• Electrical & Electronic Materials
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• v.10 no.2
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• pp.179-184
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• 1997

고주파화로 진행되고 있는 이동통신에서 사용주파수대가 고주파화로 향해감에 따라, 시스템은 소형화, 고기능화가 요구된다. 이러한 요구상황에 SAW 필터가 부응하기 위해서는 삽입손실 개선, Submicron 전극제작기술, 소형화를 위한 면실장기술 등이 앞으로 해결해 나아가야할 과제라고 생각된다. 이상으로 SAW 필터는 그 우수한 특성으로 앞으로 이동통신용 핵심부품으로 발전해 갈 것으로 생각된다. 이에 발맞추어 새로운 기술 향상과 신규시장에 대응하는 시기 적절한 상품화가 주된 관건이며, 국내업체는 위에 기술한 상황에 신속한 대응이 있어야만 세계 시장경쟁에서 살아남을 수 있을 것이라 생각된다.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.12
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• pp.1219-1227
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• 2014

For development of the surface acoustic wave bandpass filter(SAW-BPF), we fabricated the high quality ZnO thin films through the step-by-step(double) deposition using two different deposition methods which are pulsed laser deposition(PLD) and RF sputtering techniques. The second growth of ZnO thin films was completed by RF sputtering method on the first ZnO thin films pre-deposited by PLD method. The characteristics of ZnO thin films were analyzed by XRD, SEM and AFM systems. The FWHM of ${\omega}$-scan analysis and the minimum RMS value of surface roughness of step-by-step grown ZnO thin films were $0.79^{\circ}$ and 1.108 nm respectively. As a result, the crystallinity and the preferred orientation of the grown ZnO thin films were kept good quality and the surface roughnesses of those were improved by post-annealing process as comparison with ZnO thin film fabricated by the conventional PLD technique only. Using these proposed ZnO thin films, we demonstrated the RF device such as SAW-BPF, built by the proposed ZnO thin films, shows that it has the bandwidth of 2.98 MHz and the insertion loss of 36.5 dB at the center frequency of 260.8 MHz, respectively.

• The Journal of the Acoustical Society of Korea
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• v.9 no.2
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• pp.53-60
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• 1990

MSK waveforms are advantageous from the point of view of reduced interchannel interference. MSK waveform, however, is more difficult to generate than PSK due to its complex pulse shape. A SAW filter is ideally suited for generation of MSK waveform because it provides accurate control of the required impulse responese and linear phase at high frequncies. In this paper, an implementation of SAW based PSK-MSK convert filter, which can easily convert the high frequency PSK waveform to MSK, is studied.

• Proceedings of the IEEK Conference
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• 2001.06a
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• pp.241-244
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• 2001

The design and fabrication of the surface acoustic wave(SAW) bandpass filters using slanted finger interdigital electrode transducers(IDTs) is investigated. The slanted finger IDTs are used to design SAW filters with good shape factor, a flat passband, and good out-of-band rejection characteristic. The slanted finger IDTS filter was simulated of three kind of IDTs structure. uniform-uniform IDT, uniform-withdrawal weighting IDTS, withdrawal weighting-withdrawal weighting IDTS. Uniform-withdrawal weighting IDTs structure SAW filters was designed and fabricated on 112$^{\circ}$ LiTaO$_3$, 128$^{\circ}$LiNbO$_3$ substrates. Designed SAW filter has about a 30% fractional bandwidth and a 70MHz center frequency.

• The Journal of the Acoustical Society of Korea
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• v.20 no.3
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• pp.83-90
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• 2001

Conventional SAW duplexer filters employ a 1/4 wavelength transmission line, which causes difficulty in fabrication of the strip line on the package. Its manufacturing process is also complicated, because it needs integrating process of the separate transmitting filter, receiving filter and isolation circuits. This paper concerns development of a new structure of the duplexer filter that has all the transmitting filter, the receiving filter and the isolation circuit as a one chip device. For composition of the duplexer, we design the component SAW ladder filters and the isolation network consisting of lumped inductor and capacitor elements. Performance of the whole duplexer is optimized by the nonlinear multivariable minimization of a proper target function, and the result is compared with that of commercial filters.

• The Journal of the Acoustical Society of Korea
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• v.28 no.3
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• pp.260-267
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• 2009

It is very difficult to form a desired complex sound field at a designated region precisely as an application of acoustic arrays, which is one of important objects of array systems. To solve the problem, a filter design method was suggested, which employed the concept of an inverse method using the acoustical holography based on the boundary element method. In the acoustical holography used for the source identification, the measured field data are employed to reconstruct the vibro-acoustic parameters on the source surface. In the analogous problem of source array design, the desired field data at some specific points in the sound field was set as constraints and the volume velocity at the surface points of the source plane became the source signal to satisfy the desired sound field. In the filter design, the constraints for the desired sound field are set, first. The array source and given space are modelled by the boundary elements. Then, the desired source parameters are inversely calculated in a way similar to the holographic source identification method. As a test example, a target field comprised of a quiet region and a plane wave propagation region was simultaneously realized by using the array with 16 loudspeakers.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.56-56
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• 2003

최근 정보통신 분야의 급격한 발달로 인하여 무선통신에 사용되는 주파수 영역 또한 계속 높아짐에 따라 대역통과 필터 소자의 삽입 손실, 소비 전력, 크기, MMIC화에 대한 많은 연구가 진행되고 있다 압전 현상을 이용한 박막형 공진기가 이러한 요구를 충족시키고, 현재의 SAW filter를 대체할 소자로 떠오르고 있다. 본 실험에서는 단결정 미세 구조를 만들 수 있고, 압전 효과 또한 우수하며, Surface Micromachining보다 비교적 제조 공정이 간단하고 선택적 에칭이 가능한 Bulk Micromachining을 이용하여 Si$_3$N$_4$ Membrane을 이용한 중심주파수 5.2GHz인 두께 진동모드 Film Bulk Acoustic Wave Resonator(FBAR)를 제작하고 공진기의 고주파 특성을 평가하였다. Membrane구조 형성을 위해 Backside면인 Si$_3$N$_4$, Si은 RIE(Reactive Ion Etching)와 선택적 에칭용액인 KOH로 각각 에칭하여 Membrane을 갖는 구조로 중심주파수 5.2GHz인 두께 진동모드 FBAR를 설계 및 제조하였다. 체적 탄성파 공진 현상은 r.f Magnetron Sputtering법으로 증착한 AIN 압전박막과 Mo전극으로부터 발생 가능하였다. 본 연구에서는 0.9$\mu\textrm{m}$-Si$_3$N$_4$ Membrane을 이용해 FBAR를 제작/평가하고, RIE을 통해 Membrane을 제거해 가면서 공진기의 특성 즉, Quality factor와 유효전기기계결합계수(K$_{eff}$) 및 S parameter특성을 비교 측정해 보았다. 측정해본 결과 Membrane Free일때가 훨씬더 공진 특성이 우수함을 볼 수 있다

• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.24-25
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• 2006

In this paper, ZnO thin films were prepared on p-Si(100) by RF magnetron sputtering. Before the depostion, the substrates were pre-heated to 500, 400, 300, $200^{\circ}C$ or not. During the deposition, the substrates were cooled down naturally or kept and then the films were investigated by XRD(X-ray diffraction) and SEM (scanning micro scope). It is showed the most outstanding result that the film was prepared on the substrate were cooled from $400^{\circ}C$. When the substrate was cooled from a certain temperature during deposition, it could be improve the c-axis orientation and useful for application of SAW(surface acoustic wave) filter and FBAR(film bulk acoustic wave resonator) device.

• Proceedings of the IEEK Conference
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• 1998.06a
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• pp.367-370
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• 1998

A hybrid-integrated SAW(surface acoustic wave) douplexer including transmitter(Tx) filter, receiver(Rx) filter an dantenna terminal has been studied. The prototype duplxer was designed for CDMA system application in the 800 MHz-band. Ladder type SAW filters consisting of one port SAW resonators wer integrated on epoxy substrate to demonstrate the feasiblity of antenna duplexer. In order to perform the duplexing function, a strip line for impedance transformaton with length of .gamma./4 was inserted at rx path. The fabricted duplexer has an insertion loss of 3.0 dB at Tx path and 3.7 dB at Rx path. The attenuation has more than 40dB.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.613-616
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• 2002

This paper has been studied an improvement of receive sensitivity for RF module of Industrial Scientific Medical(ISM) Band. In the paper, Also this paper handles receive sensitivity progress of RF module in ISM band. how to improve receive sensitivity adds to Surface Acoustic Wave(SAW) filter, Low Noise Filter(LNA), etc and insulates receiver and transmitter. And then the circuit is inspected by the effective range test of receiver and transmitter. And this Paper was designed that micro-controler controls the part of RF by software.