Effects of Oxygen Partial Pressure in Cooling after Deposition of PZT Thin Films by Reactive Sputtering
-
- Proceedings of the Korea Association of Crystal Growth Conference
- /
- 한국결정성장학회 1996년도 The 9th KACG Technical Annual Meeting and the 3rd Korea-Japan EMGS (Electronic Materials Growth Symposium)
- /
- pp.527-527
- /
- 1996