• Ceramist
• /
• v.4 no.1
• /
• pp.5-13
• /
• 2001

차세대 ULSI 소자의 다층금속배선을 위한 저유전 물질중에서, 기존의 절연막인 TEOS-$SiO_2$ 증착 장비 및 공정을 최대한 이용할 수 있으며, 물성 또한 TEOS oxide와 유사하다는 점에서 적용 시점을 앞당길 수 있는 SiOF 박막과 SiOC 박막의 특성에 대해 고찰해 보았다. 1세대 저유전 물질이라 할 수 있는 SiOF는 후속공정에도 안정적인 상태의 박막을 얻기 위해서는 3.0이하의 유전상수를 얻는 것이 불가능한 반면, SiOC는 3.0 이하의 유전상수를 가지는 안정적인 박막을 얻을 수 있다. SiOC 물질은 저밀도의 단일물질로서, 물질 내부에 후속공정에 영향을 미칠만한 기공을 포함하지 않기 때문에 후속 CMP 공정에 적합하였으며, $450^{\circ}C$이하의 열 공정에서도 응력변화 및 박막성분 탈착이 거의 일어나지 않는 점 또한 SiOC 박막의 우수한 후속공정 적합성을 보여주는 결과였다. 이러한 결과를 종합하여 볼 때, 현재 사용되고 있는 1세대 저유전 물질인 SiOF 박막을 대체할 차세대 저유전 물질로 SiOC 물질이 유망하며, 이는 3.0 이하의 유전상수를 요구하는 Gb DRAM 소자나 보다 빠른 동작속도가 생명인 논리회로(logic circuit) 소자에 적용될 경우 큰 소자특성 개선이 기대된다.

• Korean Journal of Optics and Photonics
• /
• v.6 no.3
• /
• pp.233-238
• /
• 1995

'#65279;We made $P_2O_5-SiO_2$ films on silicon for integrated optics application by low pressure chemical vapor deposition using TEOS(tetraethylorthosilicate), TMPite(trimethylphosphite) and phosphine($PH_3$). And We studied and compared between TMPite and PH, as a dopant of P in PSG films in the aspect of the de,position characteristics. Deposition rate of TMPate-PSG films was $55 \AA/min$ which was smaller than 90 A/min , that of $PH_3-PSG$ films. Thickness deviation of TMPate-PSG films was 2% and that of PH3-PSG was 4.5%. So TMPate-PSG films had a good quality in thickness uniformity. The range of refractive index was controlled from 1.445 to 1.468 at 633 nm in TMPate-PSG films and it was controlled from 1.456 to 1.476 in $PH_3-PSG$ films.

• Applied Chemistry for Engineering
• /
• v.25 no.3
• /
• pp.286-291
• /
• 2014

In this study, nanosized TPA-silicalite-1 was synthesized with a suitable molar composition of TPAOH: $SiO_2$: $H_2O$ for the development of zeolite ceramic membranes to utilize as gas separation. As silica sources, TEOS, LUDOX AS-40 and CAB-O-SIL were used with the starting material of TPAOH. $NaH_2PO_4$, and a variety of acids and bases were used as promoters after TPAOH, $SiO_2$, $H_2O$ gel synthesis. To decrease synthesis time, a two step temperature change method was applied to the synthesis of TPA-silicalite-1 at a low temperature. TPA-silicalite-1 synthesized was analyzed with XRD, SEM, BET and TGA. As a result, TPA-silicalite-1 powders with a particle size of 100 nm and a specific surface area of $416m^2/g$ were obtained as optimum synthesis conditions when the two stage temperature change method was used with $NaH_2PO_4$ as promoter.

• Journal of the Korean Ceramic Society
• /
• v.30 no.8
• /
• pp.615-622
• /
• 1993

In order to increase chemical durability of thin films in binary system B2O3-SiO2 and Al2O3-SiO2 on the slide glass by the dip-coating technique from TEOS(Tetraethyl Orthosilicate) and boric acid or aluminum nitrate, phosphoric acid(5~20mol%) was added, respectively. Corrosion of acid and alkali of samples treated with 1N, HCl, NaOH and distilled water at 10$0^{\circ}C$ for 15 minute, were measured IR transmittance and variance of transmittance at visible range. Surface structure of thin film was investigated with SEM and formation of crystal phase according to additiion of phosphoric acid was measrued with XRD. In Al2O3-SiO2 system, change of remarkable characteristic was not obtained at the addition of P2O5 but transmittance of thin film was decreased with addition of P2O5 in B2O3-SiO2 system.

• Journal of the Korean Ceramic Society
• /
• v.46 no.5
• /
• pp.472-477
• /
• 2009

Monodisperse spherical $SiO_2$ particles of various sizes ($\sim$350 nm and $\sim$800 nm) and size distributions were synthesized from TEOS and MTMS. The particle size and size distribution were controlled by changing the volume ratio of water to ethanol and the reaction temperature. Narrow-sized $SiO_2$ particles with $\sim$3% size distribution were obtained. Self-assembly of the $SiO_2$ particles for photonic crystals were performed by the solvent evaporation method. The number of ordered $SiO_2$ layers can be controlled by changing the amount of the dispersed $SiO_2$ volume fraction in the solvent.

• Journal of the Korean Ceramic Society
• /
• v.35 no.9
• /
• pp.958-968
• /
• 1998

Porous silica ceramics were prepared using DCCA(Drying Control Chemical Additives) Such as uncharged polymer(Polyethylene glycol) and protein (Lipase) under H2O/Low-grade TEOS=10 C2H5OH/Low-grade TEOS=1 HC1/Low=grade TEOS=0.01 After Plain which doesn't added DCCA and samples of 11 sorts which varied molecular weight of PEG(Mw=600, 1000, 2000) quantity of Lipase and concentration of wat-er were synthesized gellation time and thermal analysis were investigated. After heat-treated at 600, cry-stal structures analyses of SiO2 polymer and characteristics of pores were investigated. Gellation time was retarded about 2-6 times as compared with plain resulting in addition of DCCA and crystal structures ex-hibited amorphous state. Moreover as increase of water a short gellation time was obtained. The samples added PEG showed increase of specific surface areas up to 20-40% and had micropores while those of Lipase were decreased about 90% and showed broad pore size distribution.

• Korean Journal of Materials Research
• /
• v.33 no.12
• /
• pp.530-536
• /
• 2023

The theoretical capacity of silicon-based anode materials is more than 10 times higher than the capacity of graphite, so silicon can be used as an alternative to graphite anode materials. However, silicon has a much higher contraction and expansion rate due to lithiation of the anode material during the charge and discharge processes, compared to graphite anode materials, resulting in the pulverization of silicon particles during repeated charge and discharge. To compensate for the above issues, there is a growing interest in SiO_x materials with a silica or carbon coating to minimize the expansion of the silicon. In this study, spherical silica (SiO₂) was synthesized using TEOS as a starting material for the fabrication of such SiO_x through heating in a reduction atmosphere. SiO_x powder was produced by adding PVA as a carbon source and inducing the reduction of silica by the carbothermal reduction method. The ratio of TEOS to distilled water, the stirring time, and the amount of PVA added were adjusted to induce size and morphology, resulting in uniform nanosized spherical silica particles. For the reduction of the spherical monodisperse silica particles, a nitrogen gas atmosphere mixed with 5 % hydrogen was applied, and oxygen atoms in the silica were selectively removed by the carbothermal reduction method. The produced SiO_x powder was characterized by FE-SEM to examine the morphology and size changes of the particles, and XPS and FT-IR were used to examine the x value (O/Si ratio) of the synthesized SiO_x.

• Korean Journal of Materials Research
• /
• v.22 no.6
• /
• pp.298-302
• /
• 2012

Fe/$SiO_2$ core-shell type composite nanoparticles have been synthesized using a reverse micelle process combined with metal alkoxide hydrolysis and condensation. Nano-sized $SiO_2$ composite particles with a core-shell structure were prepared by arrested precipitation of Fe clusters in reverse micelles, followed by hydrolysis and condensation of organometallic precursors in micro-emulsion matrices. Microstructural and chemical analyses of Fe/$SiO_2$ core-shell type composite nanoparticles were carried out by TEM and EDS. The size of the particles and the thickness of the coating could be controlled by manipulating the relative rates of the hydrolysis and condensation reaction of TEOS within the micro-emulsion. The water/surfactant molar ratio influenced the Fe particle distribution of the core-shell composite particles, and the distribution of Fe particles was broadened as R increased. The particle size of Fe increased linearly with increasing $FeNO_3$ solution concentration. The average size of the cluster was found to depend on the micelle size, the nature of the solvent, and the concentration of the reagent. The average size of synthesized Fe/$SiO_2$ core-shell type composite nanoparticles was in a range of 10-30 nm and Fe particles were 1.5-7 nm in size. The effects of synthesis parameters, such as the molar ratio of water to TEOS and the molar ratio of water to surfactant, are discussed.

• Journal of the Korean Ceramic Society
• /
• v.38 no.4
• /
• pp.337-342
• /
• 2001

PDP(Plasma Display Panel)용 녹색 형광체인 Zn$_2$SiO$_4$:Mn에 채-dopant로 Al을 첨가하여 졸-겔법으로 합성하였다. 졸-겔법으로 제조한 형광체는 기존의 고상 반응에 의해 합성된 경우보다 낮은 온도(1000-110$0^{\circ}C$)에서 Zn$_2$SiO$_4$단일상을 형성하였으며, 300-500nm의 비교적 균일한 입자를 얻을 수 있었다. 또한, co-dopant인 Al을 첨가함으로써 발광휘도를 향상시키고, 전광시간을 줄일 수 있었다. 한편, TEOS의 가수분해시 $H_2O$/TEOS 비율을 조절하여 발광의 최적 조건을 조사하였다.

• Fibers and Polymers
• /
• v.2 no.3
• /
• pp.135-140
• /
• 2001

Organic-inorganic hybrid composites consisting of poly(vinylidene fluoride) (PVDF) and SiO$_2$ were prepared through a sol-gel process and the crystallization behavior of PVDF in the presence of $SiO_2$ networks was investigated by spectroscopic, thermal and x-ray diffraction measurements. The hybrid composites obtained were relatively transparent, and brittleness increased with increasing content of tetraethoxysilane (TEOS). It was regarded from FT-lR and DSC thermal analyses that at least a certain interaction existed between PVDF molecules and the $SiO_2$ networks. X-ray diffraction measurements showed that all of the hybrid samples had a crystal structure of PVDF ${\gamma}$-phase. Fresh gel prepared from the sol-gel reaction showed a very weak x-ray diffraction peak near 2$\theta$=$21^{\circ}$ due to PVDF crystallization, and Intensity increased grade-ally with time after gelation. The crystallization behavior of PVDF was strongly affected by the amount of $SiO_2$ networks. That is, $SiO_2$ content directly influenced preference and disturbance fur crystallization. In polymer-rich hybrids, $SiO_2$ networks had a favorable effect on the extent of PVDF crystallization. In particular, the maximum portent crystallinity of PVDF occurred at the content of 3.7 wt% $SiO_2$ and was higher than that of pure PVDF. However. beyond about 10 wt% $SiO_2$, the crystallization of PVDF was strongly confined.