• 제목/요약/키워드: Threshold fluence

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515 nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최적 에너지밀도에 대한 이론적 분석 (Theoretical Analysis on the Optimum Fluence for Copper Ablation with a 515 nm Picosecond Laser)

  • 신동식;조용권;손현기
    • 한국정밀공학회지
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    • 제30권10호
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    • pp.1009-1015
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    • 2013
  • Ultra-short laser pulses are effective, when high requirements concerning accuracy, surface roughness and heat affected zone are demanded for surface structuring. In particular, picosecond laser systems that are suited to be operated in industrial environments are of great interest for many practical applications. This paper focused on inducing optimum process parameters for higher volume ablation rate by analyzing a relationship between crater diameter and optical spot size. In detail, the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration 8 ps and wavelength of 515 nm was discussed. The experimental results showed that wavelength of 515 nm resulted in less threshold fluence ($0.075J/cm^2$) on copper than IR wavelength ($0.3J/cm^2$). As a result, it was possible that optimum fluence for higher volume ablation rate was achieved with $0.28J/cm^2$.

핵임계사고시(核臨界事故時)에 있어서 속중성자선량(速中性子線量)의 해석(解析) (Fast Neutron Dosimetry in Criticality Accidents)

  • 노성기;육종철
    • Journal of Radiation Protection and Research
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    • 제1권1호
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    • pp.1-9
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    • 1976
  • 핵임계사고시(核臨界事故時)에 방출(放出)되는 속중성자(速中性子)가 산란중성자(散亂中性子)로 중첩(重疊)되어 있는 상태(狀態)에서 방사화(放射化) 및 발단방사화검출기(發端放射化檢出器)를 이용(利用)하여 속중성자(速中性子)를 측정(測定) 및 해석(解析)할 수 있는 한 방법(方法)을 제안(提案)하였으며 이 측정(測定)에 있어서 주요인자(主要因子), 즉(卽) 몇개의 발단방사화검출기(發端放射化檢出器)에 대(對)한 평균핵반응단면적(平均核反應斷面積)과 중성자당선량환산계수(中性子當線量換算係數)를 전자계산기(電子計算機)로 계산(計算)하였다. 그 결과(結果) 핵분열중성자(核分裂中性子)의 스펙트럼 측정(測定)에는 발단(發端)에너지가 높은 검출기(檢出器)가 유리(有利)한 것에 반(反)해 발단(發端)에너지가 낮은 것은 산란매질(散亂媒質)이 없는 핵임계장치(核臨界裝置)의 사고시(事故時)에 있어서 속중성자(速中性子)의 시적분선속밀도(時積分線束密度) 측정계(測定計) 유용(有用)한것 같았다. 그리고 유황(硫黃)의 (n, p) 핵분열(核分裂)에 대(對)한 평균단면적(平均斷面積)은 핵분열(核分裂) 중성자(中性子)의 해석적(解析的) 표현식(表現式)에 무관(無關)한 것 처럼 보였다 .그밖에 중성자당(中性子當) 선량환산계수(線量換算係數)의 변화(變化)는 핵분열(核分裂) 중성자(中性子) 스펙트럼의 해석적(解析的) 표현식(表現式)과 핵분열상태(核分裂形態)에 따라 민감(敏感)하게 변화(變化)되지 않은 것 같았다.

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극초단 레이저를 이용한 PC-TEMs 초정밀 가공에 대한 연구 (Polycarbonate Track-Etched Membrane Micromachining by Ultrafast Pulse Laser)

  • 최혜운
    • 한국정밀공학회지
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    • 제28권1호
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    • pp.24-30
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    • 2011
  • PC-TEMs (Polycarbonate Track-Etched membranes) were micro-drilled for biomedical applications by ultrafast pulsed laser. The ablation and damage characteristics were studied on PE-TEMs by assuming porous thin membranes. The experiments were conducted in the range of 2.02 $J/cm^2$ and 8.07$J/cm^2$. The ablation threshold and damage threshold were found to be 2.56$J/cm^2$ and 1.14$J/cm^2$, respectively. While a conical shaped drilled holes was made in lower fluence region, straight shaped holes were drilled in higher fluence region. Nanoholes made the membrane as porous material and ablation characteristics for both bulk and thin film membranes were compared.

플라즈마 디스플레이 패널을 위한 레이저 직접 패터닝 (Laser-Direct Patterning for Plasma Display Panel)

  • 안민영;이경철;이홍규;이천
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1999년도 춘계학술대회 논문집
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    • pp.99-102
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    • 1999
  • A mixture which was made from organic gel, glass powder and ceramic powder was masklessly etched for fabrication of barrier rib of PDP(Plasma Display Panel) by focused Ar$^{+}$ laser( λ =514 nm) and Nd:YAG(λ =532, 266 nm) laser irradiation at the atmosphere. The depth of the etched grooves increases with increasing a laser fluence and decreasing a scan speed. Using second harmonic of Nd:YAG laser, the threshold laser fluence was 6.5 mJ/$\textrm{cm}^2$ for the sample of PDP barrier rib softened at 12$0^{\circ}C$. The thickness of 130 ${\mu}{\textrm}{m}$ of the sample on the glass was clearly removed without any damage on the glass substrate by fluence of 19.5 J/$\textrm{cm}^2$....

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금속의 펨토초 어블레이션의 수치해석 (Numerical analysis of fs laser ablation of metals)

  • 오부국;김동식;김재구;이제훈
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2006년도 춘계학술대회 논문집
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    • pp.657-658
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    • 2006
  • Although there are many numerical models to simulate fs laser ablation of metals, no model can analyze the ablation phenomena over a wide range of fluence. In this work, a numerical code for simulating the fs laser ablation phenomena of metals has been developed. The two temperature model is employed to predict the ablation rate and the crater shape of metals using phase explosion mechanism in the relatively high fluence regime. Also, the ultrashort thermoelastic model is used for the low fluence regime to account for spallation of the sample by high strain rate. It has been demonstrated that the thermoelastic stress generated within the sample can exceed the yield stress of the material even near the threshold fluence. Numerical computation results are compared with the experiment for Cu and Ni and show good agreement. Discussions are made on the hydrodynamic model considering phase change and hydrodynamic flow.

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515nm 피코초 레이저를 이용한 구리 어블레이션 공정의 최대 가공율에 대한 이론적 분석 (Theoretical analysis on the maximum volume ablation rate for copper ablation with a 515nm picosecond laser)

  • 신동식;조용권;손현기;서정
    • 한국레이저가공학회지
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    • 제16권2호
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    • pp.1-6
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    • 2013
  • Picosecond lasers are a very effective tool for micromachining metals, especially when high accuracy, high surface roughness and no heat affected zone are required. However, low productivity has been a limit to broadening the spectrum of their industrial applications. Recently it was reported that in the micromachining of copper with a 1064nm picosecond laser, there exist the optimal pulse energy and repetition rate to achieve the maximum volume ablation rate. In this paper, we used a 515nm picosecond laser, which is more efficient for micromachining copper in terms of laser energy absorption, to obtain its optimal pulse energy and repetition rate. Theoretical analysis based on the experimental data on copper ablation showed that using a 515nm picosecond laser instead of a 1064nm picosecond laser is more favorable in that the calculated threshold fluence is 75% lower and optical penetration depth is 50% deeper.

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미세 유체 상 PDMS 고분자 필름의 펨토초 레이저 어블레이션 및 천공 임계치 연구 (fs-laser Ablation and Optoperforation Threshold for PDMS Thin Film on $\mu$-channel)

  • 우숙이;;윤태오;정세채;박일홍
    • 한국정밀공학회지
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    • 제27권2호
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    • pp.29-33
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    • 2010
  • We have investigated fs-laser ablation as well as optoperforation threshold of PDMS (Polydimethylsiloxane) thin lid cover on ${\mu}$-channel with changing the flow medium from water to hemoglobin. The ablation threshold is found to be independent of both PDMS thin film thickness and flow medium, but the optoperforation threshold is dependent on the films thickness. The observation that the ablation process is well described with simple two-temperature model supposed that the cover lid PDMS of $\mu$-channel be processed with minimized thermal effects by fs-laser with low laser fluence.

Measurement and Prediction of Damage Threshold of Gold Films During Femtosecond Laser Ablation

  • Balasubramani, T.;Kim, S.H.;Jeong, S.H.
    • 한국레이저가공학회지
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    • 제11권4호
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    • pp.13-20
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    • 2008
  • The damage threshold measurement of gold films is carried out with ultrashort-pulse laser. An enhanced two temperature model is developed to encounter the limitation of linear modeling during ultrashort pulse laser ablation. In which the electron heat capacity is calculated using a quantum mechanical approach based on a Fermi-Dirac distribution, temperature-dependent electron thermal conductivity valid beyond the Fermi temperature is adopted, and reflectivity and absorption coefficient are estimated by applying a temperature-dependent electron relaxation time. The predicted damage threshold using the proposed enhanced modelclosely agreed with experimental results, demonstrating the importance of considering transient thermal and optical properties in the modeling of ultrashort pulse laser ablation.

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집속 레이저 빔에 의한 PDP 격벽의 마스크레스 식각 (Maskless etching of the PDP barrier rib using focused laser beam)

  • 안민영;이경철;이홍규;최훈영;이천
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1999년도 하계학술대회 논문집 D
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    • pp.1849-1851
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    • 1999
  • The PDP(Plasma Display Panel) barrier rib was fabricated by focused $Ar^+$ laser ($\lambda$=514nm) and Nd:YAG($\lambda$=532, 266 nm) laser irradiation. The depth of the etched groove increases with increasing a laser fluence. and decreasing a scan speed. Using the second harmonic of the Nd:YAG laser, the threshold laser fluence was $6.5mJ/cm^2$ for the sample of PDP barrier rib dried at $120^{\circ}C$. The thickness of $150{\mu}m$ of the sample on the glass was etched without any damage on the glass substrate by fluence of $19.5J/cm^2$. The barrier rib sample on hot plate was etched by Nd:YAG laser(532 nm) as increasing a temperature of the sample. In this case, the etch rate was $95{\mu}m/s$, $190{\mu}m/s$ at room temperature, $175^{\circ}C$ respectively.

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Nd:YAG 레이저빔에 의한 PDP 방전셀의 구조 형성 (Formation of PDP cell structure using Nd:YAG laser beam)

  • 안민영;이경철;이홍규;이천
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2000년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.129-132
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    • 2000
  • The PDP(Plasma Display Panel) barrier rib material on the glass substrate was patterned for fabrication of the PDP cell using Nd:YAG laser(1064 nm) which can generate the second(532 nm) and forth(266 nm) harmonic wave by HGM(harmonic generation modules). At a scan speed of 20 ${\mu}m/s$ with the second harmonic wave(532 nm) of Nd:YAG laser, the etching threshold laser fluence of the PDP material was 6.5 $mJ/cm^2$ and a sample(thickness = 180 ${\mu}m$) on the glass substrate was removed clearly at a laser fluence of 19.5 $mJ/cm^2$. In order to increase the throughput of the fabrication we divided a single-beam into multi-beams by using a metal mask between the sample and the focusing lens. As a result, 10 lines of PDP cell were formed by one laser beam scanning at a scan speed of 200 ${\mu}m/s$ and a laser fluence of 2.86 $J/cm^2$.

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