• Title/Summary/Keyword: Surface treatment system

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Fabrication of SiCOI Structures Using SDB and Etch-back Technology for MEMS Applications (SDB와 etch-back 기술에 의한 MEMS용 SiCOI 구조 제조)

  • Jung, Su-Yong;Woo, Hyung-Soon;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.07b
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    • pp.830-833
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    • 2003
  • This paper describes the fabrication and characteristics of 3C-SiCOI sotctures by SDB and etch-back technology for high-temperature MEMS applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si(001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The wafer bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR. The strength of the bond was measured by tensile strengthmeter. The bonded interface was also analyzed by SEM. The properties of fabricated 3C-SiCOI structures using etch-back technology in TMAH solution were analyzed by XRD and SEM. These results indicate that the 3C-SiCOI structure will offers significant advantages in the high-temperature MEMS applications.

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FREE SURFACE FLOW ANALYSIS BY SOROBAN GRID BASED CIP MEHTOD (Soroban grid 기반 CIP법을 이용한 자유표면 유동해석)

  • Im, H.N.
    • 한국전산유체공학회:학술대회논문집
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    • 2010.05a
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    • pp.326-334
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    • 2010
  • In this study, we provide a comprehensive review of the CIP(Constrained Interpolation Pro file/Cubic Interpolated Propagation) method with a pressure-based algorithm that is known as a general numerical solver for soled liquid, gas and plasmas. And also we introduce a body-fitted grid system(Soroban grid) for computation of strongly nonlinear marine hydrodynamic problems such as slamming water on deck, wave impact by green water. This grid system can keep the third-order accuracy in time and space with the help of the CIP method. The grid system consists of the straight lines and grid points. In the 2-dimensional grid case, each grid points moving in these lines like abacus - Soroban in Japanese. The length of each line can be different and the number of grid points in each line can be different. Mesh generation and searching of upstream departure point are very simple and possible to mesh-free treatment. To optimize computation of free-surface and multi-fluid flows, We adopt the C-CUP method. In most of the earlier computations, the C-CUP method was used with a staggered-grid approach. Here, because of the mesh free nature of the Soroban grid, we use the C-CUP method with a collocated-grid approach.

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Evaluation of surface dose comparison by treatment equipment (치료 장비 별 표면 선량 비교평가)

  • Choi Eun Ha;Yoon Bo Reum;Park Byoung Suk;An Ye Chan;Park Myoung Hwan;Park Yong Chul
    • The Journal of Korean Society for Radiation Therapy
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    • v.34
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    • pp.31-42
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    • 2022
  • Purpose: This study measures and compares the surface dose values in the virtual target volume using Tomotherapy, Halcyon, and TrueBeam equipment using 6MV-Flattening Filter-Free(FFF) energy. Materials and Methods: CT scan was performed under three conditions of without bolus, 0.5 cm bolus, and 1 cm bolus using an IMRT phantom (IBA, Germany). The Planning Target Volume (PTV) was set at the virtual target depth, and the treatment plan was established at 200 cGy at a time. For surface dosimetry, the Gafchromic EBT3 film was placed in the same section as the treatment planning system and repeated measurements were performed 10 times and then analyzed. Result: As a result of measuring the surface dose for each equipment, without, 0.5 cm, 1 cm bolus is in this order, and the result of Tomotherapy is 115.2±2.0 cGy, 194.4±3.3 cGy, 200.7±2.9 cGy, The result in Halcyon was 104.7±3.0 cGy, 180.1±10.8 cGy, 187.0±10.1 cGy, and the result in TrueBeam was 92.4±3.2 cGy, 148.6±5.7 cGy, 155.8±6.1 cGy, In all three conditions, the same as the treatment planning system, Tomotherapy, Halcyon, TreuBeam was measured highly in that order. Conclusion: Higher surface doses were measured in Tomotherapy and Halcyon compared to TrueBeam equipment. If the characteristics of each equipment are considered according to the treatment site and treatment purpose, it is expected that the treatment efficiency of the patient will increase as well as the treatment satisfaction of the patient.

Design and Fabrication of Ballast Water Treatment System using Fuzzy PID Controller (퍼지 PID 제어 기법을 이용한 선박평형수 처리 시스템 설계 및 제작)

  • Lee, Young-Dong;Ahn, Byeong-Gu;Noh, Yun-Hong;Jeong, Do-Un
    • Journal of the Institute of Convergence Signal Processing
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    • v.16 no.3
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    • pp.108-114
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    • 2015
  • Ballast water is carried by ships to ensure stability, trim and structural integrity. When a ship loads cargo, the ballast water is discharged. When foreign marine microorganisms are introduced into new marine environments, they pose a threat to the local marine ecological system. UV system is commonly used for the disinfection of waste and surface water. This method would not be as efficient because some species do survive to form viable populations, much of the sediment and organisms at the bottom of tanks, and may become serious pests. In this paper, we designed and implemented ballast water treatment system using fuzzy PID controller to prevent lamp damage, and to reduce the formation of the viable populations. The experiments were conducted with ballast water treatment system using fuzzy PID controller with short time exposure to the temperature above $40^{\circ}C$. This system was shown to be effective by significantly reducing bacterial population and lamp life extension through appropriate temperature of ballast water.

Development of Automatic Backwashing Treatment System for Ballast Water (자동역세척 여과장치를 이용한 선박 밸러스트수 처리)

  • Park Sang-Ho;Lim Jae-Dong;Kim In-Soo
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2005.10a
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    • pp.181-185
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    • 2005
  • The treated ballast water from previous treatment contains microorganisms and pathogenic organisms in an filtration treatment system. The advantage of this process can be filtrated to minimize the demage to screen clogging of drum filter with sweeping the solids off rotating the surface of the filter. Another advantage is to drop off the solids with controlling revolution of drum screen in pretreatment filtration process. Also the fact that it is easy to attach and detach a several type of screen for getting the expected water quality is another advantage, too. Filter rotation speed at 20rpmis 40.5cmHg and 40rpm is 36.6cmHg. Filter out impurities from ballast water over 60rpm is 35cmHg. Filtration system removal aquatic organism over $80{\mu}m$ in ballast water. This study shows that the filtration treatment system has a potential for the removal of ballast water.

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Mechanical Stability of TiN and DLC Coated Instrument of Pedicle Screw System (TiN 및 DLC 코팅된 척추경나사못시스템 수술기구의 기계적 안정성 분석)

  • Kang, Kwan-Su;Jung, Tae-Gon;Yang, Jae-Woong;Woo, Su-Heon;Park, Tea-Hyun;Jeong, Yong-Hoon
    • Journal of the Korean institute of surface engineering
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    • v.52 no.3
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    • pp.163-170
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    • 2019
  • Durability of instrument is one of the most important factor to ensure accurate treatment and decrease failure for the orthopedic surgical operation. Normally, a set-screw driver tip has been processed with hard coating for their higher durability and wear resistance. And several surface modification methods were obtained such as titanium nitride (TiN) coating, diamond like carbon coating, other nitriding, and etc. In this study, we have surface modified on set-screw driver tip with TiN and DLC, investigated whether the TiN and DLC coatings affect the mechanical properties and durability of the set-screw driver tip in the pedicle screw system. The surface morphologies were observed with scanning-electron microscopy (SEM), and the static/dynamic torsional properties were investigated with universal testing machine based on ASTM F543. Coating thickness of each coatings were commonly around $1^{\circ}C$. Static torsional stiffness, and ultimate torque values for DLC and TiN coated samples were significantly higher than those of non-coated sample by the pared T-test. Surface morphology of after the dynamic torsional test was more clean with less scratch or friction traces from DLC coating than that of TiN coating and non-coated sample.

The Effects of CF4 Partial Pressure on the Hydrophobic Thin Film Formation on Carbon Steel by Surface Treatment and Coating Method with Linear Microwave Ar/CH4/CF4 Plasma

  • Han, Moon-Ki;Cha, Ju-Hong;Lee, Ho-Jun;Chang, Cheol Jong;Jeon, Chang Yeop
    • Journal of Electrical Engineering and Technology
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    • v.12 no.5
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    • pp.2007-2013
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    • 2017
  • In order to give hydrophobic surface properties on carbon steel, the fluorinated amorphous carbon films were prepared by using linear 2.45GHz microwave PECVD device. Two different process approaches have been tested. One is direct deposition of a-C:H:F films using admixture of $Ar/CH_4/CF_4$ working gases and the other is surface treatment using $CF_4$ plasma after deposition of a-C:H film with $Ar/CH_4$ binary gas system. $Ar/CF_4$ plasma treated surface with high $CF_4$ gas ratio shows best hydrophobicity and durability of hydrophobicity. Nanometer scale surface roughness seems one of the most important factors for hydrophobicity within our experimental conditions. The properties of a-C:H:F films and $CF_4$ plasma treated a-C:H films were investigated in terms of surface roughness, hardness, microstructure, chemical bonding, atomic bonding structure between carbon and fluorine, adhesion and water contact angle by using atomic force microscopy (AFM), nano-indentation, Raman analysis and X-ray photoelectron spectroscopy (XPS).

Thermal properties of the surface-modified Inconel 617 (표면 처리에 따른 Inconel 617 합금의 고온 특성)

  • Cho, Hyun;Bang, Kwang-Hyun;Lee, Byeong-Woo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.19 no.6
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    • pp.298-304
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    • 2009
  • The effect of the surface treatments on the high temperature properties of the Inconel 617, one of the promising candidate alloys for high temperature heat-transport system, has been studied. Various surface modification methods including a rapid thermal process(RTP), a hydrothermal treatment, and a physical vapor deposition($2{\mu}m$ thick TiAlN film by an arc discharge) were applied to the Inconel 617. The morphological and the structural properties of the surface-modified Inconel 617 samples after heat treatment at $1000^{\circ}C$ in the air were compared to find out whether inhomogeneous formation of $Cr_2O_3$ crust at the surface region was suppressed or not. TiAlN-coated Inconel 617 showed homogeneous microstructure and the lowest wear loss compared to bare, RTP- and hydrothermally-treated Inconel 617 by suppressing the $Cr_2O_3$ crust formation.

Variation of Fatigue Properties in Nanoskinned Ti-6Al-4V - Rotating Bending and Axial Loading Tension-Compression Cycle - (Ti-6Al-4V 재의 UNSM 처리에 의한 피로특성변화 - 회전굽힘 피로시험과 축하중 인장압축 피로시험 비교 -)

  • Suh, Min-Soo;Pyoun, Young-Shik;Suh, Chang-Min
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.36 no.4
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    • pp.443-449
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    • 2012
  • Nanoskins were fabricated on a Ti-6Al-4V material by carrying out various surface treatments, i.e., deep rolling, laser shot peening, and ultrasonic nanocrystal surface modification (UNSM). These surface treatments are newly developed techniques and are becoming more popular for industrial applications. Fatigue tests were carried out using material test system (MTS); these tests included the axial loading tension-compression fatigue test (R = -1, RT, 5 Hz, sinusoidal wave) and rotating bending fatigue test (R = -1, RT, 3200 rpm). The analysis of the crack initiation pattern in the UNSM-treated material indicated that the crack was interior originating in the axial loading tension-compression cycle, and was surface originating in the bending fatigue test. UNSM treatment significantly improved the fatigue strength for the regime of above $10^6$ cycles that S-N curve of rotating bending stress clearly show the performance of a 5 mm titanium specimen after UNSM treatment is similar to that of an untreated 6 mm titanium specimen.

Improvement in Mechanical and Wear Properties of WC-Co by Ultrasonic Nanocrystal Surface Modification Technique (초음파나노표면개질 기술을 적용한 초경의 기계적특성 및 마모 연구)

  • Lee, Seung-Chul;Kim, Jun-Hyong;Choi, Gab-Su;Jang, Young-Do;Amanov, Auezhan;Pyun, Young-Sik
    • Tribology and Lubricants
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    • v.31 no.2
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    • pp.56-61
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    • 2015
  • In this study, we investigated the effectiveness of an ultrasonic nanocrystal surface modification (UNSM) technique on the mechanical and wear properties of tungsten carbide (WC). The UNSM technique is a newly developed surface modification technique that increases the mechanical properties of materials by severe plastic deformation. The objective of this study was to improve the wear resistance of press die made of WC by applying the UNSM technique. We observed the microstructures of the untreated and UNSM-treated specimens using a scanning electron microscope (SEM), and energy-dispersive X-ray spectroscopy (EDX) was used to investigate the chemical composition. The SEM observations showed the pore size and the number of pores decreased after the UNSM treatment. We assessed the wear behavior of both the untreated and UNSM-treated specimens using a scratch test. The test results showed that the wear resistance of the UNSM-treated specimens increased by about 46% compared with the untreated specimens. This may be attributed to increased hardness, reduced surface roughness, induced compressive residual stress, and refined grain size following the application of the UNSM technique. In addition, we found that the UNSM treatment increased the carbon concentration to 63% from 33%. We expect that implementing the findings of this study will lead to an increase in the life of press dies.