• Title/Summary/Keyword: Surface crystallization

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Characteristics of poly-Si TFTs using Excimer Laser Annealing Crystallization and high-k Gate Dielectrics (Excimer Laser Annealing 결정화 방법 및 고유전 게이트 절연막을 사용한 poly-Si TFT의 특성)

  • Lee, Woo-Hyun;Cho, Won-Ju
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.1
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    • pp.1-4
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    • 2008
  • The electrical characteristics of polycrystalline silicon (poly-Si) thin film transistor (TFT) crystallized by excimer laser annealing (ELA) method were evaluated, The polycrystalline silicon thin-film transistor (poly-Si TFT) has higher electric field-effect-mobility and larger drivability than the amorphous silicon TFT. However, to poly-Si TFT's using conventional processes, the temperature must be very high. For this reason, an amorphous silicon film on a buried oxide was crystallized by annealing with a KrF excimer laser (248 nm)to fabricate a poly-Si film at low temperature. Then, High permittivity $HfO_2$ of 20 nm as the gate-insulator was deposited by atomic layer deposition (ALD) to low temperature process. In addition, the solid phase crystallization (SPC) was compared to the ELA method as a crystallization technique of amorphous-silicon film. As a result, the crystallinity and surface roughness of poly-Si crystallized by ELA method was superior to the SPC method. Also, we obtained excellent device characteristics from the Poly-Si TFT fabricated by the ELA crystallization method.

Phosphorus Removal from Wastewater by CaCO3 Media (탄산칼슘 담체를 이용한 폐수내의 인 제거)

  • Kim, Moon Ki;Park, Jae Hong;Lee, Kwang Hyun;Joo, Hyun Jong
    • Journal of Korean Society on Water Environment
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    • v.25 no.4
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    • pp.515-521
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    • 2009
  • In this study, the applicability of $CaCO_3$ as a seed material for crystallization reaction was tested. $CaCO_3$ was ground to lesser than 425 mesh and was made to media mixed with binder. Batch experiment was to investigate the ${PO_4}^{3-}-P$ removal efficiency of different parameters such as $CaCO_3$ dosage and binder ratio, size, type and mass of media. In addition, the effect of phosphorus removal from wastewater was tested using a lab-scaled crystallization reactor. At the results of the batch test, phosphorus removals were improved with increasing $CaCO_3$ dosage and media mass but were decreased with increasing media size. Moreover, phosphorus removals were influenced by specific surface area but media type. The average T-P and ${PO_4}^{3-}-P$ removal efficiency in a lab-scaled crystallization reactor with $CaCO_3$ media for wastewater were shown to be 60.2% and 60.3% for 18 days of operation time.

Copolyester Studies (6) Thermal Properties of Poly(Ethylene Terephthalate) Modified by 5-Sulfoisophthalic Acid Sodium Salt (Polyester의 개질에 관한 연구 (6) 5-Sulfoisophthalic Acid Sodium Salt 로 개질된 Poly(Ethylene Terephthalate)의 열적 성질)

  • Tae Oan Ahn;Han Mo Jeong
    • Journal of the Korean Chemical Society
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    • v.31 no.6
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    • pp.582-589
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    • 1987
  • The thermal properties of poly (ethylene terephthalate) (PET) modified by 5-sulfoisophthalic acid sodium salt(SIAS) were studied. The glass transition temperature was increased, and the melting temperature and the crystallization rate were decreased as the content of SIAS unit was increased. The decrease of crystallization rate is thought to be due to the polar, bulky sulfonic acid sodium salt group which greatly retards the crystallization on to the growing crystal surface of the diffused polymer chain. The crystallization mechanism of copolyester is dependent on the content of SIAS unit and the three dimensional growth of crystal is hindered by the added SIAS unit.

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Synthesis and Characterization of Bandgap-modulated Organic Lead Halide Single Crystals

  • Park, Dae Young;Byun, Hye Ryung;Lee, A Young;Choi, Ho Min;Lim, Seong Chu;Jeong, Mun Seok
    • Journal of the Korean Physical Society
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    • v.73 no.11
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    • pp.1716-1724
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    • 2018
  • Single crystal of organic lead halide ($CH_3NH_3PbX_3$; $CH_3NH^+_3$ = methylammonium (MA), $X=Cl^-$, $Br^-$, $I^-$) is the best candidate for material intrinsic property studies due to no grain boundary and high crystal quality than the film having a lot of grain boundary and surface defects. The representative crystallization methods are inverse temperature crystallization (ITC) and anti-solvent vapor assisted crystallization (AVC). Herein, we report bandgap modulated organic lead halide single crystals having a bandgap ranging from ~ 2.1 eV to ~ 3 eV with ITC and AVC methods. The bandgap modulation was achieved by controlling the solvents and chloride-to-bromide ratio. Structural, optical and compositional properties of prepared crystals were characterized. The results show that the crystals synthesized by the two crystallization methods have similar properties, but the halide ratios in the crystals synthesized by the AVC method are controlled more quantitatively than the crystals synthesized by ITC.

Characterization of Solid Phase Crystallization in Sputtered and LFCVD Amorphous Silicon Thin Film (스퍼터링 및 저압화학기상증착 비정질 실리곤 박막의 고상 결정화 특성)

  • 김형택
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.89-93
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    • 1995
  • Effects of hydrogenation in amorphous silicon rile growths on Solid Phase Crystallization (SPC) was investigated using x-ray diffractometry, energy dispersive Spectroscopy, and Raman spectrum. Interdiffusion of barium(Ba) and aluminum(Al) compounds of corning substrate was observed in both of rf sputtering and LFCVD films under the low temperature(580$^{\circ}C$) annealing. Low degree of crystallinity resulted from the interdiffusion was obtained. Highly applicable degree of crystallinity was obtained through the mechanical damage induced surface activation on amorphous silicon films. X-ray diffraction intensity of (111) orientation was used to characterize the degree of crystallinity of SPC. Nucleation and growth rate in SPC could be controllable through the employed surface treatment. IIydrogenated LPCVD films showed the superior crystallinity to non-hydrogenated sputtering films. Insignificant effects of activation treatment in sputtered film was of activation treatment in sputtered film was observed on SPC.

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Two-dimensional Chiral Honeycomb Structures of Unnatural Amino Acids on Au(111)

  • Yang, Sena;Jeon, Aram;Lee, Hee-Seung;Kim, Sehun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.191.1-191.1
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    • 2014
  • Crystallization has become the most popular technique for the separation of enantiomers since the Pasteur's discovery. To investigate mechanism of crystallization of chiral molecules, it is necessary to study self-assembled structures on two-dimensional surface. Here, we have studied two-dimensional self-assembled structures of an unnatural amino acid, (S)-${\beta}$-methyl naphthalen-1-${\gamma}$-aminobutyric acid (${\gamma}^2$-1-naphthylalanine) on Au(111) surface at 150 K using scanning tunneling microscopy (STM). At initial stage, we found two chiral honeycomb structures which are counter-clockwise and clockwise configurations in one domain. The molecules are arranged around molecular vacancies, dark hole. By further increasing the amounts of adsorbed ${\gamma}^2$-1-naphthylalanine, a well-ordered square packed structure was observed. In addition, we found the other structure that molecules were trapped in the pore of the hexagonal molecular assembly.

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Growth of Zeolite-X Crystals on Metal Sieves Surface by Continuous Crystallization Method (연속적인 결정화 방법에 의한 금속 지지체상에서 Zeolite-X의 결정성장)

  • Park, Jeong-Hwan;Suh, Jeong-Kwon;Jeong, Soon-Yong;Lee, Jung-Min;Doh, Myung-Ki
    • Applied Chemistry for Engineering
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    • v.8 no.6
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    • pp.939-944
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    • 1997
  • The films of zeolite X on the surface of metal sieve were prepared by continuous crystallization method. It is known that the growth of zeolite crystal on the surface of metal is mainly dependent on the surface composition of metal sieve. In the present work, the zeolite nuclei could be easily formed as Cr content on the metal surface was removed by acid treatment. In order to investigate the proedure growing of zeolite crystal by the continuous crystallization method, the composition of zeolite X($6.36Na_2O-Al_2O_3-5.3SiO_2-190.8H_2O$)was supplied every 12hour. Then the mechanism and inter-relationship between the metal surface and nucleation are investigated. The results show that as the content of silica increases in the gel mixture, the nuclei of zeoilite are easily formed on the metal surface. Also, it was confirmed that the particle of zeolite stuck on the metal surface continues the linear growth. The particles are combined by the reaction of polycondensation, and finally become the shape of crystal. The sample synthesized by the film type was confirmed as zeolite X by the analyses of SEM and XRD.

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Electrical and interface characteristics of BST thin films grown by RF magnetron reactive sputtering (RF magnetron reactive sputtering 법으로 제작한 BST 박막의 전기적 및 계면 특성에 관한 연구)

  • 강성준;장동훈;유영섭
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.5
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    • pp.33-39
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    • 1998
  • The BST (Ba$_{1-x}$ Sr$_{x}$TiO$_{3}$)(50/50) thin film has been grown by RF magnetron reactive sputtering and its characteristics such as crystallization, surface roughness, and electrical properties have been investigated with varying the film thickness. The crystallization and surface roughness of BST thin film are investigated by using XRD and AFM, respectively The BST thin film anealed at 800.deg. C for 2 min has pure perovskite structure and good surface roughness of 16.1.angs.. We estimate that the thickness and dielectric constant of interface layer between BST film and electrode are 3nm and 18.9, respectively, by measuring the capacitance with various film thickness. As the film thickness increases form 80nm to 240nm, the dielectric constant at 10kHz increases from 199 to 265 and the leakage current density at 200kV/cm decreases from 0.682.mu.A/cm$^{2}$ to 0.181 .mu.A/cm$^{2}$. In the case of 240nm-thick BST thin film, the charge storage density and leakage current density at 5V are 50.5fC/.mu.m$^{2}$ and 0.182.mu.A/cm$^{2}$, respectively. The values indicate that the BST thin film is a very useful dielectric material for the DRAM capacitor.or.

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