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Fabrication and Characteristics of High-sensitivity Si Hall Sensors for High-temperature Applications (고온용 고감도 실리콘 홀 센서의 제작 및 특성)

  • 정귀상;노상수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.07a
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    • pp.565-568
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    • 2000
  • This paper describes on the temperature characteristics of a SDB(silicon-wafer direct bonding) SOI(silicon-on-insulator) Hall sensor. Using the buried oxide $SiO_2$ as a dielectrical isolation layer, a SDB SOI Hall sensor without pn junction isolation has been fabricated on the Si/$SiO_2$/Si structure. The Hall voltage and the sensitivity of the implemented SOI Hall sensor show good linearity with respect to the applied magnetic flux density and supplied current. In the temperature range of 25 to $300^{\circ}C$, the shifts of TCO(temperature coefficient of the offset voltage) and TCS(temperature coefficient of the product sensitivity) are less than $\pm 6.7$$\times$$10^{-3}$/$^{\circ}C$ and $\pm 8.2$$\times$$10^{-4}$/$^{\circ}C$respectively. These results indicate that the SDB SOI structure has potential for the development of a silicon Hall sensor with a high-sensitivity and hip high-temperature operation.

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Fabrication of High-Temperature Si Hall Sensors Using Direct Bonding Technology (직접접합기술을 이용한 고온용 Si 홀 센서의 제작)

  • Chung, G.S.;Kim, Y.J.;Shin, H.K.;Kwon, Y.S.
    • Proceedings of the KIEE Conference
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    • 1995.07c
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    • pp.1431-1433
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    • 1995
  • This paper describes the characteristics of Si Hall sensors fabricated on a SOI(Si-on-insulator} structure, in which the SOI structure was forrmed by SDB(Si-wafer direct bonding) technology. The Hall voltage and the sensitivity of implemented Si Hall devices show good linearity with respect to the applied magnetic flux density and supplied current. The product sensitivity of the SDB SOI Hall device is average $600V/A{\cdot}T$. In the temperature range of 25 to $300^{\circ}C$, the shifts of TCO(Temperature Coefficient of the Offset Voltage) and TCS(Temperature Coefficient of the product Sensitivity) are less than ${\pm}6.7{\times}10^{-3}/^{\circ}C$ and ${\pm}8.2{\times}10^{-4}/^{\circ}C$, respectively. From these results, Si Hall sensors using the SOI structure presented here are very suitable for high-temperature operation.

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Temperature Characteristics of SDB SOI Hall Sensors (SDB SOI 흘 센서의 온도 특성)

  • 정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.05a
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    • pp.227-229
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    • 1995
  • Using thermal oxide SiO$_2$ as a dielectrical isolation layer, SOI Hall sensors without pn junction isolation have been fabricated on Si/SiO$_2$/Si structures. The SOI structure was formed by SDB (Si- wafer direct bonding) technology. The Hall voltage and the sensitivity of Si Hall devices implemented on the SDB SOI structure show good linearity with respect to the appled magnetic flux density and supplied current. The product sensitivity of the SDB SOI Hall device is average 600V/V.T. In the trmperature range of 25 to 300$^{\circ}C$, the shifts of TCO(Temperature Coefficient of the Offset Voltage) and TCS(Temperature Coefficient of the Product Sensitivity) are less than ${\pm}$ 6.7x10$\^$-3/ C and ${\pm}$8.2x10$\^$04/$^{\circ}C$, respectively. These results indicate that the SDB SOI structure has potential for the development of Hall sensors with a high-sensitivity and high-temperature operation.

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Comparison of Temperature Characteristics Between Single and Poly-crystalline Silicon Pressure Sensor (단결정 및 다결정 실리콘 압력센서의 온도특성 비교)

  • Park, Sung-June;Park, Se-Kwang
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.342-344
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    • 1995
  • Using piezoresistive effects of single-crystal and poly-crystalline silicon, pressure sensors of the same pattern were fabricated for comparison of temperature characteristics. Optimum size and aspect ratio of rectangular sensor diaphragm were calculated by FEM. For polsilicon pressure sensor, polysilicon resistors of Wheatstone bridge were deposited by LPCVD to be used in a wide' temperature range. Polysilicon pressure sensors showed more stable temperature characteristics than single-crysta1 silicon in the range of $-20\sim125[^{\circ}C]$. To get low TCO (Temperature Coefficient of Offset), below $\pm$3 [${\mu}V/V/^{\circ}C$], it is needed for each TCR of piezoresistors to have a deviation within $\pm25[ppm/^{\circ}C]$ less than $\pm500[ppm/^{\circ}C]$ of resistors for polysilicon pressure sensor can result in low TCS(Temperature Coefficient of Sensitivity) of -0.1[%FS/$^{\circ}C$].

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Evaluation of Electromagnetic Shielding Efficiency of Magnetite-Carbon based Inorganic Paint (Magnetite-Carbon계 전자파흡수 무기도료의 현장 전자파 저감 성능 평가)

  • Park, Dong-Cheol;Lee, Se-Hyoen;Song, Tae-Hyeop;Sim, Jong-Woo;Park, Jae-Myoung
    • Proceedings of the Korea Concrete Institute Conference
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    • 2004.11a
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    • pp.141-144
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    • 2004
  • Nowadays, there has been substantial interest in whether there is an association between electromagnetic field exposure and living environment. It is increased the demand that electromagnetic wave environment and its countermeasure. In the present study, we has applied the electromagnetic absorbent inorganic paint of 'I' corporations, and measured electromagnetic waves generated in new apartment before occupancy using the standard field electromagnetic wave generating device we developed. The measurement before occupancy was $100\~131V/m$, but the measurement after occupancy was $6.9\~8.0V/m$ less than 10V/m, the comprehensive electromagnetic wave limit allowed by TCO in Sweden. The implication is that domestic apartment are exposed to extremely poor electromagnetic wave environment. Nevertheless, there have been neither serious efforts to overcome this problem, nor its alternatives and related standards. Therefore, it is necessary to continue research of related fields to establish standards and plans to improve the situation.

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Properties of Indium Tin Oxide Multilayer Fabricated by Glancing Angle Deposition Method

  • Oh, Gyujin;Lee, Kyoung Su;Kim, Eun Kyu
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.367-367
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    • 2013
  • Commercial applications of indium tin oxide (ITO) can be separated into two useful areas. As it is perceived to bear electrical properties and optical transparency at once, its chance to apply to promising fields, usually for an optical device, gets greater in the passing time. ITO is one of the transparent conducting oxides (TCO), and required to carry the relative resistance less than $10^{-3}{\Omega}$/cm and transmittances over 80 % in the visible wavelength of light. Because ITO has considerable refractive index, there exist applications for anti-reflection coatings. Anti-reflection properties require gradual change in refractive index from films to air. Such changes are obtained from film density or nano-clustered fractional void. Glancing angle deposition (GLAD) method is a well known process for adjusting nanostructure of the films. From its shadowing effects, GLAD helps to deposit well-controlled porous films effectively. In this study, we are comparing the reference sample to samples coated with controlled ITO multilayer accumulated by an e-beam evaporation system. At first, the single ITO layer samples are prepared to decide refractive index with ellipsometry. Afterwards, ITO multilayer samples are fabricated and fitted by multilayer ellipsometric model based on single layer data. The structural properties were measured by using atomic force microscopy (AFM), and by scanning X-ray diffraction (XRD) measurements. The ellipsometry was used to determine refractive indices and extinction coefficient. The optical transmittance of the film was investigated by using an ultraviolet-visible (UV-Vis) spectrophotometer.

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Sputtered ZTO as a blocking layer at conducting glass and $TiO_2$ Interfaces in Dye-Sensitized Solar Cells (GZO/ZTO 투명전극을 이용한 DSSC의 광전 변환 효율 특성)

  • Park, Jaeho;Lee, Kyungju;Song, Sangwoo;Jo, Seulki;Moon, Byungmoo
    • 한국신재생에너지학회:학술대회논문집
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    • 2011.11a
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    • pp.53.2-53.2
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    • 2011
  • Dye-sensitized solar cells(DSSCs) have been recognized as an alternative to the conventional p-n junction solar cells because of their simple fabrication process, low production cost, and transparency. A typical DSSC consists of a transparent conductive oxide (TCO) electrode, a dye-sensitized oxide semiconductor nanoparticle layer, liquid redox electrolyte, and a Pt-counter electrode. In dye-sensitized solar cells, charge recombination processes at interfaces between coducting glass, $TiO_2$, dye, and electrolyte play an important role in limiting the photon-to-electron conversion efficiency. A layer of ZTO thin film less than ~200nm in thickness, as a blocking layer, was deposited by DC magnetron sputtering method directly onto the anode electrode to be isolated from the electrolyte in dye-sensitized solar cells(DSCs). This is to prevent the electrons from back-transferring from the electrode to the electrolyte ($I^-/I_3^-$). The presented DSCs were fabricated with working electrode of Ga-doped ZnO glass coated with blocking ZTO layer, dye-attached nanoporous $TiO_2$ layer, gel electrolyte and counter electrode of Pt-deposited GZO glass. The effects of blocking layer were studied with respect to impedance and conversion efficiency of the cells.

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A New Reference Range of Serum Anion Gap (혈청 Anion gap의 새로운 범위에 관한 연구)

  • Shin Young-Ju;Cheon Hae-Won;Choi Byung-Min;Yoo Kee-Hwan;Hong Young-Sook;Lee Joo-Won;Kim Soon-Kyum
    • Childhood Kidney Diseases
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    • v.2 no.1
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    • pp.9-13
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    • 1998
  • Purpose: The old reference range of serum anion gap(AG) may be excessive compared with value measured by new electrolyte analyzers. Therefore, we studied to establish a new reference range of AG using an autoanalyzer. Methods: With the use of analyzer(Hitachi 747 by enzymatic methods), serum Na and Cl were measured, and with the use of analyzer(CX-3 by differental rage pH), serum $TCO_2$ was measured. We measured AG(=Na-($Cl+HCO_3$)) in 395 stable patients with normal serum albumin and creatinine levels of the pediatric in-patients and out-patients for preoperative examination from march 1997 to July 1997. Results: The normal serum$ AG(mean{\pm}SD)$ were neonate, $11.2{\pm}3.2$ mEq/L; infancy, $11.8{\pm}2.7$ mEq/L; early childhood, $12{\pm}2.7$ mEq/L; late childhood, $11.7{\pm}3.2$ mEq/L; adolescence, $9.6{\pm}2.7$ mEq/L; adult, $9.0{\pm}2.7$ mEq/L. Normal serum AG in more than 10 years of age was significantly lower than the previous normal value and also the difference of AG between more than 10 years and less than 10 years was statistically significant(P<0.05). Conclusions: We suggest to measure serum AG according to each type of analyzers.

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Degradation of the Pd catalytic layer electrolyte in dye sensitized solar cells (염료감응태양전지에서 Pd 촉매층의 전해질과의 반응에 따른 특성 저하)

  • Noh, Yunyoung;Song, Ohsung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.14 no.4
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    • pp.2037-2042
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    • 2013
  • A TCO-less palladium (Pd) catalytic layer on the glass substrate was assessed as the counter electrode (CE) in a dye sensitized solar cell (DSSC) to confirm the stability of Pd with the $I^-/I_3{^-}$electrolyte on the DSSC performance. A 90nm-thick Pd film was deposited by a thermal evaporator. Finally, DSSC devices of $0.45cm^2$ with glass/FTO/blocking layer/$TiO_2$/dye/electrolyte(10 mM LiI + 1 mM $I_2$ + 0.1 M $LiClO_4$ in acetonitrile solution)/Pd/glass structure was prepared. We investigated the microstructure and photovoltaic property at 1 and 12 hours after the sample preparation. The optical microscopy, field emission scanning electron microscopy (FESEM), cyclic voltammetry measurement (C-V), and current voltage (I-V) were employed to measure the microstructure and photovoltaic property evolution. Microstructure analysis showed that the corrosion by reaction between the Pd layer and the electrolyte occurred as time went by, which led the decrease of the catalytic activity and the efficiency. I-V result revealed that the energy conversion efficiency after 1 and 12 hours was 0.34% and 0.15%, respectively. Our results implied that we might employ the other non-$I^-/I_3{^-}$electrolyte or the other catalytic metal layers to guarantee the long term stability of the DSSC devices.

A Case of JTEL's ERP Implementation through ASP (ASP 방식을 통한 제이텔의 ERP도입사례)

  • Hahm, Yong-Seok;Nam, Ki-Chan
    • Information Systems Review
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    • v.4 no.1
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    • pp.19-31
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    • 2002
  • The JTEL's success case of implementing ERP through ASP is studied in this paper. This paper especially presents the detail processes of implementing ERP through ASP and the advantages of that. Critical success factors in this case study are that pre-prepared ERP template and repetitive prototyping methodology was successfully utilized and that end users involved positively and accepted the standard best-practice processes of the ERP template in this project. These factors reduced ERP training periods and also the whole implementation periods, which made the project time quite short and TCO less. Considering these success factors, ASP method provides the advantages of global e-business IT environment, continuous new IT technologies and flexible response to the business changes to the small and medium firms. Finally, the paper suggests the new direction and possibility for small and medium firms focusing on the core competency and utilizing new system infrastructure through ASP method compared with in-house implementation.