• 제목/요약/키워드: TEM(transmission electron microscope)

검색결과 379건 처리시간 0.022초

A Site Specific Characterization Technique and Its Application

  • Kamino, T.;Yaguchi, T.;Ueki, Y.;Ohnish, T.;Umemura, K.;Asayama, K.
    • 한국전자현미경학회:학술대회논문집
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    • 한국현미경학회 2001년도 제32차 추계학술대회
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    • pp.18-22
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    • 2001
  • A technique to characterize specific site of materials using a combination of a dedicated focused ion beam system(FIB), and Intermediate-voltage scanning transmission electron microscope(STEM) or transmission electron microscope(TEM) equipped with a scanning electron microscope(SEM) unit has been developed. The FIB system is used for preparation of electron transparent thin samples, while STEM or TEM is used for localization of a specific site to be milled in the FIB system. An FIB-STEM(TEM) compatible sample holder has been developed to facilitate thin sample preparation with high positional accuracy Positional accuracy of $0.1{\mu}m$ or better can be achieved by the technique. In addition, an FIB micro-sampling technique has been developed to extract a small sample directly from a bulk sample in a FIB system These newly developed techniques were applied for the analysis of specific failure in Si devices and also for characterization of a specific precipitate In a metal sample.

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Transmission Electron Microscope Specimen Preparation of Si-Based Anode Materials for Li-Ion Battery by Using Focused Ion Beam and Ultramicrotome

  • Chae, Jeong Eun;Yang, Jun Mo;Kim, Sung Soo;Park, Ju Cheol
    • Applied Microscopy
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    • 제48권2호
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    • pp.49-53
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    • 2018
  • A successful transmission electron microscope (TEM) analysis is closely related to the preparation of the TEM specimen and should be followed by the suitable TEM specimen preparation depending on the purpose of analysis and the subject materials. In the case of the Si-based anode material, lithium atoms of formed Li silicide were removed due to ion beam and electron beam during TEM specimen preparation and TEM observation. To overcome the problem, we proposed a new technique to make a TEM specimen without the ion beam damage. In this study, two types of test specimens from the Si-based anode material of Li-ion battery were prepared by respectively adopting the only focused ion beam (FIB) method and the new FIB-ultramicrotome method. TEM analyses of two samples were conducted to compare the Ga ion damage of the test specimen.

Atomic Resolution Imaging of Rotated Bilayer Graphene Sheets Using a Low kV Aberration-corrected Transmission Electron Microscope

  • Ryu, Gyeong Hee;Park, Hyo Ju;Kim, Na Yeon;Lee, Zonghoon
    • Applied Microscopy
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    • 제42권4호
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    • pp.218-222
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    • 2012
  • Modern aberration-corrected transmission electron microscope (TEM) with appropriate electron beam energy is able to achieve atomic resolution imaging of single and bilayer graphene sheets. Especially, atomic configuration of bilayer graphene with a rotation angle can be identified from the direct imaging and phase reconstructed imaging since atomic resolution Moir$\acute{e}$ pattern can be obtained successfully at atomic scale using an aberration-corrected TEM. This study boosts a reliable stacking order analysis, which is required for synthesized or artificially prepared multilayer graphene, and lets graphene researchers utilize the information of atomic configuration of stacked graphene layers readily.

액상 투과전자현미경 분석기법 소개 및 최신 연구동향 (Current Status of Liquid-cell Transmission Electron Microscopy)

  • 홍재영;천동원
    • 세라미스트
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    • 제22권4호
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    • pp.417-428
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    • 2019
  • Even though, nanoscale materials of various shapes and compositions have been synthesized in the liquid, their underlying growth and transformation mechanisms are not well understood due to a lack of analytical methods. The advent of liquid cell for transmission electron microscope (TEM) enables the direct imaging of chemical reactions that occur in liquids with nanometer resolution of the electron microscope (EM). Here, the technical development of liquid cell TEM equipment and their applications to the study of nanomaterials analysis in liquid are discussed. Also new findings discovered through liquid cell TEM studies such as nucleation & growth, coalescence process and transformation are discussed.

Formation Dynamics of Carbon Atomic Chain from Graphene by Electron Beam Irradiation

  • Park, Hyo Ju;Lee, Zonghoon
    • Applied Microscopy
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    • 제48권4호
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    • pp.126-127
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    • 2018
  • Carbon has numerous allotropes and various crystalline forms with full dimensionalities such as diamond, graphite, fullerenes, and carbon nanotubes leading a wide range of applications. Since the emerge of graphene consisting of a single atomic layer of carbon atoms, a fabrication of all-carbon-based device with combination of one-, two-, and three-dimensional carbons has become a hot issue. Here, we introduce an ultimate one-dimensional carbon atomic chain. Carbon atomic chains were experimentally created by removing atoms from monolayer graphene sheet under electron beam inside transmission electron microscope (TEM). A series of TEM images demonstrate the dynamics of carbon atomic chains over time from the formation, transformation, and then breakage.

중국산 해포석 내 석면 함유 유무 분석 (Asbestos Analysis of China Sepiolite by Transmission Electron Microscopy)

  • 송세욱;정용현;한정희
    • 한국산업보건학회지
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    • 제23권3호
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    • pp.205-211
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    • 2013
  • Objectives: 21 sepiolite substances produced in China were investigated for the presence of asbestos in their materials. Materials and methods: In order to identify asbestos in sepiolite substances, test materials were analyzed using a transmission electron microscope equipped with energy dispersive X-ray spectrometer (TEM-EDS) for confirming their shape and components (atomic %). Results: Five of 21 sepiolte substances were asbestos-containing materials. Two chrysotile containing sepiolite proved to be asbestoscontaining materials, as did two chrysotile mixed with tremolite containing sepiolite. 16 sepiolite substances did not contain asbestos materials. Conclusions: When importing sepiolite substances, they must be analyzed to determine if there is asbestos in their materials.

TEM 관련 이론해설 (6): 투과전자현미경의 고분해능 영상이론: 결맞음 (1) (Theory of High Resolution TEM Image Formation: Coherence (1))

  • 이확주
    • Applied Microscopy
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    • 제35권3호
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    • pp.105-112
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    • 2005
  • 고분해능 TEM 영상 이론의 결맞음 조사에서의 결맞음에 관한 개념을 소개하였다. 현미경에서 부분 결맞음 파동으로 인한 transfer function과 envelope의 발생을 설명하고 현미경의 분해능과 관련된 passband와 Scherzer 초점 조건을 소개하였다.

코어/쉘 구조의 나노입자 제조 및 증착 공정을 활용한 염료감응 태양전지 (Dye-sensitized Solar Cells Utilizing Core/Shell Structure Nanoparticle Fabrication and Deposition Process)

  • 정홍인;유종렬;박성호
    • Korean Chemical Engineering Research
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    • 제57권1호
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    • pp.111-117
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    • 2019
  • 기상으로 전달된 Ti 전구체가 열 플라즈마에서 고순도의 결정질 코어-$TiO_2$로 합성됨과 동시에 기판에 바로 증착시킬 수 있는 공정을 제시한다. 제조된 코어-$TiO_2$는 외부에 노출되지 않는 상태에서 원자층증착법(Atomic Layer Deposition, ALD)에 의하여 $Al_2O_3$로 코팅된다. 코어-$TiO_2$와 코팅된 쉘-$Al_2O_3$의 형태학적 특징은 transmission electron microscope (TEM) 및 transmission electron microscope - energy dispersive spectroscopy (TEM-EDS)를 통해 분석하였다. 제조된 코어-$TiO_2$/쉘-$Al_2O_3$ 나노입자의 전기적 특성은 염료감응 태양전지(dye-sensitized solar cell, DSSC)의 작동전극에 적용하여 평가하였다. Dynamic light scattering system (DLS), scanning electron microscope (SEM), X-ray Diffraction (XRD)을 통하여 코어-$TiO_2$의 평균입도, 성장속도 및 결정구조의 무게분율을 분석한 결과, 평균입도는 17.1 nm, 코어박막의 두께는 $20.1{\mu}m$이고 주 결정구조가 Anatase로 증착된 코어-$TiO_2$/쉘-$Al_2O_3$ 나노입자를 적용한 DSSC가 기존의 페이스트 방식으로 제작한 DSSC보다 더 높은 광효율을 보여준다. 기존의 페이스트방식을 활용한 DSSC의 에너지변환효율 4.99%에 비하여 선택적으로 조절된 코어-$TiO_2$/쉘-$Al_2O_3$ 나노입자를 작동전극으로 사용한 경우가 6.28%로 26.1% 더 높은 광효율을 보여준다.

Three-Dimensional Automated Crystal Orientation and Phase Mapping Analysis of Epitaxially Grown Thin Film Interfaces by Using Transmission Electron Microscopy

  • Kim, Chang-Yeon;Lee, Ji-Hyun;Yoo, Seung Jo;Lee, Seok-Hoon;Kim, Jin-Gyu
    • Applied Microscopy
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    • 제45권3호
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    • pp.183-188
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    • 2015
  • Due to the miniaturization of semiconductor devices, their crystal structure on the nanoscale must be analyzed. However, scanning electron microscope-electron backscatter diffraction (EBSD) has a limitation of resolution in nanoscale and high-resolution electron microscopy (HREM) can be used to analyze restrictive local structural information. In this study, three-dimensional (3D) automated crystal orientation and phase mapping using transmission electron microscopy (TEM) (3D TEM-EBSD) was used to identify the crystal structure relationship between an epitaxially grown CdS interfacial layer and a $Cu(In_xGa_{x-1})Se_2$ (CIGS) solar cell layer. The 3D TEM-EBSD technique clearly defined the crystal orientation and phase of the epitaxially grown layers, making it useful for establishing the growth mechanism of functional nano-materials.

투과전자현미경분석용 박편 제작 시 집속이온빔에 의한 광물 손상 (Damage of Minerals in the Preparation of Thin Slice Using Focused Ion Beam for Transmission Electron Microscopy)

  • 정기영
    • 한국광물학회지
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    • 제28권4호
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    • pp.293-297
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    • 2015
  • 집속이온빔(FIB, focused ion beam)법은 광물 및 지질시료의 분석 대상 위치로부터 투과전자현미경(TEM, transmission electron microscope) 관찰을 위한 박편을 정밀하게 제작할 수 있는 방법으로 널리 보급되고 있다. 그러나 박편 제작과정에서 Ga 이온빔에 의한 구조 손상이나 인위적 효과들이 발생하여 전자빔에 의한 손상과 함께 TEM 분석에서의 난점들 중 하나이다. 광물 시료 FIB 박편의 TEM 관찰에서 석영과 장석의 비정질화, 커튼 효과, Ga 오염 등이 확인되었으며, 특히 입자 경계 부근이나 두께가 얇은 곳에서 이들 현상이 보다 뚜렷하다. 박편 제작 시의 가속전압 및 전류 조정 등의 분석절차 개선으로 이온빔 손상을 줄일 수 있으나, 어느 정도의 손상이나 오염은 피할 수 없으므로 TEM 박편 관찰과 해석에서 유의하여야 한다.