• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.454-454
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• 2012

Magnetron sputtering에서, 영구자석의 자속은 target 표면 가까이에 전자를 구속한다. 구속된 전자는 Ar중성기체와 충돌하여 Ar이온을 발생시킬 수 있으므로, target 근처에서의 플라즈마 밀도를 높여, 자석이 없을 때보다 낮은 압력 또는 낮은 전압에서 방전할 수 있다. 구속 전자가 밀집된 공간에서 sputtering 현상이 주로 발생하기 때문에, planar target을 사용할 경우에는 target이 불균일하게 식각되어 target의 사용효율이 좋지 못하다. 이에 대한 한 가지 대안은 target을 원통형으로 만들어 회전시키는 것이다. Cylindrical target 의 내부에 위치한 영구자석은 고정시키고, target만을 회전시키면 비교적 균일하게 식각되므로 target의 사용효율을 높일 수 있다. 본 연구에서는 기존의 planar target에 대한 Particle-In-Cell Simulation을 Cylindrical target 에 적용시키기 위한 방법을 알아본다. 또한, 개발된 Simulator를 이용하여, Sputtering 조건의 변화에 대한 I-V curve의 변화를 살펴본다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.209-209
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• 1999

현재 magnetron sputter는 반도체, LCD 등을 포함하는 microelectronics 산업에서 박막형성을 위한 주요 장비로 널리 쓰이고 있으며, 소자의 고집적화 및 대형화 추세에 따라 그 이용가치는 더욱 증대되고 있다. 본 연구엣는 TFT-LCD용 Color Filter 제조시 ITO박막형성을 위해 사용하는 magnetron sputter 내부의 플라즈마 분포 및 ion kinetic energy에 대한 해석을 실시하였으며, ITO target의 erosion 형상의 원인을 실험결과와 비교하였다. Magnetron sputtering은 target에 가해지는 bias 전압(DC 혹은 RF)에 의해 target과 shield 혹은 target과 substrate 사이에서 생성될 수 잇는 플라즈마를 target 및 부분에 붙어있는 영구자석을 이용하여 target 근처에 집중시키고, target 표면과 플라즈마 사이의 전위차에 의해 가속된 이온들이 target 표면과 충돌하여 이차 전자방출을 일으킴과 동시에 target 표면에서 sputtering을 일으키고, 이들 sputtered 된 중성의 atom 들이 substrate로 날아가 박막을 형성하는 원리로 작동된다. 이때 target에서 방출되는 이차전자들은 영구자석에 의한 자기장 효과에 의해 target 근처에 갇히게 되어 중성 기체분자들과 이온화반응을 통해 플라즈마를 유지하고 그 밀도를 높혀주는 역할을 담당하게 된다. 즉 낮은 압력 및 bias 전압에서도 플라즈마 밀도를 높일수 있고 sputtering 공정이 가능한 장점을 가지고 있다. Magnetron sputtering 현상에 대한 시뮬레이션은 크게 magnetron discharge와 sputtering에 대한 해석 두가지로 나누어 볼 수 있는데, sputtering 현상 자체를 수치묘사할 수 있는 정량적인 모델은 아직까지 명확하게 정립되어 있지 않다. 따라서 본 연구에서는 magnetron plasma 자체에 대한 수치해석에 주안점을 두고 아울러 bulk plasma 영역에서 target으로 입사하는 이온들의 입사에너지 및 입사각도 등을 Monte Carlo 방법으로 추적하여 sputtering 현상을 유추해보았다. Sputtering 현상을 살펴보기 위해 magnetron sputter 내 플라즈마 밀도, 전자온도, 특히 target 및 substrate를 충돌하는 이온의 입사에너지 및 입사각 분포등을 계산하는데 hybrid 방법으로 시뮬레이션을 하였다. 즉 ion과 bulk electron에 대해서는 fluid 방식으로 접근하고, 이차전자 운동과 그로 인한 반응관계 및 target으로 입사하는 이온의 에너지와 입사각 분포는 Monte-Carlo 방법으로 처리하였다. 정지기장해석의 경우 상용 S/W인 Vector Fields를 사용하였다. 이를 통해 sputter 내 플라즈마 특성, target으로 입사하는 이온에너지 및 각 분포, 이들이 target erosion 형상에 미치는 영향을 살펴보았다. 또한 이들 결과로부터 간단한 sputtering 모델을 사용하여 target으로부터 sputter된 입자들이 substrate에 부착되는 현상을 Monte-Carlo 방법으로 추적하여 성막특성도 살펴보았다.

• Journal of Korea Multimedia Society
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• v.20 no.10
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• pp.1637-1645
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• 2017

Target/Nontarget classification can be divided into the study of shape estimation of the target analysing reflected echo signal and of type classification of the target using acoustical features. In active sonar system, the feature vectors are extracted from the signal reflected from the target, and an classification algorithm is applied to determine whether the received signal is a target or not. However, received sonar signals can be distorted in the underwater environments, and the spatio-temporal characteristics of active sonar signals change according to the aspect of the target. In addition, it is very difficult to collect real sea-trial data for research. In this paper, target/non-target classification were performed using real sea-trial data. Feature vectors are extracted using MFCC(Mel-Frequency Cepstral Coefficients), filterbank energy in the Fourier spectrum and wavelet domain. For the performance verification, classification experiments were performed using backpropagation neural network classifiers.

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.9
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• pp.843-848
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• 2015

In this paper, The ARR-TSE (Automatic Range Restore - Triangulation based target Size Estimator) algorithm is presented for IIR (Imaging Infrared) seeker. The target size is important information for the IIR target tracking. The TSE (Triangulation based target Size Estimator) algorithm has suitable performance to estimate target size for static IIR target. but, the performance of the algorithm can be decreased by noise. In order to decrease influence of noise, we propose the ARR-TSE algorithm. The performance of proposed method is tested at target intercept scenario. The simulation results show that the proposed algorithm has the accurate target size estimating performance.

• Journal of the Korean Vacuum Society
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• v.14 no.4
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• pp.245-251
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• 2005

A high performance dual rocking magnet sputtering gun has been developed. The rocking magnet sputtering gun introduces full-face erosion by rapidly rocking the magnet in the region where the high plasma density is maintained. The newly developed dual rocking magnet sputtering gun whose target utilization was 77 percent achieved high performance in quality in the view of target utilization and target life-time comparing to the existing magnetron sputtering gun. The PIC-MCC target erosion simulation has been performed simultaneously. Comparing experimental target erosion profiles with simulated target erosion profiles, the simulation could estimate the tendency of the target erosion profiles but could not estimate an exact target erosion profile. If the simulation were improved more precisely, the cost reduction for the development of the multiple rocking magnet sputtering gun would be expected.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.32 no.3
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• pp.241-248
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• 1996

The relationship between width of line target and distance at the limit of discrimination was examined by means of the behavioral method, for filefish Stephanolepis cirrhifer from 11 to 15cm body length. Target distance was distance from beginning of partition board to target plate, and was varied from 50cm to 200cm. The target plate was made of white acrylic resin with a vertical black line in the center. The width of line target was varied from 0.2mm to 8.0mm. Fish were trained to respond to a line target and the width of line target reduced until the minimum width required to elicit a response was established. Rate of success was expressed as the percentage of target choices in 90 trials. The line acuity of filefish was found to be 0.58 at a target distance of 50cm. The rate of success decreased slowly as line target width decreased from 8.0mm to 1.5mm, and decreased suddenly for target widths less than about 1.5mm. The width of the line target D(mm) at the limit of discrimination was shown to be an exponential function of the target distance L(cm) as follows : D=exp(9.947$\times$$10^-3$.L+0.146)

• The Journal of the Acoustical Society of Korea
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• v.33 no.3
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• pp.174-183
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• 2014

When a active sonar signal is transmitted and returned back from a target, it has been distorted by various properties of acoustic channel such as multipath arrivals. And signals have been appeared to be different form by target position and attitude. Therefore, we simulated the target echo signal using 3 dimensional target model include reflects target features. In this paper, we develop components form of a simulated target model is made up equally spaced highlight points, and each part of the target consists of shape function. We can simulate a target echo signal and Target strength (TS) according to wave incident angle. To verify, we made small scale target in kit form and we had got underwater target signal for comparing simulation result in water tank.

• Journal of the Korea Institute of Military Science and Technology
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• v.10 no.4
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• pp.30-37
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• 2007

In this paper, Water Entry Point Selection Algorithm(WEPSA) for selecting an optimal Water Entry Point of anti-submarine missiles which maximizes Detection Probability about a given target was investigated. WEPSA is a method which decides the position of an optimal Water Entry Point with calculating the target Detection Probability of a torpedo in the whole domain which centered by the target, performing the Monte-Carlo Simulations which include errors for the target informations and for weapon delivery. We can decide an optimal Water Entry Point of anti-submarine missiles which maximizes Detection Probability about a given target with WEPSA, if we get target informations about target range, target bearing, target speed and target course from Combat Systems.

• Proceedings of the KSRS Conference
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• 2006.03a
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• pp.7-14
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• 2006

Detection and identification of targets from remotely sensed imagery are of great interest for civilian and military application. This paper presents an algorithm for target detection in high spatial resolution imagery based on the spectral and the dimensional characteristics of the reference target. In this algorithm, the spectral and the dimensional information of the reference target is extracted automatically from the sample image of the reference target. Then in the entire image, the candidate target pixels are extracted based on the spectral characteristics of the reference target. Finally, groups of candidate pixels which form isolated spatial objects of similar size to that of the reference target are extracted as detected targets. The experimental test results showed that even though the algorithm detected spatial objects which has different shape as targets if the spectral and the dimensional characteristics are similar to that of the reference target, it could detect 97.5% of the targets in the image. Using hyperspectral image and utilizing the shape information are expected to increase the performance of the proposed algorithm.

• Journal of Institute of Control, Robotics and Systems
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• v.21 no.10
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• pp.917-923
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• 2015

In this paper, the TSE (Triangulation based target Size Estimator) algorithm is presented to estimate static target size at IIR (Imaging Infrared) environment. The size information is important factor for accurate IIR target tracking. But the IIR sensor can't generate distance between missile and target to calculate target size. In order to overcome the problem, we propose TSE algorithm which based on triangulation measurement. The performance of proposed method is tested at target intercept scenario. The experiment results show that the proposed algorithm has suitable performance for the accurate static target size estimating.