• Korean Journal of Materials Research
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• v.8 no.12
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• pp.1170-1175
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• 1998

PZT films without lower electrode were deposited on the highly doped Si(100) substrate with MgO buffer layer (Mgo/si) by RF magnetron sputtering method followed by the rapid thermal annealing at $650^{\circ}C$ . We investigated the dependences of the crystalline and electrical properties on the MgO thickness and the RTA post annealing. The PZT films on bare Si (without MgO) showed pyrochlore crystal structure while those on MgO(50 )/Si substrates showed the typical perovskite crystal structures. From SEM and AES analysis, the thickness of PZT films was about 7000 showing relatively smooth interface. The depth profiles indicated that atomic species were distributed homogeneously in the PZT/MgO/Si substrate. The dielectric constant($\varepsilon_{r}$ ) and remanent polarization(2Pr) were about 300 and $14\mu$C/$\textrm{cm}^2$;, respectively. The leakage current was about $3.2\mu$/A$\textrm{cm}^2$.

• Composites Research
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• v.28 no.4
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• pp.155-161
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• 2015

A composite structure was fabricated with embedded impact detection capabilities for applications in Structural Health Monitoring (SHM). By embedding sensor functionality in the composite, the structure can successfully perform impact localization in real time. Smart resin, composed of $Pb(Ni_{1/3}Nb_{2/3})O_3-Pb(Zr,\;Ti)O_2$ (PNN-PZT) powder and epoxy resin with 1:30 wt%, was used instead of conventional epoxy resin in order to activate the sensor function in the composite structure. The embedded impact sensor in the composite was fabricated using Hand Lay-up and Vacuum Assisted Resin Transfer Molding(VARTM) methods to inject the smart resin into the glass-fiber fabric. The electrodes were fabricated using silver paste on both the upper and bottom sides of the specimen, then poling treatment was conducted to activate the sensor function using a high voltage amplifier at 4 kV/mm for 30 min at room temperature. The composite's piezoelectric sensitivity was measured to be 35.13 mV/N by comparing the impact force signals from an impact hammer with the corresponding output voltage from the sensor. Because impact sensor functionality was successfully embedded in the composite structure, various applications of this technique in the SHM industry are anticipated. In particular, impact localization on large-scale composite structures with complex geometries is feasible using this composite embedded impact sensor.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.29 no.4
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• pp.179-186
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• 2019

In this study, we investigated the structural properties of $Ga_2O_3$ thin films and the photo-electrical properties of metal-semiconductor-metal (MSM) photodetectors deposited by Ti/Au electrodes. $Ga_2O_3$ thin films were grown at different temperatures using metal organic chemical vapor deposition (MOCVD). The crystal phase of $Ga_2O_3$ changed from ${\varepsilon}$-phase to ${\beta}$-phase depending on the growth temperature. The crystal structure of ${\varepsilon}-Ga_2O_3$ was confirmed by X-ray diffraction (XRD) analysis and the formation mechanism of crystal structure was discussed by scanning electron microscopy (SEM) images. From the results of current-voltage (I-V) and time-dependent photoresponse characteristics under the illumination of external lights, we confirmed that the MSM photodetector fabricated by ${\varepsilon}-Ga_2O_3$ showed much better photocurrent characteristics in the 266 nm UV range than in the visible range.

• Journal of the Korean Electrochemical Society
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• v.24 no.4
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• pp.100-105
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• 2021

Recently, all-solid-state batteries have attracted much attention to improve safety of rechargeable lithium batteries, but the solid-state batteries of conductive ceramics or solid polymer electrolytes show poor electrochemical properties because of several problems such as high interfacial resistance and undesired reactions. To solve the problems of the reported all-solid-state batteries, a hybrid solid electrolyte is suggested, in this study, NASICON-type nanoparticle Li_1.5Al_0.5Ti_1.5P₃O₁₂ (LATP) conductive ceramic, PVdF-HFP, and a carbonate-based liquid electrolyte were composited to prepare a quasi-solid electrolyte. The hybrid solid electrolyte has a high voltage stability of 5.6 V and shows an suppress effect of lithium dendrite growth in the stripping-plating test. The LiNi_0.83Co_0.11Mn_0.06O₂ (NCM811)-based battery with the hybrid solid electrolyte exhibits a high discharge capacity of 241.5 mAh/g at a high charge-cut-off voltage of 4.8V and stable electrochemical reaction. The NCM811-based battery also shows 139.4 mAh/g discharge capacity without short circuit or explosion at 90℃. Therefore, the LATP-based hybrid solid electrolyte can be an effective solution to improve the safety and electrochemical properties of rechargeable lithium batteries.

• Membrane Journal
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• v.33 no.4
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• pp.181-190
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• 2023

Wastewater purification is one of the most important techniques for controlling environmental pollution and fulfilling the demand for freshwater supply. Various technologies, such as different types of distillations and reverse osmosis processes, need higher energy input. Capacitive deionization (CDI) is an alternative method in which power consumption is deficient and works on the supercapacitor principle. Research is going on to improve the electrode materials to improve the efficiency of the process. A reverse electrodialysis (RED) is the most commonly used desalination technology and osmotic power generator. Among many studies conducted to enhance the efficiency of RED, MXene, as an ion exchange membrane (IEM) and 2D nanofluidic channels in IEM, is rising as a promising way to improve the physical and electrochemical properties of RED. It is used alone and other polymeric materials are mixed with MXene to enhance the performance of the membrane further. The maximum desalination performances of MXene with preconditioning, Ti₃C₂T_x, Nafion, and hetero-structures were respectively measured, proving the potential of MXene for a promising material in the desalination industry. In terms of osmotic power generating via RED, adopting MXene as asymmetric nanofluidic ion channels in IEM significantly improved the maximum osmotic output power density, most of them surpassing the commercialization benchmark, 5 Wm^-2. By connecting the number of unit cells, the output voltage reaches the point where it can directly power the electronic devices without any intermediate aid. The studies around MXene have significantly increased in recent years, yet there is more to be revealed about the application of MXene in the membrane and osmotic power-generating industry. This review discusses the electrodialysis process based on MXene composite membrane.

• Korean Journal of Materials Research
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• v.22 no.2
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• pp.86-90
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• 2012

Insoluble catalytic electrodes were fabricated by RF magnetron sputtering of Pt on Ti substrates and the performance of seawater electrolysis was compared in these electrodes to that is DSA electrodes. The Pt-sputtered insoluble catalytic electrodes were nearly 150 nm-thick with a roughness of $0.18{\mu}m$, which is 1/660 and 1/12 of these values for the DSA (dimensionally stable anodes) electrodes. The seawater electrolysis performance levels were determined through measurements of the NaOCl concentration, which was the main reaction product after electrolysis using artificial seawater. The NaOCl concentration after 2 h of electrolysis with artificial seawater, which has 3.5% NaCl normally, at current densities of 50, 80 and 140 mA/$cm^2$ were 0.76%, 1.06%, and 2.03%, respectively. A higher current density applied through the electrodes led to higher electrolysis efficiency. The efficiency reached nearly 58% in the Pt-sputtered samples after 2 h of electrolysis. The reaction efficiency of DSA showed higher values than that of the Pt-sputtered insoluble catalytic electrodes. One plausible reason for this is the higher specific surface area of the DSA electrodes; the surface cracks of the DSAs resulted in a higher specific surface area and higher reaction sites. Upon the electrolysis process, some Mg- and Ca-hydroxides, which were minor components in the artificial seawater, were deposited onto the surface of the electrodes, resulting in an increase in the electrical resistances of the electrodes. However, the extent of the increase ranged from 4% to 7% within an electrolysis time of 720 h.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.263-263
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• 2016

최근 반도체 시장에서는 저비용으로 고성능 박막 트랜지스터(TFT)를 제작하기 위한 다양한 기술들이 연구되고 있다. 먼저, 재료적인 측면에서는 비정질 상태에서도 높은 이동도와 가시광선 영역에서 투명한 특성을 가지는 산화물 반도체가 기존의 비정질 실리콘이나 저온 폴리실리콘을 대체하여 차세대 디스플레이의 구동소자용 재료로 많은 주목받고 있다. 또한, 공정적인 측면에서는 기존의 진공장비를 이용하는 PVD나 CVD가 아닌 대기압 상태에서 이루어지는 용액 공정이 저비용 및 대면적화에 유리하고 프리커서의 제조와 박막의 증착이 간단하다는 장점을 가지기 때문에 활발한 연구가 이루어지고 있다. 특히 산화물 반도체 중에서도 indium-gallium-zinc oxide (IGZO)는 비교적 뛰어난 이동도와 안정성을 나타내기 때문에 많은 연구가 진행되고 있지만, 산화물 반도체 기반의 박막 트랜지스터가 가지는 문제점 중의 하나인 문턱전압의 불안정성으로 인하여 상용화에 어려움을 겪고 있다. 따라서, 본 연구에서는 기존의 산화물 반도체의 불안정한 문턱전압의 문제점을 해결하기 위해 마이크로웨이브 열처리를 적용하였다. 또한, 기존의 IGZO에서 suppressor 역할을 하는 값비싼 갈륨(Ga) 대신, 저렴한 지르코늄(Zr)과 하프늄(Hf)을 각각 적용시켜 용액 공정 기반의 Zr-In-Zn-O (ZIZO) 및 Hf-In-Zn-O (HIZO) TFT를 제작하여 시간에 따른 문턱 전압의 변화를 비교 및 분석하였다. TFT 소자는 p-Si 위에 습식산화를 통하여 100 nm 두께의 $SiO_2$가 열적으로 성장된 기판 위에 제작되었다. 표준 RCA 세정을 진행하여 표면의 오염 및 자연 산화막을 제거한 후, Ga, Zr, Hf 각각 suppressor로 사용한 IGZO, ZIZO, HIZO 프리커서를 이용하여 박막을 형성시켰다. 그 후 소스/드레인 전극 형성을 위해 e-beam evaporator를 이용하여 Ti/Al을 5/120 nm의 두께로 증착하였다. 마지막으로, 후속 열처리로써 마이크로웨이브와 퍼니스 열처리를 진행하였다. 그 결과, 기존의 퍼니스 열처리와 비교하여 마이크로웨이브 열처리된 IGZO, ZIZO 및 HIZO 박막 트랜지스터는 모두 뛰어난 안정성을 나타냄을 확인하였다. 결론적으로, 본 연구에서 제안된 마이크로웨이브 열처리된 용액공정 기반의 ZIZO와 HIZO 박막 트랜지스터는 추후 디스플레이 산업에서 IGZO 박막 트랜지스터를 대체할 수 있는 저비용 고성능 트랜지스터로 적용될 것으로 기대된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.206.1-206.1
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• 2015

최근에 금속산화물을 증착하는 방법으로 용액공정이 주목 받고 있다. 용액 공정은 대기압에서 매우 간단한 방법으로 복잡한 공정과정을 요구하지 않기 때문에 박막을 경제적으로 간단하게 형성할 수 있다. 하지만 용액공정을 통해 형성한 박막에는 소자의 특성을 열화 시키는 solvent와 탄소계열의 불순물을 많이 포함하고 있어 고온의 열처리가 필수적이다. 박막의 품질을 향상시키기 위해서 다양한 열처리 방법들이 이용되고 있으며, 일반적인 열처리 방법으로는 furnace를 이용한 conventional thermal annealing (CTA)이 많이 이용되고 있다. 하지만, 최근에는 microwave를 이용한 공정이 주목 받고 있다. Microwave energy는 CTA보다 효과적으로 비교적 낮은 온도에서 높은 열처리 효과를 나타낸다. 본 실험은 n-type Silicon 기판에 solution-ZrO2 산화막을 형성 후, oven baking을 한 뒤, CTA와 microwave를 이용하여 solvent와 불순물을 제거 하였다. 전기적 특성을 확인하기 위해 solution ZrO2 산화막 위에 E-beam evaporator를 이용해 Ti 금속 전극을 증착하여 Metal-Oxide-Semiconductor (MOS) capacitor를 제작하였다. 다음으로, PRECISION SEMICONDUCTOR PARAMETER ANALYZER (4156B)를 이용하여, capacitance-voltage (C-V) 특성 및 current-voltage (I-V) 특성을 비교하였다. 다음으로, CTA를 통하여 제작한 소자와 전기적 특성을 비교하였다. 그 결과, Microwave irradiation으로 열처리한 MOS capacitor 소자에서 capacitance 값과 flat band voltage, hysteresis 등이 개선되는 효과를 확인하였다. Microwave irradiation 열처리는 100oC 미만의 온도에서 공정이 이루어짐에도 불구하고 시료 내에서의 microwave 에너지의 흡수가 CTA 공정에서의 열에너지 흡수보다 훨씬 효율적으로 이루어지며, 결과적으로 ZrO2 용액의 불순물과 solvent를 낮은 온도에서 제거하여 고품질 박막 형성에 매우 효과적이라는 것을 나타낸다. 따라서, microwave irradiation 열처리 방법은 비정질 산화막이 포함되는 박막 transistor 소자 제작에 대하여 결정적인 열처리 방법이 될 것으로 기대한다.

• Journal of Hydrogen and New Energy
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• v.8 no.4
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• pp.181-185
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• 1997

The electrochemical properties of the $AB_2$-type (Zr-Ti-V-Ni-Cr-Co-Mn) metal hydride electrodes prepared by ball milling with $AB_5-type\{(LM)Ni_{3.6}Al_{0.4}Co_{0.7}Mn_{0.3}\}$(LM : Lanthanum-rich mischmetal) alloy powder as a surface activator were investigated. By ball milling with $AB_5$ type alloy powder, the activation of $AB_2$ type metal hydride electrode was accelerated resulting in an increase of discharge capacity from 35% to 85% of the maximum capacity at the first cycle. As the amount of surface activator increased the activation rate increased, whereas the discharge capacity increased with 10wt% and decreased with 20wt% addition of the surface activator. When the amount of the surface activator was kept constant as 10wt%, the discharge capacity and the activation rate increased with ball milling time up to 20 hours. However beyond 20 hours of ball milling time, they decreased drastically due to the nano-crystallization or amorphorzation of the alloy powder.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.59 no.12
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• pp.2218-2224
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• 2010

Dye-sensitized solar cell (DSC) is a promising alternative solar cell to the conventional silicon solar cell due to several advantages. Development of large scale module is necessary to commercialize the DSC in the near future. A scribing technology of the transparent conductive oxide (TCO) is one of the important technologies on the fabrication of DSC module. A quality of the scribed line on the TCO has a decisive effect on the efficiency of DSC module. Among several scribing technologies, the fiber laser is a suitable for scribing the TCO more precisely and accurately because of their own characteristics. In this study, we try to improve the quality of the TCO scribed line by using the fiber laser. Consequently, the operating parameter of fiber laser is optimized to get the TCO scribed line with good quality. And the fiber laser scribing technology of the TCO is applied to the fabrication of the DSC with optimal operating parameter, operating current 3900mA. As a result, the current density and fill factor are improved and the total efficiency is increased because the internal resistances of DSC such as TCO sheet resistance and the resistance concerned to the electron movement in the $TiO_2$ are reduced. This is analyzed by the electrochemistry impedance spectroscopy (EIS) and the equivalent circuit model of the DSC.