• Title/Summary/Keyword: Thin Film

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박막 패턴의 레이저 리페어 연구 (A Study of Laser Repair for Thin Film Pattern)

  • 강형식;홍성준;최종윤;홍순국;전태옥
    • 한국레이저가공학회지
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    • 제1권1호
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    • pp.39-44
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    • 1998

  • Laser ablation system for microscopic defect in thin film pattern was developed in this study. For the varification of this study, several laser ablation tests were accomplished. The ablated shape of thin film and the surface of base glass were analyzed by use of microscopic tools and EPMA. After some tests of thin film, the specification of laser and optical unit(max. laser energy is 25mJ, wavelength is 532nm, Q-switched Nd-YAG laser, frequency is 20Hz, Auto-focus unit is LD type.)

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고온에서 알루미나 박막의 인장특성 (Tensile characteristics of Alumina Thin Film at High Temperature)

  • 선신규;강기주
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.1344-1347
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    • 2004

  • Recently, Study on measuring property of a micro thin film(nm ～ hundreds of ) under Thermal Mechanical loading. In this work, We perform tensile test at high temperature(1200 ) to investigate mechanical properties of alumina TGO formed under Thermal Barrier Coating. We used Digital Image Correlation method for measuring displacement, and We presented a method of tensile test for thin film at high temperature.

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