• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2018.06a
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• pp.125-125
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• 2018

반도체 소자의 미새화에 따라 선폭이 10nm 이하로 줄어듦에 따라, 금속 배선의 저항이 급격하게 상승하고 있다. Cu는 낮은 저항과 높은 전도도를 가지고 있어 현재 배선물질로써 가장 많이 사용되고 있지만, 소자가 미세화됨에 따라 Cu를 미래의 배선물질로써 계속 사용하기에는 몇 가지 문제점이 제기되고 있다. Cu는 electron mean free path (EMFP)가 39 nm로 긴 특성을 가지기 때문에, 선폭이 줄어듦에 따라 surface 및 grain boundary scattering이 증가하여 저항이 급격하게 증가한다. 또한, technology node에 따른 소자의 operating temperature와 current density의 증가로 인해 Cu의 reliability가 감소하게 된다. 텅스텐은 EMFP가 19 nm로 짧은 특성을 가지고 있어, 소자의 크기가 줄어듦에 따라 Cu보다 낮은 저항 특성을 가질 수 있으며, 녹는점이 3695K로 1357K인 Cu보다 높으므로 배선물질로써 Cu를 대체할 가능성이 있다. 본 연구에서는 Inductively Coupled Plasma (ICP) assisted magnetron sputtering을 통해 매우 얇은 텅스텐 박막을 증착하여 저항을 낮추고자 하였다. 고밀도 플라즈마의 방전을 위해, internal-type coil antenna를 사용하였으며 텅스텐 박막의 증착을 위해 DC sputter system이 사용되었다. 높은 에너지를 가진 텅스텐 이온을 이용하여 낮은 온도에서 고품위 박막을 증착할 수 있었으며, dense한 구조의 박막 성장이 가능하였다. ICP assisted를 이용하여 증착했을 때와, 그렇지 않을 때를 비교하여 ICP 조건에 따라서 박막의 저항이 감소함을 확인할 수 있었을 뿐만 아니라 최대 약 65% 감소함을 확인할 수 있었다. XRD를 이용하여 ICP power를 인가했을 때, 높은 저항을 갖는 A-15 구조를 가진 ${\beta}$ peak의 감소와 낮은 저항을 갖는 BCC 구조를 가진 ${\alpha}$ peak의 증가를 상온과 673K에서 증착한 박막 모두에서 확인하였으며, 이를 통해 ICP power가 저항 감소에 영향을 미친다는 것을 확인하였다. 또한, 두 온도 조건에서 grain size를 계산하여 ICP power를 인가함에 따라 두 조건 모두 grain size가 증가하였음을 조사하였다. 또한, XPS 분석을 통해 ICP power를 인가하였을 때 박막의 저항에 많은 영향을 끼치는 O peak이 감소하는 것을 통해 ICP assisted의 효과를 확인하였다. 이를 통해, ICP assisted magnetron sputtering을 통해 텅스텐 박막을 증착함으로써 차세대 배선물질로써 텅스텐의 가능성을 확인할 수 있었다.

• Journal of Welding and Joining
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• v.11 no.2
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• pp.42-52
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• 1993

The corrosion fatigue fracture behaviour of dual phase steel was investigated in 3% NaCl solution at 302MPa and 137MPa. Fatigue test was conducted by cantilever type of self-made rotary bending fatigue testing machine. The fatigue strength increased with increasing the hardness of 2nd phase. Corrosion pit originated at the boundary of the 2nd phase. The size and number of corrosion pits were influenced by the 2nd phase hardness, and pits remained constant in size just after they were transited into cracks. The life of crack initiation was effected by stress level. The shape of relation of .DELTA. K and da/dN has smaller scattering in it in 3% NaCl solution than that in air. The higher the 2nd phase hardness is, the greater the corrosion fatigue life becomes. Corrosion fatigue fracture behaviour was primarily effected by mechanical factor in case of high stress(302MPa), but by electro-chemical reaction in a lower stress(137MPa). As stress level got lower and hardness of the 2nd phase got higher, the roughness of fracture surface increased.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.953-956
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• 2003

Transparent conductive ZnO:Ga thin films were deposited on glass substrates using rf magnetron sputtering method for flat panel display. The ZnO:Ga films were preferentially oriented to c-axis (002) of on substrates. The surface morphology was smooth and had not porous whatever substrate temperature was. The electrical conductivity of the thin films were in the range of $1.6{\times}10^2{\sim}6.7{\times}10^3\;{\Omega}^{-1}cm^{-1}$ at the growth temperature from 50 to $400^{\circ}C$, whereas has a maximum at around $250^{\circ}C$. By combining of XRD and EXAFS, the crystallinity and grain size decreased with increasing substrate temperature corresponding to the reduction of the grain-boundary scattering. The optical transmittance of sputtered ZnO:Ga thin films had an improved about 86% in the UV-visible region.

• Economic and Environmental Geology
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• v.27 no.2
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• pp.191-199
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• 1994

We have developed an algorithm based on the method of integral equations to simulate the magnetotelluric (MT) responses of three-dimensional (3-D) bodies in a layered half-space. The inhomogeneities are divided into a number of cells and are replaced by an equivalent current distribution which is approximated by pulse basis functions. A matrix equation is constructed using the electric Green's tensor function appropriate to a layered earth, and is solved for the vector current in each cell. Subsequently, scattered fields are found by integrating electric and magnetic Green's tensor functions over the scattering current About a 3-D conductive body near the earth's surface, interpretation using 2-D transverse electric modeling schemes can imply highly erratic low resistivities at depth. This is why these routines do not account for the effect of boundary charges. However, centrally located profiles across elongate 3-D prisms may be modeled accurately with a 2-D transverse magnetic algorithm, which implicitly includes boundary charges in its formulation. Multifrequency calculations show that apparent resistivity and impedance phase are really two complementary parameters. Hence, they should be treated simultaneously in broadband MT interpretation.

• Korean Journal of Materials Research
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• v.18 no.2
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• pp.103-106
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• 2008

The magneto-transport properties of an individual single crystalline Bi nanowire grown by a spontaneous growth method are reported. A four-terminal device based on an individual 400-nm-diameter nanowire was successfully fabricated using a plasma etching technique that removed an oxide layer that had formed on the surface of the nanowire. Large transverse ordinary magnetoresistance (1401%) and negative longitudinal ordinary magnetoresistance (-38%) were measured at 2 K. It was observed that the period of Shubnikov-de Haas oscillations in transverse geometry was $0.074^{T-1}$, $0.16^{T-1}$ and $0.77^{T-1}$, which is in good agreement with those of bulk Bi. However, it was found that the period of SdH oscillation in longitudinal geometry is $0.24^{T-1}$, which is larger than the value of $0.16^{T-1}$ reported for bulk Bi. The deviation is attributable to the spatial confinement arising from scattering at the nanowire surface boundary.

• Journal of Environmental Science International
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• v.3 no.3
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• pp.229-239
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• 1994

By laying emphasis on the intermediate layer, water property distribution in the Northwest Pacific is studied using the hydrographic data obtained by Japan Meteorologica] Agency in the period from 1960 to 1986. The scattering of water type in T-S diagram is relatively small in the Kuroshio Region. Both the envelopes of saline side and of fresh side of the scattered data points shifts gradually from saline side to fresh side as the observation line moves from southwest to northeast. In the Mixed Water Region, the scattering of water type increases rapidly as the observation line moves north; The envelope of fresh cold side moves towards fresh cold side much faster than that of same side. The thermosteric anomaly value at the salinity minimum decreases as the observation line moves from north to south or southwest. This suggests that the water does not advect along the salinity minimum layer, but that the salinity minimun layer is understood as a boundary of two different waters aligned vertically. We defined the typical water masses for the Oyashio Water and the Kuroshio Water. The water mass below the salinity minimum layer may be created by isopycnal mixing of these two water masses with a fixed mixing rate. While, the water mass above the salinity minimum cannot be created simply by isopycnal mixing. The salinity minimum layer may be eroded from upper side due to active mixing processes in the surface layer, while the water of the salinity minimum layer moves gradually southward. This appears to give an explanation why the thermosteric anomaly value at salinity minimum decreases towards south.

• Journal of Korean Society of Coastal and Ocean Engineers
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• v.12 no.3
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• pp.116-129
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• 2000

The interaction of incident monochromatic waves with a tensioned, flexible, circular membrane submerged horizontally below free surface is investigated in the frame of three-dimensional linear hydro-elastic theory. The velocity potential is split into two parts i.e. the diffraction potential representing the scattering of incident waves by a rigid circular disk and the radiation potential describing motion induced waves by elastic responses of flexible membrane. The fluid domain is divided into three regions, and the diffraction and radiation potentials in each region are expressed by the Fourier Bessel series. The displacement of circular membrane is expanded with a set of natural functions, which satisfy the membrane equation of motion and boundary conditions. The unknown coefficients in each region are determined by applying the continuity of pressure and normal velocity at the matching boundaries. The results show that various types of wave focusing are possible by controlling the size, submergence depth, and tension of membrane.

• Journal of the Korean Ceramic Society
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• v.45 no.12
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• pp.827-831
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• 2008

Spark plasma sintering (SPS) of AlN ceramics were carried out with ${Y_2}{O_3}$ as sintering additive at a sintering temperature $1,550{\sim}1,700^{\circ}C$. The effect of ${Y_2}{O_3}$ addition on sintering behavior and thermal conductivity of AlN ceramics was studied. ${Y_2}{O_3}$ added AlN showed higher densification rate than pure AlN noticeably, but the formation of yttrium aluminates phases by the solid-state reaction of ${Y_2}{O_3}$ and ${Al_2}{O_3}$ existed on AlN surface could delay the densification during the sintering process. The thermal conductivity of AlN specimens was promoted by the addition of ${Y_2}{O_3}$ up to 3 wt% in spite of the formation of YAG secondary phase in AlN grain boundaries because ${Y_2}{O_3}$ addition could reduced the oxygen contents in AlN lattice which is primary factor of thermal conductivity. However, the thermal conductivity rather decreased over 3 wt% addition because an immoderate formation of YAG phases in grain boundary could decrease thermal conductivity by a phonon scattering surpassing the contribution of ${Y_2}{O_3}$ addition.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.53-53
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• 2011

As the dimension of Cu interconnects has continued to reduce, its resistivity is expected to increase at the nanoscale due to increased surface and grain boundary scattering of electrons. To suppress increase of the resistivity in nanoscale interconnects, alloying Cu with other metal elements such as Al, Mn, and Ag is being considered to increase the mean free path of the drifting electrons. The formation of Al alloy with a slight amount of Cu broadly studied in the past. The study of Cu alloy including a very small Al fraction, by contrast, recently began. The formation of Cu-Al alloy is limited in wet chemical bath and was mainly conducted for fundamental studies by sputtering or evaporation system. However, these deposition methods have a limitation in production environment due to poor step coverage in nanoscale Cu metallization. In this work, gap-filling of Cu-Al alloy was conducted by cyclic MOCVD (metal organic chemical vapor deposition), followed by thermal annealing for alloying, which prevented an unwanted chemical reaction between Cu and Al precursors. To achieve filling the Cu-Al alloy into sub-100nm trench without overhang and void formation, furthermore, hydrogen plasma pretreatment of the trench pattern with Ru barrier layer was conducted in order to suppress of Cu nucleation and growth near the entrance area of the nano-scale trench by minimizing adsorption of metal precursors. As a result, superconformal gap-fill of Cu-Al alloy could be achieved successfully in the high aspect ration nanoscale trenches. Examined morphology, microstructure, chemical composition, and electrical properties of superfilled Cu-Al alloy will be discussed in detail.

• The Journal of the Acoustical Society of Korea
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• v.20 no.1
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• pp.68-76
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• 2001

Sonar is the system that detects objects and finds their location in water by using the echo ranging technique. In order to have excellent performance in variable environment, acoustic characteristics of this system must be analyzed accurately. In this paper, based on the finite element analysis, modeling and analysis of acoustic characteristics of underwater acoustic sensors are preformed. Couplings between piezoelectric and elastic materials, and fluid and structure systems associated with the modeling of piezoelectric underwater acoustic sensors are formulated. In the finite element modeling of unbounded acoustic fluid, IWEE (Infinite Eave Envelop Element) is adopted to take into account the infinite domain. When an incidence wave excites the surface of Tonpilz underwater acoustic sensor, the scattered wave on the sensor is founded by satisfying the radiation condition at the artificial boundary approximately. Based on this scattering analysis, the electrical response of the underwater acoustic sensor under incidence, so called RVS (Receiving Voltage Signal) is founded accurately. This will devote to design Sonar systems accurately.