• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.11a
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• pp.721-725
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• 1996

The microfabricated test structures were used in order to evaluate the stress characteristics in films. The test structures were fabricated using surface micromachining technique, including HF vapor phase etching as an effective release method. The fabricated structures were micro strain gauge, cantilever-type vernier gauge and bridge for stress measurement, and cantilever for stress gradient measurement. The strain was measures by observing the deformation of the structures occurred after release etching and the amount of deformation can be detected by micro vernier gauge, which has gauge resolution of 0.2${\mu}{\textrm}{m}$. The detection principles and the degree of precision for the measured strain were also discussed. The characteristics of residual stress in LPCVD polysilicon films were studied using these test structures. The stress gradient due to the stress variation through the film thickness was calculated by measuring the deflection at the cantilever free end.

• Atmosphere
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• v.28 no.2
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• pp.113-121
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• 2018

In order to monitor greenhouse gases including $CO_2$, various types of surface-, aircraft-, and satellite-based measurement projects have been conducted. These data help understand the variations of greenhouse gases and are used in atmospheric inverse modeling systems to simulate surface fluxes for greenhouse gases. CarbonTracker is a system for estimating surface $CO_2$ flux, using an atmospheric inverse modeling method, based on only surface observation data. Because of the insufficient surface observation data available for accurate estimation of the surface $CO_2$ flux, additional observations would be required. In this study, a system that assimilates aircraft $CO_2$ measurement data in CarbonTracker (CT2013B) is developed, and the estimated results from this data assimilation system are evaluated. The aircraft $CO_2$ measurement data used are obtained from the Comprehensive Observation Network for Trace gases by the Airliner (CONTRAIL) project. The developed system includes the preprocessor of the raw observation data, the observation operator, and the ensemble Kalman filter (EnKF) data assimilation process. After preprocessing the raw data, the modeled value corresponding spatially and temporally to each observation is calculated using the observation operator. These modeled values and observations are then averaged in space and time, and used in the EnKF data assimilation process. The modeled values are much closer to the observations and show smaller biases and root-mean-square errors, after the assimilation of the aircraft $CO_2$ measurement data. This system could also be used to assimilate other aircraft $CO_2$ measurement data in CarbonTracker.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.11 s.176
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• pp.64-71
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• 2005

In order to measure surface roughness profile, stylus type equipments are commonly used, but the stylus keeps contact with surface and damages specimens by its tip pressure. Therefore, optics based measurement systems are developed, and light phase interferometer, which is based on light interference phenomenon, is the most noticeable research. However, light interference based measurements require translation mechanisms of nano-meter order in order to generate phase differences or multiple focusing, thus the systems cannot satisfy the industrial need of on-the-machine and in-process measurement to achieve factory automation and productive enhancement. In this research, we focused light reflectance phenomenon rather than the light interference, because reflectance based method do not need translation mechanisms. However, the method cannot direct]y measure surface roughness profile, because reflected light consists of several components and thus it cannot supply surface height information with its original form. In order to overcome the demerit, we newly proposed an image processing based algorithm, which can separate reflected light components and conduct parameterization and reconstruction process with respect to surface height information, and then confirmed the reliability of proposed algorithm by experiment.

• Corrosion Science and Technology
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• v.16 no.4
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• pp.201-208
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• 2017

A finite element analysis is proposed to study the effect of specimen dimensions on lateral diffusion of hydrogen during hydrogen permeation flux measurements. The error of measurement on thick specimens because of 1D diffusion approximation may be as much as 70%. A critical condition for accurate measurements is to designate the area of hydrogen monitoring/exit surface smaller than the area of hydrogen charging/entry surface. For thin to medium thickness specimens (ratio of thickness to specimen radius of 5:10 and below), the charging surface should be maximized and the monitoring surface should be minimized. In case of relatively thick specimens (ratio of thickness to specimen radius above of 5:10), use of a hydrogen-diffusion barrier on the specimen boundaries is recommended. It would completely eliminate lateral losses of hydrogen, but cannot eliminate the deviation towards 2D diffusion near the side edges. In such a case, the charging surface should be maximized and the monitoring surface should be as closer in dimension as the charging surface. A regression analysis was carried out and an analytical relationship between the maximum measurement error and the specimen dimensions is proposed.

• Current Optics and Photonics
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• v.2 no.6
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• pp.568-575
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• 2018

Various techniques to measure the three-dimensional (3D) surface profile of a 3D micro- or nanostructure have been proposed. However, it is difficult to apply such techniques directly to industrial uses because most of them are relatively slow, unreliable, and expensive. The HiLo optical imaging technique, which was recently introduced in the field of fluorescence imaging, is a promising wide-field imaging technique capable of high-speed imaging with a simple optical configuration. It has not been used in measuring a 3D surface profile although confocal microscopy originally developed for fluorescence imaging has been adapted to the field of 3D optical measurement for a long time. In this paper, to the best of our knowledge, the HiLo optical imaging technique for measuring a 3D surface profile is proposed for the first time. Its optical configuration and algorithm for a precisely detecting surface position are designed, optimized, and implemented. Optical performance for several 3D microscale structures is evaluated, and it is confirmed that the capability of measuring a 3D surface profile with HiLo optical imaging technique is comparable to that with confocal microscopy.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.3
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• pp.537-543
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• 2002

This paper examines a new in-process measurement system for the measurement of micro-defects on the surfaces of brittle materials by using the AFM (Atomic Force Microscopy). A new AFM scanning stage that can also perform nano-scale bending of the sample was developed by adding a bending unit to a commercially available AFM scanner. The bending unit consists of a PZT actuator and sample holder, and can perform static and cyclic three-point bending. The true bending displacement of the bending unit is approximately 1.8mm when 80 volts are applied to the PZT actuator. The frequency response of the bending unit and the stress on the sample were also analyzed, both theoretically and experimentally. Potential surface defects of the sample were successfully detected by this measurement system. It was confirmed that the number of micro-defects on a scratched surface increases when the surface is subjected to a cyclic bending load.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2007.11a
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• pp.1018-1021
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• 2007

This paper explores the use of BEM based NAH to reconstruct the surface vibration of a plate in a rectangular finite cavity, in which the distances between sensors and the nearest points on the source surface are not equal. In such circumstances, different degree of information on propagating and non-propagating wave components will be detected by sensors at different positions, as well as the influence of measurement noise will vary significantly from the nearest points of measurement to the farthest ones. On the other hand, the condition number of the vibro-acoustic transfer function matrix relating normal surface velocities and field pressures will becomes high, numerically indicating an increase of linear dependency between rows of transfer function matrix. The combination of poor measurement and high condition number will result inaccurate reconstruction. Therefore, one approach to be investigated in this work is to select the measurement positions in such ways that reduce measurement redundancy, as it indicated by the condition number. The improvement is found to be significant in the numerical simulations utilizing two different criterions, spanning from over-determined to under-determined cases, and in the validation experiment.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.21 no.11
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• pp.1862-1870
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• 1997

A fast and precise technique to measure 3-dimensional coordinates of an object is proposed. It is essential to take the 3-dimensional measurements of the object in design and inspection. Using this developed system a surface model of a complex shape can be constructed. 3-dimensional world coordinates are projected onto a camera plane by the perspective transformation, which plays an important role in this measurement system. According to the shape of the object two measuring methods are proposed. One is rotation of an object and the other is translation of measuring unit. Measuring speed depending on image processing time is obtained as 200 points per second. Measurement resolution i sexperimented by two parameters among others; the angle between the laser beam plane and the camera, and the distance between the camera and the object. As a result of these experiments, it was found that measurement resolution ranges from 0.3mm to 1.0mm. This constructed surface model could be used in manufacturing tools such as rapid prototyping machine.

• Journal of ILASS-Korea
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• v.2 no.4
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• pp.29-35
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• 1997

Liquid film thickness is measured by $moir\acute{e}$ topography which monitored liquid surface. $Moir\acute{e}$ fringe measurement techniques share the inherent simplicity found in optical interferometric techniques have the advantage of use over a greater range of displacement. $Moir\acute{e}$ fringe are the geometric interference patterns observed when two dense line grating are superposed. Light transmitted through a fixed line grating is deviated by the liquid film surface, producing a distored image of the grating. The $moir\acute{e}$ fringe produced by projection of this optically distored grating onto a second stationary grating permit visualization of the liquid surface and measurement of the liquid film thickness. This study measured the small amplitude of liquid film thickness to the $moir\acute{e}$ fringe pattern produced when spherical metal was dropped glycerin put)1 And the measurement of liquid film thickness flowing down an inclined plate are required to calculate the liquid slope in a position.

• Korean Journal of Remote Sensing
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• v.35 no.4
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• pp.609-616
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• 2019

Land surface temperature ($T_s$) is a critical variable for understanding the surface energy exchange between land and atmosphere. Using the data measured from micrometeorological flux towers, three types of $T_s$, obtained using a thermal-infrared radiometer (IRT), a net radiometer, and an equation for sensible heat flux, were compared. The $T_s$ estimated using the net radiometer was highly correlated with the $T_s$ obtained from the IRT. Both values acceptably fit the $T_s$ from the Terra/MODIS (Moderate Resolution Imaging Spectroradiometer)satellite. These results will enhance the measurement of land surface temperatures at various scales. Further, they are useful for understanding land surface energy partitioning to evaluate and develop land surface models and algorithms for satellite remote sensing products associated with surface thermal conditions.