• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.22-25
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• 2005

In this research, a wafar-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• Steel and Composite Structures
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• 제25권2호
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• pp.187-196
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• 2017

In this work, transient thermo-piezo-elastic responses of an infinite functionally graded piezoelectric (FGPE) plate whose upper surface suffers time-dependent thermal shock are investigated in the context of different thermo-piezo-elastic theories. The thermal and mechanical properties of functionally graded piezoelectric plate under consideration are expressed as power functions of plate thickness variable. The solution of problem is obtained by solving the corresponding finite element governing equations in time domain directly. Transient thermo-piezo-elastic responses of the FGPE plate, including temperature, stress, displacement, electric intensity and electric potential are presented graphically and analyzed carefully to show multi-field coupling behaviors between them. In addition, the effects of functionally graded parameters on transient thermo-piezo-elastic responses are also investigated to provide a theoretical basis for the application of the FGPE materials.

• Structural Engineering and Mechanics
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• 제19권4호
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• pp.441-457
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• 2005

An analytical method is presented to solve the problem of transient wave propagation in a transversely isotropic piezoelectric hollow sphere subjected to thermal shock and electric excitation. Exact expressions for the transient responses of displacements, stresses, electric displacement and electric potentials in the piezoelectric hollow sphere are obtained by means of Hankel transform, Laplace transform, and inverse transforms. Using Hermite non-linear interpolation method solves Volterra integral equation of the second kind involved in the exact expression, which is caused by interaction between thermo-elastic field and thermo-electric field. Thus, an analytical solution for the problem of transient wave propagation in a transversely isotropic piezoelectric hollow sphere is obtained. Finally, some numerical results are carried out, and may be used as a reference to solve other transient coupled problems of thermo-electro-elasticity.

• 정보저장시스템학회논문집
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• 제2권2호
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• pp.96-99
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• 2006

In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride ($Si_3N_4$) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric $Si_3N_4$ cantilevers. In this process, we did not use a SOI wafer but a conventional p-type wafer for the fabrication of the thermo-piezoelectric $Si_3N_4$ cantilever arrays. Furthermore, we have developed a very simple transfer process, requiring only one step of cantilever transfer process for the integration of the CMOS wafer and cantilevers. Using this process, we have fabricated a single thermo-piezoelectric $Si_3N_4$ cantilever, and recorded 65nm data bits on a PMMA film and confirmed a charge signal at 5nm of cantilever deflection. And we have successfully applied this method to transfer 34 by 34 thermo-piezoelectric $Si_3N_4$ cantilever arrays on a CMOS wafer. We obtained reading signals from one of the cantilevers.

• Steel and Composite Structures
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• 제45권4호
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• pp.535-546
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• 2022

The memory response of nonlocal systematical formulation size-dependent coupling of viscoelastic deformation and thermal fields for piezoelectric materials with dual-phase lag heat conduction law is constructed. The method of the matrix exponential, which constitutes the basis of the state-space approach of modern control theory, is applied to the non-dimensional equations. The resulting formulation together with the Laplace transform technique is applied to solve a problem of a semi-infinite piezoelectric rod subjected to a continuous heat flux with constant time rates. The inversion of the Laplace transforms is carried out using a numerical approach. Some comparisons of the impacts of nonlocal parameters and time-delay constants for various forms of kernel functions on thermal spreads and thermo-viscoelastic response are illustrated graphically.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 추계학술대회논문집A
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• pp.426-431
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• 2000

A decoupled thermo-piezoelectric-mechanical model of composite laminates with surface bonded piezoelectric actuators, subjected to externally applied load, temperature change load, electric field load is developed. The governing differential equations are obtained by applying the principle of free energy and variational techniques. A higher order zigzag theory displacement field is employed to accurately capture the transverse shear and normal effects in laminated composite plates of arbitrary thickness.

• Structural Engineering and Mechanics
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• 제65권4호
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• pp.435-445
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• 2018

This paper is concerned with thermo-mechanical vibration behavior of flexoelectric/piezoelectric nanobeams under uniform and linear temperature distributions. Flexoelectric/piezoelectric nanobeams have higher natural frequencies compared to conventional piezoelectric ones, especially at lower thicknesses. Both nonlocal and surface effects are considered in the analysis of flexoelectric/piezoelectric nanobeams for the first time. Hamilton's principle is employed to derive the governing equations and the related boundary conditions which are solved applying a Galerkin-based solution. Comparison study is also performed to verify the present formulation with those of previous data. Numerical results are presented to investigate the influences of the flexoelectricity, nonlocal parameter, surface elasticity, temperature rise, beam thickness and various boundary conditions on the vibration frequencies of thermally affected flexoelectric/piezoelectric nanobeam.

• 한국복합재료학회:학술대회논문집
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• 한국복합재료학회 2000년도 추계학술발표대회 논문집
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• pp.46-49
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• 2000

A decoupled thermo-~lezoelectric-mechanical model of composite laminates with surface bonded piezoelectric actuators, subjected to externally applied load, temperature change load, electric field load is developed. The governing differential equations are obtained by applying the principle of free energy and variational techniques. A higher order zigzag theory displacement field is employed to accurately capture the transverse shear and normal effects in laminated composite plates of arbitrary thickness.

• Design & Manufacturing
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• 제14권3호
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• pp.23-30
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• 2020

Laser Assisted Thermo-Compression Bonding (LATCB) has been proposed to improve the "chip tilt due to the difference in solder bump height" that occurs during the conventional semiconductor chip bonding process. The bonding module of the LATCB system has used a piezoelectric actuator to control the inclination of the compression jig on a micro scale, and the piezoelectric actuator has been directly coupled to the compression jig to minimize the assembly tolerance of the compression jig. However, this structure generates a lateral force in the piezoelectric actuator when the compression jig is tilted, and the stacked piezoelectric element vulnerable to the lateral force has a risk of failure. In this paper, the optimal design of the flexure hinge was performed to minimize the lateral force generated in the piezoelectric actuator when the compression jig is tilted by using the displacement difference of the piezoelectric actuator in the bonding module for LATCB. The design variables of the flexure hinge were defined as the hinge height, the minimum diameter, and the notch radius. And the effect of the change of each variable on the stress generated in the flexible hinge and the lateral force acting on the piezoelectric actuator was analyzed. Also, optimization was carried out using commercial structural analysis software. As a result, when the displacement difference between the piezoelectric actuators is the maximum (90um), the maximum stress generated in the flexible hinge is 11.5% of the elastic limit of the hinge material, and the lateral force acting on the piezoelectric actuator is less than 1N.

• Smart Structures and Systems
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• 제25권6호
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• pp.707-717
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• 2020

In this paper, analysis of thermal post-buckling behaviors of sandwich nanobeams with two layers of multi-phase magneto-electro-thermo-elastic (METE) composites have been presented considering geometric imperfection effects. Multi-phase METE material is composed form piezoelectric and piezo-magnetic constituents for which the material properties can be controlled based on the percentages of the constituents. Nonlinear governing equations of sandwich nanobeam are derived based on nonlocal elasticity theory together with classic thin beam model and an analytical solution is provided. It will be shown that post-buckling behaviors of sandwich nanobeam in thermo-electro-magnetic field depend on the constituent's percentages. Buckling temperature of sandwich nanobeam is also affected by nonlocal scale factor, magnetic field intensity and electrical voltage.