• 반도체디스플레이기술학회지
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• 제2권2호
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• pp.9-15
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• 2003

This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

• Journal of the Optical Society of Korea
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• 제13권3호
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• pp.304-309
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• 2009

We tested the feasibility of measuring fat thickness using a miniaturized chip LED sensor module, testing 12 healthy female subjects. The module consisted of a single detector and four sources at four different source-detector distances (SD). A segmental curve-fitting procedure was applied, using an empirical algorithm obtained by Monte-Carlo simulation, and fat thicknesses were estimated. These thicknesses were compared to computed-tomography (CT) results; the correlation coefficient between CT and optical measurements was 0.932 for bicep sites. The mean percentage error between the two measurements was 13.12%. We conclude that fat thickness can be efficiently measured using the simple sensor module.

• 설비공학논문집
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• 제21권11호
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• pp.629-635
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• 2009

In this study, fin surface temperature and frost properties, i.e., frost thickness and frost surface temperature on a heat exchanger, were experimentally analyzed with different fin thicknesses, fin sizes and thermal conductivities of fin. As a result, it is found that fin thickness and thermal conductivity of fin should be considered in order to design an efficient heat exchanger fin. Correlations of dimensionless average frost properties were proposed as functions of dimensionless air temperature, dimensionless fin base temperature, dimensionless fin thickness, absolute air humidity, Reynolds number and Fourier number. The correlations predicted well the average frost thickness with a maximum error of 10.5% and frost surface temperature with a maximum difference of $0.89^{\circ}C$, respectively.

• 제어로봇시스템학회논문지
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• 제6권1호
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• pp.8-14
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• 2000

In this paper, three adaptive sliding mode control algorithms, which self-tune both the sliding mode gain and the boundary layer thickness, are proposed. The first algorithm uses a gain adaptation rule is combined with the boundary layer thickness adaptatioin rule to satisfy the sliding condition. In the third algorithm, the computation burden of the second algorithm is reduced further, and therefore no extra cost is required for real-time implementation. Due to the mixed sliding mode gain and the boundary layer thickness adaptation scheme, the tracking error and the chattering of the control input can be reduced greatly.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2007년도 하계종합학술대회 논문집
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• pp.279-280
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• 2007

Airway wall thickness is an important bio-marker for evaluation of pulmonary diseases such as stenosis, bronchiectasis. Nevertheless, an image-based analysis of the airway tree can provide precise and valuable airway size information, quantitative measurement of airway wall thickness in CT images involves various sources of error and uncertainty. So we have developed an accurate airway wall measurement technique for small airways with three-dimensional (3-D) approach. To illustrate performance of these techniques, we used airway phantom that consisted of 4 acryl tubes with various inner and outer diameters. Results show that evaluation of interpolation and deconvolution methods of airways in 3-D CT images, and significant improvement over the full-width-half-maximum method for measurement of not only location of the luminal and outer edge of the airway wall but airway wall thickness.

• Current Optics and Photonics
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• 제5권1호
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• pp.52-58
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• 2021

We show that a simple double-slit experimental setup can be used to measure the thickness of a transparent thin film. The phase difference between the light passing through one slit covered with photoresist film and that passing through the other slit without film was estimated using the simple Fraunhofer diffraction formula for a double slit. Our method gave error of a few percent or less for film thicknesses ranging from 0.7 to 1.7 ㎛, demonstrating that a laboratory double-slit experimental setup can be utilized in practical film-thickness measurements.

• 항공우주시스템공학회지
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• 제15권2호
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• pp.1-9
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• 2021

In this paper, a thickness compensation function is introduced to consider the shear deformation and warping effect resulting from increased thickness in the composite multi-cell wing box. The thickness compensation function is used to perform the structure optimization of the multi-cell. It is determined by minimizing the error of an analytical formula using solid mechanics and the Ritz method. It is used to define a structural performance prediction expression due to the increase in thickness. The parameter is defined by the number of spars and analyzed by the critical buckling load and the limited failure index as a response. Constraints in structural optimization are composed of displacements, torsional angles, the critical buckling load, and the failure index. The objective function is the mass, and its optimization is performed using a genetic algorithm.

• 한국정밀공학회지
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• 제15권8호
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• pp.145-155
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• 1998

An $H{\infty}$ controller with a roll eccentricity filter is proposed to alleviate the effect of entry thickness variation and roll eccentricity occured in rolling stands themselves of tandem cold mills. A robust controller to the disturbances is designed by H$_{\infty}$ control techniques, which can reflect the input direction of disturbances and the knowledge of disturbance spectrum in the frequency domain. First, fundamental problems in tandem cold mills such as process transport delay inherent in the exit thickness measurement and the feedforward loading of roll eccentricity signals on the exit thickness be overcome by the roll eccentricity filtering and the compensation for the error of gaugemeter thickness estimator. And non-satndard $H{\infty}$ control problem caused by the selection of weighting function having poles on the $J{\omega}$-axis is discussed. The resultant controller composed by an $H{\infty}$ controller and an estimator for the roll eccentricity is evaluated through computer simulations. The effectiveness of the proposed control method is compared to that of the conventional LQ controller method and a feedforward controller for the roll eccentricity, which has been already studied.

• 한국분무공학회지
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• 제12권4호
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• pp.211-219
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• 2007

The liquid film thickness inside a pressure-swirl nozzle was measured, and then the measured liquid film thickness was compared with the results from previous empirical equations. The liquid film inside the nozzle was visualized using extended transparent nozzles and a microscopic imaging system, and then the measurement error was evaluated using optical geometry analysis. The high injection pressures up to 7MPa were adopted to simulate the injection conditions of the direct-injection spark-ignition engines. The totally different two injectors with different fuels, nozzle lengths, nozzle diameters and swirlers were utilized to obtain the comprehensive equations. The results showed that the liquid film thickness very slightly decreased at high injection pressures and the empirical equations overestimated the effect of injection pressure. Most of empirical equations did not include the effect of nozzle length and swirler angle, although it caused significant change in liquid film thickness. A new empirical equation was suggested based on the experimental results with the effects of fuel properties, injection pressure, nozzle diameter, nozzle length and swirler angle.

• Smart Structures and Systems
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• 제32권2호
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• pp.123-133
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• 2023

This paper proposes a thermography-based coating thickness estimation method for steel structures using model-agnostic meta-learning. In the proposed method, a halogen lamp generates heat energy on the coating surface of a steel structure, and the resulting heat responses are measured using an infrared (IR) camera. The measured heat responses are then analyzed using model-agnostic meta-learning to estimate the coating thickness, which is visualized throughout the inspection surface of the steel structure. Current coating thickness estimation methods rely on point measurement and their inspection area is limited to a single point, whereas the proposed method can inspect a larger area with higher accuracy. In contrast to previous ANN-based methods, which require a large amount of data for training and validation, the proposed method can estimate the coating thickness using only 10- pixel points for each material. In addition, the proposed model has broader applicability than previous methods, allowing it to be applied to various materials after meta-training. The performance of the proposed method was validated using laboratory-scale and field tests with different coating materials; the results demonstrated that the error of the proposed method was less than 5% when estimating coating thicknesses ranging from 40 to 500 ㎛.