• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• Economic and Environmental Geology
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• v.55 no.6
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• pp.727-736
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• 2022

Ice wedges are subsurface ice mass structures that formed mainly by freezing precipitation with airborne dust and surrounding soil particles flowed through the active layer into the cracks growing by repeating thermal contractions in the deeper permafrost layer over time. These ice masses characteristically contain high concentrations of solutes and solids. Because of their unique properties and distribution, the possibility of harnessing ice wedges as an alternative archive for reconstructing paleoclimate and paleoenvironment has been recently suggested despite limited studies. It is imperative to preserve the physicochemical properties of the ice wedge (e.g., solute concentration, mineral particles) without any potential alteration to use it as a proxy for reconstructing the paleo-information. Thawing the ice wedge samples is prerequisite for the assessment of their physicochemical properties, during which the paleo-information could be unintentionally altered by any methodological artifact. This study examined the effect of thawing conditions and procedures on the physicochemical properties of solutes and solid particles in ice wedge samples collected from Cyuie, East Siberia. Four different thawing conditions with varying temperatures (4 and 23℃) and oxygen exposures (oxic and anoxic) for the ice wedge sample treatment were examined. Ice wedge samples thawed at 4℃ under anoxic conditions, wherein biological activity and oxidation were kept to a minimum, were set as the standard thawing conditions to which the effects of temperature and oxygen were compared. The results indicate that temperature and oxygen exposure have negligible effects on the physicochemical characteristics of the solid particles. However, the chemical features of the solution (e.g., pH, electric conductivity, alkalinity, and concentration of major cations and trace elements) at 4℃ under oxic conditions were considerably altered, compared to those measured under the standard thawing conditions. This study shows that the thawing condition of ice wedge samples can affect their chemical features and thereby the geochemical information therein for the reconstruction of the paleoclimate and/or paleoenvironment.