• 제목/요약/키워드: Thermal cycles

검색결과 494건 처리시간 0.026초

반도체소자의 표면보호용 PSG, PE-SIN박막의 항균열특성에 대한 연구 (The Crack Resistance for PSG and Pe-Sin Films in the Semiconductor Device)

  • 하정민;신홍재;이수웅;김영욱;이정규
    • 한국재료학회지
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    • 제3권2호
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    • pp.166-174
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    • 1993
  • 반도체 소자의 표면 보호용으로 사용되는 상압 CVD 방법에 의한 PSG(Phosposilicate glass)막 및 플라즈마 CVD방법에 의한 PE-SiN(Plasma enhanced CVD S${i_2}{N_4}$)막의 항균열 특성을 알루미늄박막이 증착되어 있는 실리콘 기판위에서 조사했다. 45$0^{\circ}C$에서 30분간으 열처리를 반복하면서 균열 발생 유무 및 그 형태를 조사하여 이러한 균열의 생성을 각 막의 막응력과 관련하여 검토하였다. 이들 박막에서의 균열 발생은 하부 조직인 알루미튬배선과의 열팽창계수차에 의한 것임을 알 수 있었다. PSG막 두께가 증가할수록 인장응력이 증가하여 항균열성이 저하되었다. PSG막의 P농도가 증가할수록 막응력은 압축응력쪽으로 이동하였고 균열 발생은 억제되었다. PE-SiN 막도 높은 압축응력을 갖게 함으로써 항균열성을 향상시킬 수 있었다. 본 실험의 결과로부터 반복 열처리시 균열 발생여부에 대한 실험식을 제시하였다.

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수소화기상증착공정을 이용한 마그네슘하이드라이드 미세분말 합성 (Synthesis of Sub-Micron MgH2 using Hydriding Thermal Chemical Vapor Synthesis)

  • 강태희;김진호;한규성;김병관
    • 한국수소및신에너지학회논문집
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    • 제23권5호
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    • pp.455-460
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    • 2012
  • This work describes the hydriding chemical vapor synthesis (HCVS) of the $MgH_2$ in a hydrogen atmosphere and the product's hydriding-dehydridng properties. Mg powder was used as a starting material to synthesize $MgH_2$ and uniformly heated to a temperature of $600^{\circ}C$ for Mg vaporization. The effects of hydrogen pressure on the morphology and the composition of HCVS-$MgH_2$ were examined by using X-ray diffraction (XRD) and scanning electron microscopy (SEM). It is clearly seen that after the HCVS process, the particle size of synthesized $MgH_2$ was drastically reduced to the submicron or micrometer-scale and these showed different shapes (needle-like nanofibers and angulated plate) depending on the hydrogen pressure. It was found that after the HCVS process, the $H_2$ desorption temperature of HCVS-$MgH_2$ decreased from 380 to $410^{\circ}C$, and the minimum hydrogen desorption tempreature of HCVS-$MgH_2$ powder with needle-like shape can be obtained. In addition, the enhanced hydrogen storage performance for needle-like $MgH_2$ was achieved during subsequent hydriding-dehydriding cycles.

A STUDY ON THE RELATIONSHIP BETWEEN PLASMA CHARACTERISTICS AND FILM PROPERTIES FOR MgO BY PULSED DC MAGNETRON SPUTTERING

  • Nam, Kyung H.;Chung, Yun M.;Han, Jeon G.
    • 한국표면공학회:학술대회논문집
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    • 한국표면공학회 2001년도 추계학술발표회 초록집
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    • pp.35-35
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    • 2001
  • agnesium Oxide (MgO) with a NaCI structure is well known to exhibit high secondary electron emission, excellent high temperature chemical stability, high thermal conductance and electrical insulating properties. For these reason MgO films have been widely used for a buffer layer of high $T_c$ superconducting and a protective layer for AC-plasma display panels to improve discharge characteristics and panel lifetime. Up to now MgO films have been synthesized by lE-beam evaporation, Molecular Beam Epitaxy (MBE) and Metalorganic Chemical Vapor Deposition (MOCVD), however there have been some limitations such as low film density and micro-cracks in films. Therefore magnetron sputtering process were emerged as predominant method to synthesis high density MgO films. In previous works, we designed and manufactured unbalanced magnetron source with high power density for the deposition of high quality MgO films. The magnetron discharges were sustained at the pressure of O.lmtorr with power density of $110W/\textrm{cm}^2$ and the maximum deposition rate was measured at $2.8\mu\textrm{m}/min$ for Cu films. In this study, the syntheses of MgO films were carried out by unbalanced magnetron sputtering with various $O_2$ partial pressure and specially target power densities, duty cycles and frequency using pulsed DC power supply. And also we investigated the plasma states with various $O_2$ partial pressure and pulsed DC conditions by Optical Emission Spectroscopy (OES). In order to confirm the relationships between plasma states and film properties such as microstructure and secondary electron emission coefficient were analyzed by X-Ray Diffraction(XRD), Transmission Electron Microscopy(TEM) and ${\gamma}-Focused$ Ion Beam (${\gamma}-FIB$).

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PC 기판위에 성막한 IZO/Ag/IZO 박막의 특성과 이를 이용하여 제작한 플렉시블 유기발광다이오드의 특성 분석 (Characteristics of flexible IZO/Ag/IZO anode on PC substrate for flexible organic light emitting diodes)

  • 조성우;정진아;배정혁;문종민;최광혁;김한기
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.381-382
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    • 2007
  • IZO/Ag/IZO (IAI) anode films for flexible organic light emitting diodes (OLEDs) were grown on PC (polycarbonate) substrate using DC sputter (IZO) and thermal evaporator (Ag) systems as a function of Ag thickness. To investigate electrical and optical properties of IAI stacked films, 4-point probe and UV/Vis spectrometer were used, respectively. From a IAI stacked film with 12nm-thick Ag, sheet resistance of $6.9\;{\Omega}/{\square}$ and transmittance of above 82 % at a range of 500-550 nm wavelength were obtained. In addition, structural and surface properties of IAI stacked films were analyzed by XRD (X-ray diffraction) and SEM (scanning electron microscopy), respectively. Moreover, IAI stacked films showed dramatically improved mechanical properties when subjected to bending both as a function of number of cycles to a fixed radius. Finally, OLEDs fabricated on both flexible IAI stacked anode and conventional ITO/Glass were fabricated and, J-V-L characteristics of those OLEDs were compared by Keithley 2400.

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Alanine and serine functionalized magnetic nano-based particles for sorption of Nd(III) and Yb(III)

  • Galhoum, Ahmed A.;Mahfouz, Mohammad G.;Atia, Asem A.;Gomaa, Nabawia A.;Abdel-Rehem, Sayed T.;Vincent, Thierry;Guibal, Eric
    • Advances in environmental research
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    • 제5권1호
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    • pp.1-18
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    • 2016
  • Magnetic nano-based sorbents have been synthesized for the recovery of two rare earth elements (REE: Nd(III) and Yb(III)). The magnetic nano-based particles are synthesized by a one-pot hydrothermal procedure involving co-precipitation under thermal conditions of Fe(III) and Fe(II) salts in the presence of chitosan. The composite magnetic/chitosan material is crosslinked with epichlorohydrin and modified by grafting alanine and serine amine-acids. These materials are tested for the binding of Nd(III) (light REE) and Yb(III) (heavy REE) through the study of pH effect, sorption isotherms, uptake kinetics, metal desorption and sorbent recycling. Sorption isotherms are well fitted by the Langmuir equation: the maximum sorption capacities range between 9 and 18 mg REE $g^{-1}$ (at pH 5). The sorption mechanism is endothermic (positive value of ${\Delta}H^{\circ}$) and contributes to increase the randomness of the system (positive value of ${\Delta}S^{\circ}$). The fast uptake kinetics can be described by the pseudo-second order rate equation: the equilibrium is reached within 4 hours of contact. The sub-micron size of sorbent particles strongly reduces the contribution of resistance to intraparticle diffusion in the control of uptake kinetics. Metal desorption using acidified thiourea solutions allows maintaining sorption efficiency for at least four successive cycles with limited loss in sorption capacity.

Modification of RFSP to Accommodate a True Two-Group Treatment

  • Bae, Chang-Joon;Kim, Bong-Ghi;Suk, Soo-Dong;D. Jenkins;B. Rouben
    • 한국원자력학회:학술대회논문집
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    • 한국원자력학회 1996년도 춘계학술발표회논문집(1)
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    • pp.185-190
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    • 1996
  • RFSP is a computer program to do fuel management calculations for CANDU reactors. Its main function is to calculate neutron flux and power distributions using two-energy-group, three dimensional neutron diffusion theory. However, up to now the treatment has not been true two-group but actually "one-and-half groups". In other words, the previous (1.5-group) version of RFSP lumps the fast fission term into the thermal fission term. This is based on the POWDERPUFS-V Westcott convention. Also, there is no up-scattering term or bundle power over cell flux (H1 factor) for the fast group. While POWDERPUFS-V provides only 1.5 group properties, true two-group cross sections for the design and analysis of CAUDU reactors can be obtained from WIMS-AECL. To treat the full two-group properties, the previous RFSP version was modified by adding the fast fission, up-scatter terms, and H1 factor. This two-group version of RFSP is a convenient tool to accept lattice properties from any advanced lattice code (e.g. WIMS-AECL DRAGON, HELIOS...) and to apply to advanced fuel cycles. In this study, the modification to implement the true two-group treatment was performed only in the subroutines of the *SIMULATE module of RFSP. This module is the appropriate one to modify first, since it is used for the tracking of reactor operating histories. The modified two-group RFSP was evaluated with true two-group cross sections from WIMS-AECL. Some tests were performed to verify the modified two-group RFSP and to evaluate the effects of fast fission and up-scatter for three core conditions and four cases corresponding to each condition. The comparisons show that the two-group results are quite reasonable and serve as a verification of the modifications made to RFSP. To assess the long-term impact of the full 2-group treatment, it is necessary to simulate a long period (several months) of reactor history. It will also be necessary to implement the full two-group treatment of reactivity devices and assess the reactivity-device worths.ce worths.

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CORE DESIGN FOR HETEROGENEOUS THORIUM FUEL ASSEMBLIES FOR PWR(1)-NUCLEAR DESIGN AND FUEL CYCLE ECONOMY

  • BAE KANG-MOK;KIM MYUNG-HYUN
    • Nuclear Engineering and Technology
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    • 제37권1호
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    • pp.91-100
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    • 2005
  • Kyung-hee Thorium Fuel (KTF), a heterogeneous thorium-based seed and blanket design concept for pressurized light water reactors, is being studied as an alternative to enhance proliferation resistance and fuel cycle economics of PWRs. The proliferation resistance characteristics of the KTF assembly design were evaluated through parametric studies using neutronic performance indices such as Bare Critical Mass (BCM), Spontaneous Neutron Source rate (SNS), Thermal Generation rate (TG), and Radio-Toxicity. Also, Fissile Economic Index (FEI), a new index for gauging fuel cycle economy, was suggested and applied to optimize the KTF design. A core loaded with optimized KTF assemblies with a seed-to-blanket ratio of 1: 1 was tested at the Korea Next Generation Reactor (KNGR), ARP-1400. Core design characteristics for cycle length, power distribution, and power peaking were evaluated by HELIOS and MASTER code systems for nine reload cycles. The core calculation results show that the KTF assembly design has nearly the same neutronic performance as those of a conventional $UO_2$ fuel assembly. However, the power peaking factor is relatively higher than that of conventional PWRs as the maximum Fq is 2.69 at the M$9^{th}$ equilibrium cycle while the design limit is 2.58. In order to assess the economic potential of a heterogeneous thorium fuel core, the front-end fuel cycle costs as well as the spent fuel disposal costs were compared with those of a reference PWR fueled with $UO_2$. In the case of comprising back-end fuel cycle cost, the fuel cycle cost of APR-1400 with a KTF assembly is 4.99 mills/KWe-yr, which is lower than that (5.23 mills/KWe-yr) of a conventional PWR. Proliferation resistance potential, BCM, SNS, and TG of a heterogeneous thorium-fueled core are much higher than those of the $UO_2$ core. The once-through fuel cycle application of heterogeneous thorium fuel assemblies demonstrated good competitiveness relative to $UO_2$ in terms of economics.

Fabrication of a Porous Copper Current Collector Using a Facile Chemical Etching to Alleviate Degradation of a Silicon-Dominant Li-ion Battery Anode

  • Choi, Hongsuk;Kim, Subin;Song, Hayong;Suh, Seokho;Kim, Hyeong-Jin;Eom, KwangSup
    • Corrosion Science and Technology
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    • 제20권5호
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    • pp.249-255
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    • 2021
  • In this work, we proposed a facile method to fabricate the three-dimensional porous copper current collector (3D Cu CC) for a Si-dominant anode in a Li-ion battery (LiB). The 3D Cu CC was prepared by combining chemical etching and thermal reduction from a planar copper foil. It had a porous layer employing micro-sized Cu balls with a large surface area. In particular, it had strengthened attachment of Si-dominant active material on the CC compared to a planar 2D copper foil. Moreover, the increased contact area between a Si-dominant active material and the 3D Cu could minimize contact loss of active materials from a CC. As a result of a battery test, Si-dominant active materials on 3D Cu showed higher cyclic performance and rate-capability than those on a conventional planar copper foil. Specifically, the Si electrode employing 3D Cu exhibited an areal capacity of 0.9 mAh cm-2 at the 300th cycles (@ 1.0 mA cm-2), which was 5.6 times higher than that on the 2D copper foil (0.16 mAh cm-2).

The effect of silane and universal adhesives on the micro-shear bond strength of current resin-matrix ceramics

  • Sarahneh, Omar;Gunal-Abduljalil, Burcu
    • The Journal of Advanced Prosthodontics
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    • 제13권5호
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    • pp.292-303
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    • 2021
  • PURPOSE. The aim of this in vitro study was to evaluate the effect of silane and universal adhesive applications on the micro-shear bond strength (µSBS) of different resin-matrix ceramics (RMCs). MATERIALS AND METHODS. A total of 120 slides (14 × 12 × 1 mm) were produced from 5 different RMC materials (GC Cerasmart [GC]; Brilliant Crios [BC]; Grandio blocs [GB]; Katana Avencia [KA]; and KZR-CAD HR 2 [KZR]) and sandblasted using 50 ㎛ Al2O3 particles. Each RMC material was divided into six groups according to the surface conditioning (SC) method as follows: control (G1), silane primer (G2), silane-free universal adhesive (G3), silane-containing universal adhesive (G4), silane primer and silane-free universal adhesive (G5), and silane primer and silane-containing universal adhesive (G6). Three cylindric specimens made from resin cement (Bifix QM) were polymerized over the treated surface of each slide (n = 12). After thermal cycling (10000 cycles, 5 - 55℃), µSBS test was performed and failure types were evaluated using a stereomicroscope. Data were analyzed using 2-way ANOVA and Tukey tests (α = .05). RESULTS. µSBS values of specimens were significantly affected by the RMC type and SC protocols (P < .001) except the interaction (P = .119). Except for G2, all SC protocols showed a significant increase in µSBS values (P < .05). For all RMCs, the highest µSBS values were obtained in G4 and G6 groups. CONCLUSION. Only silane application did not affect the µSBS values regardless of the RMC type. Moreover, the application of a separate silane in addition to the universal adhesives did not improve the µSBS values. Silane-containing universal adhesive was found to be the best conditioning method for RMCs.

Immobilization and Performance of Penicillin G Acylase on Magnetic Ni0.7Co0.3Fe2O4@SiO2-CHO Nanocomposites

  • Lv, Zhixiang;Yu, Qingmei;Wang, Zhou;Liu, Ruijiang
    • Journal of Microbiology and Biotechnology
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    • 제29권6호
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    • pp.913-922
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    • 2019
  • Magnetic $Ni_{0.7}Co_{0.3}Fe_2O_4$ nanoparticles that were prepared via the rapid combustion process were functionalized and modified to obtain magnetic $Ni_{0.7}Co_{0.3}Fe_2O_4@SiO_2-CHO$ nanocomposites, on which penicillin G acylase (PGA) was covalently immobilized. Selections of immobilization concentration and time of fixation were explored. Catalytic performance of immobilized PGA was characterized. The free PGA had greatest activity at pH 8.0 and $45^{\circ}C$ while immobilized PGA's activities peaked at pH 7.5 and $45^{\circ}C$. Immobilized PGA had better thermal stability than free PGA at the range of $30-50^{\circ}C$ for different time intervals. The activity of free PGA would be 0 and that of immobilized PGA still retained some activities at $60^{\circ}C$ after 2 h. $V_{max}$ and $K_m$ of immobilized PGA were 1.55 mol/min and 0.15 mol/l, respectively. Free PGA's $V_{max}$ and $K_m$ separately were 0.74 mol/min and 0.028 mol/l. Immobilized PGA displayed more than 50% activity after 10 successive cycles. We concluded that immobilized PGA with magnetic $Ni_{0.7}Co_{0.3}Fe_2O_4@SiO_2-CHO$ nanocomposites could become a novel example for the immobilization of other amidohydrolases.