• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.229-229
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• 2010

With the scaling down of ultra large integrated circuits (ULSI) to the sub-50 nm technology node, the need for an ultra-thin, continuous and conformal diffusion barrier and Cu seed layer is increasing. However, diffusion barrier and Cu seed layer formation with a physical vapor deposition (PVD) method has become difficult as the technology node is reduced to 30 nm and beyond. Recent work on self-forming barrier processes using PVD Cu alloys have attracted great attention due to the capability of conformal ultra-thin barrier formation using a simple technique. However, as in the case of the conventional barrier and Cu seed layer, PVD of the Cu alloy seed layer will eventually encounter the difficulty in conformal deposition in narrow line trenches and via holes. Atomic layer deposition (ALD) has been known for its good step coverage and precise thickness control, and is a candidate technique for the formation of a thin conformal barrier layer and Cu seed layer. Conformal Cu-Mn seed layers were deposited by plasma enhanced atomic layer deposition (PEALD) at low temperature ($120^{\circ}C$), and the Mn content in the Cu-Mn alloys were controlled form 0 to approximately 10 atomic percent with various Mn precursor feeding times. Resistivity of the Cu-Mn alloy films decreased by annealing due to out-diffusion of Mn atoms. Out-diffused Mn atoms were segregated to the surface of the film and interface between a Cu-Mn alloy and $SiO_2$, resulting in self-formed $MnO_x$ and $MnSi_xO_y$, respectively. No inter-diffusion was observed between Cu and $SiO_2$ after annealing at $500^{\circ}C$ for 12 h, indicating an excellent diffusion barrier property of the $MnSi_xO_y$. The adhesion between Cu and $SiO_2$ was enhanced by the formation of $MnSi_xO_y$. Continuous and conductive Cu-Mn seed layers were deposited with PEALD into 32 nm $SiO_2$ trench, enabling a low temperature process, and the trench was perfectly filled using electrochemical plating (ECD) under conventional conditions. Thus, it is the resultant self-forming barrier process with PEALD Cu-Mn alloy film as a seed layer for plating Cu that has further potential to meet the requirement of the smaller than 30 nm node.

• Journal of the Korean Geophysical Society
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• v.2 no.3
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• pp.209-216
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• 1999

In order to get geologic information necessary for underground installation of water pipe, seismic refraction profiling was applied to the southwest side of the Seomjin River which flows between Namwon-gun, Cholabuk-do and Gokseong-gun, Cholanam-do. Before obtaining the in-line refraction data, walkaway data were recorded with 1 m geophone interval and -36∼+36 m offset range. From the walkaway data, it is interpreted that a dry soil layer with the average velocity of 585 m/s covers wet sediments with the average velocity of 1,326 m/s. The second layer overlies basements nearly horizontally with the average velocity of 4,218 m/s. Refraction profiling of 220 m long with the geophone interval of 2 m is interpreted with the Generalized Reciprocal Method (GRM). Three layers are identified with average velocities of 688 m/s, 1,473 m/s, and 3,776 m/s, respectively. The depth to the bedrock impossible for ripping ranges between two extremes, 1.51∼2.43 m and 2.25∼3.54 m, depending upon thickness of the hidden layer. A typical shortcoming of refraction method, the hidden layer problem, prevents accurate estimation in depth of the second layer.

• Journal of the Korean Geophysical Society
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• v.2 no.1
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• pp.45-56
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• 1999

Seismic refracrion and reflection surveys were conducted along an E-W trending track of 482 m long in Ilwall-dong, Pohang. End-on spread was employed as source-receiver configuration with 2 m for both geophone interval and offset. Seismic data were acquired using 24 channels at every shot fired every 2 m along the track. Refraction data were interpreted using equations for multi-horizontal layers. Reflection data were processed in the sequence of trace edit, gain control, CMP sorting, NMO correction, mute, common offset gathering, and filtering to produce a single fold seismic section. There are two layers in shallow subsurface of the study area. Upper layer has the P-wave velocities ranging from 267 to 566 m/s and is interpreted as a layer of unconsolidated sediments. Lower layer has P-wave velocities of 1096-3108 m/s and is interpreted as weathered rock to hard rock. Most of the lower layer classified as soft rock. Upper layer has lateral variations in both P-wave velocity and thickness. The upper layer in the eastern part of the seismic line is 3-5 m thick and has P-wave velocity of 400 m/s in average. The upper layer in the western part is 8-10 m thick and has P-wave velocity of 340 m/s in average. The eastern part is interpreted as unconsolidated beach sand, while the western part is interpreted as infilled soil to develop a construction site. Three fault systems of high angle are imaged in seismic reflection section. It is interpreted that the area between these fault systems are relatively safe. Large buildings should be located in the safe ground condition of no fault and footings should be designed to be in the basement rock of 3-10 m deep below the surface.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.18 no.11
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• pp.1217-1223
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• 2007

Advanced microwave absorbers for wide oblique incidence angles are required in many applications including wireless communication or vehicle identification in ITS(Intelligent Transport System) where 5.8 GHz DSRC(Dedicated Short Range Communication) system is applied. In this study, two-layered microwave absorber(with a laminate structure of dielectric/magnetic composites) has been designed for the achievement of low reflection coefficient over wide incidence angles at 5.8 GHz. Iron flake particles are used as the filler in the absorbing layer, and the magnetic composite sheet exhibits high magnetic loss due to ferromagnetic resonance in gigahertz frequencies. The surface layer of low dielectric constant containing small amount of carbon black is used as the impedance transformer. On the basis of transmission line theory, the reflection loss has been calculated for the two-layer structure with variation of incident angles for both TE(Transverse Electric) and TM(Transverse Magnetic) polarizations. At the optimum thickness of the composite layers, a low value of reflection loss(less than -10 dB) has been predicted for wide incidence angles up to $55^{\circ}$ which is in good agreement with the measured value determined by free-space measurement.

• Journal of Korean Ophthalmic Optics Society
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• v.15 no.3
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• pp.235-240
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• 2010

Purpose: In this study, we proposed a simple accommodation-dependent crystalline lens with a constant volume and homogeneous refractive index. Methods: We proposed a human crystalline lens with two aspheric surfaces. Two surfaces intersect in two points and straight line between two points was equator(2b). It assumed that the derivative in axial direction was zero at the equator and the radial derivative was zero at the vertex. Proposed human crystalline lens was divided by the equator into the anterior and posterior parts. It was assume that the volume of each part and refractive index of the human crystalline lens were constant during accommodation. Results: For the changes during accommodation, geometrical parameters were determined by different objective distances. Considering the constant volume of each part with the small decrement of the equator, we obtained the paraxial parameters, such as the anterior and posterior vertex radius of curvature and lens thickness. Compared with the experimental data published in the literature, calculated values using simple approximation showed similar change per accommodative stimulus. Conclusions: These results showed that proposed simple approximation using assumption of constant volume and refractive index of the human crystalline lens made it possible to predict changes of geometrical parameters during accommodation.

• Geophysics and Geophysical Exploration
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• v.10 no.1
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• pp.50-59
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• 2007

The advent of towed geo-electrical array surveying on water and land has resulted in datasets of magnitude approaching that of airborne electromagnetic surveying and most suited to 1D inversion. Robustness and complete automation is essential if processing and reliable interpretation of such data is to be viable. Sharp boundaries such as river beds and the top of saline aquifers must be resolved so use of smoothness constraints must be minimised. Suitable inversion algorithms must intelligently handle low signal-to-noise ratio data if conductive basement, that attenuates signal, is not to be misrepresented. A noise-level aware inversion algorithm that operates with one elastic thickness layer per electrode configuration has been coded. The noise-level aware inversion identifies if conductive basement has attenuated signal levels so that they are below noise level, and models conductive basement where appropriate. Layers in the initial models are distributed to span the effective depths of each of the geo-electric array quadrupoles. The algorithm works optimally on data collected using geo-electric arrays with an approximately exponential distribution of quadrupole effective depths. Inversion of data from arrays with linear electrodes, used to reduce contact resistance, and capacitive-line antennae is plausible. This paper demonstrates the effectiveness of the algorithm using theoretical examples and an example from a salt interception scheme on the Murray River, Australia.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.47 no.3
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• pp.50-56
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• 2010

In this paper, compact broad-band antenna using circular spiral slot and CPW (coplanar waveguide) feed is proposed. The proposed antenna is designed on the same plane of the substrate by using CPW fed structure, archimediean spiral slot structure. So it was achieved both the size of compact antenna and the broad band. A archimediean spiral slot structure is introduced for resonance of medium band operation. The distances of a CPW feeder line and a ground plane are modified for impedance matching and lower/higher band operation. The proposed antenna has a compact size ($8mm\;{\times}\;13mm$) and it is etched on the FR-4 (relative dielectric constant 4.4, thickness 0.8mm) dielectric substrate. The simulated impedance bandwidth (VSWR $\leq$ 2) and maximum gain of the proposed antenna are 5.98GHz (4.1GHz ~ 10.08GHz) and 3.97dBi, respectively. The measured impedance bandwidth (VSWR $\leq$ 2) and maximum gain of the proposed antenna are 6.02GHz (4.48GHz ~ 10.5GHz) and 2.68dBi, respectively. The simulation and measured result shows good impedance matching and radiation pattern over the interesting frequency bands. It can be applied to antenna of broad-band wireless communication system.

• Applied Chemistry for Engineering
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• v.29 no.2
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• pp.162-167
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• 2018

The effect of the average particle size and shape of silver nanoparticles for the transparent conductive film (TCF) was studied. Optical and electrical properties of silver conductive lines coated on the polyethylene terephthalate (PET) film was also measured. Silver nanoparticles produced by Ag-CM, Ag-ME, Ag-EE methods showed an excellent conductivity compared to those produced by Ag-EB, Ag-CR and Ag-PL methods, but a little difference in the transparency. In the case of the former three silver nanoparticles, the average particle size was about 80 nm or less and the size was uniform. For the latter case, the severe agglomeration phenomena of particles was observed and the average particle size was 100 nm or more. This result was consistent with the result of the uniformity of the pattern shape and thickness on conductive line patterns observed by SEM. Therefore, it was confirmed that the electrical characteristics could be obtained when the average particle size of silver nanoparticles is smaller and the uniformity of the particles is maintained.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.21 no.3
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• pp.62-72
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• 2022

In this study, a miniaturized GPS band(L₁ : 1.575 GHz) antenna that can be mounted on a small drone is proposed. The miniaturization was designed by applying the perturbation method based on the λ/4 microstrip antenna and lengthening the current path at the edge of the patch. The miniaturized antenna was fabricatred such that it could be attached to the surface of styrofoam(ε_r=1.06, t=10 mm) having a size of 10 mm × 9 mm × 10 mm (0.05 λ × 0.05 λ × 0.05 λ). The thickness and length of the feeding line and the spacing between short stubs were adjusted for impedance matching. S₁₁ was found to be -18.8 dB at the center frequency of the fabricated antenna, 1.575 GHz. The radiation pattern measurement results show that the maximum gain of E_θ is 1.87 dBi in 0 directions in the xz-plane, and that E_θ is an omnidirectional characteristic with an average gain of -1.7 dBi in the yz-plane. It was found that the antenna can be used as an ultra-small microstrip antenna, which can be mounted on a small dron for GPS, and is capable of preserving a reduction ratio of 98.8% as compared to a λ/2 microstrip patch antenna.

• Journal of Navigation and Port Research
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• v.38 no.4
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• pp.367-371
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• 2014

When the crew or passengers fall into the water due to marine accident of vessel, it is very important to rescue them quickly. In the case of marine accidents, most people in distress have been wearing a lifejacket, so if the GPS and Cospas-Sarsat communication module will be integrated within the lifejacket, it is easy to rescue them. In this paper, development of the dual band lifejacket-integrated antenna for GPS and Cospas-Sarsat communication is discussed. The antenna with the FR-4 substrate of 0.2mm thickness for flexibility was designed that it can be fitted close to the shoulder of the life jacket and operate at 1.575GHz and 406MHz. The GPS communication antenna was implemented with a ring-slot antenna having a circular polarized characteristic and a meander type linear polarized antenna is used as Cospas-Sarsat communication. The two antennas are fed by a single microstrip line and an open stub is used to minimize the mutual interference between the two antennas. The performance of the fabricated antenna attached to the life vest is confirmed by the measurement of the return loss at GPS and Cospas-Sarsat frequency bands.