• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.221-221
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• 2014

The present work proposes an improved numerical simulator for design and modification of large area capacitively coupled plasma (CCP) processing chamber. CCP, as notoriously well-known, demands the tremendously huge computational cost for carrying out transient analyses in realistic multi-dimensional models, because electron dissociations take place in a much smaller time scale (${\Delta}t{\approx}10-8{\sim}10-10$) than time scale of those happened between neutrals (${\Delta}t{\approx}10-1{\sim}10-3$), due to the rf drive frequencies of external electric field. And also, for spatial discretization of electron flux (Je), exponential scheme such as Scharfetter-Gummel method needs to be used in order to alleviate the numerical stiffness and resolve exponential change of spatial distribution of electron temperature (Te) and electron number density (Ne) in the vicinity of electrodes. Due to such computational intractability, it is prohibited to simulate CCP deposition in a three-dimension within acceptable calculation runtimes (<24 h). Under the situation where process conditions require thickness non-uniformity below 5%, however, detailed flow features of reactive gases induced from three-dimensional geometric effects such as gas distribution through the perforated plates (showerhead) should be considered. Without considering plasma chemistry, we therefore simulated flow, temperature and species fields in three-dimensional geometry first, and then, based on that data, boundary conditions of two-dimensional plasma discharge model are set. In the particular case of SiH4-NH3-N2-He CCP discharge to produce deposition of SiNxHy thin film, a cylindrical showerhead electrode reactor was studied by numerical modeling of mass, momentum and energy transports for charged particles in an axi-symmetric geometry. By solving transport equations of electron and radicals simultaneously, we observed that the way how source gases are consumed in the non-isothermal flow field and such consequences on active species production were outlined as playing the leading parts in the processes. As an example of application of the model for the prediction of the deposited thickness uniformity in a 300 mm wafer plasma processing chamber, the results were compared with the experimentally measured deposition profiles along the radius of the wafer varying inter-electrode gap. The simulation results were in good agreement with experimental data.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.8
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• pp.781-787
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• 2011

We design a four-stage propane-refrigerant centrifugal compressor for an LNG plant. Using a commercial code, we aerodynamically designed the compressor at each design point of the corresponding stages. We estimated the one-dimensional aerodynamic design output and the three-dimensional shape of the impeller flow passage via three-dimensional flow analysis. In particular, we discuss in detail the flow characteristics of the impeller and the vaneless diffuser passages of the fourth-stage compressor in terms of the velocity fields, the pressure, and the entropy distributions of the flow passages. We include the flow effects of the tip clearance flow, because at this stage the rotating speed and total inlet pressure are higher than those at the other compressor stages are. We carried out performance tests of the designed compressor stages using propane as a refrigerant in the LNG cycle. The practical evaluation could lead to design enhancements in the future.

• Journal of the Korean Electrochemical Society
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• v.11 no.1
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• pp.51-58
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• 2008

Many researches for effects of different flow configurations on performance of Proton Exchange Membrane Fuel Cell have extensively been done but the effects of flow direction at the same flow channel shape should be considered for optimal operation of fuel cell as well. In this paper a numerical computational methode for simulating entire reactive flow fields including anode and cathode flow has been developed and the effects of different flow direction at parallel flow was studied. Pressure drop along the flow channel and density distribution of reactant and products and water transport, ion conductivity across the membrane and I-V performance are compared in terms of flow directions(co-flow or counter-flow) using above numerical simulation method. The results show that the performance under counter-flow condition is superior to that under co-flow condition due to higher reactant and water transport resulting to higher ion conductivity of membrane.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.35 no.6
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• pp.474-482
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• 2007

An analysis is made for flow and rocket motion during a supersonic separation stage of an air-launching rocket(ALR) from the mother plane. Three-dimensional compressible Navier-Stokes equations are numerically solved to analyze the steady/unsteady flow fields around the rocket which is being separated from the mother plane configuration(F-4E Phantom). Simulation results clearly demonstrate the effect of shock-expansion wave interaction around both of the rocket and the mother plane. To predict the behavior of the ALR by the change of the center-of-gravity, three cases of numerical analysis are performed. As a result, a design-guideline of supersonic air-launching rockets for safe separation is proposed.

• Journal of Power System Engineering
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• v.5 no.1
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• pp.21-26
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• 2001

This paper represents the turbulent intensity, the turbulent kinetic energy and Reynolds shear stress in the X-Y plane of cone type swirl gas burner measured by using X-probe from the hot-wire anemometer system. The experiment is carried out at flowrate 350 and $450{\ell}/min$ respectively in the test section of subsonic wind tunnel. The turbulent intensity and the turbulent kinetic energy show that the maximum value is formed in the narrow slits distributed radially on the edge of a cone type swirl burner, hence, the combustion reaction is anticipated to occur actively near this region. And the turbulent intensities ${\upsilon}\;and\;{\omega}$ are disappeared faster than the turbulent intensity u due to the inclined flow velocity ejecting from the swirl vanes of a cone type baffle plate of burner. Moreover, the Reynolds shear stress $u{\upsilon}$ is distributed about three times as large as the Reynolds shear stress $u{\omega}$ in the outer region of the cone type gas burner.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.1 s.232
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• pp.123-130
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• 2005

A digital in-line holographic particle image velocimetry (HPIV) which can be applied to measure three-dimensional velocity fields of turbulent flows was developed. There are three different implementation methods of HPIV: traditional film-based HPIV, intermediate HPIV and digital HPIV. The traditional film-based HPIV and intermediate HPIV method is rather troublesome to do experiments and takes long calculation time, compared with the digital HPIV, Configuration of the digital in-line HPIV is simple and the data processing routine is similar to conventional 2D PIV methods. The digital HPIV velocity field measurement consists of four steps: recording, numerical reconstruction, particle extraction and velocity extraction. In the velocity extraction process, we improved PTV algorithm to extract the displacement of particle each placed in 3D space. The developed digital in-line HPIV system was applied to a vertical jet flow. The 3D velocity vectors measured by the digital HPIV method in the near field are in a good agreement with 2D PIV results.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.32 no.2
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• pp.122-134
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• 2020

On the many coasts of South Korea, including the eastern side, it has been recently increasing the coastal disaster such as the severe coastal erosion and road damage swept away by the wave. As one of the alternatives to prevent the coastal disaster, it has been widely studied the coastal disaster reduction method by the Low-Crested Structure (LCS) in the many countries including several European countries. In this study, the olaFLow model is used to simulate the permeable LCS and wave field of the LCS through the three-dimensional irregular waves numerical analysis on the basis of the previous research. From the numerical analysis, it is evaluated the H_rms, nearshore current and time-averaged turbulent kinetic energy. In addition, the pattern of nearshore current and spatial distribution of time-averaged turbulent kinetic energy are compared with the case of submerged breakwater under the irregular wave fields. As one of significant results, it is confirmed that the pattern of nearshore current is different with the case of submerged breakwater.

• Fire Science and Engineering
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• v.19 no.2 s.58
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• pp.37-44
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• 2005

We have conducted a numerical simulation under three-dimensional unsteady conditions in order to analyze the characteristics of flow and the distribution of $CO_2$ agent concentration according to the number of $CO_2$ agent nozzle. The engine room of a ship was selected as a protection space, and flow fields and $CO_2$ concentration fields were measured. In case of increasing the number of $CO_2$ nozzle from 2 nozzles to 4 nozzles, the distribution of CO2 concentration showed low, and in case of increasing the number of $CO_2$ nozzle to above 6 nozzles, the recirculating flow affected to all region was generated. In case of increasing the number of $CO_2$ agent nozzle to above 4 nozzles, the iso-concentration line below 0.36 expanded or contracted slightly. Therefor, the proper number and the arrangement of $CO_2$ agent nozzle are considered when $CO_2$ fire fighting system is designed.

• International Journal of Fluid Machinery and Systems
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• v.2 no.4
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• pp.295-302
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• 2009

The flow in the draft tube cone of Francis turbines operated at partial discharge is a complex hydrodynamic phenomenon where an incoming steady axisymmetric swirling flow evolves into a three-dimensional unsteady flow field with precessing helical vortex (also called vortex rope) and associated pressure fluctuations. The paper addresses the following fundamental question: is it possible to compute the circumferentially averaged flow field induced by the precessing vortex rope by using an axisymmetric turbulent swirling flow model? In other words, instead of averaging the measured or computed 3D velocity and pressure fields we would like to solve directly the circumferentially averaged governing equations. As a result, one could use a 2D axi-symmetric model instead of the full 3D flow simulation, with huge savings in both computing time and resources. In order to answer this question we first compute the axisymmetric turbulent swirling flow using available solvers by introducing a stagnant region model (SRM), essentially enforcing a unidirectional circumferentially averaged meridian flow as suggested by the experimental data. Numerical results obtained with both models are compared against measured axial and circumferential velocity profiles, as well as for the vortex rope location. Although the circumferentially averaged flow field cannot capture the unsteadiness of the 3D flow, it can be reliably used for further stability analysis, as well as for assessing and optimizing various techniques to stabilize the swirling flow. In particular, the methodology presented and validated in this paper is particularly useful in optimizing the blade design in order to reduce the stagnant region extent, thus mitigating the vortex rope and expending the operating range for Francis turbines.

• Geomechanics and Engineering
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• v.10 no.4
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• pp.423-436
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• 2016

Currently, there is a great interest in the coupling between multiphase fluid flow and geomechanical effects in hydrocarbon reservoirs and surrounding rocks. The ideal solution for this coupled problem is to introduce the geomechanical effects through the stress analysis solution and implement an algorithm, which assures that the equations governing the flow and stress analyses are obeyed in each time step. This paper deals with the implementation of a program (FORTRAN90 interface code), which was developed to couple conventional reservoir (ECLIPSE) and geomechanical (ABAQUS) simulators, using a partial coupling algorithm. The explicit coupled hydro-mechanical behavior of Iranian field during depletion and $CO_2$ injection is studied using the soils consolidation procedure available in ABAQUS. Time dependent reservoir pressure fields obtained from three dimensional compositional reservoir models were transferred into finite element reservoir geomechanical models in ABAQUS as multi-phase flow in deforming reservoirs cannot be performed within ABAQUS. The FEM analysis of the reservoir showed no sign of plastic strain under production and $CO_2$ injection scenarios in any part of the reservoir and the stress paths do not show a critical behavior.