• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.176-180
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• 2001

There are several factors causing re-work in CMP process such as improper polish time calculation by operator, removal rate decline of the polisher, unstable in-suit pad conditioning, slurry supply module problem and wafer carrier rotation inconsistency. And conclusively those fundimental reason for the re-work rate increasement is mainly from the cycle time delay between wafer polish and post measurement. Therefore, Wafer thickness measurement in wet condition could be able to remove those improper process conditions which may happen during the process in comparison with the conventional dried wafer measurement system and it can be able to reduce the CMP process cycle time. CMP scrap reduction by overpolish, re-work rate reduction, thickness control efficiency also can be easily achieved. CMP Equipment manufacturer also trying to develop integrated system which has multi-head & platen, cleaner, pre & post thickness measure and even control the polish time from the calculated removal rate of each polishing head by software. CMP re-work problem such as over & under polish by target thickness may result in the cycle time delay. By reducing those inefficient factors during the process and establish of the automatic process control, CLC system need to be adopted to maximize the process performance. Wafer to Wafer Polish Time Feed Back Control by measuring the wafer right after the polish shorten the polish time calculation for the next wafer and it lead to the perfect Post CMP target thickness control capability. By Monitoring all of the processed the wafer, CMP process will also be stabilize itself.

• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.1
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• pp.214-224
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• 1990

A "two-fluid" model using thermal eddy diffusivity concept and Lumley's drag reduction theory, is proposed to analyze heat transfer of the turbulent dilute gas-particle flow in a vertical pipe with constant wall heat flux. The thermal eddy diffusivity is derived to be a function of the ratio of the heat capacity-density products .rho. over bar $C_{p}$ of the gaseous phase and the particulate phase and also of the ratio of thermal relaxation time scale to that of turbulence. The Lumley's theory dictates the variation of the viscous sublayer thickness depending on the particle loading ratio Z and the relative particle size $d_{p}$/D. At low loading ratio, the size of viscous sublayer thickness is important for suspension heat transfer, while at higher loading, the effect of the ratio .rho. $_{p}$ over bar $C_{p}$$_{p}$/ .rho. $_{f}$ over bar $C_{p}$$_{f}$ is dominant. The major cause of decrease in the suspension Nusselt number at lower loading ratio is found to be due to the increase of the viscous sublayer thickness caused by the suppression of turbulence near the wall by the presence of solid particles. Predicted Nusselt numbers using the present model are in satisfactory agreements with available experimental data both in pipe entrance and the fully developed regions.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.223-225
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• 2007

Online models predicting roll force and forward slip of roughing mill was developed using nondimensional parameters. Using the effective inlet thickness, roll force model take into account the effect of inlet dog-bone shape of slab which take places after width reduction through edger rolling in roughing mill. The prediction accuracy of the proposed model is examined through comparison with measurements.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.1463-1466
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• 2007

Visco-elastic damping material for reducing heavy-weight floor impact noise and vibration in reinforced concrete structures was tested according to its thickness in the damping layer. The effect of damping material was compared with 20, 15, 10 and 5mm thickness. The wave propagation characteristics was measured for suggestion of an efficient method to reduce the floor impact noise. The method was proposed using the flexural wave propagation characteristics. The result showed that reduction of the thickness of damping layer made a slight difference; the natural frequency moved to higher frequency and the amplitude increased at low frequencies with 5mm thickness of damping material.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.567-571
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• 1997

Recently, automobile industry has led to increasing use of aluminum alloy for weight reduction. Automobile made of aluminum alloy can be given lighter, stronger and a harder surface by anodizing than one made of steel-alloy. In this paper, we investigate the influence of lap length, adherend thickness and adhesive thickness on adhesive strength of single-lap adhesive joints by conducting tensile-shear tests. Single-lap adhesive joints of aluminum was calculated using joint factor by using adhesive length, adherend thickness of specimen.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.353-358
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• 2013

Present paper deals with turbulence-airfoil interaction noise and mainly investigates the effects of airfoil thickness on the broadband noise spectrum. The acoustic power radiation from an airfoil is predicted using high-order time-domain method, which is based on the computational aeroacoustic technique solving the linear Euler equations. The homogeneous and isotropic turbulence is generated by utilizing the synthetic turbulence modeling based on random particle method. The airfoils taken into consideration are a flat-plate and a NACA0012 airfoil aligned with uniform mean flow. The effects of airfoil thickness on the radiated inflow turbulence noise are investigated by comparing acoustic power spectrum predicted for each airfoil. The comparison of acoustic power spectrum reveals that the airfoil thickness significantly contributes the high frequency noise reduction.

• Journal of the Geological Society of Korea
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• v.54 no.6
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• pp.631-640
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• 2018

To understand the formation and evolution of a sedimentary basin in basin analysis and modelling studies, it is important to analyze the thickness and age range of sedimentary layers infilling a basin. Because the compaction effect reduces the thickness of sedimentary layers during burial, basin modelling studies typically restore the reduced thickness using the relation of porosity and depth (compaction trend). Based on the compilation plots of published compaction trends of representative sedimentary rocks (sandstone, shale and carbonate), this study estimates the compaction trend ranges with exponential curves and equations. Numerical analysis of sedimentary compaction is performed to evaluate the variation of porosity and layer thickness with depth at key curves within the compaction trend ranges. In sandstone, initial porosity lies in a narrow range and decreases steadily with increasing depth, which results in relatively constant thickness variations. For shale, the porosity variation shows two phases which are fast reduction until ~2,000 m in depth and slow reduction at deeper burial, which corresponds to the thickness variation pattern of shale layers. Carbonate compaction is characterized by widely distributed porosity values, which results in highly varying layer thickness with depth. This numerical compaction analysis presents quantitatively the characteristics of porosity and layer thickness variation of each lithology, which influence on layer thickness reconstruction, subsidence and thermal effect analyses to understand the basin formation and evolution. This work demonstrates that the compaction trend is an important factor in basin modelling and underlines the need for appropriate application of porosity data to produce accurate analysis outcomes.

• Tribology and Lubricants
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• v.31 no.4
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• pp.148-156
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• 2015

In the study, a design process for ensuring optimal clearance in a fuel injection pump(FIP) is suggested. Structure analysis and hydrodynamic lubrication analysis are performed to determine the optimal clearance. The FIP is simulated using Hypermesh, Abaqus 6.12 to evaluate the reduction of clearance when the maximum supply pressure is applied. The reduction in clearance is caused by the difference in the deformations between the barrel and plunger. When the deformation of the plunger is larger than that of the barrel, a reduction in clearance at the head part occurs. On the other hand, the maximum clearance reduction equals the maximum deformation in the stem part, because the deformation of barrel does not occur in this region. The clearance of FIP should be designed to be larger than maximum reduction of clearance in order to avoid contact between the plunger and barrel. In addition, the two-dimensional Reynolds equation is used to evaluate lubrication characteristics with variations of viscosity, clearance and nozzle for a laminar, incompressible, unsteady state flow. The equation is discretized using the finite difference method. The lubrication characteristics of FIP are investigated by comparing film parameter, which is the ratio of the minimum film thickness and surface roughness. The optimal clearance of FIP is to be designed by considering the maximum reduction in clearance, lubrication characteristics, machining limits and tolerance of clearance.

• Tribology and Lubricants
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• v.25 no.5
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• pp.348-358
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• 2009

To satisfy the more severe emission regulation and the demand of higher fuel economy in near future, the combustion pressure and power output of engines is going to be higher. In order to get the reduction of engine emission and the higher power, it is needed the reduction of the tension and width of ring pack. The lower tension ring and the manufacturing technology of cast iron thinner width ring can bring the friction reduction between the ring and liner during engine running. Therfore, the fuel economy can be achieved. Thereafter the engine emission can be reduced. In this study, by using a developed basic computer program that predicts the inter-ring pressure, the motion of ring and the inter-ring pressure through a crevice volume model between adjacent rings, and the oil film thickness and the friction computed by lubrication theories, it is to be examined the effect of friction reduction from piston ring pack equipped with thinner width ring and lower tension ring.

• Journal of Powder Materials
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• v.4 no.2
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• pp.106-112
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• 1997

$Cu-Al_20_3 $ composite powders were prepared by hydrogen reduction of $Cu^{2+}$ from ammoniacal copper sulfate solution on alumina core using autoclave. The copper reduction rate and the properties of copper layer were investigated using Scanning Electron Microscope(SEM), X-ray diffractometer, size and chemical analyzers. The reduction rate of $Cu^{2+}$ showed the maximum value when the molar ratio of [$NH_3$]/[$Cu^{2+}$] was 2. In order to prevent the agglomeration of Cu powder and ethane reduction rate, $Fe^{2+}$ and anthraquinone which act as catalysis were added in the solution. Catalysis was effectively chanced with the addition of two elemerts at a time. Optimum conditions obtained in this study were hydrogen reduction temperature of 205$^{\cire}C$, stirring speed of 500 rpm and hydrogen partial pressure of 300 psi. Obtained $Cu-Al_20_3 $ composite Powders were found to have the uniform and continuous copper coating layer of nodule shape with 3~5 $\mu$m thickness.