• Proceedings of the Materials Research Society of Korea Conference
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• 1998.11a
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• pp.34-34
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• 1998

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.84-84
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• 2012

소자가 고집적화 됨에 따라, 비저항이 낮고 electro migration (EM), Stress Migration (SM) 특성이 우수한 구리(Cu)를 배선재료로서 사용하고 있다. 그러나, 구리는 Si과 $SiO_2$의 내부로 확산이 빠르게 일어나, Si 소자 내부에 deep donor level을 형성하고, 누설 전류를 증가시키는 등 소자의 성능을 저하시킬 수 있는 문제점을 가지고 있다. 그러나, electroplating 을 이용하여 증착한 Cu 박막은 일반적으로 확산 방지막으로 쓰이는 TiN, TaN, 등의 물질과의 접착 (adhesion) 특성이 나쁘다. 따라서, Cu CMP 에서 증착된 Cu 박막의 벗겨지거나(peeling), EM or SM 저항성 저하 등의 배선에서의 reliability 문제를 야기하게된다. 따라서 Cu 와 접착 특성이 좋은 새로운 확산방지막 또는 adhesion layer의 필요성이 대두되고 있다. 본 연구에서는 이러한 Cu 배선에서의 접착성 문제를 해결하고자 Metal organic chemical vapor deposition (MOCVD)을 이용하여 제조한 코발트(Co) 박막을 $Cu/TaN_x$ 사이의 접착력 개선을 위한 adhesion layer로 적용하려는 시도를 하였다. Co는 비저항이 낮고, Cu 와 adhesion이 좋으며, Cu direct electroplating 이 가능하다는 장점을 가지고 있다. 하지만, 수소 분위기에서 $C_{12}H_{10}O_6(Co)_2$ (dicobalt hexacarbonyl tert-butylacetylene, CCTBA) 전구체에 의한 MOCVD Co 박막의 경우 탄소, 산소와 같은 불순물이 다량 함유되어 있어, 비저항, surface roughness 가 높아지게 된다. 따라서 구리 전착 초기에 구리의 핵 생성(nucleation)을 저해하고 핵 생성 후에도 응집(agglomeration)이 발생하여 연속적이고 얇은 구리막 형성을 방해한다. 이를 해결하기 위해, MOCVD Co 박막 증착 시 수소 반응 가스에 암모니아를 추가로 주입하여, 수소/암모니아의 분압을 1:1, 1:6, 1:10으로 변화시켜 $Co/TaN_x$ 박막의 특성을 비교 분석하였다. 각각의 수소/암모니아 분압에 따른 $Co/TaN_x$ 박막을 TEM (Transmission electron microscopy), XRD (X-ray diffraction), AES (Auger electron spectroscopy)를 통해 물성 및 조성을 분석하였고, AFM (Atomic force microscopy)를 이용하여, surface roughness를 측정하였다. 실험 결과, $Co/TaN_x$ 박막은 수소/암모니아 분압 1:6에서 90 ${\mu}{\Omega}-cm$의 낮은 비저항과 0.97 nm 의 낮은 surface roughness 를 가졌다. 뿐만 아니라, MOCVD 에 의해 증착된 Co 박막이4-6 % concentration 의 탄소 및 산소 함량을 가지는 것으로 나타났고, 24nm 크기의 trench 기판 위에 약 6nm의 $Co/TaN_x$ 박막이 매우 균일하게 형성된 것을 확인 할 수 있었다. 이러한 결과들은, 향후 $Co/TaN_x$ 박막이 Cu direct electroplating 공정이 가능한 diffusion barrier로서 성공적으로 사용될 수 있음을 보여준다.

• Journal of the Korean Society of Radiology
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• v.8 no.6
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• pp.287-292
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• 2014

In this study, the neutron capture cross section of $^{180}Ta$(natural existence ratio: 0.012 %) obtain by measuring has been compared with the evaluated data for the capture data. In generally, the neutron capture resonance is defined as Breit-Wigner formula. The formula consists of the resonance parameters such as neutron width, total width and neutron width. However in the case of $^{180}Ta$, these are very poor experimental neutron capture cross section data and resonance information in below 10 eV. Therefore, in the study, we analyzed the neutron resonance of $^{180}Ta$ with the measuring the prompt gamma-ray from the sample. And the resonance was compared with the evaluated data by Mughabghab, ENDF/B-VII, JEFF-3.1 and TENDL 2012. Neutron sources from photonuclear reaction with 46-MeV electron linear accelerator at Research Reactor Institute, Kyoto University used for cross section measurement of $^{180}Ta(n,{\gamma})^{181}Ta$ reaction. $BGO(Bi_4Ge_3O_{12})$ scintillation detectors used for measurement of the prompt gamma ray from the $^{180}Ta(n,{\gamma})^{181}Ta$ reaction. The BGO spectrometer was composed geometrically as total energy absorption detector.

• Journal of the Korean Magnetics Society
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• v.11 no.6
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• pp.239-244
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• 2001

Recently, RF inductor having researched by many workers, we fabricated and investigated properties of RF inductors. In order to improve the Q-factor (Quality), we try to apply the patterned Fe$_{78.81}$Ta$_{8.47}$N$_{12.71}$ soft magnetic thin film of 5000 which shows magnetic anisotropy of 30 Oe. Thus, patterned magnetic film was artificially increased magnetic anisotropy lead to increasing of ferro-magnetic resonance frequency up to GHz band. Coil as part of inductor was fabricated by lift off process. The dimension of RF inductor was designed 47un, rectangular shape, and measured properties. In the case of Ti/Ag air core type inductor shows Q of 9, inductance of 8.4 nH at 2 GHz. Magnetic film employed inductor shows inductance of 9 nH and FMR resonance frequency was 700 MHz.

• Journal of Sensor Science and Technology
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• v.12 no.5
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• pp.199-204
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• 2003

This paper describes on the fabrication and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited onto a micromachined Si diaphragms with buried cavity for overpressure protectors. The proposed device takes advantages of the good mechanical properties of single-crystalline Si as diaphragms fabricated by SDB and electrochemical etch-stop technology, and in order to extend the operating temperature range, it incorporates relatively the high resistance, stability and gauge factor of Ta-N thin-films. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is $1.097-1.21\;mV/V{\codt}kgf/cm^2$ in the temperature range of $25-200^{\circ}C$ and the maximum non-linearity is 0.43%FS.

• Environmental Analysis Health and Toxicology
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• v.18 no.2
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• pp.121-129
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• 2003

The genotoxicity of pendimethalin [N-(l-ethylpropyl)-2, 6-dinitro-3, 4-xylidine, C$\_$13/H$\_$19/N$_3$O$_4$, M.W.=281.3, CAS No. 40487-42-1], one of selective herbicide, was evaluated in bacterial gene mutation system, chromosome aberration in mammalian cell system and in vivo micronucleus assay with rodent. In bacterial gene mutation assay, pendimethalin revealed dose-dependent mutagenic potential in 313 ∼ 5,000 ${\mu}$g/plate of Salmonella typhimurium TA 98 and TA 1537 both in the absence and presence of S-9 metabolic activation system, and TA 100 only in the absence of S-9 mixture. In the TA 1535, slight increase of revertant was also observed in the presence of S-9 metabolic activation system. No mutagenic potential was observed in the TA 1535 without metabolic activation system and TA l00 in the presence of S-9 mixture. In mammalian cell system using Chinese hamster lung (CHL) fibroblast, no clastogenicity of pendimethalin was observed both in the absence and presence of S-9 metabolic activation system in the concentration range of 2.32∼9.28 ${\mu}$g/ml. And also, in vivo bone marrow micronucleus assay, pendimethalin revealed no clastogenic potential in the dose range of 203∼810 mg/kg body weight after oral administration in mice. Consequently, in vitro chromosome aberration with mammalian cells and in vivo bone marrow micronucleus assay revealed no clastogenic potential of pendimethalin. However, pendimethalin revealed mutagenic potential in bacterial gene mutation assay.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11b
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• pp.97-100
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• 2001

This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

• Preventive Nutrition and Food Science
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• v.1 no.2
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• pp.151-158
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• 1996

Antimutagenic effect of Doenjang (Korean soy paste) on various carcinogens in Salmonella typhimurium strains of TA98 and TA100 were studied. By the addition of methanol extract of Doenjang to aflatoxin B₁(AFB₁)in the experimental system, the mutagenicity of AFB₁ on the strains of TA98 and TA100 was com-pletely inhibited. The methenol extract of the Doenjang also inhibited the mutagencities induced by direct mutagens such as N-methy1-N'-nitro-N-nitroguanidine(MNNG)and 4-nitroquinoline-1-oxide(4-NQO), and another indirect mutagens of benzo(a) pyrene(BaP) and dimethylnitrosamine(DMN). From the solvents and thin layer chromatographic(TLC) fractionations, free fatty acid(s), especially linoleic acid in Doenjang seemed to be one of the active antimutagenic compounds.

• Journal of the Korean Society of Food Science and Nutrition
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• v.23 no.6
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• pp.916-921
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• 1994

The inhibitory effects of the juice and boiling water extract of Houttuyina cordata Thunb., which has been known as a traditional folk antitumor agent, on the genotxicity induced by mutagens were investigated . For this purpose, Salmonella typhimurium TA98 and TA100, and the transheterozygous (mwh/+) third larvae of Drosophila melanogaster were used. The juice of fresh H. cordata 9JHC) and boiling H. cordata extract (BHC) showed antimutagenicities toared alfatoxin B₁ in S. typhimurium TA 98 and TA100. The JHC's inhibitory effect increased by 76% to 98% as the adding concentrations increased, and the BHC had a 86-97% inhibitory effect. however, in the case of N-methyl-N'-nitro-N nitrosoguanidine (MNNG), the JHC's inhibitory effect was 52-60% irrespectively of its concentrations and the BHC had a low inhibitory effect. The JHC and BHC slightly reduced the somatic chromosomal mutagenicity by MNNG in the wing hair spot test system (mwh/+) of D. melanogaster, which suggests that they can inhibit gene mutation , deletion and mitotic chromosomal recomgination.

• Bulletin of the Korean Chemical Society
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• v.11 no.5
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• pp.367-371
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• 1990

The near-IR spectra of thioacetamide were recorded for the investigation of hydrogen bonding between thioacetamide (TA) and N,N-dimethylalkylamides (DMF, DMA, DMP) in chloroform over the range of 5$^{\circ}C$ to 55$^{\circ}C$. The ${\nu}_{\alpha}$ + amide II combination band has been resolved into contributions from monomeric TA, 1:1 hydrogen bonded complex and 1:2 complex by the parameterized matrix modeling method. The association constants ($K_c$) of the complex have been obtained at various temperatures and used to determine the thermodynamic parameters for the hydrogen bonding by the usual Van't Hoff method. It was found that N,N-dimethylalkylamide forms less stable hydrogen bonded complex with TA in chloroform than in carbon tetrachloride.