• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.5 s.236
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• pp.726-733
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• 2005

A spherical surface referenced Shack-Hartmann method is studied for inspecting machining accuracy of large concave mirror This method is so strong to the vibration environment for using as an on-machine inspection system during polishing process of large optics comparing with the interferometry. The measuring uncertainty of the system is shown as less than p-v 150 m. On-machine measured surface profile data with this method is used for feed back control of the polishing time or depth to improve the surface profile accuracy of large concave mirror. Also, the spherical surface referenced Shack-Hartmann method is useful for measuring aspheric such as parabolic or hyperbolic surface profile, comparing that the interferomehy needs a special null lens, which is to be a reference and difficult to fabricate.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.7 s.94
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• pp.1731-1739
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• 1993

An application of Scanning Tunneling Microscopy(STM) is investigated for the measurement of 3-dimensional profiles of the macro-machined patterns of which critical dimensions lie in the range of submicrometers. Special emphasis of this investigation is given to extending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models. Detailed aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine It patterns can successfully be traced with a resolution of 1 nanometer over a surface range of $4{\times}2$ micrometers.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.12 no.3
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• pp.61-68
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• 2013

Automatic measurement system is required since cycle time and cost of production are increased by various factors in manual systems. This paper presents a machine vision based prototype measurement system for the automotive axisymmetric shape parts which are generally measured by a manual system that is required the tolerance of the part is very small on each machined surface. This measurement system adopts a method in which optical lens is transferred along the profile of the part to minimize measurement cycle time. The main interest of this paper is a development of an optimum measurement algorithm to the outside diameter of the parts that can be applied to various combinations of hardware. The operating system used to implement the whole system is Window XP and corresponding environment.

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.2
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• pp.407-415
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• 1993

This report presents an automatic measurement method of 3-dimensional profiles of free-formed surfaces, by using a touch a touch-trigger contact probe along with a conventional coordinate measuring machine. The method proceeds in three steps; The surface profile under consideration is traced by the probe in an automatic manner, and then its measured data is compensated by considering the actual probe radius. Finally the compensated data is rearranged in the form suitable for the further processings of CAD/CAM applications. Some experimental results are discussed to verify the validity of the method suggested in this study.

• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1051-1058
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• 2020

The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.8
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• pp.1077-1087
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• 2002

The heat (mass) transfer characteristics on the blade surface of a high-turning first-stage turbine rotor for power generation has been investigated by employing the naphthalene sublimation technique. A four-axis profile measurement system is developed successfully for the measurements of local sublimation depth on the curved surface In the leading edge region, there is a good agreement between the present heat (mass) transfer data and the previous result on a turbine blade with a moderate turning angle, but some discrepancies are found in the mid-chord heat (mass) transfer between the two results. The local heat (mass) transfer on the present suction surface is greatly enhanced due to an earlier boundary transition, compared with that on a turbine blade with a moderate turning angle, meanwhile there is only a slight change in the pressure-side heat (mass) transfer between the two different turbine rotors. In general, the heat (mass) transfer augmentation by the endwall vortices is found much higher on the suction surface than on the pressure surface.

• Journal of the Korea Furniture Society
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• v.17 no.3
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• pp.79-85
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• 2006

Temperature of board surface was monitored during drying using an IR image measurement system. Boards were water-saturated and dried at the levels of four temperatures and three air velocities. At higher DB the surface temperature increased more steeply and level off period was significantly short. At the DB temperatures of 70, 80, $90^{\circ}C$ the period where the surface temperature was equivalent to WB temperature was constant regardless of air velocity while at $60^{\circ}C$ it decreased as air velocity increased. It was confirmed that a surface transfer coefficient increased with DB temperature. Variation of temperature profile on a wood surface increased with DB temperature and air velocity.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.79-87
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• 2004

The light pattern reflected from a machined surface contains some information like roughness and profile on the projected surface as expected in the Beckmann-Spizzichino model. In applying the theory into a real reliable measuring device, many parameters such as incident light power, wave length, spot size should be kept a constant optical value. However, the reflected light power is likely to change with the environmental noise, the variations of the light source, the reflectivity of the surface, etc. even though the incident light power is constant. In this study, a method for adjusting the incident light power to keep the reflected light power projected on a CMOS image sensor constant was proposed and a simple adjustment algorithm based on PI digital control was examined. Experiments verified that the proposed method made the surface roughness measurement better and more reliable even under variations of the height of light source.

• Proceedings of the Korean Society of Agricultural Engineers Conference
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• 2000.10a
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• pp.346-351
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• 2000

The study was carried out to investigate the characteristics of vertical velocity distribution measured by current meter at Kangkyung station in Keum river during the period of 1995 to 1997. It suggests the quadratic parabola equation to estimate the vertical velocity profile only from the measurement data of surface velocity. The equation was found to be statistically very stable and showed high significance to express the surface velocity and bottom velocity. The vertical velocity profile was determined by the relationships to the surface velocity, and a coefficient of the quadratic parabola equation. The vertical velocity profile can be applied to calculating the mean velocity and discharge, and to and to analyse the dispersion of pollutant materials in the streamflow.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.2
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• pp.267-280
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• 1992

This paper describes a numerical analysis of the light scattering patterns of roughness profiles. This analysis was based upon the light scattering theory developed by Beckmann. In the analysis, the roughness profile was regarded as a profile whose irregularities depend on the production process and the shape of cutting tool. Generally, waviness of an actual surface seriously distorts the scattered pattern of roughness profile. In order to avoid the effects of waviness of actual surfaces, several theoretically calculated scattering patterns, instead of actual scattering patterns, were used to analyze the scattering patterns of typical engineering roughness profiles. The characteristics of the light scattering patterns for five model surfaces were studied.