• Title/Summary/Keyword: TA-11

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Formation of ultra-thin $Ta_{2}O_{5}$ film on thermal silicon nitrides (열적 성장된 실리콘 질화막위에 산화 탄탈륨 초박막의 형성)

  • 이재성;류창명;강신원;이정희;이용현
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.32A no.11
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    • pp.35-43
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    • 1995
  • To obtain high quality of $Ta_{2}O_{5}$ film, two dielectric layers of $Si_{3}N_{4}$ and $Ta_{2}O_{5}$ were subsequently formed on Si wafer. Silicon nitride films were thermally grown in 10 Torr ammonia ambient by R.F induced heating system. The thickness of thermally grown $Si_{3}N_{4}$ film was able to be controlled in the range of tens $\AA$ due to the self-limited growth property. $Ta_{2}O_{5}$ film of 200$\AA$ thickness was then deposited on the as-grown $Si_{3}N_{4}$ film about 25$\AA$ thickness by sputtering method and annealed at $900^{\circ}C$in $O_{2}$ ambient for 1hr. Stoichiometry film was prepared by the annealing in oxygen ambient. Despite the high temperature anneal process, silicon oxide layer was not grown at the interface of the layered films because of the oxidation barrier effect of Si$_{3}$N$_{4}$ film. The fabricated $Ta_{2}O_{5}$/$Si_{3}N_{4}$ film showed low leakage current less than several nA and high dielectric breakdown strength.

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Microwave Dielectric Properties of $Ba(Mg_{1/3}Ta_{2/3})O_3$[BMT] Ceramics with Ca1cining Condition (하소조건에 따른 $Ba(Mg_{1/3}Ta_{2/3})O_3$[BMT] 세라믹스의 마이크로파 유전특성)

  • Hwang, Tae-Kwang;Lim, Sung-Soo;Chung, Jang-Ho;Bae, Seon-Gi;Lee, Young-Hie
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.04b
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    • pp.84-87
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    • 2000
  • The microwave dielectric properties of complex perovskite-structured $Ba(Mg_{1/3}Ta_{2/3})O_3$ ceramics were investigated with calcining condition. The BMT ceramics were prepared by conventional mixed oxide method. Calcining conditions were $1200^{\circ}C$ for 10hr., $1300^{\circ}C$ for 2hr., and 5hr., respectively. And the specimens were sintered at $1650{\mu}m$. The structural and microwave properties of BMT ceramics were investigated by XRD, SEM and network analyzer. In the case of BMT ceramics calcined at $1300^{\circ}C$ for 5 hr., dielectric constant, quality factor and temperature coefficient of resonant frequency were 20.26, 31,144(at 1GHz), 6.11[ppm/$^{\circ}C$], respectively.

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The substitution effect of Langasite $(La_3Ga$_5SiO_{14})$-type compound, $Ca_3TaGa_3Si_2O_{14}$ crystals on their synthesis and crystal growth (Langasite$(La_{3}Ga$_{5}SiO_{14})$-type 인 $Ca_{3}TaGa_{3}Si_{2}O_{14}$ 결정의 합성과 경정성장에서의 치환효과)

  • Young Suk Kim;Keun Ho Auh
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.11 no.6
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    • pp.285-289
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    • 2001
  • We investigated that each site was substituted by new chemical components in Langasite ($La_3Ga_5/SiO_{14}$)-type structure with superior piezoelectric characteristics than $La_3Ga_5/SiO_{14}$. In this study $Ca_3TaGa_5Si_{2}O_{14}$ was synthesized by soilid-state reaction and grown by the $\mu$-PD(micro-pilling-down)and Cz technique. Lattice parameter and chemical composition was investigated by XRD and EPMA respectively.

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Local Magnetization Reversal of FeMn/NiFe Films Using Laser Annealing (Laser 열처리를 이용한 FeMn/NiFe 박막의 자화 반전)

  • Choi, S.D.;Jin, D.H.;Kim, S.W.;Kim, Y.S.;Lee, K.A.;Lee, S.S.;Hwang, D.G.
    • Journal of the Korean Magnetics Society
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    • v.14 no.6
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    • pp.228-231
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    • 2004
  • We have studied local magnetization reversal and magnetic properties induced by Laser annealing method in the strip-patterned Ta/NiFe/FeMn/Ta and Ta/NiFe/FeMn/NiFe/Ta multilayers fabricated by ion-beam deposition. The films were exposed to the emission of the DPSS (Diode Pumped Solid State, Nd:YAG) laser under 600 G. The laser beam intensity increased up to 440 mW. When the laser illuminated the patterned film with the power of above 200 m W, the intensity of MR peak located in +87 Oe shrunk. A new MR peak was generated at -63 Oe. When the laser power is 400 mW, the location of positive MR peak(H$\sub$ex/) was changed slightly from +87 Oe to +76 Oe, and the MR ratio was decreased from 0.9% to 0.1 %. On the other hand, the new (negative) MR peak shifted from -63 Oe to -80 Oe, with the MR ratio increased up to 0.3%. As the illuminated area expanded, the intensity of opposite MR peak increased and it of negative MR peak decreased. This proved that the local reversal of exchange biasing should be realized by laser annealing.

Studies on Biological Activity of Leaves from Korean Rosa davurica Pall. (한국산 생열귀나무(Rosa davurica Pall.) 잎의 생리활성 기능 검색에 관한 연구)

  • 김준범;최승필;이득식;함승시
    • Food Science and Preservation
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    • v.11 no.1
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    • pp.100-105
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    • 2004
  • The objective of this study was carried out to investigate biological activities effects of Korean leaf from Rosa davurica Pall. in vitro. They were extracted with methanol, ethanol, chloroform and water. Methods of the antimutagenic used in this experiment were well-known bacterial short term tests which include Ames test and the antigenotoxic used in this experiment was DPPH radical scavenge. All extracts (ethanol, methanol, water) except chloroform extract exhibited 1,1-diphenyl-2-picrylhydrazyl (DPPH) radical scavenging activity with IC$\_$50/ of 11.5 $\mu\textrm{g}$/mL, 6.4 $\mu\textrm{g}$/mL, 4.8 $\mu\textrm{g}$/mL. In Ames test, most of extracts had strong antimutagenic effects against the mutagenesis induced by 4-nitroquinoline-1-oxide (4NQO), N-methyl-N’-nitro-N-nitrosoguanidine (MNNG), 3-amino-l,4-dimethyl-5H-pyrido[4,3-b]indol(Trp-P-I) and benzo(${\alpha}$)pyrene(B(${\alpha}$)P). The extracts of leaves (200 $\mu\textrm{g}$/plate) showed approximately 60∼80% inhibitory effect on the mutagenesis induced by 4NQO, Trp-P-1 and B(${\alpha}$)P against TA98 strain, whereas 60∼80% inhibition were observed on the mutagenesis induced by MNNG, 4NQO, Trp-P-1 and B(${\alpha}$)P against TA100 strain. respectively.

Structural and Electrical Properties of K(Ta0.70Nb0.30)O3/K(Ta0.55Nb0.45)O3 Heterolayer Thin Films for Electrocaloric Devices (전기 열량 소자로의 응용을 위한 K(Ta0.70Nb0.30)O3/K(Ta0.55Nb0.45)O3 이종층 박막의 구조적, 전기적 특성)

  • Byeong-Jun Park;Ji-Su Yuk;Sam-Haeng Yi;Myung-Gyu Lee;Joo-Seok Park;Sung-Gap Lee
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.37 no.3
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    • pp.297-303
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    • 2024
  • In this study, KTN heterolayer thin films were fabricated by alternately stacking films of K(Ta0.70Nb0.30)O3 and K(Ta0.55Nb0.45)O3 synthesized using the sol-gel method. The sintering temperature and time were 750℃ and 1 hour, respectively. All specimens exhibited a polycrystalline pseudo-cubic crystal structure, with a lattice constant of approximately 0.398 nm. The average grain size was around 130~150 nm, indicating relatively uniform sizes regardless of the number of coatings. The average thickness of a single-coated film was approximately 70 nm. The phase transition temperature of the KTN heterolayer films was found to be approximately 8~12℃. Moreover, the 6-coated KTN heterolayer film displayed an excellent dielectric constant of about 11,000. As the number of coatings increased, and consequently the film thickness, the remanent polarization increased, while the coercive field decreased. The 6-coated KTN heterolayer film exhibited a remanent polarization and coercive field of 11.4 μC/cm2 and 69.3 kV/cm at room temperature, respectively. ΔT showed the highest value at a temperature slightly above the Curie temperature, and for the 6-coated KTN heterolayer film, the ΔT and ΔT/ΔE were approximately 1.93 K and 0.128×10-6 K·m/V around 40℃, respectively.

Estimation of Daytime Net Radiation above Corn Canopy (옥수수 군낙초관부(群落草冠部) 위에서의 주간순복사량(晝間純輻射量) 추정(推定))

  • Lee, Yang-Soo;Jeong, Young-Sang
    • Korean Journal of Soil Science and Fertilizer
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    • v.21 no.1
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    • pp.11-14
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    • 1988
  • Field study was conducted to evaluate the relationship between daytime net radiation (Drn) and global solar radiation (Rs) and to develop the empirical equation predicting daytime net radiation above corn canopy from observations of Rs and Ta (mean daily air temperature). The relationship between Drn and Rs under the cloudless day was Drn = 0.6659Rs and that under the cloudy (> 35% of possible sunshine) Drn = 0.729Rs. Thus, Drn/Rs Ratio under cloudless day was found to be lower than that under the cloudy day. Rs and Ta were used in the radiation balance equation to estimate Drn and the empirical model could be expressed as $Drn=[0.9Rs-(352-227{\times}10^{-10}{\times}Ta^4)]$ [1.11Rs/Rso - 0.05].

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Influences of Structural Features on Electrical Properties and Heating Characteristics of Al-Ta Alloy Thin Films (Al-Ta 합금박막의 구조적 인자가 전기적 특성 및 발열 특성에 미치는 영향)

  • Song Daegwon;Lee Jongwon;Park In Yong;Kim Kyujin
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.4 s.33
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    • pp.23-27
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    • 2004
  • The $Al_xTa_{1-x} (x=0.0{\~}1.0)$ alloy thin films were deposited by RF-magnetron sputtering system, and the crystal quality, surface morphology, and electrical properties were examined using XRD, AFM, 4-point probe techniques in this study. The thin films were grown according to the alloy compositions first, and the effects of film thickness and mask patterns were investigated afterwards. Also, the heating characteristics were examined by heat controller. The obtained results showed that the high electrical resistivity was obtained for Al content $x=6.63at\%$, and the even higher resistivity was accomplished for the samples with smaller thickness and narrower width. The heating temperature demonstrated the identical trend to the electrical properties, and the highest heating temperature ($400^{\circ}C$) and output power ($12.6W/cm^2$) were obtained for the sample with Al content $x=6.63\%$, film thickness d=500 nm, film width w=1.5 mm.

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