• Journal of the Korean Society for Precision Engineering
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• v.26 no.11
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• pp.138-145
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• 2009

A suspended membrane micro fluidic heat flux sensor that is able to measure the heat flow rate was designed and fabricated by a complementary-metal-oxide-semiconductor-compatible process. The combination of a thirty-junction gold and nickel thermoelectric sensor with an ultralow noise preamplifier, low pass filter, and lock-in amp has enabled the resolution of 50 nW power and provides the sensitivity of $11.4\;mV/{\mu}W$. The heater modulation method was used to eliminate low frequency noises from sensor output. It is measured with various heat flux fluid of DI-water to test as micro fluidic application. In order to estimate the heat generation of samples from the output measurement of a micro fluidic heat-flux sensor, a methodology for modeling and simulating electro-thermal behavior in the micro fluidic heat-flux sensor with integrated electronic circuit is presented and validated. The electro-thermal model was constructed by using system dynamics, particularly the bond graph. The electro-thermal system model in which the thermal and the electrical domain are coupled expresses the heat generation of samples converts thermal input to electrical output. The proposed electro-thermal system model shows good agreement with measured output voltage response in transient state and steady-state.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1951-1956
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• 2008

Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.37 no.3
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• pp.237-242
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• 2013

This paper proposes a thermal peripheral blood flowmeter integrated with a force sensor that is capable of contact force compensation. We fabricate this blood flowmeter using a nickel RTD (resistance temperature detector) and piezoresistive force sensor by using microfabrication technology. In an experiment, we obtained a decreasing trend for the blood flow under an increasing contact force with a linear tendency of 31.7%/N. We then performed a compensation process based on this obtained trend. As a result, the maximum variance in the blood flow at 1-3N was 9.8%. Thus we achieved consistent blood flow measurement independent of the contact force. In this work, we verified that the thermal blood flowmeter integrated with a force sensor has the ability to accurately measure the blood flow independent of the contact force.

• Proceedings of the Korean Geotechical Society Conference
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• 2006.03a
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• pp.1100-1109
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• 2006

In this study, two different technologies which can measure temperature simultaneously at many points are introduced. One is to use a thermal sensor cable that is comprised of addressable thermal sensors connected in parallel within a single cable. The other is to use an optic fiber with Distributed Temperature Sensing (DTS) system. The difference between two technologies can be summarized as follows. A thermal sensor cable has a concept of 'point sensing' that can measure temperature at accurate position of a thermal sensor. So the accuracy and resolution of temperature measurement are up to the ability of the thermal sensor. Whereas optic fiber sensor has a concept of 'distributed sensing' because temperature is measured by ratio of Stokes and anti-Stokes component intensities of Raman backscatter that is generated when laser pulse travels along an optic fiber. It's resolution is determined by measuring distance, measuring time and spatial resolution. The purpose of this study is that application targets of two temperature measurement techniques are checked in technical and economical phases by examining the strength and weakness of them. Considering the functions and characteristics of two techniques, the thermal sensor cable will be suitable to apply to the assessment of groundwater flow, geothermal distribution and grouting efficiency within 300m distance. It is expected that the optic fiber sensor can be widely utilized at various fields (for example: pipe line inspection, tunnel fire detection, power line monitoring etc.) which need an information of temperature distribution over relatively long distance.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2692-2695
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• 2008

Polydiacetylene (PDA) is chemosensor materials that exhibit non-fluorescent-to-fluorescent transition as well as blue-to-red visible color change upon chemical or thermal stress. They have been studied in forms of film or microarray chip, so far. In this paper, we provide a novel technique to fabricate continuous micro-fiber PDA sensor using in-situ laser-polymerization technique and 3-D hydrodynamic focusing on a microfluidic chip. The flow of a monomer solution with diacetylene (DA) monomer is focused by a sheath flow on a 3-D microfluidic chip. The focused flow is exposed to 365 nm UV laser beam for in-situ polymerization which generates a continuous fiber containing DA monomers. Then, the fiber is exposed to 254 nm UV light to polymerize DA monomers to PDA. Preliminary results indicate that the fiber size can be controlled by the flow rates of the monomer solution and sheath flows and that a PDA sensor fiber successively responds to chemical and thermal stress.

• Proceedings of the KSME Conference
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• 2000.04b
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• pp.154-161
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• 2000

As a mass flow controller is widely used in many manufacturing processes for controlling a mass flow rate of gas with accuracy of 1%, several investigators have tried to describe the heat transfer phenomena in a sensor tube of an MFC. They suggested a few analytic solutions and numerical models based on simple assumptions, which are physically unrealistic. In the present work, the heat transfer phenomena in the sensor tube of the MFC are studied by using both experimental and numerical methods. The numerical model is introduced to estimate the temperature profile in the sensor tube as well as in the gas stream. In the numerical model, the conjugate heat transfer problem comprising the tube wall and the gas stream is analyzed to fully understand the heat transfer interaction between the sensor tube and the fluid stream using a single domain approach. This numerical model is further verified by experimental investigation. In order to describe the transport of heat energy in both the flow region and the sensor tube, the Nusselt number at the interface between the tube wall and the gas stream as well as heatlines is presented from the numerical solution.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.246-247
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• 2005

This study suggested fanless thermal design using CAE technique for the information storage system under the serious thermal problem. At first, main heat flow was controlled by CAE based fanless heat sink design not to influence sensitive optical pick-up sensor. Then, vent parametric studies found a thermal solution about highly concentrated case top heat due to fanless. These CAE results were verified by experimental methods. As a consequence of newly designed thermal path, thermal specification of optical pick-up sensor was satisfied and fanless thermal design for the information storage system was achieved.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1842-1846
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• 2008

This work reports development of novel liquid-level sensors based on the $3{\omega}$ method. The sensors determine the liquid level by measuring the thermal response as in the conventional hot-wire technique. However the sensors employ an AC heating method to enhance the sensitivity, noise resistance and time response. Also, the microfabricated thin-film structure of the sensor provides mass-producibility as well as improved sensor performance owing to the increase in the surface-volume ratio of the sensor. Two different types of the sensor are developed: one for point detection of the fluid phase and the other for monitoring continuous variation of liquid level. Notable is that the performance of the sensor is not considerably affected by the liquid flow.

• Journal of Sensor Science and Technology
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• v.5 no.6
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• pp.51-59
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• 1996

A flow sensor has been fabricated by preparing thin film Pt-heater and Bi-Sb thermocouples array on 150 nm-$Si_{3}N_{4}$/300 nm-$SiO_{2}$/150 nm-$Si_{3}N_{4}$ dielectric diaphragm which has low thermal conductivity and balanced stress with silicon substrate for the purpose of improving the thermal isolation between heater and silicon substrate. Pt-heater showed nonlinear I-V characteristics due to the thermal isolation effect of the diaphragm. Its temperature coefficient of resistance was about $0.00378\;/^{\circ}C$ and Seebeck coefficient of Bi-Sb thermocouple was about $97\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and flow sensitivity increased as heater voltage increased or as the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_{2}$-flow sensitivity and thermal response time of the sensor were about $1.27\;mV{\cdot}(sccm)^{-1/2}$ and 0.13 sec., respectively.

• Journal of Mechanical Science and Technology
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• v.19 no.7
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• pp.1449-1459
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• 2005

This paper shows the results of local flow speed measurement using tunable AC thermal anemometry, which is suitable for the accurate measurement of wide range flow speed. The measurement accuracy is verified through the comparison between the measurement data and the analytic solution of the sensor temperature oscillation in stationary fluid. The relation between the phase lag and the flow speed is experimentally investigated at various conditions. The measurement sensitivity for low flow speed improves in a low frequency region and that for high flow speed improves in a high frequency region. Also, the sensitivity increases with decreasing thermal conductivity of the surrounding fluid. The local flow speed could be measured as low as 1.5 mm/s and the highest measurement resolution was 0.05 mm/s in the range of 4.5 $\~$5.0 mm/s at 1 Hz in this experiment.