• 한국진공학회:학술대회논문집
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• 한국진공학회 2000년도 제18회 학술발표회 논문개요집
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• pp.80-80
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• 2000

Surface acoustic wave (SAW) devices have become more important as mobile telecommunication systems need h호-frrequency, low-loss, and down-sized components. Higher-frequency SAW divices can be more sasily realized by developing new h호-SAW-velocity materials. The ZnO/diamond/Si multilasyer structure is one of the most promising material components for GHz-band SAW filters because of its SAW velocity above 10,000 m/sec. Silicon carbide is also a potential candidate material for high frequency, high power and radiation resistive electronic devices due to its superior mechanical, thermal and electronic properties. However, high price of commercialized 6- or 4H-SiC single crystalline wafer is an obstacle to apply SiC to high frequency SAW devices. In this study, single crystalline 3C-SiC thin films were grown on Si (100) by MOCVD using bis-trimethylsilymethane (BTMSM, C7H20Si7) organosilicon precursor. The 3C-SiC film properties were investigated using SEM, TEM, and high resolution XRD. The FWHM of 3C-SiC (200) peak was obtained 0.37 degree. To investigate the SAW propagation characteristics of the 3C-SiC films, SAW filters were fabricated using interdigital transducer electrodes on the top of ZnO/3C-SiC/Si(100), which were used to excite surface acoustic waves. SAW velocities were calculated from the frequency-response measurements of SAW filters. A generalized SAW mode. The hard 3C-SiC thin films stiffened Si substrate so that the velocities of fundamental and the 1st mode increased up to 5,100 m/s and 9,140 m/s, respectively.

• 센서학회지
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• 제21권6호
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• pp.408-412
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• 2012

An in-line dispersive delay line (DDL) demands low and controllable reflectivity of the reflectors, especially if the surface acoustic wave (SAW) propagates all the way along the reflecting structure. The metal reflectors are usually too strong and introduce too much attenuation in such a device. The proposed solution of this problem is to spatially separate the acoustic channels for different frequencies with the help of Fan-shaped Transducers (FIDT) and to use narrow open metal reflectors to reduce reflectivity. Special arrangement of FIDT is performed to use 180-deg. reflection of the SAW. Narrow open metal strips with a metallisation ratio of the order of 20% are used as reflectors with small and controllable reflectivity. Reflectivity of such strips is estimated both theoretically and experimentally. Experimental performance of the proposed DDL is presented.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.242-243
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• 2005

SAW filters were fabricated on $LiNbO_3$ substrates to evaluate frequency response and properties of photolithography. In the both of etch and lift-off methods, lift off method was superior to etch method in fabrication process. Frequency response property was measured by network analyzer. From a measurement of acoustic property, SAW propagation velocity was 3574.9m/sec for $LiNbO_3$ SAW filter.

• 한국생산제조학회지
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• 제21권2호
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• pp.267-275
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• 2012

Austenite stainless steel 304 has properties of high resistance to corrosion and temperature changes. Therefore, this material is widely used in various of industries. However, when the material is subjected to heating and cooling cycles the forming accuracy, for example, the right angle associated with a sharp bend such as corner is lost. This phenomenon is caused by the reversion of the deformation-induced martensite into austenite when the temperature in increased. This result in misfit of a structure or an assembly, and an increase in residual stress. Hence, it is important to understand this process. In this study, to evaluate the mechanical behavior of the deformation-induced martensite and reversed austenite, a scanning acoustic spectroscope including the capability of obtaining both phase and amplitude of the ultrasonic wave (i.e., the complex V(z) curve method) was used. Then, the velocities of the SAW propagating within the specimens made in different conditions were measured. The experimental differences of the SAW velocities obtained in this experiment were ranging from 2,750 m/s to 2,850 m/s, and the theoretical difference was 3.6% under the assumption that the SAW velocity was 2,800 m/s. The error became smaller as the martensite content was increased. Therefore, the SAW velocity may be a probe to estimate the marternsite content.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1994년도 하계학술대회 논문집 C
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• pp.1457-1459
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• 1994

A surface acoustic wave(SAW) sensor for the detection of odorants has been constructed by depositing various phospholipids and fatty acids onto the surface of the SAW device. Applying the Langmuir-Blodgett technique, it was possible to deposit the optimal number of layers which was found to be between 10 and 20. Menthone, amylacetate, acetoin, and other organic gases showed different affinities to the coated lipids. An explanation is given for different odorant affinities based on the monolayer properties of phospholipids.

• 센서학회지
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• 제19권5호
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• pp.337-341
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• 2010

In this work, the nanocrystalline ZnO/polycrystalline(poly) aluminum nitride(AlN)/ Si-layered structure was fabricated for humidity sensor applications based on surface acoustic wave(SAW). The ZnO film was used as a sensitive material layer. The ZnO and AlN(0002) were deposited by a sol-gel process and a pulse reactive magnetron sputtering, respectively. The ZnO sensitive films coated on AlN have a hexagonal wurtzite structure after the thin films annealed at $400^{\circ}C$, $500^{\circ}C$ and $600^{\circ}C$. The surface of the film exhibits sponginess and a nanometer particle size(below 50 nm). The largest shift in the frequency response was at approximately 200 kHz(the relative humidity: 10 %~90 %) for the structure annealed at $400^{\circ}C$. The effect of the change in the environmental temperature on the frequency response of the SAW humidity sensor was also investigated.

• 마이크로전자및패키징학회지
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• 제12권3호
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• pp.267-274
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• 2005

This paper presents the fabrication of surface acoustic wave (SAW)-based pressure sensor for long-term stable mechanical compression force measurement. SAW pressure sensor has many attractive features for practical pressure measurement: no battery requirement, wireless pressure detection especially at hazardous environments, and easy other functionality integrations such as temperature, humidity, and RFID. A $41^{\circ}$ YX $LiNbO_3$ piezoelectric substrate was used because of its high SAW propagation velocity and large values of electromechanical coupling factors $K^2$. A silicon substrate with $\~200{\mu}m$ deep cavity was bonded to the diaphragm with epoxy, in which gold was covered all over the inner cavity in order to confine electromagnetic energy inside the sensor, and provide good isolation of the device from its environment. The reflection coefficient $S_{11}$ was measured using network analyzer. High S/N ratio, sharp reflected peaks, and clear separation between the peaks were observed. As a mechanical compression force was applied to the diaphragm from top with extremely sharp object, the diaphragm was bended, resulting in the phase shifts of the reflected peaks. The phase shifts were modulated depending on the amount of applied mechanical compression force. The measured $S_{11}$ results showed a good agreement with simulated results obtained from equivalent admittance circuit modeling.

• 한국음향학회지
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• 제10권3호
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• pp.13-18
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• 1991

본 연구에서는 취약한 고체의 표면에 존재하는 crack에 탄성표면파를 입사 시켰을 때 발생하는 반사계수를 측정하여 파괴응력을 해석하는 방법을 연구 분석하였다. Crack이 존재하는 취약한 고체에서의 파괴응력은 임계응력확대계수와 정규화된 최대응력확대계수의 함수로써 나타나며, 이 때 정규화된 최대응력확대계수는 탄성표면파의 반사계수를 측정하여 구할 수 있었다. 실험을 위하여 Pyrex glass원판 중앙에 깊이가 0.5mm~0.9mm인 crack을 제작하였고, SAW wedge transducer를 피치캐치(pitch-catch) 모드로 구성하여 반사계수를 측정하고 파괴응력값을 산출하였으며 UTM(Universal Testing Machine)으로 측정한 값과 비교 분석하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.759-762
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• 2003

The epitaxially grown Mg-doped GaN thin film was prepared by MOCVD (Metal Organic Chemical Vapor Deposition) for a SAW(Surface Acoustic Wave) filter. Mg-doped GaN thin film had enough properties for a SAW filter which include crystallinity and morphology. The surface morphology and crystalline of the Mg-doped GaN thin films were characterized using AFM and an X-ray rocking curve. The SAW filter, which was fabricated by lift-off process and frequency response, was measured by HP 8753C network analyzer. Center frequency was 96.687 MHz and SAW velocity was 5801 m/s when wavelength(λ) was 60${\mu}{\textrm}{m}$. Insertion loss was over -10 dB, Q was factor over 200, and side lobe attenuation was over 22 dB which was suitable for use as a SAW filter. Electro-mechanical coupling coefficient (k$^2$) was calculated from the measured data. k$^2$ was from 1 % to 1.44 %. The fabricated SAW filter using Mg-doped GaN/sapphire structure has good qualities as a filter and will be used as a SAW filter for operating RF frequency.

• Tribology and Lubricants
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• 제27권5호
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• pp.249-255
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• 2011

Recently the demand for a fast and precise actuator in semiconductor industries is growing larger. A SAW motor is now expected as a new friction-drive actuator to meet such demand. However, its friction and wear properties are almost unknown and its low stability and reliability still remain to be solved. In this research the tests of SAW motor were carried out and its durability was discussed. The effect of wear caused by friction on the driving force and driving speed were clarified.