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Characterization and Formation Mechanism of Zr-Cu and Zr-Cu-Al Metallic Glass Thin Film by Sputtering Process

  • Lee, Chang-Hun;Sun, Ju-Hyun;Moon, Kyoung-Il;Shin, Seung-Yong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.271-272
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    • 2012
  • Bulk Metallic Glasses (BMGs or amorphous alloy) exhibit high strength and good corrosion resistance. Applications of thin films and micro parts of BMGs have been used a lot since its inception in the research of BMGs. However, Application and fabrication of BMGs are limited to make structural materials. Thin films of BMGs which is sputtered on the surface of structural materials by sputtering process is used to improve limits about application of BMGs. In order to investigate the difference of properties between designed alloys and thin films, we identified that thin films deposited on the surface that have the characteristic of the amorphous films and the composition of designed alloys. Zr-Cu (Cu=30, 35, 38, 40, 50 at.%) and Zr-Cu-Al (Al=10 at.% fixed, Cu=26, 30, 34, 38 at.%) alloys were fabricated with Zr (99.7% purity), Cu (99.997% purity), and Al (99.99% purity) as melting 5 times by arc melting method before rods 2mm in diameter was manufactured. In order to analyze GFA (Glass Forming Ability), rods were observed by Optical Microscopy and SEM and $T_g$, $T_x$, ($T_x$ is crystallization temperature and $T_g$ is the glass transition temperature) and Tm were measured by DTA and DSC. Powder was manufactured by Gas Atomizer and target was sintered using powder in large supercooled liquid region ($=T_x-T_g$) by SPS(Spark Plasma Sintering). Amorphous foil was prepared by RSP process with 5 gram alloy button. The composition of the foil and sputtered thin film was analyzed by EDS and EPMA. In the result of DSC curve, binary alloys ($Zr_{62}Cu_{38}$, $Zr_{60}Cu_{40}$, $Zr_{50}Cu_{50}$) and ternary alloys ($Zr_{64}Al_{10}Cu_{26}$, $Zr_{56}Al_{10}Cu_{34}$, $Zr_{52}Al_{10}Cu_{38}$) have $T_g$ except for $Zr_{70}Cu_{30}$ and $Zr_{60}Al_{10}Cu_{30}$. The compositions with $T_g$ made into powders. Figure shows XRD data of thin film showed similar hollow peak.

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ZnO가 포함된 BaO-GeO2-La2O3 계 광학 유리 특성 (The properties of optical glass of BaO-GeO2-La2O3 system with ZnO)

  • 이지선;임태영;황종희;이영진;전대우;김선욱;라용호;김진호
    • 한국결정성장학회지
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    • 제29권5호
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    • pp.208-214
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    • 2019
  • $3{\sim}5{\mu}m$ 범위의 중적외선에서 75 % 이상의 투과율을 갖는 $BaO-GeO_2-La_2O_3-ZnO$ 계 유리를 제조 및 특성을 평가하였다. Flow button test를 통해 유리 용융이 가능한 조성을 선택 후, ZnO를 10 mol%, 20 mol% 각각 첨가하여 $1350^{\circ}C$에서 1시간 동안 용융하여 $BaO-GeO_2-La_2O_3-ZnO$ 계 유리를 제조하였다. 이 중에서 ZnO를 20 mol% 포함하는 16 mol% BaO-56 mol% $GeO_2-8mol%$ $La_2O_3-20mol%$ ZnO 계 유리 전이 온도 $660^{\circ}C$ 이하, 굴절률 1.70 이상, Knoop 경도 530 이상 값을 가지는 것을 확인하였다. 따라서, ZnO를 20 mol% 포함하는 $BaO-GeO_2-La_2O_3-ZnO$ 계 유리는 저온에서 양호한 용융 상태와 우수한 광학적 특성을 확인하였고 특수 광학용 재료 분야에 충분히 활용이 가능하리라 판단되었다.