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http://dx.doi.org/10.7736/KSPE.2013.30.10.1009

Theoretical Analysis on the Optimum Fluence for Copper Ablation with a 515 nm Picosecond Laser  

Shin, Dongsig (Department of Laser & Electron-beam Application, KIMM)
Cho, Yongkwon (Department of Laser & Electron-beam Application, KIMM)
Sohn, Hyonkee (Department of Laser & Electron-beam Application, KIMM)
Publication Information
Journal of the Korean Society for Precision Engineering / v.30, no.10, 2013 , pp. 1009-1015 More about this Journal
Abstract
Ultra-short laser pulses are effective, when high requirements concerning accuracy, surface roughness and heat affected zone are demanded for surface structuring. In particular, picosecond laser systems that are suited to be operated in industrial environments are of great interest for many practical applications. This paper focused on inducing optimum process parameters for higher volume ablation rate by analyzing a relationship between crater diameter and optical spot size. In detail, the dependency of the volume ablation rate, penetration depth and threshold fluence on the pulse duration 8 ps and wavelength of 515 nm was discussed. The experimental results showed that wavelength of 515 nm resulted in less threshold fluence ($0.075J/cm^2$) on copper than IR wavelength ($0.3J/cm^2$). As a result, it was possible that optimum fluence for higher volume ablation rate was achieved with $0.28J/cm^2$.
Keywords
Threshold fluence; Optical penetration depth; Pulse repetition rate; Ablation; Copper;
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