• Bulletin of the Korean Chemical Society
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• 제32권5호
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• pp.1534-1538
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• 2011

Uniform, hollow nanosilica spheres were prepared by the chemical coating of cationic polystyrene (cPS) with tetraethylorthosilicate (TEOS), followed by calcination at 600 $^{\circ}C$ under air. cPS was synthesized by surfactant-free emulsion polymerization using 2,2'-azobis (2-methyl propionamidine) dihydrochloride as the cationic initiator, and poly(vinyl pyrrolidone) as a stabilizer. The resulting cPS spheres were 280 nm in diameter, and showed monodispersion. After coating, the hollow silica product was spherically shaped, and 330 nm in diameter, with a narrow distribution of sizes. Dispersion was uniform. Wall thickness was 25 nm, and surface area was 96.4 $m^2/g$, as determined by BET. The uniformity of the wall thickness was strongly dependent upon the cPS surface charge. The effects of TEOS and ammonia concentrations on shape, size, wall thickness, and surface roughness of hollow $SiO_2$ spheres were investigated. We observed that the wall thicknesses of hollow $SiO_2$ spheres increased and that silica size was simultaneously enhanced with increases in TEOS concentrations. When ammonia concentrations were increased, the irregularity of rough surfaces and aggregation of spherical particles were more severe because higher concentrations of ammonia result in faster hydrolysis and condensation of TEOS. These changes caused the silica to grow faster, resulting in hollow $SiO_2$ spheres with irregular, rough surfaces.

• 산업기술연구
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• 제21권B호
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• pp.149-153
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• 2001

A study on the particle growth in $TEOS/O_2$ plasma was performed, and particle size and its distribution was measured by the electrical aerosol analyzer (EAA), light scattering particle size analyzer and the particle size was also determined by SEM. The effects of process variables such as total gas flow rate, reactor pressure, supplied power and initial reactant concentration on the particle growth were investigated. From the EAA results, the particle size distribution is divided into three groups of the cluster size and the small and large size particles. The particle size distribution measured by the light scattering particle size analyzer becomes bimodal, because the cluster size particles smaller than 20 nm in diameter cannot be detected by the light scattering particle size analyzer. The size of particles measured by the light scattering particle size analyzer is in good agreements with those by the SEM. Also we could understand that the particle formation is very sensitive to the changes of reactor pressure and reactant concentration. As the total gas flow rate increases, the particle size decreases because of the shorter residence time. As the reactor pressure, or the reactant concentration increases, the particle concentration increases and the particles grow more quickly by the faster coagulation between particles.

• 한국세라믹학회지
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• 제55권6호
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• pp.562-569
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• 2018

We propose an economic and facile method for the preparation of silica nanoparticles through a two-step process utilizing chlorosilane residues. Mixed chlorosilane residue was alcoholized with absolute ethanol as a first step to form tetraethoxysilane (TEOS). The TEOS was then utilized as a silicon source to synthesize silica nanoparticles in a sol-gel method. The alcoholysis process was designed and optimized utilizing the Taguchi experimental design method and the yield of TEOS was as high as 82.2% under optimal synthetic conditions. Similarly, the Taguchi method was also utilized to study the effects of synthesis factors on the particle size of silica nanoparticles. The results of statistical analysis indicate that the concentration of ammonia has a greater influence on particle size compared to the mass fractions of TEOS and polyethylene glycol (4.6% and 9.7%). The purity of the silica particles synthesized in our experiments is high, but the specific surface area and pore volume are small.

• 한국세라믹학회지
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• 제33권12호
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• pp.1365-1372
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• 1996

투광성이 좋고 dimer의 형성이 억제되는 유기염료의 기저체를 얻기 위해 Ormosil(organically modified silicate)제조시에 출발물질 및 촉매의 조성을 변화시켰으며 이 각각의 조성에 따른 미세구조의 변화가 광학특성에 미치는 영향에 대한 연구가 수행되었다. 광학적 응용이 가능한 Ormosil의 TEOS/PDMS 비는 90/10이었으며 겔의 미세구조 변화는 HCI/TEOS의 비를 조절하여 달성하였다. 이 HCI/TEOS의 비가 증가될수록 그 복합체의 기공은 커졌으며, 기공률은 증가되었다. 또한 이 비의 증가에 따라 투광성이 감소되었다. 이러한 특성변화를 가지는 기저체에 염료인 Rhodamice 6G perchlorate(Rh6Gp)를 첨가하면 HCI/TEOS의 비가 증가할수록 monomer에 대한 dimer 피크의 강도가 증가되었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 춘계학술대회 논문집
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• pp.43-43
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• 2010

we have investigated the field emission characteristics of the CNT/TEOS hybrid thin films fabricated by a spray method. It is found that the CNT/TEOS hybrid emitters show high current density, low turn on field, and long-term emission stability compared to the CNT emitters. These efficient field emission characteristics of the CNT/TEOS hybrid emitters are attributed to the TEOS sol, acting as a protection layer of nanotube emitter by surrounding the nanotube tip as well as a binder material to enhance the adhesion of nanotube emitters to the substrate. Therefore, the CNT/TEOS hybrid emitters could be utilized as an alternative for the efficient and reliable field emitters.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.284-284
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• 2011

Recently, the increasing degree of device integration in the fabrication of Si semiconductor devices, etching processes of nano-scale materials and high aspect-ratio (HAR) structures become more important. Due to this reason, etch selectivity control during etching of HAR contact holes and trenches is very important. In this study, The etch selectivity and etch rate of TEOS oxide layer using ACL (amorphous carbon layer) mask are investigated various process parameters in CH2F2/C4F8/O2/Ar plasma during etching TEOS oxide layer using ArF/BARC/SiOx/ACL multilevel resist (MLR) structures. The deformation and etch characteristics of TEOS oxide layer using ACL hard mask was investigated in a dual-frequency superimposed capacitively coupled plasma (DFS-CCP) etcher by different fHF/ fLF combinations by varying the CH2F2/ C4F8 gas flow ratio plasmas. The etch characteristics were measured by on scanning electron microscopy (SEM) And X-ray photoelectron spectroscopy (XPS) analyses and Fourier transform infrared spectroscopy (FT-IR). A process window for very high selective etching of TEOS oxide using ACL mask could be determined by controlling the process parameters and in turn degree of polymerization. Mechanisms for high etch selectivity will discussed in detail.

• Bulletin of the Korean Chemical Society
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• 제20권1호
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• pp.69-75
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• 1999

The silica-pillared H-kenyaites were prepared by interlarmellar base-catalyzed reaction of tetraethylorthosilicate [TEOS, Si(OC2H5)4] intercalated into the interlayer of H-kenyaite. The intercalation of TEOS was conducted by the octylamine preswelling process, resulting in a dramatic increase in gallery height to 24.7 Å. The interlamellar hydrolysis of octylamine-TEOS/H-kenyaite paste were conducted between 10 min and 40 min in 0.00%, 0.05% and 0.10% NH3-water solution respectively, and resulting in siloxane-pillared H-kenyajte with gallery height of 28.2-31.8 Å. The calcination of samples at 538 ℃ resulted in silica-pillared H-kenyaites with a large surface areas between 411 m2/g and 885 m2/g, depending on the aging time and NH3 concentration. Samples with optimum specific surface areas and well ordered-basal spacing were obtained by reaction between 10 min and 40 min in pure water and 0.05% NH3-water solution. Mesoporous samples with narrow pore size distribution were also prepared by reaction for 10-40 min in 0.05% NH3 solution. Rapid interlamellar reaction of TEOS in pure water showed that intercalated octylamine itself could act as a base catalyst during interlamellar polycondensation of TEOS.

• 한국진공학회지
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• 제4권S1호
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• pp.151-156
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• 1995

0.5$\mu$m 이하 급의 device에서 TEOS/O3 BPSG 박막을 층간절연막(Interlayer Dielectric)으로 사용하여, 평탄화를 위해 etchback 공정을 적용할 때 BPSG 박막이 가지는 구조적, 화학적 불안정성으로 인해 B,P 농도의 변화나 crack 발생 현상이 일어날 수 있다. 본 실험에서는 이러한 현상을 억제하기 위해 농도를 달리한 이층막의 증착, PR strip 시에 사용하는 wet chemical의 변경 및 증착후 치밀화(densificaiton)공정추가 등의 방법을 사용하였으며, 이에 따른 박막 특성의 변화를 조사하였다.

• 한국세라믹학회지
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• 제30권1호
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• pp.34-40
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• 1993

ORMOSIL was synthesized with inorganic precursor, TEOS and organic precursor, PDMS, and the variation of composite properties according to the concentration of HCl, solvent content and reaction time were studied. As the concentration of HCl increased, condensation reaction was well proceeded and more regularly distributed network was observed. Increase in reactivity was found with the amount of solvent, and composite had a tendency of forming more porous microstructure as reaction time was increased, which had no influence on the bonding degree.

• 멤브레인
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• 제22권2호
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• pp.104-112
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• 2012

Chemically stable Polyvinylidene fluoride-hexa-fluoropropane (PVDF-HFP) copolymer asymmetric membranes were prepared by the conventional phase inversion process, using Dimethyacetamide (DMAc) as a solvent and water as a non-solvent. To control the pore size and porosity of the PVDF-HFP membranes, tetra-ethoxysilane (TEOS) was used as a pore-forming agent. The prepared membranes were characterized, using several analytical methods such as Fourier Transform Infrared spectroscopy (FTIR), Thermo-gravimetric analyzer (TGA), Field Emission Scanning Electronic Microscopy (FESEM). TEOS turned out to increase porosity and make homogeneous pores on the membranes. Depending on the composition of the dope solutions, the pore size was ranged from 0.1 to 1.0 ${\mu}m$. The flux of the PVDF-HFP membranes prepared by using TEOS as a pore forming agent was increased substantially without much decrease in the rejection. When 15 wt% PVDF-HFP solution was blended with 13 wt% TEOS solution at composition ratio of 70/30 in wt%, the water flux at 2 bars was about 2 $m^3/m^2day$.