• 제목/요약/키워드: Thin layer

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배향막으로 사용된 NDLC 박막의 증착방법에 따른 능력 (Ability of Nitride-doped Diamond Like Carbon Thin Film as an Alignment Layer according to Deposition Methods)

  • 김영환;김병용;오병윤;강동훈;박홍규;이강민;서대식
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 추계학술대회 논문집
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    • pp.431-431
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    • 2007
  • In this paper, the LC alignment characteristics of the NDLC thin film deposited by PECVD and sputtering were reported respectively. The NDLC thin film deposited using sputter showed uniform LC alignment at the 1200 eV of the ion beam intensity and pretilt angle was about $2^{\circ}$ while the NDLC thin film deposited using the PECVD showed uniform LC alignment and high pretilt angle at the 1800 eV of the ion beam intensity. Concerning the ion beam intensity, uniform LC alignment of the NDLC thin film deposited by the sputtering was achieved at the lower intensity. And the pretilt angle of the NDLC thin film deposited by sputter was higher than those of NDLC thin film that was deposited using the PECVD. The uppermost of the thermal stability of NDLC thin film was $200^{\circ}C$, respectively. However, NDLC thin film deposited by the PECVD showed stability at high temperature without defects, compared to NDLC thin film deposited by the sputter.

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Molecular Aligning Properties of a Dielectric Layer of Polymer-Ceramic Nanocomposite for Organic Thin-Film Transistors

  • Kim, Chi-Hwan;Kim, Sung-Jin;Yu, Chang-Jae;Lee, Sin-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1200-1203
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    • 2004
  • We investigated the molecular aligning capability of a polymer layer containing ceramic nanoparticles which can be used as a gate insulator of organic thin-film transistors (OTFTs). Because of the enhanced dielectric properties arising from the nanoparticles and molecular aligning properties of the polymer, the composite layer provides excellent mobility characteristics of the OTFTs.

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Atomic Layer Epitaxy 법에 의한 TiN 박막의 성장과 그 특성 (Growth and Characteristics of TiN Thin Films by Atomic Layer Epitaxy)

  • 이종화;김동진
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 1998년도 추계종합학술대회 논문집
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    • pp.581-584
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    • 1998
  • TiN thin films were grown on (100) Si substrate by atomic layer epitaxy at 130 - $240^{\circ}C$ using TEMAT and NH3 as precursors. Reactants were injected into the reactor in sequence of TEMAT precursor vapor pulse, N2 purging gas pulse, NH3 gas pulse and N2 purging gas pulse so that gas-phase reactions could be removed. The films were characterized by means of x-ray diffraction(XRD), 4-point probe, atomic force microscopy(AFM) and auger electron spectroscopy(AES).

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Developments of Transparent ac-PDPs

  • Choi, Hak-Nyun;Lee, Seog-Young;Kim, Yong-Seog
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.1621-1624
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    • 2008
  • Transparent ac-PDP test panel was prepared via a combination of materials including ITO sustaining electrodes, thin film dielectric layer and nano-sized phosphor powders. The thin film dielectric layer was prepared by E-beam evaporation process and phosphor layer was deposited on metal mesh pattern by electrophoretic deposition process. The optical transmittance and luminance of the panel indicated that full color transparent ac-PDP is feasible with the approach.

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Dielectric Thin Film Using Atmospheric Pressure Plasma Polymerization

  • Choi, Sung-Lan;Kim, Hong-Doo
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1444-1446
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    • 2009
  • The atmospheric pressure plasma polymerization of acrylate monomers was carried out to have dielectrics with easy preparation and high performance. The effects of discharge power, monomer concentration and deposition time on film properties were investigated using various characterization tools. With proper conditions, smooth dielectric layer of 100nm thickness was obtained. Dielectric property as organic dielectric layer has been studied for future applications in organic thin film transistors(OTFT).

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반응성 스퍼터링에 의해 제조된 Fe-Hf-N 박막의 연자기 특성에 미치는 열처리 영향 (The Effect of Annealing on Soft Magnetic Properties of Ee-Hf-N Thin Films Prepared by Reactive Sputtering)

  • 김경일;김병호;김병국;제해준
    • 한국자기학회지
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    • 제10권4호
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    • pp.165-170
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    • 2000
  • Fe-Hf-N 연자성 박막의 물리적, 자기적 특성에 미치는 열처리 영향에 대하여 고찰하였다. Fe-Hf-N 연자성 박막을 질소분위기에서 열처리 할 경우 표면에 Fe$_2$O$_3$-Fe$_3$O$_4$으로 구성된 산화층이 생성되었고, 이 산화층 아래 Fe-Hf-O-N층이 생성되었다. 열처리 온도의 증가에 따라 Fe$_2$O$_3$-Fe$_3$O$_4$ 산화층과 Fe-Hf-O-N 층의 두께가 증가하였고, Fe$_2$O$_3$-Fe$_3$O$_4$산화층을 제외한 박막의 두께는 열처리전과 같았다. 열처리한 박막에서 표면에 생성된 Fe$_2$O$_3$-Fe$_3$O$_4$산화층의 두께를 제외하고 계산한 박막의 연자기 특성은 열처리 전의 연자기 특성에 비해 약간 떨어지는 것으로 나타났다. 그러므로, Fe-Hf-O-N층은 박막 전체의 연자기 특성을 크게 떨어뜨리지 않으며, 열처리 후 박막 전체의 연자기 특성은 Fe-Hf-O-N과 Fe-Hf-N의 다층막의 연자기 특성을 나타내는 것으로 생각된다.

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TiO2 Buffer Layer의 후열처리 온도 증가에 따른 PLZT 박막의 유전특성에 대한 연구 (The Dielectric Properties of PLZT Thin Films as Post Annealing Temperatures of TiO2 Buffer Layer)

  • 윤지언;이인석;김상지;손영국
    • 한국진공학회지
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    • 제17권6호
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    • pp.560-565
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    • 2008
  • 본 연구에서는 PLZT 박막이 $(Pb_{0.92}La_{0.08})(Zr_{0.65}Ti_{0.35})O_3$ 조성의 타겟을 이용한 R.F. 마그네트론 스퍼터링공정에 의해 실리콘 웨이퍼 위에 증착되었다. PLZT 박막의 강유전특성을 향상시키기 위해 buffer layer인 $TiO_2$ 층이 사용되었으며, buffer layer의 후열처리온도 변화에 따른 PLZT 박막의 결정성과 유전특성이 연구되었다. buffer layer이 삽입되지 않은 PLZT 박막의 잔류분극값은 $19.13{\mu}C/cm^2$ 이었으며, 반면 $TiO_2$ buffer layer을 삽인한 후 후열처리 온도를 $600^{\circ}C$로 증가시킨 PLZT 박막의 잔류분극값은 $146.62{\mu}C/cm^2$까지 크게 증가하였다. 하부전극 백금(Pt)과 PLZT 박막층 사이에 삽입된 $TiO_2$ buffer layer의 특성과 PLZT 박막의 유전특성에 미치는 영향을 살펴보기 위해 글로우 방전 분광법 (glow discharge spectroscopy, GDS)이 PLZT 박막(PLZT/($TiO_2$)/Pt/Ti/$SiO_2$/Si wafer)에 대해 수행 되었다.

Cu층 증착시간에 따른 Cu2ZnSnS4 (CZTS) 박막의 특성 (Characterization of the Cu-layer deposition time on Cu2ZnSnS4 (CZTS) Thin Film Solar Cells Fabricated by Electro-deposition)

  • 김윤진;김인영;강명길;문종하;김진혁
    • Current Photovoltaic Research
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    • 제4권1호
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    • pp.16-20
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    • 2016
  • $Cu_2ZnSnS_4$ (CZTS) thin films were fabricated by successive electrodeposition of layers of precursor elements followed by sulfurization of an electrodeposited Cu-Zn-Sn precursor. In order to improve quality of the CZTS films, we tried to optimize the deposition condition of absorber layers. In particular, I have conducted optimization experiments by changing the Cu-layer deposition time. The CZTS absorber layers were synthesized by different Cu-layer conditions ranging from 10 to 16 minutes. The sulfurization of Cu/Sn/Zn stacked metallic precursor thin films has been conducted in a graphite box using rapid thermal annealing (RTA). The structural, morphological, compositional, and optical properties of CZTS thin films were investigated using X-ray diffraction (XRD), Field emission scanning electron microscopy (FE-SEM), Raman spectroscopy, and X-ray Flourescenece Spectrometry (XRF). Especially, the CZTS TFSCs exhibits the best power conversion efficiency of 4.62% with $V_{oc}$ of 570 mV, $J_{sc}$ of $18.15mA/cm^2$ and FF of 45%. As the time of deposition of the Cu-layer to increasing, the properties were confirmed to be systematically changed. And we have been discussed in detail below.

개에서 thin layer chromatography 박층크로마토그라피 및 ELISA를 이용한 요중의 cortisol : creatinine비 측정 (Determination of urinary cortisol : creatinine ratios by sequential thin layer chromatography and ELISA in dogs)

  • 손대호;나기정;오태호;이혜숙;한홍율
    • 대한수의학회지
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    • 제39권5호
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    • pp.1006-1012
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    • 1999
  • This study was conducted to evaluate the ELISA kit for measuring the level of cortisol in the urine. The CV of within-run variation and day to day variation were 0.4~2.8 and 1.8~5.7, respectively. The minimum limitation of measurement was 1ng/ml. The cross reaction was high ($CR_{50}(%)=11.4{\sim}43.2$) in prednisolone, 11-deoxycortisol, 21-deoxycortisol and predinosone. There was low and no cross reaction in other steroid. To develop the ELISA kit we measured the cortisol level in diluted urine with PBS (procedure I), extracted urine with methylene chloride (procedure II) and extracted methylene chloride-extracted urine from thin-layer chromatography (procedure III). The CV value of procedure I, II, III was 9.4~28.3%, 7.2~8.9% and 2.5~5.7%, respectively. There was significant difference between procedure I with II, and pro-cedure I with III(p < 0.01), but no difference between procedure II with III significantly(p < 0.01). The mean UCCR of urine collected through am 8 to 10 was $9.5{\pm}7.6$(0.14~28.0) in 12-month-old dog(n = 47). In this study we can measure the cortisol level in extracted urine with methylene chloride and sequential thin-layer chromatography accurately using ELISA kit.

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능동층 구조에 따른 비정질산화물반도체 박막트랜지스터의 특성 (The Characteristics of Amorphous-Oxide-Semiconductor Thin-Film-Transistors According to the Active-Layer Structure)

  • 이호년
    • 한국산학기술학회논문지
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    • 제10권7호
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    • pp.1489-1496
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    • 2009
  • 비정질 인듐-갈륨-아연 산화물 박막트랜지스터를 모델링 하여서, 능동층의 구조, 두께, 평형상태의 전자밀도에 대응하는 박막트랜지스터의 특성을 연구하였다. 단일 능동층 박막트랜지스터의 경우, 능동층이 얇을 때 높은 전계효과이동도를 보였다. 문턱전압의 절대값은 능동층의 두께가 20 nm일 때 최저치를 보였으며, 문턱전압이하 기울기는 두께에 대한 의존성을 보이지 않았다. 복층구조 능동층의 경우, 하부의 능동층이 높은 평형상태 전자밀도를 가질 때보다 우수한 스위칭 특성을 보였다. 이 경우에도 능동층의 두께가 얇을 때에 높은 전계효과 이동도를 보였다. 높은 평형상태 전자밀도의 능동층의 두께를 증가시키면 문턱전압은 음의 방향으로 이동하였다. 문턱전압이하 기울기는 능동층의 구조에 대하여 특별한 의존성을 보이지 않았다. 이상과 같은 데이터는 산화물반도체 박막트랜지스터 능동층의 구조, 두께, 도핑비율을 최적화함에 효과적으로 사용될 것으로 기대된다.