Fabrication of 365 nm Wavelength High Transmittance Silicone Resin TIR Lens and High Directivity Light Source Module for Exposure System |
Sung, Jun Ho
(Department of Electronic Engineering, Sunmoon University)
Yu, Soon Jae (Department of Electronic Engineering, Sunmoon University) Anil, Kawan (Department of Electronic Engineering, Sunmoon University) Jung, Mee Suk (Department of Nano-optical Engineering, Korea Polytechnic University) |
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