• Tribology and Lubricants
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• v.40 no.2
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• pp.47-53
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• 2024

Surface topography plays a decisive role in determining the performance of several precision components. In particular, the surface roughness of semiconductor devices affects the precision of the circuit. In this regard, the surface topography of a given surface needs to be appropriately assessed. Typically, the average roughness is used as one of the main indicators of surface finish quality because it is influenced by both dynamic and static parameters. Owing to the increasing demand for such accurate and reliable surface measurement systems, studies are continuously being conducted to understand the parameters of surface roughness and measure the average roughness with high reliability. However, the differences in the measurement methods of surface roughness are not clearly understood. Hence, in this study, the surface roughness of the back of a silicon wafer was measured using both contact and noncontact methods. Subsequently, a comparative analysis was conducted according to various surface roughness parameters to identify the differences in surface roughness depending on the measurement method. When using a 3D laser confocal microscope, even smaller surface asperities can be measured compared with the use of a 3D profiler. The results are expected to improve the understanding of the surface roughness characteristics of precision components and be used as a useful guideline for selecting the measurement method for surface topography assessment.

• Journal of the Korean Geotechnical Society
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• v.15 no.4
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• pp.247-260
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• 1999

It was found that surface roughness has a first-order effect on the interface shear strength and accordingly it should be accurately quantified if its role is to be properly understood. Most of the surface roughness parameters are based on the trisector approach (three dimensional parameter) which can provide a good measure of the surface roughness from a static perspective. However, if roughness is to be correlated with a directional sensitive parameter such as interface shear then a two dimensional parameter could be more meaningful if the roughness measurements are made parallel to the direction of shearing. In this paper, alternative roughness parameters which consider the direction of shearing are described. These directional parameters are compared with the existing roughness parameters, and the relationship between these directional and non-directional parameters are investigated. The surface roughness was quantified by using the Optical Profile Microscopy (OPM) method (Dove and Frost, 1996) based on the digital image analysis. The results showed that the various surface roughness parameters measured in this study exhibit similar trend of roughness values, so that, good relationships are obtained between these roughness parameters. As the surface roughness increases, the roughness values measured in trisector coupons are increasing higher than those measured in parallel coupons.

• Journal of the Semiconductor & Display Technology
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• v.13 no.3
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• pp.7-11
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• 2014

The experimental analysis presented aims at the selection of the most optimal machining parameter combination for wire electrical discharge machining (WEDM) of STD11. Based on the Taguchi experimental design ($L_{27}$ orthogonal array) method, a series of experiments were performed by considering time-on, voltage, time-off, wire speed, and flow rate as input parameters. The surface roughness was considered responses. Based on the signal-to-noise (S/N) ratio, the influence of the input parameters on the responses was determined. The optimal machining parameters setting for the minimum surface roughness was found using Taguchi methodology. In order to investigate the effects of process parameters on the surface machined by WEDM, Several experiments are conducted to consider effects of time-on, voltage, time-off, wire speed and flow rate on the surface roughness. Analysis of variance (ANOVA) as well as regression analysis are performed on experimental data. The best results of surface roughness were obtained at higher voltage, lower wire speed, and lower time-on.

• Proceedings of the Korean Geotechical Society Conference
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• 1999.11c
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• pp.57-68
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• 1999

This paper summarizes the results of a study which uses the recently developed Optical Profile Microscopy technique (Dove and Frost, 1996) as the basis for investigating the role of geomembrane surface roughness on the shear mechanism of geomembrane/geotextile interfaces. The alternative roughness parameters which consider the direction of shearing are described. These directional parameters are compared with the existing roughness parameters, and the relationship between these directional and non-directional parameters are investigated. Then, the relationship between interface shear strength and surface roughness quantified at the interface is investigated. The results show that interface friction can be quantitatively related to the surface roughness of the geomembrane. The peak and residual interface strengths increase dramatically through the use of textured geomembranes as opposed to smooth geomembranes. For the smooth geomembranes, the sliding of the geotextile is the main shear mechanism. For the textured geomembranes, the peak interface strength is mainly mobilized through the micro-texture of the geomembrane, however, the residual interface strength is primarily attributed to macro scale surface roughness which pulls out and breaks the filaments from the geotextile. The results of this study can be extended to the other interfaces such as joints in rock mass, and also can be used to provide a quantitative framework that can lead to a significantly improved basis for the selection and design of geotextiles and geomembranes in direct contact.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.2
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• pp.63-69
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• 2007

The surface roughness in centerless grinding is mainly affected by the many process parameters. For improving the surface roughness, the control of grinding parameters is very important. This paper deals with the analysis of the process parameters such as height of renters, tilting angle of the regulating wheel with respect to grinding wheel, rotation speed of regulating wheel, which are developed based on design of experiments such as factorial design. The investigation can enhance the surface roughness of ferrule. Finally, we have verified improved results of the optimized conditions.

• Transactions of Materials Processing
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• v.20 no.8
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• pp.575-580
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• 2011

Direct laser melting(DLM) is promising as a joining method for producing parts for automobiles, aerospace, marine and medical applications. An advantageous characteristic of DLM is that it affects the parent metal very little. The mechanical properties of parts made by DLM are strongly affected by the porosity and surface roughness of the laser melted beads. This is a systematic study of the effects of the porosity and surface roughness of laser melted beads using various processing parameters, such as laser power, scan rate and overlapping ratio of the fill spacing. The specimens were fabricated with 316L and 304L austenitic stainless steel powder. Dense parts with low porosity were obtained at low laser scan speed, as it increased the aspect ratio of the parental material and the depth of penetration. The variations of surface roughness were examined at various processing parameters such as overlapping ratio and laser power.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.321-322
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• 2002

This paper presents study of effects of cutting parameters such as cutting speed, feed rate and depth of cut on the surface roughness in hard turning. Taguchi Method and linear regression model of design parameters were utilized to identify the controlling process parameters that can monitor the surface roughness in the hard turning operation. In the process optimization, experimental planning was performed using the orthogonal array and concept of the signal-to-noise ratio. Cutting parameters such as speed, feed rate, and depth of cut were selected as process parameters and the ANOVA analysis showed that feed rate and cutting speed had more effect on the roughness variation that depth of cut.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1992.10a
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• pp.101-105
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• 1992

Machined graphite/epoxy composite surfaces were studied by using SEM(Scanning Electron Microscopy). surface profilometry and its analysis to determine suitable surface describing parameters for machined unidirectional and laminate composite surface. The surface roughness and profile are found to be highly dependent on the fiber layup direction and the measurement direction. Machined unidirectional and 0.deg. 45 .deg. 90 .deg. plies in laminate composite surface profiles are found to be Gaussian in the direction of machining. Since there exist bare fibers without matrix smearing in 0 .deg. ply, higher surface roughness values were found in this orientation. It was possible to machine 90 .deg. and -45 .deg. plies due to the adjacent plies, which were holding those plies. It was found that the microgeometrical variations in terms of roughness parameters Ra without Dy (maximum Damage Depth) region and Dy are better descriptors of the machined laminate composite surface than commonly used roughness parameters Ra and Ra. The characteristics of surface profiles in laminate composite are well represented in CHD (Cumulative Height Distribution) plot and PPD (Percentage Probability Density) plot. Also, the power spectral density function is shown to be capable of identifying the wavelength distribution of the machining damage.

• Transactions of Materials Processing
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• v.17 no.6
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• pp.401-406
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• 2008

The frictional behavior of stamping process is a function of interface parameters such as sheet and tool material, lubricant, surface roughness, contact pressure, sliding speed etc. Among these parameters the thing that can be controlled by a steel maker is the surface roughness of sheet. In this study, effects of surface roughness on the frictional behavior of steel sheet for automotive were investigated to find out the way to improve the frictional characteristics of steel sheet. The cold rolled steel sheets with various surface roughnesses were prepared for the test. The flat type friction test was conducted with different lubricant conditions. The surface roughness effect on frictional behavior depends on the viscosity of lubricant. The frictional characteristic of steel sheet was influenced by the amplitude of roughness as well as the shape of that.

• Transactions of Materials Processing
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• v.30 no.1
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• pp.27-34
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• 2021

In this study, response surface method (RSM) was used in modeling and multi-objective optimization of the parameters of AA5052-H32 in incremental sheet forming (ISF). The goals of optimization were the maximum forming angle, minimum thickness reduction, and minimum surface roughness, with varying values in response to changes in production process parameters, such as tool diameter, tool spindle speed, step depth, and tool feed rate. A Box-Behnken experimental design (BBD) was used to develop an RSM model for modeling the variations in the forming angle, thickness reduction, and surface roughness in response to variations in process parameters. Subsequently, the RSM model was used as the fitness function for multi-objective optimization of the ISF process based on experimental design. The results showed that RSM can be effectively used to control the forming angle, thickness reduction, and surface roughness.