• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.365-366
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• 2009

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.874-877
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• 2001

SOI(Silicon-On-Insulator) technology is proposed as an alternative to bulk silicon for MEMS(Micro Electro Mechanical System) manufacturing. In this paper, we fabricated the SOI wafer with uniform active layer thickness by silicon direct bonding and mechanical polishing processes. Specially-designed electrostatic bonding system is introduced which is available for vacuum packaging and silicon-glass wafer bonding for SOG(Silicon On Glass) wafer. We demonstrated thermopile sensor and RF resonator using the SOI wafer, which has the merits of simple process and uniform membrane fabrication.

• 센서학회지
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• 제26권3호
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• pp.168-172
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• 2017

A nondispersive infrared (NDIR) ethanol gas sensor was prototyped with ASIC implemented thermopile sensor, which included a temperature sensor and two ellipsoidal waveguide structures. The temperature dependency of the two ethanol sensors (with partially blocked and intact structures) has been characterized. The two ethanol gas sensors showed linear output voltages initially when varying the ambient temperature from 253 K to 333 K. The slope of the temperature sensor presented a constant value of 15 mV/K. After temperature compensation, the ethanol gas sensor estimated ethanol concentrations with larger errors of 20 to 25% below 200 ppm. However, the estimation errors were reduced to between -10 and +1 % from 253 K to 333 K above 200 ppm ethanol gas concentration in this research.

• 한국가스학회:학술대회논문집
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• 한국가스학회 2006년도 추계학술발표회 논문집
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• pp.123-128
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• 2006

This paper describes NDIR $CO_2$ gas sensor that shows the characteristics of temperature compensation. It consists of novel optical cavity that has two elliptical mirrors and a thermopile detector that includes ASIC chip in the same metal package for the amplification of detector output voltage and temperature sensor. The newly developed sensor modules shows high accuracy (less than +/-40 ppm) throughout the measuring concentration of $CO_2$ gas from 0 ppm to 2,000 ppm. After implementing the calculation methods of gas concentration, which is based upon the experimental results, the sensor module shows high accuracy less than +/- 5 ppm error throughout the measuring temperature range $(15^{\circ}C\;to\; 35^{\circ}C)$ and gas concentrations.

• 한국정밀공학회지
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• 제17권7호
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• pp.226-231
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• 2000

New types of the micro heat flux sensor are designed and fabricated using SU-8 and Cu electroplating. And then calibrated under convection environment. The thermal path was made by SU-8 structure and electroplated Cu layers. The bottom surface of the micro heat flux sensor receives the heat flux from the wall, Then the heat flows along the Cu layers and drains out to the environment with producing the temperature difference at the upper layer of Cu. By measuring this temperature difference, the heat flux from the wall can be obtained. The temperature difference is measured by thermopile which is composed of Ni-Cr pairs or Al-chromel pairs. The calibration is accomplished under convection environment because it is most frequent situation. The range of the sensitivity is 0.11~2.02$\mu$V/(㎽/$\textrm{cm}^2$) for the various heat flux and Reynolds numbers.

• 한국태양에너지학회 논문집
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• 제28권6호
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• pp.58-63
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• 2008

It is essential to investigate the structure and the main characteristic of Home USN (Ubiquitous Sensor Network) technologies in built ubiquitous environment while designing bio-sensors. For this study, Thermistor elements and Thermopile black body have been selected to implement ubiquitous technologies for bio-sensors and wireless network such as WiBro has been used to transfer sensing data to the BSN (Bio-Sensor Network) gateway. It is certain that efficiency of ubiquitous space design is improved if main components of each specific sensor network are analyzed precisely in digital way and corresponding communication modules are prepared accordingly. Ubiquitous technology, in conclusion, has to be applied not only with systematical mechanism or electronic setting but in human-centered atmosphere as well, keeping with deep consideration for bio-housing service factors in eco-friendly surrounding.

• 센서학회지
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• 제28권5호
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• pp.305-310
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• 2019

The purpose of this study is to classify the concentration of HbA1c (glycosylated hemoglobin), which is an indicator in the management of accurate blood glucose level in diabetic patients, using a non-invasive optical property measurement method. To measure the optical properties of HbA1c, the optical source uses LEDs and laser diodes of 400 nm in the visible region and 1450 nm in the nearinfrared region using thermopile to detect the Raman scattering intensity. An HbA1c control solution was used. As a result, the optical properties of 5% (normal) and 9% (abnormal) HbA1c control solutions showed specificity in which the output values were reversed at 850 nm and 950 nm, respectively. This property was applied to distinguish between normal and abnormal values in diabetes. In addition, considering tissue penetration depths for non-invasive measurements, two wavelengths were determined to be effective in distinguishing the concentrations of HbA1c control solutions at 5%, 7%, and 9%.

• 한국정밀공학회지
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• 제26권11호
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• pp.138-145
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• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• 한국산업융합학회 논문집
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• 제19권2호
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• pp.95-100
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• 2016

This study proposes the temperature compensation algorithm using thermopile detector for non-dispersive infrared Nitrogen gas sensor. From the output voltage of thermistor that is attached onto the infrared detector, the ambient temperature was extracted. The effects of temperatures on the properties of sensor module characteristics of narrow bandpass filter, optical cavity and infrared lamp, and air mixing gas have been introduced in order to implement the temperature compensation algorithm.

• 대한기계학회논문집B
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• 제31권10호
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• pp.876-883
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• 2007

Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.