Fabrication of Alloy Target for Formation of Ti-Al-Si-N Composite Thin Film and Their Mechanical Properties (Ti-Al-Si-N 박막 제작을 위한 합금 타겟 제조 및 박막의 기계적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.29 no.10
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- pp.665-670
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- 2016