• Structural Engineering and Mechanics
• /
• v.8 no.1
• /
• pp.103-118
• /
• 1999

The structural integrity of the reactor pressure vessel under pressurized thermal shock (PTS) is evaluated in this study. For given material properties and transient histories such as temperature and pressure, the stress distribution is found and stress intensity factors are obtained for a wide range of crack sizes. The stress intensity factors are compared with the fracture toughness to check if cracking is expected to occur during the transient. A round robin problem of the PTS during a small break loss of coolant transient has been analyzed as a part of the international comparative assessment study, and the evaluation results are discussed. The maximum allowable nil-ductility transition temperatures are determined for various crack sizes.

• Tribology and Lubricants
• /
• v.22 no.4
• /
• pp.182-189
• /
• 2006

In this paper, the adhesion characteristics between a fused silica without or with an anti-sticking layer and a thermoplastic polymer film used in thermal NIL were investigated experimentally in order to identify the release performance of the anti-sticking layer. The anti-sticking layers were derived from fluoroalkylsilanes, (1H, 1 H, 2H, 2H-perfluorooctyl)trichlorosilane ($F_{13}-OTS$) and (3, 3, 3-trifluoropropyl)trichlorosilane (FPTS), and coated on the silica surface in vapor phase. The commercial polymers, mr-I 7020 and 8020 (micro resist technology, GmbH), for thermal NIL were spin-coated on Si substrate with a rectangular island which was fabricated by conventional microfabrication process to achieve small contact area and easy alignment of flat contact sur- faces. Experimental conditions were similar to the process conditions of thermal NIL. When the polymer film on the island was separated from the silica surface after imprint process, the adhesion force between the silica surface and the polymer film was measured and the surfaces of the silica and the polymer film after the separation were observed. As a result, the anti-sticking layers remarkably reduced the adhesion force and the surface damage of polymer film and the chain length of silane affects the adhesion characteristics. The anti-sticking layers derived from FPTS and $F_{13}-OTS$ reduced the adhesion force per unit area to 38% and 16% of the silica sur-faces without an anti-sticking layer, respectively. The anti-sticking layer derived from $F_{13}-OTS$ was more effective to reduce the adhesion, while both of the anti-sticking layers prevented the surface damages of the polymer film. Finally, it is also found that the adhesion characteristics of mr-I 7020 and mr-I 8020 polymer films were similar with each other.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2008.10a
• /
• pp.325-328
• /
• 2008

With intensive research and development to mass particular nanostructure of 10nm, Nanoimprint lithography will soon be put to practical use. This paper reviews latest research and application trend and also covers technical articles about Nanoimprint lithography technology Published since 1998, including statistical analysis of collected data(Web of Science DB) and related technical trend.

• Tribology and Lubricants
• /
• v.32 no.1
• /
• pp.1-8
• /
• 2016

This paper focuses on the thermal deformation induced preload change in the tilting pad journal bearing, using a three-dimensional (3D) thermo-hydro-dynamic (THD) approach. Preload is considered as a critical factor in designing the tilting pad journal bearing. The initial preload measured under nil external load and nil thermal gradient is influenced by two factors, namely, the thermal deformation and elastic deformation. Thermal deformation is due to a temperature distribution in the bearing pads, whereas the elastic deformation is due to fluid forces acting on the pads. This study focuses on the changes induced in preload and film clearance due to thermal deformation. The generalized Reynolds equation is used to evaluate the force of the fluid and the 3D energy equation is used to calculate the temperature of the lubricant. The abovementioned equations are combined by establishing a relationship between viscosity and temperature. The heat transfer within the bearing pads, the lubricant, and the spinning journal is calculated using the heat flux boundary condition. The 3D Finite Element Method (FEM) is used in modeling the (1) heat conduction in the spinning journal and bearing pads, (2) thermal gradient induced thermal distortion of the spinning journal and pads, and (3) viscous shearing, and heat conduction and convection in a thin film. This evaluation method has an increased fidelity, and it can prove to be a cost-effective tool that can be used by designers to predict the dynamic behavior of a bearing.

• Nuclear Engineering and Technology
• /
• v.30 no.5
• /
• pp.470-484
• /
• 1998

An analysis program for the evaluation of pressure vessel integrity under pressurized thermal shock (PTS) is developed. For given material properties and transient history such as temperature and pressure, the stress distribution is calculated and then stress intensity factors are obtained for a wide range of crack sizes. The stress intensity factors are compared with the fracture toughness to check if cracking is expected to occur during the transient. Using this program a round robin problem of PTS during a small break loss of coolant transient has been analyzed as a part of the international comparative assessment study. The allowable maximum reference nil-ductility transition temperatures are determined for various crack sizes.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.15 no.4
• /
• pp.1838-1843
• /
• 2014

Nanoimprint lithography (NIL) fabrication process is regarded as the main alternative to existing expensive photo-lithography in areas such as micro- and nano-electronics including optical components and sensors, as well as the solar cell and display device industries. Functional patterns, including anti-reflective moth-eye pattern, photonic crystal pattern, fabricated by NIL can improve the overall efficiency of such devices. To successfully imprint a nano-sized pattern, the process conditions such as temperature, pressure, and time should be appropriately selected. In this paper, a cavity-filling process of the moth-eye pattern during the thermal-NIL within the temperature range, where the polymer resist shows the viscoelastic behaviors with consideration of stress relaxation effect of the polymer, were investigated with three-dimensional finite element analysis. The effects of initial thickness of polymer resist and imprinting pressure on cavity-filling process has been discussed. From the analysis results it was found that the cavity filling can be completed within 100 s, under the pressure of more than 4 MPa.

• Nuclear Engineering and Technology
• /
• v.28 no.4
• /
• pp.405-414
• /
• 1996

In this paper, the unsteady 2-dimensional turbulent flow model for thermal stratification in a pressurizer surge line of PWR plant is proposed to numerically investigate the heat transfer and flow characteristics. The turbulence model is adapted to the low Reynolds number K-$\varepsilon$ model (Davidson model). The dimensionless governing equations are solved by using the SIMPLE (Semi-Implicit Method for Pressure Linked Equations) algorithm. The results are compared with simulated experimental results of TEMR Test. The time-dependent temperature profiles in the fluid and pipe nil are shown with the thermal stratification occurring in the horizontal section of the pipe. The corresponding thermal stresses are also presented. The numerical result for thermal stratification by the outsurge during heatup operation of PWR shows that the maximum dimensionless temperature difference is about 0.83 between hot and cold sections of pipe well and the maximum thermal stress is calculated about 322MPa at the dimensionless time 28.5 under given conditions.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2007.05a
• /
• pp.199-204
• /
• 2007

Hot embossing, one of Nanoimprint Lithography(NIL) techniques, has been getting attention as an alternative candidate of next generation patterning technologies by the advantages of simplicity and low cost compared to conventional photolithographies. A typical hot embossing usually, however, takes more than ten minutes for one cycle of the process because of a long thermal cycling. Over the last few years a number of studies have been made to reduce the cycle time for hot embossing or similar patterning processes. The target of this research is to develop an induction heating apparatus for heating a metallic micro patterning mold at very high speed with the large-area uniformity of temperature distribution. It was found that a 0.5 mm-thick nickel mold can be heated from $25^{\circ}C$ to $150^{\circ}C$ within 1.5 seconds with the temperature variation of ${\pm}5^{\circ}C$ in 4-inch diameter area, using the induction heating apparatus.

• Journal of the Microelectronics and Packaging Society
• /
• v.12 no.4 s.37
• /
• pp.275-280
• /
• 2005

We propose a new approach to greatly simplify the fabrication of conventional nanoimprint lithography (NIL) by combined nanoimprint and photolithography (CNP). We introduce a hybrid mask mold (HMM) made from UV transparent material with a UV-blocking Cr metal layer placed on top of the mold protrusions. We used a negative tone photo resist (PR) with higher selectivity to substrate the CNP process instead of the UV curable monomer and thermal plastic polymer that has been commonly used in NIL. Self-assembled monolayer (SAM) on HMM plays a reliable role for pattern transfer when the HMM is separated from the transfer layer. Hydrophilic $SiO_2$ thin film was deposited on all parts of the HMM, which improved the formation of SAM. This $SiO_2$ film made a sub-10nm formation without any pattern damage. In the CNP technique with HMM, the 'residual layer' of the PR was chemically removed by the conventional developing process. Thus, it was possible to simplify the process by eliminating the dry etching process, which was essential in the conventional NIL method.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.26 no.1
• /
• pp.39-47
• /
• 2002

Performed here is an assessment study for deterministic fracture mechanics analysis of a pressurized thermal shock(PTS). The PTS event means an event or transient in pressurized water reactors(PWRs) causing severe overcooling(thermal shock) concurrent with or followed by significant pressure in the reactor vessel. The problems consisting of two transients and 10 cracks are solved and maximum stress intensity factors and maximum allowable nil-ductility reference temperatures are calculated. Their results are compared each other to address the general characteristics between transients, crack types and analysis methods. The effects of elastic-plastic material behavior and clad coating on the inner surface are explored.