Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System (365 nm 파장대역 고투과율 실리콘 수지 TIR 렌즈 및 고지향성 노광기 광원모듈 제작)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.31 no.4
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- pp.267-271
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- 2018