• 대한기계학회논문집B
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• 제32권7호
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• pp.542-548
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• 2008

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.