• Title/Summary/Keyword: Target evaporation

검색결과 63건 처리시간 0.027초

빛의 간섭현상을 이용한 증기용착 성장속도 측정법의 실험적 연구 (Optical(Interferometric) Measurements of Vapor Deposition Growth Rate and Dew Points in Combustion Gases)

  • 김상수;송영훈
    • 대한기계학회논문집
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    • 제10권3호
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    • pp.343-348
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    • 1986
  • 본 연구는 이와 같은 필요성에 의해 빛의 간섭현상을 이용하여 액체막이 부차 적인 유동을 일으키기 이전에 용착성장속도를 정량적으로 측정할 수 있었고, 터어빈 날개의 부식에 직접적으로 문제를 일으키는 황산나트륨과 황산칼륨의 용착성장속도를 측정하였다. 본 연구는 종래 액체막의 성장속도만을 빛의 간섭현상을 이용하여 측정 해오던 측정범위를 광원으로 사용된 레이저의 편광상태, 굴절율, 입사각등의 변화에 따른 간섭신호의 비교연구를 통해 고체상태막의 성장속도 및 막이 기화되어 증발되는 현상도 측정하였다. 따라서 증기상태의 무기염이 금속표면에 용착될 때 적용해온 Rosner의 이론을 실험결과와 비교할 수 있었고 응축된 상태로 증기에 표함되어 있는 경우와 이슬점(dew point:표면에 더 이상 용착이 일어나지 못하는 표면온도)의 해석에 보다 확장된 개념들을 도입할 수 있었다.

Effect of Sulfurization on CIGS Thin Films by RF Magnetron Sputtering Using a Cu(In1-xGax)Se2 Single Target

  • Jung, Sung Hee;Chung, Chee Won
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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    • pp.675-675
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    • 2013
  • CIGS thin films have received a great attention as a promising material for solar cells due to their high absorption coefficient, appropriate bandgap, long-term stability, and low cost production. CIGS thin films have been deposited by various methods such as co-evaporation, sputtering, spray pyrolysis and electro-deposition. In this study, Cu(In,Ga)Se2(CIGS) thin films were prepared using a single quaternary target by rf magnetron sputtering. The effect of sulfurization on the structural, compositional and electrical properties of the films was examined in order to develop the deposition process. An optimal sulfurization process will be selected for the preparation of CIGS thin films with good structural, optical and electrical properties by applying various sulfurization processes. In addition, the electrical properties of CIGS thin films were investigated by post-deposition annealing process. The carrier concentration of CIG(SSe) thin films after sulfurization was increased from $10^{14}cm^{-3}$ to $10^{16}cm^{-3}$ and the resistivity was increased from 10 ${\Omega}cm$ to $10^3$ ${\Omega}cm$. It is confirmed that CIG(SSe) thin films prepared at optimal deposition condition have similar atomic ratio to the target value after sulfurization.

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스퍼터링법으로 제작한 CIGS 박막의 후열처리에 따른 물성 평가 (Characteristic of the Sputtered CIGS Films in Relation to Heat Treatment Condition)

  • 정재헌;조상현;송풍근
    • 한국표면공학회지
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    • 제46권1호
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    • pp.16-21
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    • 2013
  • CIGS (Cu-In-Ga-Se) films were deposited on the Mo coated soda lime glass (Mo/SLG) by RF magnetron sputtering using a single sintered target with different chemical compositions. Heat treatment of the CIGS films were carried out under three different conditions, 1step ($350^{\circ}C$ for 2 hour and $550^{\circ}C$ for 2 hour) and 2step ($350^{\circ}C$ for 1 hour and $550^{\circ}C$ for 1 hour). In the case of CIGS films post-annealed on 2step method, grain size remarkably increased compared to other methods, indicating that chemical composition [Cu/(Ga+In) = 1] of CIGS films was same as CIGS target. After heat treatment by 2step method, band gap energy of the CIGS film deposited at RF 80 W showed 1.4 eV which is broadly similar to identical band gap energy (1.2 eV) of CIGS film prepared by evaporation method. Therefore, 2step heat treatment method could be expected to low temperature process.

Real Time Monitoring of Ionic Species Generated from Laser-Ablated Pb$(Zr_{0.52}Ti_{0.48})O_3$ Target Using Pulsed-Field Time-Of-Flight Mass spectrometer

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • 제19권8호
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    • pp.830-835
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    • 1998
  • The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

드레스룸 표면 결로 발생 예측 모델 개발 - 노달 모델과 데이터 기반 모델 - (Development of Prediction Models of Dressroom Surface Condensation - A nodal network model and a data-driven model -)

  • 주은지;이준혜;박철수;여명석
    • 대한건축학회논문집:구조계
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    • 제36권3호
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    • pp.169-176
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    • 2020
  • The authors developed a nodal network model that simulates the flow of moist air and the thermal behavior of a target area. The nodal network model was enhanced using a parameter estimation technique based on the measured temperature, humidity, and schedule data. However, the nodal model is not good enough for predicting humidity of the target space, having 55.6% of CVRMSE. It is because re-evaporation effect could not be modeled due to uncertain factors in the field measurement. Hence, a data-driven model was introduced using an artificial neural network (ANN). It was found that the data-driven model is suitable for predicting the condensation compared to the nodal model satisfying ASHRAE Guideline with 3.36% of CVRMSE for temprature, relative humidity, and surface temperature on average. The model will be embedded in automated devices for real-time predictive control, to minimize the risk of surface condensation at dressroom in an apartment housing.

사람 적혈구막 Band 3의 정제 및 Liposome으로의 도입 (Purification of Band 3 from the Human Erythrocyte Membrane and its Incorporation into Liposome)

  • 김재룡;김정희;이기영
    • Journal of Yeungnam Medical Science
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    • 제3권1호
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    • pp.41-48
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    • 1986
  • 사람의 적혈구막으로부터 Band 3를 분리정제하고 이를 liposome 내로 도입시켜 그 결과를 관찰하였다. 적혈구를 약알칼리 저장액으로 용혈시켜 막을 분리한 후, 저이온강도 용액으로 처리하여 Band 4를 추출하였다. Triton X-100 추출액에 p-chloromercuribenzoate를 가하고 sucrose density gradient ultracentrifugation후 fractionation하여 Band 3를 정제하였다. phosphatidyl L-serine과 cholesterol을 1 : 1 molar ratio로 섞고 진공회전 증발기를 사용하여 chloroform을 제거한 후 Triton X-100을 제거한 Band 3용액을 가하고 sonication함으로 liposome(reverse-phase evaporation vesicle)을 만들면서 Band 3를 도입 시켰다 Band 3의 분리정제 및 liposome에 도입되었음은 sodium dodecyl sulfate-polyacrylamide gel 전기영 동 후 coomassie brilliant blue 염색으로 확인할 수 있었다.

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전자빔으로 폴리사이클릭 올레핀 기판에 ITO 증착시 기판온도 및 산소 도입의 영향 (Effect of Substrate Temperature and O2 Introduction With ITO Deposition by Electron Beam Evaporation on Polycyclic Olefin Polymer)

  • 안희준;하기룡
    • 공업화학
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    • 제16권6호
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    • pp.742-748
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    • 2005
  • 투명전극재료 indium tin oxide (ITO) 필름은 평판 디스플레이 전극재료로 널리 사용되고 있다. 이러한 ITO 필름은 마그네트론 스퍼터링법, 기상화학증착법 및 전자빔증착법 등의 방법으로 제조되어지고 있다. 본 실험에서는 전자빔 증착법으로 무게비로 $SnO_2$가 10%, $In_2O_3$가 90%인 ITO 타겟을 다른 플라스틱 기판보다 높은 유리전이 온도($Tg=330^{\circ}C$)를 가지는 polycyclic olefin polymer (POP) 플라스틱 기판에 증착시켰다. 본 연구에서는 ITO 박막의 물리적, 전기적 및 광학적 성질에 영향을 미치는 중요한 변수라 할 수 있는 기판온도와 산소도입속도가 증착된 ITO 박막의 전기적 및 광학적 성질에 미치는 영향을 살펴보았다. 주요공정 변수로는 온도 및 산소도입속도에 중점을 두어 실험하였으며 그 결과 8 sccm (Standard Cubic Centimeter per Minute)의 $O_2$, $200^{\circ}C$의 기판 온도, $5{\AA}/sec$의 증착 속도에서 $1000{\AA}$으로 증착된 ITO 박막 두께에서 우수한 전기적 광학적 성질인 $1.78{\times}10^{-3}{\Omega}{\cdot}cm$ 비저항 및 85% 광투과율을 얻을 수 있었다.

생체분자와 필드의 동시국소화를 통한 플라스몬 센서의 감도향상 연구 (Enhanced Detection Sensitivity of Surface Plasmon Resonance Biosensing Based on Colocalized Target Molecules and Evanescent Fields)

  • 이원주;오영진;김동현
    • 한국광학회지
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    • 제22권4호
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    • pp.198-203
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    • 2011
  • 본 논문에서는 국소화된 플라스몬 필드 내에 분자를 동시국소화 시키는 방법으로 플라스몬 센서의 감도를 향상시키기 위한 이론적 연구를 수행하였다. 플라스몬 필드의 국소화는 나노격자를 통하여 이루어 졌으며, 측정하고자 하는 분자 반응은 유전체 박막의 기울임 증착을 통하여 국소화되는 것으로 가정하였다. 근접장 기반의 필드와 분자 분포 간의 중복적분 값을 통하여 중복도가 플라스몬 센서의 감도와 밀접한 관련이 있는 것을 확인하였으며, 계산된 플라스몬 센서 특성에 근거하여 동시국소화된 플라스몬 센서의 경우, 동시국소화되지 않은 경우에 비하여, 10배 정도의 감도개선 효과가 있는 것을 확인하였다.

발광소자를 위한 실리콘 나노 미립자 제작 (Preparation of Silicon Nanoparticles for the Device of Photoluminescence)

  • 최병정;이중휘;양성채
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.131-132
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    • 2006
  • We experimentally demonstrated the synthesis of silicon nanoparticles by using high-density ablation plasma prepared by the interaction of an intense pulsed light-ion beam (LIB) with a target. known as the intense pulsed ion beam evaporation (IBE) method. Light emission was obtained from the silicon nanoparticles. It was determined that the ambient gas reaction is very important and useful method to obtain the photoluminescence from the silicon nanoparticles.

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RESULTS FROM THE YOHKOH SATELLITE

  • WATANABE TETSUYA
    • 천문학회지
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    • 제29권spc1호
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    • pp.291-294
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    • 1996
  • The .Japanese sun observing satellite, Yohkoh, has been operational for five years and her scientific instruments are still in good condition. They have revealed ample of evidences that solar flares were triggered by magnetic reconnection, which was, for the first time, clearly indicated to take place in the solar corona. Cusp structures in soft X-rays and a new type of hard X-ray sources at the top of flaring loops have strongly supported the scenario originally proposed by C-S-H-KP. Nonthermal energy input in hard X-rays and thermal energy estimated from soft X-rays are fundamentally consistent with the interpretation of thick-target and chromospheric-evaporation models (Neupert effect). X-ray jets, another discovery of Yohkoh, were also associated with magnetic reconnection, as a result of the interaction of emerging fluxes with pre-existing coronal loops. Temperature structures of active regions, quiet sun, and coronal holes had very dynamic differential-emission-measure (DEM) distributions and high-temperature tails of DEM were considered to come from the contribution of flare-like activity.

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