• 한국주조공학회지
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• 제31권5호
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• pp.288-292
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• 2011

In order to complement the drawbacks of quartz crucible such as fragile-like break and melt-leakage through open slit nozzle, a new PFC system has been developed using a common graphite crucible and plugging system. The u melt is fed on to the rotating a roll through slit nozzle by self-gravity. The new equipment was designed and manufactured successfully. An effort for optimizing all related parameter has been made. Then using the optimized parameters about 10 meters u foil having very thin thickness, which meets the target thickness of 130 ${\mu}m$ and enough width more than 60 mm could be made. The thickness homogeneity set improved, due to the lower eddy flowing of the melt flow the self-gravity feeding system.

• 한국광학회:학술대회논문집
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• 한국광학회 2008년도 하계학술발표회 논문집
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• pp.243-244
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• 2008

• Journal of the Optical Society of Korea
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• 제13권1호
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• pp.37-41
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• 2009

We observe the proton signals produced by laser interaction with thin-foil targets of polyimide and of copper. We change the thickness of the polyimide target to $7.5{\mu}m$, $12.5{\mu}m$, and $50{\mu}m$. High-energy protons with the maximum energy of ${\sim}2.3\;MeV$ from $7.5{\mu}m$ thick polyimide are observed. This proton beam with the maximum energy of multi-MeV has various applications such as a proton shadowgraphy.

• Journal of the Optical Society of Korea
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• 제13권1호
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• pp.48-52
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• 2009

Micro-hole targets are studied to generate energetic protons from laser-thin foil targets by using 2-dimensional particle-in-cell simulations. By using a small hole, the maximum energy of the accelerated proton is increased to 4 times higher than that from a simple planar target. The main proton acceleration mechanism of the hole-targets is the electrostatic field created between the fast electrons accelerated by the laser pulse ponderomotive force combined with the vacuum heating and the target rear surface. But in this case, the proton angular distribution shows double-peak shape, which means poor collimation and low current density. By using a small cone-shaped hole, the maximum proton energy is increased 3 times higher than that from a simple planar target. Furthermore, the angular distribution of the accelerated protons shows good collimation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.271-272
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• 2012

Bulk Metallic Glasses (BMGs or amorphous alloy) exhibit high strength and good corrosion resistance. Applications of thin films and micro parts of BMGs have been used a lot since its inception in the research of BMGs. However, Application and fabrication of BMGs are limited to make structural materials. Thin films of BMGs which is sputtered on the surface of structural materials by sputtering process is used to improve limits about application of BMGs. In order to investigate the difference of properties between designed alloys and thin films, we identified that thin films deposited on the surface that have the characteristic of the amorphous films and the composition of designed alloys. Zr-Cu (Cu=30, 35, 38, 40, 50 at.%) and Zr-Cu-Al (Al=10 at.% fixed, Cu=26, 30, 34, 38 at.%) alloys were fabricated with Zr (99.7% purity), Cu (99.997% purity), and Al (99.99% purity) as melting 5 times by arc melting method before rods 2mm in diameter was manufactured. In order to analyze GFA (Glass Forming Ability), rods were observed by Optical Microscopy and SEM and $T_g$, $T_x$, ($T_x$ is crystallization temperature and $T_g$ is the glass transition temperature) and Tm were measured by DTA and DSC. Powder was manufactured by Gas Atomizer and target was sintered using powder in large supercooled liquid region ($=T_x-T_g$) by SPS(Spark Plasma Sintering). Amorphous foil was prepared by RSP process with 5 gram alloy button. The composition of the foil and sputtered thin film was analyzed by EDS and EPMA. In the result of DSC curve, binary alloys ($Zr_{62}Cu_{38}$, $Zr_{60}Cu_{40}$, $Zr_{50}Cu_{50}$) and ternary alloys ($Zr_{64}Al_{10}Cu_{26}$, $Zr_{56}Al_{10}Cu_{34}$, $Zr_{52}Al_{10}Cu_{38}$) have $T_g$ except for $Zr_{70}Cu_{30}$ and $Zr_{60}Al_{10}Cu_{30}$. The compositions with $T_g$ made into powders. Figure shows XRD data of thin film showed similar hollow peak.

• 한국진공학회:학술대회논문집
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• 한국진공학회 1994년도 제7회 학술발표회 및 한·일 CVD 심포지움 논문개요집
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• pp.92-92
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• 1994

Relative intensities of photons emitted from tilted carbon foils have been measured in the wavelength region 300800 nm by 0,6-2,4 MeV $H^{+}\;and\;He^{+}$ ion impacts, Ions were directed onto target surfaces at tilt angles with respect to the sllrface normal, Experimental results support the model that the observed continuum radiation is emitted from the exited carbon foil itself. At each incident projectile energy, the photon intensities of continuum spectra for tilted carbon foi Is were compatred to the stoppi ng powers of carbon for $H^{+}\;and\;He^{+}$ ions, It was found that the photon emission intensity for $H^{+}$ ion is linearly proportional to the stopping power, whereas that for $He^{+}$ ions is proportional to a higher power of the stopping power, and that this tendency increases wi th decreasing velocity of the projectiIes[1, 2].[1, 2].

• 한국진공학회지
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• 제14권1호
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• pp.17-23
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• 2005

본 논문은 글로우방전 질량분석법(Glow Discharge Mass Spectrometry: GDMS)을 이용하여 구리 박막내의 미량 불순물의 농도분석과 음의 기판 바이어스에 대한 구리 박막내의 불순물의 농도변화에 대해서 고찰하였다. 구리 박막은 실리콘 기판 위에 비질량 분리형 이온빔 증착장비를 이용하여 기판 바이어스를 걸지 않은 경우와 -50 V의 기판 바이어스를 걸은 상태에서 증착하였다. 전기를 통하지 않는 분석 샘플의 경우, 직류(DC) GDMS에 의한 분석시, 샘플 표면에서의 charge-up 효과에 의해 분석에 어려움이 있었지만, 본 실험에서는 간편하게 분석이 가능하도록 샘플을 알루미늄 포일(foil)로 감싸서 구리 박막으로부터 실리콘 기판 뒤의 샘플 홀더까지 전기적 접촉이 이루어지도록 하였다. 구리 타겟과 증착된 구리 박막들에 대한 GDMS 분석결과에 의해서, 전체적으로 박막내의 불순물의 양이 음의 기판 바이어스에 의해 줄어듦으로써 구리 박막의 전체 순도를 높일 수 있다는 것을 알게 되었다. 음의 기판 바이어스에 의한 불순물들의 농도변화는 각각의 불순물의 이온화 포텐셜의 차이에 의한 것으로, 박막 증착시 플라즈마내의 Penning ionization effect와 본 논문에서 제시한 이온화 과정에 의해 각 불순물의 농도변화가 설명되어질 수 있었다. 또한, 기판 위에서의 구리 이온들의 충격에 의한 cleaning effect도 박막내의 불순물의 농도변화에 기여했다고 판단된다.