$ +MgO+TiO$_2$,는 평균 1.9 wt%로서 우백질화강암에 해당한다. 육십령 복운모 우백질화강암은 SiO$_2$성분이 증가함에 따라, TiO$_2$, $Al_2$O$_3$, FeO, Fe$_2$O$_3$, MgO, CaO, $K_2$O, P$_2$O$_{5}$ , Rb, Ba, Sr 은 감소하는 경향을 나타내는 반면, Zr과 Th는 증가하는 경향을 나타내는데, 이는 장석, 흑운모, 인회석 저어콘의 분별경정작용에 기인한 것으로 해석된다. 거정질 암맥에는 SiO$_2$and P$_2$O$_{5}$ 는 높게, 그 외의 주원소는 결핍되어 나타난다. Manaslu, Hercynian 복운모 우백질화강암, Lachlan습곡대의 S-형 화강암과 비교해 보면, 육십령 복운모 우백질화강암은 낮은 Rb, 높은 Ba, Sr을 나타낸다. 거정질 암맥의 지화학적 특징은 육십령 복운모화강암을 형성했던 멜트로부터 일부 원소들의 제거 혹은 유동성에 의해 높은 Rb, Nb와, 낮은 Ba, Sr, Zr, Th, Pb 함유를 나타낸다. 육십령 복운모 우백질화강암은 총 휘토류 함량이 95.7∼123.3ppm 범위를 나타내며, 운석에 대해 표준해보면, 저 내지 중정도의 Eu 이상(Eu/Eu＊= 0.7∼0.9)을 가지면서 경희토류원소가 풍부하고 중희토류원소가 결핍된 매우 경사가 져 있는((La/Yb)$_{N}$ = 6.9∼24.8) 변화를 보여준다. 반면에 페그마틱 암맥은 총 휘토류원소의 함량이 7.0ppm으로 운석에 대해 표준화하면, 강한 부의 Eu 이상(Eu/Eu＊= 0.2)을 가진 편평한 양상을 나타낸다. 복운모 우백질화강암을 형성했던 멜트의 성분은 기원암 뿐만 아니라 기원암이 녹은 후의 잔류물질의 양에도 의존한다. 특히 CaO/$Na_2$O의 비와 Rb/Sr-Rb/Ba의 비들은 강한 과알루미나질 화강암에서는 기원암의 성분에, 즉, 기원암의 사장석과 점토 함량 비에 주로 의존한다. 육십령 복운모 우백질화강암은 사장석 성분보다 점토 성분이 풍부한 암석에서 기원한 Manaslu와 Hercynian 복운모 우백질화강암들(예를 들면 Millevaches와 Gueret)보다는 더 높은 CaO/$Na_2$O의 비와 더 낮은 Rb/Sr-Rb/Ba 비를 나타내고 있는데, 이러한 지화학적 특징은 점토 성분보다는 사장석이 풍부한 석영장석질 암석으로부터 기원했던 것으로 사료된다.

• 한국세라믹학회지
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• 제26권5호
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• pp.682-690
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• 1989

Fine mullite powder was prepared by colloidal sol-gel route. Boehmite as a starting material of Al2O3 and silica sol or fumed silica as a starting material of SiO2 were used. $\alpha$-Al2O3, TiO2 and ZrO2 were used as seeding materials. The combination of boehmite and silica was found to be the stoichiometric mullite powder. Techniques for drying used were spray drying, freeze drying, reduced pressure evaporation and drying in a oven. The gelled powder was heated at 130$0^{\circ}C$ for 100min and was attrition-milled for 1~3hrs. The mullite powder obtained was composed of submicrometer, uniform and spherical particles with a narrow size distribution. The mullite powder was characterized by BET, SEM, XRD and IR spectroscopy.