• 전자공학회논문지A
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• 제32A권3호
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• pp.68-77
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• 1995

Characteristics of electron cyclotron resonance (ECR) plasma thermal oxide grown at low-temperature have been investigated. The effects of several process parameters such as substrate temperature, microwave power, gas flow rate, and process pressure on the growth rate of the oxide have been also investigated. It was found that the plasma density, reactive ion species, is strongly related to the growth rate of ECR plasma oxied. It was also found that the plasma density increases with microwave power while it decreases with decreasing O2 flow rate. The oxidation time dependence of the oxide thichness showed parabolic characteristics. Considering ECR plasma thermal oxidation at low-temperature, the linear as well as parabolic rate constants calculated from fitting data by using the Deal-Grove model was very large in comparison with conventional thermal oxidation. The ECR plasma oxide grown on (100) crystalline-Si wafer exhibited good electrical characteristics which are comparable to those of thermal oxide: fixed oxide charge(N$_{ff}$)= 7${\times}10^{10}cm^{-2}$, interface state density(N$_{it}$)=4${\times}10^[10}cm^{-2}eV^{-1}$, and breakdown field > 8MV/cm.

• 대한기계학회논문집B
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• 제25권3호
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• pp.296-304
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• 2001

A new method of measuring the thermal diffusivity of solid material at room temperature using photothermal displacement is proposed. The influence of the parameters, such as radius and modulation frequency of the pump beam and the sample thickness, was studied. From the minimum position of phase of measured deflection with respect to the pump beam, the thermal diffusivity of the materials can be obtained. The position where phase has the minimum value is determined using multiparameter least-square regression fitting. The experimental values for different samples obtained by applying the new method are in good agreement with the literature values.

• International Journal of Aeronautical and Space Sciences
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• 제3권1호
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• pp.9-18
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• 2002

Thermal humidity characteristics were considered theoretically and experimentally. A Simply well-fitted correlation of a saturated vapor pressure-temperature curve of water was introduced based on Antoine equation to make theoretical prediction of relative humidity according to temperature variation. Characteristics of dew point were also examined theoretically and its relation with temperature and humidity was evaluated. The exact mass of water vapor in a specified humidity and temperature condition was estimated to provide useful insight into the idea about how much amount of water corresponds to a specified humidity and temperature condition in a confined system. A simple but well-fitting model of dehumidification process was introduced to anticipate the trend of relative humidity level during GN2(gaseous nitrogen) purge process in a humidity chamber. Well-suitedness of this model was also verified by comparison with experimental data. The overall appearance and specification of two thermal humidity chambers were introduced which were used to perform various thermal humidity tests in order to yield useful data necessary to support validity of theoretical models.

• Nuclear Engineering and Technology
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• 제22권1호
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• pp.75-81
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• 1990

핵연료봉내의 온도 분포를 결정하는데 있어서 중요한 핵연료소자와 피복판 사이의 접촉 열전도도를 결정하기 위한 실험을 수행하였다. 이 실험에 사용된 측정장치는 접촉압력을 임의로 변화시켜 줄 수 있는 가압기와 열전대, 진공펌프, 핵연료소자, 봉형태의 피복관, 그리고 두 개의 히터 등으로 구성되어 있다. 접촉 열전도도는 $UO_2$ 소자와 Zircaloy-2 피복관 사이의 접촉 압력과 표면 조도를 변화시키면서 측정하였다. 그 결과 두 물체사이의 접촉압력이 증가함에 따라, 그리고 표면이 매끄러울수록 접촉 열전달계수는 증가하였다. 실험에서 얻은 값을 가지고 상관식을 만들었으며 일반적으로 사용되고 있는 상관식과 비교하였다.

• Geomechanics and Engineering
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• 제16권5호
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• pp.483-493
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• 2018

Experimental study of the deterioration of high-temperature rock subjected to rapid cooling is essential for thermal engineering applications. To evaluate the influence of thermal shock on heated granite with different temperatures, laboratory tests were conducted to record the changes in the physical properties of granite specimens and the dynamic mechanical characteristics of granite after rapid cooling were experimentally investigated by using a split Hopkinson pressure bar (SHPB). The results indicate that there are threshold temperatures ($500-600^{\circ}C$) for variations in density, porosity, and P-wave velocity of granite with increasing treatment temperature. The stress-strain curves of $500-1000^{\circ}C$ show the brittle-plastic transition of tested granite specimens. It was also found that in the temperature range of $200-400^{\circ}C$, the through-cracks induced by rapid cooling have a decisive influence on the failure pattern of rock specimens under dynamic load. Moreover, the increase of crack density due to higher treatment temperature will result in the dilution of thermal shock effect for the rocks at temperatures above $500^{\circ}C$. Eventually, a fitting formula was established to relate the dynamic peak strength of pretreated granite to the crack density, which is the exponential function.

• Computers and Concrete
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• 제20권5호
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• pp.605-616
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• 2017

Concrete filled steel tubular (CFST) composite girder is a new type of structures for bridge constructions. The existing design codes cannot be used to predict the thermal stress in the CFST truss girder structures under solar radiation. This study is to develop the temperature gradient curves for predicting thermal stress of the structure based on field and laboratory monitoring data. An in-field testing had been carried out on Ganhaizi Bridge for over two months. Thermal couples were installed at the cross section of the CFST truss girder and the continuous data was collected every 30 minutes. A typical temperature gradient mode was then extracted by comparing temperature distributions at different times. To further verify the temperature gradient mode and investigate the evolution of temperature fields, an outdoor experiment was conducted on a 1:8 scale bridge model, which was installed with both thermal couples and strain gauges. The main factors including solar radiation and ambient temperature on the different positions were studied. Laboratory results were consistent with that from the in-field data and temperature gradient curves were obtained from the in-field and laboratory data. The relationship between the strain difference at top and bottom surfaces of the concrete deck and its corresponding temperature change was also obtained and a method based on curve fitting was proposed to predict the thermal strain under elevated temperature. The thermal stress model for CFST composite girder was derived. By the proposed model, the thermal stress was obtained from the temperature gradient curves. The results using the proposed model were agreed well with that by finite element modelling.

• 해양환경안전학회:학술대회논문집
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• 해양환경안전학회 2018년도 공동국제학술발표회
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• pp.176-176
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• 2018

• 제어로봇시스템학회논문지
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• 제6권6호
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• pp.500-505
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• 2000

This paper deals with wafer temperature uniformity control essential in rapid thermal processing (RTP). One of the important control objectives of RTP is to keep the temperature over the wafer surface as uniformly as possible. For this, a discrete time state equation around the operating point is first identified by using the subspace fitting method, and a multivariable LQG(Linear Quadratic Gaussian) controller is designed based on the identified model. Simulation and experimental results show improvement in temperature uniformity over the conventional PID method.

• 대한조선학회논문집
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• 제44권1호
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• pp.32-39
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• 2007

A three-dimensional finite element model has been developed to simulate the MIG P/S welding process of two aluminum plates. The finite element calculations are performed using ANSYS finite element code, which takes into account the thermal and mechanical non-linear material properties. The results of finite element analysis compared with those of experiment to show its validity in view of distortions. Parametric studies are carried out on the validated model to assess the effects of various factors on the final residual distortion. Large deformations, temperature dependent material properties are included in the model. Finally, the formulas of fitting curves of angular distortion transverse shrinkage, and longitudinal shrinkage have been proposed.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 심포지엄 논문집 정보 및 제어부문
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• pp.60-62
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• 2005

In this study, the automatic tracking algorithm tracing a human face is proposed by using YCbCr color coordinated information and its thermal properties expressed in terms of thermal indexes in an infra-red image. The facial candidates are separately estimated in CbCr color and infra-red domain, respectively with applying the morphological image processing operations and the geometrical shape measures for fitting the elliptical features of a human face. The identification of a true face is accomplished by logical 'AND' operation between the refined image in CbCr color and infra-red domain.