• Title/Summary/Keyword: TEG

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Analysis of the Effect of the Etching Process and Ion Injection Process in the Unit Process for the Development of High Voltage Power Semiconductor Devices (고전압 전력반도체 소자 개발을 위한 단위공정에서 식각공정과 이온주입공정의 영향 분석)

  • Gyu Cheol Choi;KyungBeom Kim;Bonghwan Kim;Jong Min Kim;SangMok Chang
    • Clean Technology
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    • v.29 no.4
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    • pp.255-261
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    • 2023
  • Power semiconductors are semiconductors used for power conversion, transformation, distribution, and control. Recently, the global demand for high-voltage power semiconductors is increasing across various industrial fields, and optimization research on high-voltage IGBT components is urgently needed in these industries. For high-voltage IGBT development, setting the resistance value of the wafer and optimizing key unit processes are major variables in the electrical characteristics of the finished chip. Furthermore, the securing process and optimization of the technology to support high breakdown voltage is also important. Etching is a process of transferring the pattern of the mask circuit in the photolithography process to the wafer and removing unnecessary parts at the bottom of the photoresist film. Ion implantation is a process of injecting impurities along with thermal diffusion technology into the wafer substrate during the semiconductor manufacturing process. This process helps achieve a certain conductivity. In this study, dry etching and wet etching were controlled during field ring etching, which is an important process for forming a ring structure that supports the 3.3 kV breakdown voltage of IGBT, in order to analyze four conditions and form a stable body junction depth to secure the breakdown voltage. The field ring ion implantation process was optimized based on the TEG design by dividing it into four conditions. The wet etching 1-step method was advantageous in terms of process and work efficiency, and the ring pattern ion implantation conditions showed a doping concentration of 9.0E13 and an energy of 120 keV. The p-ion implantation conditions were optimized at a doping concentration of 6.5E13 and an energy of 80 keV, and the p+ ion implantation conditions were optimized at a doping concentration of 3.0E15 and an energy of 160 keV.

EFFECT OF RESIN MATRIX ON DEGREE OF CONVERSION AND FRACTURE TOUGHNESS OF DENIAL COMPOSITES (기질레진의 조성에 따른 복합레진의 물리적 성질에 관한 연구)

  • Lee, Yun-Shin;Choi, Kyoung-Kyu;Park, Sang-Jin
    • Restorative Dentistry and Endodontics
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    • v.27 no.1
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    • pp.77-86
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    • 2002
  • Current composites are made with dimethacrylate monomers and silane-treated silica microfillers, either alone or with silane treated glass fillers The main reasons for clinical failure of dental composites are secondary caries, wear and fracture. Most of practitioner want to get a composite which is more tougher under occlusal stress, less polymerization contraction, and better handling properties in application clinically. The aim of this study was to investigate the influence of resin matrix with various flows on the physical proper-ties such as fracture toughness and degree of conversion of the experimental resins. It was hypothesized that flexible or tough resin composites can be designed by judicious choice of monomer composition Various flow resin matrices containing Bis-GMA, UDMA, and TEG-DMA were made by altering the pro-portion of the monomers. After the unfilled resins were light-cured for different light intensity, the fracture toughness(K$_{1c}$) was measured according to ASTM standard using the single edge notched geometry, and degree of conversion(DC) was measured by FTIR. And experimental composites were formulated with variations in the proportion of silanated quartz and strontium glass fillers as 60, 75, and 77wt%. Also, the physical properties of composites with various filer contents were evaluated as same manner. All resulting data were compared by ANOVA/Tukeys test at 0.05 level. The results were as follows; 1. The degree of conversion of high flow resin containing less Bis-GMA was higher than that of low flow unfilled resin 2. While the degree of conversion of unfilled resin was increased according to light intensity for polymerization, there was no significant increase with moderate and high light intensity. Also, the fracture toughness was not increased by high light intensity. 3. The fracture toughness was high in the low flow unfilled resin containing higher contents of Bis-GMA. 4. There was a significant increase for fracture toughness and a tendency for degree of conversion to be reduced when the content of fillers was increased. 5. In the experimental composites, the flow of resin matrix did not affected on the fracture toughness, even, which was decreased as increase of viscosity. These results showed that the physical properties of a dental composite could be attributed to the flow of resin matrix with relative content of monomers. Specific combination of resin monomers should be designed to fulfil the needs of specific indication for use.

Changes of Coagulability after Off-pump CABG: Comparison with On-pump CABG (심폐바이패스 없이 시행하는 관상동맥우회술 후 혈액응고 기늠의 변화: 심폐바이패스하 관상동맥우회술 후 혈액응고 상태와의 비교)

  • 장우익;김기봉;김욱성;정철현;허재학;장지민;이동순;한규섭
    • Journal of Chest Surgery
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    • v.37 no.3
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    • pp.245-251
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    • 2004
  • Hemostatic function is regarded to be preserved after an off-pump coronary artery bypass grafting (CABG), compared to conventional CABG, and the preserved hemostatic function may increase thrombotic occlusion of the graft. We studied the changes of hemostatic variables in patients undergoing off-pump CABG, and compared to those of on-pump CABG. We studied the changes of coagulation function in 11 patients who underwent off-pump CABG (group I), and compared them with those of 11 patients who underwent on-pump CABG and Dor procedure (group II). Coagulation status was evaluated by thromboelastography and blood coagulation test preoperatively, postoperative 1$^{st}$ day, 2$^{nd}$ day, 3$^{rd}$ day, and 5$^{th}$ day, respectively. Among the variables measured by thromboelastography (such as r time, k time, $\alpha$ angle, and MA value) and blood coagulation test (such as factor Ⅶ, protein S, protein C, antithrombin III, activated protein C resistance test, plasminogen, D-dimer, prothrombin time, activated partial thromboplastin time, platelet count, hemoglobin, and fibrinogen), there were significant differences in the MA value, $\alpha$ angle, and platelet counts between the two groups. MA values were 140$\pm$72% and 153$\pm$98% in group I, and 87$\pm$27% and 78$\pm$28% in group II, at postoperative 3$^{rd}$ and 5$^{th}$ days, respectively (p<0.05). $\alpha$ angle was 122$\pm$92% in group I and 69$\pm$23% in group II at postoperative 3$^{rd}$ day (p=0.09). Platelet count was 63$\pm$55% in group I and 33$\pm$13% in group II at postoperative 3$^{rd}$ day (p<0.05). Patients who underwent off-pump CABG showed increased coagulability during postoperative periods, compared to those who underwent on-pump CABG. Our data suggest that aggressive perioperative anticoagulation therapy is warranted in patients undergoing off-pump CABG. CABG.